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Backends
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60e9a04892
Simulator LP3 Update
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il y a 2 ans |
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Config
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d331213da1
1.SETM Pressure Control update
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il y a 1 an |
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Devices
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96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
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il y a 1 an |
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Instances
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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il y a 1 an |
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Modules
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96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
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il y a 1 an |
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Properties
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44fc6989ef
1、Remove FabConnect dll file;
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il y a 1 an |
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Resources
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a5245356d0
source files
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il y a 3 ans |
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App.config
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e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
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il y a 1 an |
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RT2.ico
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ffda76b488
修改rt与ui交互功能
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il y a 2 ans |
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Venus_RT.csproj
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d331213da1
1.SETM Pressure Control update
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il y a 1 an |
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Venus_RT.csproj.bak
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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il y a 2 ans |
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Venus_RT.csproj.user
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8fb1796c74
1.airsys chiller加入on/off状态
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il y a 1 an |
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defaultrt.ico
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bad0bb7282
icon
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il y a 3 ans |
lixiang
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug