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IoBacksideHe.cs
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3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
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1 year ago |
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IoCylinder.cs
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cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
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1 year ago |
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IoGasStick.cs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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IoHeartbeat.cs
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 years ago |
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IoHeater.cs
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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IoHighTemperatureHeater.cs
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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IoLid.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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1 year ago |
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IoMfc.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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IoPressureControl.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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IoPressureMeter.cs
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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IoSignalLight.cs
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 years ago |
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IoSignalTower.cs
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f211c4242f
Efem module raw design.
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1 year ago |
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IoSwitch.cs
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8f80478982
1.添加IoSwitch
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1 year ago |
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IoTMPressureCtl.cs
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b6acfe2e29
优化TM leak check功能
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1 year ago |
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IoTMSEPressureCtl.cs
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31bbc4482b
update ui && rt && simu for Venus SE
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1 year ago |
lixiang
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能