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IoBacksideHe.cs
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 anno fa |
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IoCylinder.cs
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af631c4aaa
1.添加RF Calibration功能
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1 anno fa |
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IoGasStick.cs
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1929a3510b
1.新版ui界面开发
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1 anno fa |
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IoHeartbeat.cs
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 anni fa |
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IoHeater.cs
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 anno fa |
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IoHighTemperatureHeater.cs
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d35b997884
1.优化RevtechMatch状态机
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1 anno fa |
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IoHongHuControl.cs
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d331213da1
1.SETM Pressure Control update
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1 anno fa |
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IoLid.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 anni fa |
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IoMfc.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 anno fa |
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IoPressureControl.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 anno fa |
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IoPressureMeter.cs
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f09d7d1b15
分开所有系列配置文件
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1 anno fa |
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IoSignalLight.cs
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 anni fa |
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IoSignalTower.cs
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f211c4242f
Efem module raw design.
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2 anni fa |
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IoSwitch.cs
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8f80478982
1.添加IoSwitch
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2 anni fa |
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IoTMPressureCtl.cs
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 anno fa |
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IoTMSEPressureCtl.cs
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31bbc4482b
update ui && rt && simu for Venus SE
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2 anni fa |
lixiang
d35b997884
1.优化RevtechMatch状态机