PumpDownRoutine.cs 5.9 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174
  1. using System;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using Venus_Core;
  7. namespace Venus_RT.Modules.PMs
  8. {
  9. class PumpDownRoutine : PMRoutineBase, IRoutine
  10. {
  11. private enum PumpStep
  12. {
  13. kDelay_2s,
  14. kCloseISOValve,
  15. kSoftPump,
  16. kFastPump,
  17. kPVHe2,
  18. kISOValve,
  19. kTurboN2Purge,
  20. kVATValve,
  21. kOpenTurboPumpPurgeGasFinal,
  22. kOpenTurboPump,
  23. kGasFinal,
  24. kFinalStep,
  25. kEnd,
  26. }
  27. //private int _ventTime;
  28. private int _pump_delay = 5000;
  29. private int _roughPumpPressure = 75000;
  30. private int _vHe2FlowPressure = 200;
  31. private int _basePressure = 10;
  32. private JetChamber jetChamber = JetChamber.None;
  33. private bool needsoft = true;
  34. public PumpDownRoutine(JetPMBase chamber) : base(chamber)
  35. {
  36. jetChamber = (JetChamber)SC.GetValue<int>($"{chamber.Name}.ChamberType");
  37. Name = "PumpDown";
  38. if (jetChamber == JetChamber.VenusDE)
  39. {
  40. needsoft = false;
  41. }
  42. }
  43. public RState Start(params object[] objs)
  44. {
  45. if (CheckLid() &&
  46. CheckSlitDoor())
  47. {
  48. Reset();
  49. _chamber.CloseValves();
  50. _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.PumpCrossingPressure");
  51. _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
  52. _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  53. _chamber.OpenValve(ValveType.PVN22, true);
  54. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  55. _chamber.TurnPendulumValve(false);
  56. if (jetChamber == JetChamber.Venus)
  57. {
  58. _chamber.OpenValve(ValveType.HeISO, false);
  59. _chamber.OpenValve(ValveType.PVHe3, false);
  60. }
  61. _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
  62. return Runner.Start(Module, Name);
  63. }
  64. return RState.Failed;
  65. }
  66. public RState Monitor()
  67. {
  68. if (jetChamber == JetChamber.VenusDE)
  69. {
  70. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  71. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  72. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_5s)
  73. .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  74. .Run(PumpStep.kISOValve, OpenISOValve, _delay_5s)
  75. .Run(PumpStep.kOpenTurboPump, OpenTurboValve, _delay_3s)
  76. .Run(PumpStep.kVATValve, OpenVATValve, _delay_2s)
  77. .Run(PumpStep.kOpenTurboPump, OpenGuageGasFinalValve, _delay_3s)
  78. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  79. .End(PumpStep.kEnd, NullFun, _delay_1s);
  80. }
  81. else
  82. {
  83. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  84. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  85. .RunIf(PumpStep.kSoftPump, needsoft, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  86. .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  87. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  88. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  89. .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  90. .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  91. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  92. .End(PumpStep.kEnd, NullFun, _delay_1s);
  93. }
  94. return Runner.Status;
  95. }
  96. private bool OpenTurboPumpPurgeGasFinalValve()
  97. {
  98. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  99. _chamber.OpenValve(ValveType.GasFinal, true);
  100. return true;
  101. }
  102. private bool OpenTurboValve()
  103. {
  104. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  105. return true;
  106. }
  107. private bool OpenGuageGasFinalValve()
  108. {
  109. _chamber.OpenValve(ValveType.GasFinal, true);
  110. _chamber.OpenValve(ValveType.Guage, true);
  111. return true;
  112. }
  113. private bool OpenFastPump()
  114. {
  115. _chamber.OpenValve(ValveType.SoftPump, false);
  116. _chamber.OpenValve(ValveType.FastPump, true);
  117. return true;
  118. }
  119. private bool OpenHe2Valve()
  120. {
  121. _chamber.OpenValve(ValveType.FastPump, false);
  122. _chamber.OpenValve(ValveType.PVHe2, true);
  123. return true;
  124. }
  125. private bool OpenISOValve()
  126. {
  127. _chamber.OpenValve(ValveType.PVHe2, false);
  128. // ISO Valve
  129. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  130. return true;
  131. }
  132. private bool OpenVATValve()
  133. {
  134. return _chamber.TurnPendulumValve(true);
  135. }
  136. private bool FinalStep()
  137. {
  138. _chamber.OpenValve(ValveType.Guage, true);
  139. //2023/04/25修改
  140. //_chamber.OpenValve(ValveType.TurboPumpPurge, true);
  141. //_chamber.OpenValve(ValveType.GasFinal, true);
  142. return true;
  143. }
  144. public void Abort()
  145. {
  146. CloseAllValves();
  147. }
  148. }
  149. }