SIASUNRobot.cs 40 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using Venus_RT.Modules;
  4. using Venus_Core;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using Aitex.Sorter.Common;
  8. using MECF.Framework.Common.Equipment;
  9. using MECF.Framework.Common.SubstrateTrackings;
  10. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  11. using Aitex.Core.RT.Log;
  12. using System.Text.RegularExpressions;
  13. using MECF.Framework.Common.CommonData;
  14. using System.Threading;
  15. using System.Collections.Concurrent;
  16. using System.Threading.Tasks;
  17. namespace Venus_RT.Devices
  18. {
  19. class SIASUNRobot : ITransferRobot
  20. {
  21. enum OPStep
  22. {
  23. Idle,
  24. Home,
  25. Goto,
  26. MoveTo,
  27. CheckLoad_ArmA,
  28. CheckLoad_ArmB,
  29. Pick,
  30. Place,
  31. PickExtend,
  32. PickRetract,
  33. PlaceExtent,
  34. PlaceRetract,
  35. QueryAwc
  36. }
  37. private RState _status;
  38. private bool _IsHomed;
  39. private bool _HasReceiveMsg;
  40. public RState Status { get { return _status; } }
  41. public bool IsHomed { get { return _IsHomed; } }
  42. private double offset_x = 0;
  43. private double offset_y = 0;
  44. public double Offset_X => offset_x;
  45. public double Offset_Y => offset_y;
  46. public double Offset_D => Math.Round(Math.Sqrt(Math.Pow(offset_x, 2) + Math.Pow(offset_y, 2)), 2);//欧式距离 保留后两位
  47. public RobotMoveInfo TMRobotMoveInfo { get { return _robotMoveInfo; } }
  48. public string WithWaferSpeed => "";
  49. public string NoWaferSpeed => "";
  50. private readonly AsyncSocket _socket;
  51. private OPStep _currentOP = OPStep.Idle;
  52. private Dictionary<ModuleName, int> _StationNumbers = new Dictionary<ModuleName, int>();
  53. private readonly int _checkLoadStation = 1;
  54. private RobotMoveInfo _robotMoveInfo = new RobotMoveInfo();
  55. private string Hand2Arm(Hand hand) => hand == Hand.Blade1 ? "B" : "A";
  56. private readonly Regex _rex_check_load = new Regex(@"LOAD\s+(A|B)\s+(\w+)\s*");
  57. private readonly Regex _rex_error_code = new Regex(@"_ERR\s+(\d+)\s*");
  58. private readonly Regex _rex_event_offset = new Regex(@"_EVENT\sROBOT\s[0-9|\s]*.*");
  59. private readonly Regex _rex_event_getoffset = new Regex(@"(?<=_EVENT\sROBOT\s)(.+?)(?=\sB)");
  60. private readonly Regex _rex_query_awc = new Regex(@"WAF_CEN\sRT[-|0-9|\s]*LFT[-|0-9|\s]*OFFSET[-|0-9|\s]*");
  61. private readonly Regex _rex_query_getoffset = new Regex(@"(?<=WAF_CEN\sRT[-|0-9|\s]*LFT[-|0-9|\s]*OFFSET\s)(.*)");
  62. private const string EOF = "\r\n";
  63. private BlockingCollection<RobotAnimationData> blockingCollection = new BlockingCollection<RobotAnimationData>();
  64. public SIASUNRobot()
  65. {
  66. _socket = new AsyncSocket("", EOF);
  67. _socket.Connect(SC.GetStringValue($"TM.IPAddress"));
  68. _socket.OnDataChanged += OnReceiveMessage;
  69. _socket.OnErrorHappened += OnErrorHappen;
  70. _status = RState.Init;
  71. _IsHomed = false;
  72. _StationNumbers[ModuleName.LLA] = SC.GetValue<int>("TM.LLAStationNumber");
  73. _StationNumbers[ModuleName.LLB] = SC.GetValue<int>("TM.LLBStationNumber");
  74. _StationNumbers[ModuleName.PMA] = SC.GetValue<int>("TM.PMAStationNumber");
  75. _StationNumbers[ModuleName.PMB] = SC.GetValue<int>("TM.PMBStationNumber");
  76. _StationNumbers[ModuleName.PMC] = SC.GetValue<int>("TM.PMCStationNumber");
  77. _StationNumbers[ModuleName.PMD] = SC.GetValue<int>("TM.PMDStationNumber");
  78. _StationNumbers[ModuleName.PME] = SC.GetValue<int>("TM.PMEStationNumber");
  79. _StationNumbers[ModuleName.PMF] = SC.GetValue<int>("TM.PMFStationNumber");
  80. _checkLoadStation = SC.GetValue<int>("TM.CheckLoadStation");
  81. Task.Run(() =>
  82. {
  83. foreach (var data in blockingCollection.GetConsumingEnumerable())
  84. {
  85. _robotMoveInfo.Action = data.Action;
  86. _robotMoveInfo.ArmTarget = data.Hand == Hand.Blade1 ? RobotArm.ArmA : (data.Hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
  87. _robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{data.Target}";
  88. Thread.Sleep(600);
  89. }
  90. });
  91. }
  92. public bool Home()
  93. {
  94. _status = RState.Running;
  95. _currentOP = OPStep.Home;
  96. return _SendCommand("HOME ALL");
  97. }
  98. public bool Halt()
  99. {
  100. return _SendCommand("HALT");
  101. }
  102. public bool ReQueryLoadA()
  103. {
  104. return true;
  105. }
  106. public bool ReQueryLoadB()
  107. {
  108. return true;
  109. }
  110. public bool CheckLoad(Hand hand = Hand.Blade1)
  111. {
  112. if (_currentOP != OPStep.Home && _currentOP != OPStep.CheckLoad_ArmA && CheckRobotStatus() == false)
  113. return false;
  114. _currentOP = hand == Hand.Blade2 ? OPStep.CheckLoad_ArmB : OPStep.CheckLoad_ArmA;
  115. _status = RState.Running;
  116. return _SendCommand($"CHECK LOAD {_checkLoadStation} ARM {Hand2Arm(hand)}");
  117. }
  118. public bool QueryAwc()
  119. {
  120. //检查防止状态交叉
  121. if (CheckRobotStatus() == false)
  122. return false;
  123. offset_x = 0;
  124. offset_y = 0;
  125. _currentOP = OPStep.QueryAwc;
  126. _status = RState.Running;
  127. _HasReceiveMsg = false;
  128. return _SendCommand("RQ WAF_CEN DATA");
  129. }
  130. public bool Goto(ModuleName station, int slot, Hand hand)
  131. {
  132. if (CheckRobotStatus() == false)
  133. return false;
  134. _currentOP = OPStep.Goto;
  135. _status = RState.Running;
  136. SetRobotMovingInfo(RobotAction.Rotating, hand, station);
  137. return _SendCommand($"GOTO N {_StationNumbers[station]} R RE Z DOWN SLOT {slot + 1} ARM {Hand2Arm(hand)}");
  138. }
  139. public bool MoveTo(ModuleName stnFrom, ModuleName stnTo, Hand hand)
  140. {
  141. if (CheckRobotStatus() == false)
  142. return false;
  143. _currentOP = OPStep.MoveTo;
  144. _status = RState.Running;
  145. return _SendCommand($"XFER ARM {Hand2Arm(hand)} {_StationNumbers[stnFrom]} {_StationNumbers[stnTo]}");
  146. }
  147. public bool PickExtend(ModuleName chamber, int slot, Hand hand)
  148. {
  149. if (CheckRobotStatus() == false)
  150. return false;
  151. _currentOP = OPStep.PickExtend;
  152. _status = RState.Running;
  153. SetRobotMovingInfo(RobotAction.Extending, hand, chamber);
  154. return _SendCommand($"PICK {_StationNumbers[chamber]} SLOT {slot + 1} ARM {Hand2Arm(hand)} ENRT NR");
  155. }
  156. public bool PickRetract(ModuleName chamber, int slot, Hand hand)
  157. {
  158. if (CheckRobotStatus() == false)
  159. return false;
  160. _currentOP = OPStep.PickRetract;
  161. _status = RState.Running;
  162. SetRobotMovingInfo(RobotAction.Retracting, hand, chamber);
  163. return _SendCommand($"PICK {_StationNumbers[chamber]} SLOT {slot + 1} ARM {Hand2Arm(hand)} STRT NR");
  164. }
  165. public bool PlaceExtend(ModuleName chamber, int slot, Hand hand)
  166. {
  167. if (CheckRobotStatus() == false)
  168. return false;
  169. _currentOP = OPStep.PlaceExtent;
  170. _status = RState.Running;
  171. SetRobotMovingInfo(RobotAction.Extending, hand, chamber);
  172. return _SendCommand($"PLACE {_StationNumbers[chamber]} SLOT {slot + 1} ARM {Hand2Arm(hand)} ENRT NR");
  173. }
  174. public bool PlaceRetract(ModuleName chamber, int slot, Hand hand)
  175. {
  176. if (CheckRobotStatus() == false)
  177. return false;
  178. _currentOP = OPStep.PlaceExtent;
  179. _status = RState.Running;
  180. SetRobotMovingInfo(RobotAction.Retracting, hand, chamber);
  181. return _SendCommand($"PLACE {_StationNumbers[chamber]} SLOT {slot + 1} ARM {Hand2Arm(hand)} STRT NR");
  182. }
  183. public bool Pick(ModuleName station, int slot, Hand hand)
  184. {
  185. if (CheckRobotStatus() == false)
  186. return false;
  187. _currentOP = OPStep.Pick;
  188. _status = RState.Running;
  189. SetRobotMovingInfo(RobotAction.Picking, hand, station);
  190. return _SendCommand($"PICK {_StationNumbers[station]} SLOT {slot + 1} ARM {Hand2Arm(hand)}");
  191. }
  192. public bool Place(ModuleName station, int slot, Hand hand)
  193. {
  194. if (CheckRobotStatus() == false)
  195. return false;
  196. _currentOP = OPStep.Place;
  197. _status = RState.Running;
  198. SetRobotMovingInfo(RobotAction.Placing, hand, station);
  199. return _SendCommand($"PLACE {_StationNumbers[station]} SLOT {slot + 1} ARM {Hand2Arm(hand)}");
  200. }
  201. private bool _SendCommand(string cmd)
  202. {
  203. LOG.WriteSingeLine(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"Send Command to SIASUN TM Robot: {cmd}");
  204. return _socket.Write(cmd + EOF);
  205. }
  206. private bool CheckRobotStatus()
  207. {
  208. if (Status == RState.Init)
  209. {
  210. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, "TM Robot is not homed, please home first.");
  211. return false;
  212. }
  213. else if (Status == RState.Running)
  214. {
  215. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, "TM Robot is busy, please wait a minute");
  216. return false;
  217. }
  218. else if (Status == RState.Failed || Status == RState.Timeout)
  219. {
  220. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, "TM Robot has a error, please check and fix the hardware issue and home it");
  221. return false;
  222. }
  223. return true;
  224. }
  225. private void OnReceiveMessage(string RevMsg)
  226. {
  227. LOG.WriteSingeLine(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"Receive message from SIASUN TM Robot: {RevMsg}, while {_currentOP}");
  228. if (_rex_error_code.IsMatch(RevMsg))
  229. {
  230. _IsHomed = false;
  231. _status = RState.Failed;
  232. var results = _rex_error_code.Match(RevMsg);
  233. ErrorMessageHandler(results.Groups[1].Value);
  234. return;
  235. }
  236. switch (_currentOP)
  237. {
  238. case OPStep.Goto:
  239. case OPStep.MoveTo:
  240. case OPStep.Pick:
  241. case OPStep.PickExtend:
  242. case OPStep.PickRetract:
  243. case OPStep.Place:
  244. case OPStep.PlaceExtent:
  245. case OPStep.PlaceRetract:
  246. {
  247. if (RevMsg.Trim() == "_RDY" || (RevMsg.Contains("_RDY") && !RevMsg.Contains("_ERR")))
  248. {
  249. _currentOP = OPStep.Idle;
  250. _status = RState.End;
  251. //if (RevMsg.Contains("_EVENT"))
  252. //{
  253. // GetEventMsg(RevMsg);
  254. //}
  255. }
  256. else if (RevMsg.Trim().Contains( "_EVENT"))
  257. {
  258. GetEventMsg(RevMsg);
  259. }
  260. else
  261. {
  262. ReportWrongMsg(RevMsg);
  263. }
  264. if (_currentOP != OPStep.PickExtend && _currentOP != OPStep.PlaceExtent)
  265. {
  266. SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.TMRobot);
  267. }
  268. }
  269. break;
  270. case OPStep.Home:
  271. {
  272. if (RevMsg.Trim() == "_RDY")
  273. {
  274. //CheckLoad(Hand.Blade1);
  275. _currentOP = OPStep.Idle;
  276. _status = RState.End;
  277. _IsHomed = true;
  278. SetRobotMovingInfo(RobotAction.Homing, Hand.Both, ModuleName.TM);
  279. }
  280. else
  281. ReportWrongMsg(RevMsg);
  282. }
  283. break;
  284. case OPStep.CheckLoad_ArmA:
  285. {
  286. if (_rex_check_load.IsMatch(RevMsg))
  287. {
  288. GetCheckLoadResult(RevMsg);
  289. CheckLoad(Hand.Blade2);
  290. }
  291. else
  292. ReportWrongMsg(RevMsg);
  293. }
  294. break;
  295. case OPStep.CheckLoad_ArmB:
  296. {
  297. if (_rex_check_load.IsMatch(RevMsg))
  298. {
  299. GetCheckLoadResult(RevMsg);
  300. _currentOP = OPStep.Idle;
  301. _status = RState.End;
  302. _IsHomed = true;
  303. }
  304. }
  305. break;
  306. case OPStep.QueryAwc:
  307. QueryAwcData(RevMsg);
  308. break;
  309. default:
  310. if (!RevMsg.Contains("_EVENT"))
  311. ReportWrongMsg(RevMsg);
  312. else
  313. GetEventMsg(RevMsg);
  314. break;
  315. }
  316. }
  317. private void GetCheckLoadResult(string strRev)
  318. {
  319. Match result = _rex_check_load.Match(strRev);
  320. string Arm = result.Groups[1].Value;
  321. string WaferStatus = result.Groups[2].Value;
  322. if (WaferStatus == "ON")
  323. {
  324. WaferManager.Instance.CreateWafer(ModuleName.TMRobot, Arm == "A" ? 0 : 1, Aitex.Core.Common.WaferStatus.Unknown);
  325. }
  326. }
  327. private void OnErrorHappen(ErrorEventArgs args)
  328. {
  329. Singleton<RouteManager>.Instance.TM.PostMsg(TMEntity.MSG.Error);
  330. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, $"SIASUN TM Robot Error: {args.Reason} while {_currentOP}");
  331. }
  332. private void ReportWrongMsg(string revMsg)
  333. {
  334. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, $"Receive wrong message:{revMsg} while {_currentOP}");
  335. }
  336. private void ErrorMessageHandler(string errCode)
  337. {
  338. int ErrCode;
  339. string ErrorInfo;
  340. if (int.TryParse(errCode, out ErrCode))
  341. {
  342. switch (ErrCode)
  343. {
  344. // 系统及硬件错误信息
  345. case 901:
  346. ErrorInfo = $"_Err {errCode}: 主电柜急停启动";
  347. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  348. break;
  349. case 902:
  350. ErrorInfo = $"_Err {errCode}: 示教盒急停启动";
  351. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  352. break;
  353. case 862:
  354. ErrorInfo = $"_Err {errCode}: 驱动器 RDY 信号断开";
  355. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  356. break;
  357. // 执行错误信息
  358. case 3001:
  359. ErrorInfo = $"_Err {errCode}: 系统发生碰撞,按取消恢复";
  360. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  361. break;
  362. case 7300:
  363. ErrorInfo = $"_Err {errCode}: 旋转信号不允许";
  364. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  365. break;
  366. case 7301:
  367. ErrorInfo = $"_Err {errCode}: 伸缩信号不允许";
  368. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  369. break;
  370. case 2200:
  371. ErrorInfo = $"_Err {errCode}: 输出端口 NO.不存在";
  372. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  373. break;
  374. case 3100:
  375. ErrorInfo = $"_Err {errCode}: 关节 N 位置超界";
  376. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  377. break;
  378. case 3120:
  379. ErrorInfo = $"_Err {errCode}: 关节 N 速度超界";
  380. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  381. break;
  382. case 100:
  383. ErrorInfo = $"_Err {errCode}: 手臂电源上电失败(手臂电源未打开)";
  384. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  385. break;
  386. // 通信错误信息
  387. case 7307:
  388. ErrorInfo = $"_Err {errCode}: GOTO 工位号超范围";
  389. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  390. break;
  391. case 7308:
  392. ErrorInfo = $"_Err {errCode}: 不支持的传感器类型";
  393. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  394. break;
  395. case 7312:
  396. ErrorInfo = $"_Err {errCode}: PICK工位号超范围";
  397. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  398. break;
  399. case 7313:
  400. ErrorInfo = $"_Err {errCode}: PLACE工位号超范围";
  401. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  402. break;
  403. case 7314:
  404. ErrorInfo = $"_Err {errCode}: XFER工位号超范围";
  405. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  406. break;
  407. case 7315:
  408. ErrorInfo = $"_Err {errCode}: REMOVE不支持的IO类型";
  409. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  410. break;
  411. case 7316:
  412. ErrorInfo = $"_Err {errCode}: RQ INTLCK不识别的参数";
  413. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  414. break;
  415. case 7317:
  416. ErrorInfo = $"_Err {errCode}: RQ IO不识别的参数";
  417. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  418. break;
  419. case 7319:
  420. ErrorInfo = $"_Err {errCode}: RQ STN工位号超范围";
  421. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  422. break;
  423. case 7320:
  424. ErrorInfo = $"_Err {errCode}: wafre(WAF_SEN)参数未设置";
  425. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  426. break;
  427. case 7321:
  428. ErrorInfo = $"_Err {errCode}: wafex(RETRACT_PIN)参数未设置";
  429. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  430. break;
  431. case 7322:
  432. ErrorInfo = $"_Err {errCode}: svlv(SBIT_SVLV_SEN)参数未设置";
  433. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  434. break;
  435. case 7323:
  436. ErrorInfo = $"_Err {errCode}: ens(EX_ENABLE)参数未设置";
  437. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  438. break;
  439. case 7324:
  440. ErrorInfo = $"_Err {errCode}: RQ命令不支持的参数";
  441. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  442. break;
  443. case 7325:
  444. ErrorInfo = $"_Err {errCode}: SET INTLOCK WAF_SEN参数错";
  445. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  446. break;
  447. case 7326:
  448. ErrorInfo = $"_Err {errCode}: SET INTLOCK RZ参数错";
  449. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  450. break;
  451. case 7327:
  452. ErrorInfo = $"_Err {errCode}: SET INTLOCK参数错";
  453. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  454. break;
  455. case 7328:
  456. ErrorInfo = $"_Err {errCode}: SET IO ECHO参数错";
  457. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  458. break;
  459. case 7329:
  460. ErrorInfo = $"_Err {errCode}: SET IO STATE不支持";
  461. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  462. break;
  463. case 7330:
  464. ErrorInfo = $"_Err {errCode}: SET IO不支持的参数";
  465. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  466. break;
  467. case 7331:
  468. ErrorInfo = $"_Err {errCode}: SET STN工位号超范围";
  469. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  470. break;
  471. case 7332:
  472. ErrorInfo = $"_Err {errCode}: 手臂参数读取错误";
  473. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  474. break;
  475. case 7333:
  476. ErrorInfo = $"_Err {errCode}: WAF_SEN不识别的参数";
  477. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  478. break;
  479. case 7334:
  480. ErrorInfo = $"_Err {errCode}: SET不支持的传感器类型";
  481. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  482. break;
  483. case 7335:
  484. ErrorInfo = $"_Err {errCode}: SET 指令输入不完整";
  485. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  486. break;
  487. case 7336:
  488. ErrorInfo = $"_Err {errCode}: STORE IO命令不支持该参数";
  489. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  490. break;
  491. case 7337:
  492. ErrorInfo = $"_Err {errCode}: STORE LOAD命令不支持该参数";
  493. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  494. break;
  495. case 7338:
  496. ErrorInfo = $"_Err {errCode}: STORE STN指令工位号大于20";
  497. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  498. break;
  499. case 7339:
  500. ErrorInfo = $"_Err {errCode}: STORE STN命令手臂参数错误";
  501. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  502. break;
  503. case 7340:
  504. ErrorInfo = $"_Err {errCode}: STORE不支持的传感器类型";
  505. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  506. break;
  507. case 7341:
  508. ErrorInfo = $"_Err {errCode}: STORE指令输入不完整";
  509. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  510. break;
  511. case 7342:
  512. ErrorInfo = $"_Err {errCode}: 无法识别的命令";
  513. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  514. break;
  515. case 7343:
  516. ErrorInfo = $"_Err {errCode}: HOME参数未指定";
  517. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  518. break;
  519. case 7344:
  520. ErrorInfo = $"_Err {errCode}: GOTO指令R轴参数未指定";
  521. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  522. break;
  523. case 7345:
  524. ErrorInfo = $"_Err {errCode}: GOTO指令Z轴参数未指定";
  525. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  526. break;
  527. case 7346:
  528. ErrorInfo = $"_Err {errCode}: ARM参数错误";
  529. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  530. break;
  531. case 7347:
  532. ErrorInfo = $"_Err {errCode}: GOTO指令未指定参数";
  533. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  534. break;
  535. case 7349:
  536. ErrorInfo = $"_Err {errCode}: MOVE指令未指定模式或轴";
  537. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  538. break;
  539. case 7350:
  540. ErrorInfo = $"_Err {errCode}: MOVE 指令中字段名字错";
  541. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  542. break;
  543. case 7351:
  544. ErrorInfo = $"_Err {errCode}: PICK未指定参数";
  545. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  546. break;
  547. case 7352:
  548. ErrorInfo = $"_Err {errCode}: PLACE未指定参数";
  549. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  550. break;
  551. case 7353:
  552. ErrorInfo = $"_Err {errCode}: REMOVE未指定参数";
  553. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  554. break;
  555. case 7354:
  556. ErrorInfo = $"_Err {errCode}: 指令执行未结束";
  557. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  558. break;
  559. case 7355:
  560. ErrorInfo = $"_Err {errCode}: GOTO指令未指定工位号";
  561. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  562. break;
  563. case 7356:
  564. ErrorInfo = $"_Err {errCode}: PICK指令未指定工位号";
  565. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  566. break;
  567. case 7357:
  568. ErrorInfo = $"_Err {errCode}: PLACE指令未指定工位号";
  569. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  570. break;
  571. case 7358:
  572. ErrorInfo = $"_Err {errCode}: ABS未指定数值";
  573. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  574. break;
  575. case 7359:
  576. ErrorInfo = $"_Err {errCode}: REL未指定数值";
  577. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  578. break;
  579. case 7360:
  580. ErrorInfo = $"_Err {errCode}: 没有指定主程序";
  581. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  582. break;
  583. case 7361:
  584. ErrorInfo = $"_Err {errCode}: 当前没有打开作业";
  585. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  586. break;
  587. case 7362:
  588. ErrorInfo = $"_Err {errCode}: 当前作业不是主作业";
  589. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  590. break;
  591. case 7363:
  592. ErrorInfo = $"_Err {errCode}: ex_ena(EX_ENABLE_SEN)参数未设置";
  593. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  594. break;
  595. case 7364:
  596. ErrorInfo = $"_Err {errCode}: stable(STABLE_ SIGNAL)参数未设置";
  597. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  598. break;
  599. case 7365:
  600. ErrorInfo = $"_Err {errCode}: VIA参数设置有误";
  601. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  602. break;
  603. case 7366:
  604. ErrorInfo = $"_Err {errCode}: 系统处于非启动状态";
  605. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  606. break;
  607. case 7367:
  608. ErrorInfo = $"_Err {errCode}: extend(EX_SIGNAL)参数未设置";
  609. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  610. break;
  611. case 7368:
  612. ErrorInfo = $"_Err {errCode}: retract(RE_ SIGNAL)参数未设置";
  613. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  614. break;
  615. case 7371:
  616. ErrorInfo = $"_Err {errCode}: place动作前:未检测到晶圆";
  617. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  618. break;
  619. case 7372:
  620. ErrorInfo = $"_Err {errCode}: pick动作前:检测到晶圆";
  621. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  622. break;
  623. case 7373:
  624. ErrorInfo = $"_Err {errCode}: place动作后:检测到晶圆";
  625. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  626. break;
  627. case 7374:
  628. ErrorInfo = $"_Err {errCode}: pick动作后:未检测到晶圆";
  629. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  630. break;
  631. case 7375:
  632. ErrorInfo = $"_Err {errCode}: 系统未上电或当前不是执行模式";
  633. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  634. break;
  635. case 7376:
  636. ErrorInfo = $"_Err {errCode}: 参数中存在非数字";
  637. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  638. break;
  639. case 7385:
  640. ErrorInfo = $"_Err {errCode}: 驱动器异常停止";
  641. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  642. break;
  643. case 7387:
  644. ErrorInfo = $"_Err {errCode}: 驱动器ID1报警";
  645. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  646. break;
  647. case 7388:
  648. ErrorInfo = $"_Err {errCode}: 驱动器ID2报警";
  649. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  650. break;
  651. case 7389:
  652. ErrorInfo = $"_Err {errCode}: 驱动器ID3报警";
  653. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  654. break;
  655. case 7391:
  656. ErrorInfo = $"_Err {errCode}: AWC工位号超范围";
  657. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  658. break;
  659. case 7392:
  660. ErrorInfo = $"_Err {errCode}: 偏差过大AWC报警";
  661. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  662. break;
  663. case 7393:
  664. ErrorInfo = $"_Err {errCode}: 标定失败,请重新标定";
  665. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  666. break;
  667. case 7398:
  668. ErrorInfo = $"_Err {errCode}: 触发点计算半径有误";
  669. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  670. break;
  671. case 7399:
  672. ErrorInfo = $"_Err {errCode}: 驱动器锁存AWC数据个数有误";
  673. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  674. break;
  675. case 7401:
  676. ErrorInfo = $"_Err {errCode}: 手指上可能有晶圆";
  677. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  678. break;
  679. case 7402:
  680. ErrorInfo = $"_Err {errCode}: 手指上可能无晶圆";
  681. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  682. break;
  683. case 7403:
  684. ErrorInfo = $"_Err {errCode}: load当前状态为ON,不正确";
  685. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  686. break;
  687. case 7404:
  688. ErrorInfo = $"_Err {errCode}: load当前状态为OFF,不正确";
  689. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  690. break;
  691. case 7405:
  692. ErrorInfo = $"_Err {errCode}: 当前slot不存在!";
  693. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  694. break;
  695. case 7495:
  696. ErrorInfo = $"_Err {errCode}: ID1码盘反馈错误";
  697. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  698. break;
  699. case 7496:
  700. ErrorInfo = $"_Err {errCode}: ID2码盘反馈错误";
  701. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  702. break;
  703. case 7497:
  704. ErrorInfo = $"_Err {errCode}: ID3码盘反馈错误";
  705. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  706. break;
  707. case 7990:
  708. ErrorInfo = $"_Err {errCode}: 左盘超过最大纠偏";
  709. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  710. break;
  711. case 7991:
  712. ErrorInfo = $"_Err {errCode}: 右盘超过最大纠偏";
  713. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  714. break;
  715. default:
  716. ErrorInfo = $"_Err {errCode}: 不能识别的错误码";
  717. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  718. break;
  719. }
  720. //LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  721. }
  722. else
  723. {
  724. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, $"Try Parse the receive error code faild:{errCode}");
  725. }
  726. }
  727. public void SetRobotMovingInfo(RobotAction action, Hand hand, ModuleName target)
  728. {
  729. //_robotMoveInfo.Action = action;
  730. //_robotMoveInfo.ArmTarget = hand == Hand.Blade1 ? RobotArm.ArmA : (hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
  731. //_robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{target}";
  732. blockingCollection.Add(new RobotAnimationData(action,hand,target));
  733. }
  734. private void GetEventMsg(string revMsg)
  735. {
  736. //在包含数据的前提下
  737. switch (_robotMoveInfo.Action)
  738. {
  739. case RobotAction.Picking:
  740. case RobotAction.Placing:
  741. case RobotAction.Extending:
  742. case RobotAction.Retracting:
  743. if (_rex_event_offset.IsMatch(revMsg))
  744. {
  745. //offset_x = _rex_event_getoffset.Match(revMsg).Value.Split(' ')[0];
  746. //offset_y = _rex_event_getoffset.Match(revMsg).Value.Split(' ')[1];
  747. }
  748. break;
  749. default:
  750. break;
  751. }
  752. }
  753. private void QueryAwcData(string revMsg)
  754. {
  755. //不沾包
  756. if (revMsg.Trim() == "_RDY")
  757. {
  758. if (_HasReceiveMsg)
  759. {
  760. _currentOP = OPStep.Idle;
  761. _status = RState.End;
  762. }
  763. else
  764. {
  765. _status = RState.Failed;
  766. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, $"Query Awc failed because not find valided data");
  767. }
  768. }
  769. //单条查询处理
  770. GetAwcMsg(revMsg);
  771. //沾包
  772. if (revMsg.Trim() != "_RDY" && revMsg.Contains("_RDY"))
  773. {
  774. if (!revMsg.Contains("_ERR"))
  775. {
  776. foreach (string msg in revMsg.Split('\n'))
  777. GetAwcMsg(msg);
  778. _currentOP = OPStep.Idle;
  779. _status = RState.End;
  780. }
  781. else
  782. {
  783. foreach (string msg in revMsg.Split('\n'))
  784. if (msg.Contains("_ERR"))
  785. ErrorMessageHandler(_rex_error_code.Match(revMsg.Trim()).Value);
  786. _status = RState.Failed;
  787. }
  788. }
  789. }
  790. private void GetAwcMsg(string revMsg)
  791. {
  792. revMsg = revMsg.Trim();
  793. if (_rex_query_awc.IsMatch(revMsg))
  794. {
  795. _HasReceiveMsg = true;
  796. string offset_r_t = _rex_query_getoffset.Match(revMsg).Value;
  797. //最大仅6位 不超过int范围
  798. int offset_r;
  799. int offset_t;
  800. if (int.TryParse(offset_r_t.Split(' ')[0], out offset_r) && int.TryParse(offset_r_t.Split(' ')[1], out offset_t))
  801. {
  802. // 9/26 新松暂未提供转换公式 暂时使用相关数据
  803. offset_x = offset_r * Math.Cos(offset_t);
  804. offset_y = offset_r * Math.Sin(offset_t);
  805. }
  806. else
  807. {
  808. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, $"TM Robot returned illegal offset data! Raw Data:{revMsg}");
  809. }
  810. }
  811. else if(!_HasReceiveMsg)
  812. {
  813. _status = RState.Failed;
  814. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, $"The awc parameter format returned by TM Robot is incorrect! Raw Data:{revMsg}");
  815. }
  816. }
  817. public bool PickWithOffset(ModuleName station, int slot, Hand hand, int Roffset, int Toffset)
  818. {
  819. return true;
  820. }
  821. public bool SetSpeed(string withwafer, float speed)
  822. {
  823. return true;
  824. }
  825. public bool SaveSpeed(string withwafer)
  826. {
  827. return true;
  828. }
  829. public bool QuerySpeed(string withwafer)
  830. {
  831. return true;
  832. }
  833. public bool ServeOn(bool IsOn)
  834. {
  835. return true;
  836. }
  837. }
  838. }