IoHighTemperatureHeater.cs 41 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.IOCore;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.OperationCenter;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using MECF.Framework.Common.CommonData.DeviceData;
  9. using System;
  10. using System.Collections.Generic;
  11. using System.Diagnostics;
  12. using System.Linq;
  13. using System.Text;
  14. using System.Threading.Tasks;
  15. using System.Xml;
  16. using Venus_Core;
  17. using Venus_Unity;
  18. namespace Venus_RT.Devices.IODevices
  19. {
  20. public class IoHighTemperatureHeater : BaseDevice, IDevice
  21. {
  22. private readonly DIAccessor _diPowerOnFeedback;
  23. private readonly DOAccessor _doPowerOn;
  24. private readonly AIAccessor _aiTemperatureFeedback;
  25. private readonly AOAccessor _aoTemperatureSetPoint;
  26. private readonly DIAccessor _diGoPosition1Feedback;
  27. private readonly DOAccessor _doGoPosition1On;
  28. private readonly DIAccessor _diGoPosition2Feedback;
  29. private readonly DOAccessor _doGoPosition2On;
  30. private readonly DIAccessor _diGoPosition3Feedback;
  31. private readonly DOAccessor _doGoPosition3On;
  32. private readonly DIAccessor _diGoPosition4Feedback;
  33. private readonly DOAccessor _doGoPosition4On;
  34. private readonly DIAccessor _diGoPosition5Feedback;
  35. private readonly DOAccessor _doGoPosition5On;
  36. private readonly DIAccessor _diGoOriginFeedback;
  37. private readonly DOAccessor _doGoOriginOn;
  38. private readonly AOAccessor _aoLiftServoPosition1;
  39. private readonly AOAccessor _aoLiftServoPosition2;
  40. private readonly AOAccessor _aoLiftServoPosition3;
  41. private readonly AOAccessor _aoLiftServoPosition4;
  42. private readonly AOAccessor _aoLiftServoPosition5;
  43. private readonly AOAccessor _aoOriginSearchHighSpeed;
  44. private readonly AOAccessor _aoOriginSearchLowSpeed;
  45. private readonly AOAccessor _aoAbsMoveSpeed;
  46. private readonly AOAccessor _aoMaximusMoveSpeed;
  47. private readonly AOAccessor _aoSoftDownLimit;
  48. private readonly AOAccessor _aoSoftUpLimit;
  49. private readonly AOAccessor _aoRatio;
  50. private readonly DIAccessor _diDriverAlarm;
  51. private readonly DIAccessor _diPosiModuleAlarm;
  52. private readonly DIAccessor _diORGFailAlarm;
  53. private readonly DOAccessor _doResetLift;
  54. private readonly DOAccessor _doResetHeater;
  55. private readonly AIAccessor _aiHeaterPurgeN2Flow;
  56. private readonly DIAccessor _diMhtrErrorHeatStop;
  57. private readonly DOAccessor _doMhtrErrorReset;
  58. private readonly DIAccessor _diWaferTransferPosiSW;
  59. private readonly AIAccessor _aiHeaterInnerAlarmWord1;
  60. private readonly AIAccessor _aiHeaterInnerAlarmWord2;
  61. private readonly AIAccessor _aiHeaterOuterAlarmWord1;
  62. private readonly AIAccessor _aiHeaterOuterAlarmWord2;
  63. private readonly DeviceTimer _originTimer = new DeviceTimer();
  64. private readonly DeviceTimer _position1Timer = new DeviceTimer();
  65. private readonly DeviceTimer _position2Timer = new DeviceTimer();
  66. private readonly DeviceTimer _position3Timer = new DeviceTimer();
  67. private readonly DeviceTimer _position4Timer = new DeviceTimer();
  68. private readonly DeviceTimer _position5Timer = new DeviceTimer();
  69. private int _goPositionTime = 30 * 1000;
  70. private float HighTemperatureHeaterTemperatureSetPoint;
  71. private string HighTemperatureHeaterPositipnSetPoint;
  72. private float HighTemperatureHeaterRatioSetPoint;
  73. private float _maxTemperatureSetPoint;
  74. private float _minTemperatureSetPoint;
  75. private float _maxRatioSetPoint;
  76. private float _minRatioSetPoint;
  77. private int _clearAlarmCounter;
  78. private Stopwatch _heaterControlStopWatch = new Stopwatch();
  79. //private R_TRIG innerWord1_TRIG = new R_TRIG();
  80. //private R_TRIG innerWord2_TRIG = new R_TRIG();
  81. //private R_TRIG outerWord1_TRIG = new R_TRIG();
  82. //private R_TRIG outerWord2_TRIG = new R_TRIG();
  83. private int _innerWord1;
  84. private int _innerWord2;
  85. private int _outerWord1;
  86. private int _outerWord2;
  87. private bool _isAutoRatio;
  88. private List<RatioValue> _ratioValues = new List<RatioValue>();
  89. private Stopwatch _ratioStopwatch=new Stopwatch();
  90. private int RangeIndex=-1;
  91. private AITHighTemperatureHeaterData DeviceData
  92. {
  93. get
  94. {
  95. return new AITHighTemperatureHeaterData
  96. {
  97. Module = Module,
  98. DeviceName = Name,
  99. DisplayName = Display,
  100. HighTemperatureHeaterPositionFeedBack = CurrentPosition.ToString(),
  101. HighTemperatureHeaterIsonFeedBack = HighTemperatureHeaterIsOn,
  102. HighTemperatureHeaterTemperatureFeedBack = HighTemperatureHighHeaterTemperature,
  103. HighTemperatureHeaterRatioFeedBack = HighTemperatureHeaterRatio,
  104. HighTemperatureHeaterPositionSetPoint = HighTemperatureHeaterPositipnSetPoint,
  105. HighTemperatureHeaterTemperatureSetPoint = HighTemperatureHeaterTemperatureSetPoint,
  106. HighTemperatureHeaterRatioSetPoint = HighTemperatureHeaterRatioSetPoint,
  107. HighTemperatureHeaterN2Flow = HighTemperatureHeaterN2Flow,
  108. LiftIsAlarm = IsDriverAlarm || IsPosiModuleAlarm || IsORGFailAlarm,
  109. HeaterIsAlarm = _diMhtrErrorHeatStop.Value,
  110. IsAutoRatio = _isAutoRatio
  111. };
  112. }
  113. }
  114. public bool IsDriverAlarm => _diDriverAlarm.Value;
  115. public bool IsPosiModuleAlarm => _diPosiModuleAlarm.Value;
  116. public bool IsORGFailAlarm => _diORGFailAlarm.Value;
  117. public HighTemperatureHeaterPosition CurrentPosition
  118. {
  119. get
  120. {
  121. if (_diDriverAlarm.Value || _diPosiModuleAlarm.Value || _diORGFailAlarm.Value)
  122. {
  123. return HighTemperatureHeaterPosition.UnKnow;
  124. }
  125. if (_diGoOriginFeedback.Value == true && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)
  126. {
  127. return HighTemperatureHeaterPosition.Origin;
  128. }
  129. if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == true && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)
  130. {
  131. return HighTemperatureHeaterPosition.Position1;
  132. }
  133. else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == true && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)
  134. {
  135. return HighTemperatureHeaterPosition.Position2;
  136. }
  137. else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == true && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)
  138. {
  139. return HighTemperatureHeaterPosition.Position3;
  140. }
  141. else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == true && _diGoPosition5Feedback.Value == false)
  142. {
  143. return HighTemperatureHeaterPosition.Position4;
  144. }
  145. else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == true)
  146. {
  147. return HighTemperatureHeaterPosition.Position5;
  148. }
  149. else
  150. {
  151. return HighTemperatureHeaterPosition.UnKnow;
  152. }
  153. }
  154. }
  155. public bool HighTemperatureHeaterIsOn
  156. {
  157. get
  158. {
  159. if (_diPowerOnFeedback.Value == true && _doPowerOn.Value == true)
  160. {
  161. return true;
  162. }
  163. else
  164. {
  165. return false;
  166. }
  167. }
  168. set
  169. {
  170. SC.SetItemValue($"{Module}.HighTemperatureHeater.IsOn", value);
  171. }
  172. }
  173. public float HighTemperatureHighHeaterTemperature
  174. {
  175. get
  176. {
  177. if (_aiTemperatureFeedback == null) return -1;
  178. return _GetRealFloat(_aiTemperatureFeedback);
  179. }
  180. set
  181. {
  182. if (value <= _maxTemperatureSetPoint && value >= _minTemperatureSetPoint)
  183. {
  184. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $" Set Temperature to {value}");
  185. HighTemperatureHeaterTemperatureSetPoint = value;
  186. SC.SetItemValue($"{Module}.HighTemperatureHeater.Temperature", value);
  187. }
  188. else
  189. {
  190. LOG.Write(eEvent.ERR_HighTemperatureHeater_SetTemperature_OverRange, Module, value.ToString(), _minTemperatureSetPoint.ToString(), _maxTemperatureSetPoint.ToString());
  191. }
  192. }
  193. }
  194. public float HighTemperatureHeaterRatio
  195. {
  196. get
  197. {
  198. if (_aoRatio == null) return -1;
  199. return _GetRealFloat(_aoRatio);
  200. }
  201. set
  202. {
  203. if (value <= _maxRatioSetPoint && value >= _minRatioSetPoint)
  204. {
  205. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $" Set Ratio to {value}");
  206. HighTemperatureHeaterRatioSetPoint = value;
  207. SC.SetItemValue($"{Module}.HighTemperatureHeater.Ratio", value);
  208. }
  209. else
  210. {
  211. LOG.Write(eEvent.ERR_HighTemperatureHeater_SetRatio_OverRange, Module, value.ToString(), _minRatioSetPoint.ToString(), _maxRatioSetPoint.ToString());
  212. }
  213. }
  214. }
  215. public float HighTemperatureHeaterN2Flow
  216. {
  217. get
  218. {
  219. if (_aiHeaterPurgeN2Flow == null) return -1;
  220. return _GetRealFloat(_aiHeaterPurgeN2Flow);
  221. }
  222. }
  223. public IoHighTemperatureHeater(string module, XmlElement node, string ioModule = "")
  224. {
  225. base.Module = module;
  226. base.Name = node.GetAttribute("id");
  227. base.Display = node.GetAttribute("display");
  228. base.DeviceID = node.GetAttribute("schematicId");
  229. _diPowerOnFeedback = ParseDiNode("diPowerOnFeedback", node, ioModule);
  230. _doPowerOn = ParseDoNode("doPowerOn", node, ioModule);
  231. _aiTemperatureFeedback = ParseAiNode("aiTemperatureFeedback", node, ioModule);
  232. _aoTemperatureSetPoint = ParseAoNode("aoTemperatureSetPoint", node, ioModule);
  233. _diGoPosition1Feedback = ParseDiNode("diGoPosition1Feedback", node, ioModule);
  234. _doGoPosition1On = ParseDoNode("doGoPosition1On", node, ioModule);
  235. _diGoPosition2Feedback = ParseDiNode("diGoPosition2Feedback", node, ioModule);
  236. _doGoPosition2On = ParseDoNode("doGoPosition2On", node, ioModule);
  237. _diGoPosition3Feedback = ParseDiNode("diGoPosition3Feedback", node, ioModule);
  238. _doGoPosition3On = ParseDoNode("doGoPosition3On", node, ioModule);
  239. _diGoPosition4Feedback = ParseDiNode("diGoPosition4Feedback", node, ioModule);
  240. _doGoPosition4On = ParseDoNode("doGoPosition4On", node, ioModule);
  241. _diGoPosition5Feedback = ParseDiNode("diGoPosition5Feedback", node, ioModule);
  242. _doGoPosition5On = ParseDoNode("doGoPosition5On", node, ioModule);
  243. _diGoOriginFeedback = ParseDiNode("diGoOriginFeedback", node, ioModule);
  244. _doGoOriginOn = ParseDoNode("doGoOriginOn", node, ioModule);
  245. _aoLiftServoPosition1 = ParseAoNode("aoLiftServoPosition1", node, ioModule);
  246. _aoLiftServoPosition2 = ParseAoNode("aoLiftServoPosition2", node, ioModule);
  247. _aoLiftServoPosition3 = ParseAoNode("aoLiftServoPosition3", node, ioModule);
  248. _aoLiftServoPosition4 = ParseAoNode("aoLiftServoPosition4", node, ioModule);
  249. _aoLiftServoPosition5 = ParseAoNode("aoLiftServoPosition5", node, ioModule);
  250. _aoOriginSearchHighSpeed = ParseAoNode("aoOriginSearchHighSpeed", node, ioModule);
  251. _aoOriginSearchLowSpeed = ParseAoNode("aoOriginSearchLowSpeed", node, ioModule);
  252. _aoAbsMoveSpeed = ParseAoNode("aoAbsMoveSpeed", node, ioModule);
  253. _aoMaximusMoveSpeed = ParseAoNode("aoMaximusMoveSpeed", node, ioModule);
  254. _aoSoftDownLimit = ParseAoNode("aoSoftDownLimit", node, ioModule);
  255. _aoSoftUpLimit = ParseAoNode("aoSoftUpLimit", node, ioModule);
  256. _aoRatio = ParseAoNode("aoRatio", node, ioModule);
  257. _aiHeaterInnerAlarmWord1 = ParseAiNode("aiHeaterInnerAlarmWord1", node, ioModule);
  258. _aiHeaterInnerAlarmWord2 = ParseAiNode("aiHeaterInnerAlarmWord2", node, ioModule);
  259. _aiHeaterOuterAlarmWord1 = ParseAiNode("aiHeaterOuterAlarmWord1", node, ioModule);
  260. _aiHeaterOuterAlarmWord2 = ParseAiNode("aiHeaterOuterAlarmWord2", node, ioModule);
  261. _maxTemperatureSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Temperature").Max);
  262. _minTemperatureSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Temperature").Min);
  263. _maxRatioSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Ratio").Max);
  264. _minRatioSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Ratio").Min);
  265. _diDriverAlarm = ParseDiNode("diDriverAlarm", node, ioModule);
  266. _diPosiModuleAlarm = ParseDiNode("diPosiModuleAlarm", node, ioModule);
  267. _diORGFailAlarm = ParseDiNode("diORGFailAlarm", node, ioModule);
  268. _doResetLift = ParseDoNode("doResetLift", node, ioModule);
  269. _doResetHeater = ParseDoNode("doResetHeater", node, ioModule);
  270. _aiHeaterPurgeN2Flow = ParseAiNode("aiHeaterPurgeN2Flow", node, ioModule);
  271. _diMhtrErrorHeatStop = ParseDiNode("diMhtrErrorHeatStop", node, ioModule);
  272. _doMhtrErrorReset = ParseDoNode("doMhtrErrorReset", node, ioModule);
  273. _diWaferTransferPosiSW = ParseDiNode("diWaferTransferPosiSW", node, ioModule);
  274. UpdateAutoRatio();
  275. _ratioStopwatch.Start();
  276. }
  277. public bool GotoPosition(HighTemperatureHeaterPosition highTemperatureHeaterPosition)
  278. {
  279. if (!LiftHardwareIsOK())
  280. {
  281. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Alarm,can not go to {highTemperatureHeaterPosition}");
  282. return false;
  283. }
  284. if (highTemperatureHeaterPosition != HighTemperatureHeaterPosition.Origin && !LiftSoftwareIsOK())
  285. {
  286. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Alarm,can not go to {highTemperatureHeaterPosition}");
  287. return false;
  288. }
  289. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} start to {highTemperatureHeaterPosition.ToString()}");
  290. HighTemperatureHeaterPositipnSetPoint = highTemperatureHeaterPosition.ToString();
  291. switch (highTemperatureHeaterPosition)
  292. {
  293. case HighTemperatureHeaterPosition.Origin:
  294. _doGoPosition1On.Value = false;
  295. _doGoPosition2On.Value = false;
  296. _doGoPosition3On.Value = false;
  297. _doGoPosition4On.Value = false;
  298. _doGoPosition5On.Value = false;
  299. _doGoOriginOn.Value = true;
  300. _originTimer.Start(_goPositionTime);
  301. break;
  302. case HighTemperatureHeaterPosition.Position1:
  303. _doGoPosition2On.Value = false;
  304. _doGoPosition3On.Value = false;
  305. _doGoPosition4On.Value = false;
  306. _doGoPosition5On.Value = false;
  307. _doGoOriginOn.Value = false;
  308. _doGoPosition1On.Value = true;
  309. _position1Timer.Start(_goPositionTime);
  310. break;
  311. case HighTemperatureHeaterPosition.Position2:
  312. _doGoPosition1On.Value = false;
  313. _doGoPosition3On.Value = false;
  314. _doGoPosition4On.Value = false;
  315. _doGoPosition5On.Value = false;
  316. _doGoOriginOn.Value = false;
  317. _doGoPosition2On.Value = true;
  318. _position2Timer.Start(_goPositionTime);
  319. break;
  320. case HighTemperatureHeaterPosition.Position3:
  321. _doGoPosition1On.Value = false;
  322. _doGoPosition2On.Value = false;
  323. _doGoPosition4On.Value = false;
  324. _doGoPosition5On.Value = false;
  325. _doGoOriginOn.Value = false;
  326. _doGoPosition3On.Value = true;
  327. _position3Timer.Start(_goPositionTime);
  328. break;
  329. case HighTemperatureHeaterPosition.Position4:
  330. _doGoPosition1On.Value = false;
  331. _doGoPosition2On.Value = false;
  332. _doGoPosition3On.Value = false;
  333. _doGoPosition5On.Value = false;
  334. _doGoOriginOn.Value = false;
  335. _doGoPosition4On.Value = true;
  336. _position4Timer.Start(_goPositionTime);
  337. break;
  338. case HighTemperatureHeaterPosition.Position5:
  339. _doGoPosition1On.Value = false;
  340. _doGoPosition2On.Value = false;
  341. _doGoPosition3On.Value = false;
  342. _doGoPosition4On.Value = false;
  343. _doGoOriginOn.Value = false;
  344. _doGoPosition5On.Value = true;
  345. _position5Timer.Start(_goPositionTime);
  346. break;
  347. }
  348. return true;
  349. }
  350. public bool Initialize()
  351. {
  352. OP.Subscribe($"{Module}.{Name}.GotoPosition", (cmd, args) =>
  353. {
  354. var currentPosition = (HighTemperatureHeaterPosition)Enum.Parse(typeof(HighTemperatureHeaterPosition), args[0].ToString());
  355. GotoPosition(currentPosition);
  356. return true;
  357. });
  358. OP.Subscribe($"{Module}.{Name}.SwitchHighTemperatureHeater", (cmd, args) =>
  359. {
  360. HighTemperatureHeaterIsOn = Convert.ToBoolean(args[0].ToString());
  361. return true;
  362. });
  363. OP.Subscribe($"{Module}.{Name}.SetHighTemperatureHeaterTemperature", (cmd, args) =>
  364. {
  365. HighTemperatureHighHeaterTemperature = Convert.ToSingle(args[0]);
  366. return true;
  367. });
  368. OP.Subscribe($"{Module}.{Name}.SetHighTemperatureHeaterRatio", (cmd, args) =>
  369. {
  370. HighTemperatureHeaterRatio = Convert.ToSingle(args[0]);
  371. return true;
  372. });
  373. OP.Subscribe($"{Module}.{Name}.ResetHighTemperatureHeaterLift", (cmd, args) =>
  374. {
  375. ResetLift();
  376. return true;
  377. });
  378. OP.Subscribe($"{Module}.{Name}.ResetHighTemperatureHeater", (cmd, args) =>
  379. {
  380. ResetHeater();
  381. return true;
  382. });
  383. OP.Subscribe($"{Module}.{Name}.SetAutoRatio", (cmd, args) =>
  384. {
  385. UpdateAutoRatio();
  386. return true;
  387. });
  388. DATA.Subscribe($"{Module}.{Name}.DeviceData", () => DeviceData, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  389. DATA.Subscribe($"{Module}.{Name}.Temperature", () => DeviceData.HighTemperatureHeaterTemperatureFeedBack);
  390. DATA.Subscribe($"{Module}.{Name}.Position", () => (int)CurrentPosition - 1);
  391. DATA.Subscribe($"{Module}.{Name}.IsOn", () => DeviceData.HighTemperatureHeaterIsonFeedBack);
  392. DATA.Subscribe($"{Module}.{Name}.TemperatureSetPoint", () => DeviceData.HighTemperatureHeaterTemperatureSetPoint);
  393. DATA.Subscribe($"{Module}.{Name}.Power_Output", () => GetAiValue($"{Module}.AI_CHB_M-HT_Reference_Power_Output"));
  394. DATA.Subscribe($"{Module}.{Name}.MaxPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Max_Power"));
  395. DATA.Subscribe($"{Module}.{Name}.MinPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Min_Power"));
  396. DATA.Subscribe($"{Module}.{Name}.Speed", () => GetAiValue($"{Module}.AI_CHB_M-HT_Current_Speed"));
  397. DATA.Subscribe($"{Module}.{Name}.Posi_Mm", () => GetAiValue($"{Module}.AI_Lift_Servo_Current_Posi_Mm"));
  398. DATA.Subscribe($"{Module}.{Name}.TM_Temp", () => GetAiValue($"{Module}.AI_CHB_M-HT_Control_TM_Temp"));
  399. DATA.Subscribe($"{Module}.{Name}.InnerCurrent", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Current_FB"));
  400. DATA.Subscribe($"{Module}.{Name}.InnerVoltage", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Voltage_FB"));
  401. DATA.Subscribe($"{Module}.{Name}.InnerPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Power_FB"));
  402. DATA.Subscribe($"{Module}.{Name}.InnerResistance", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Resistance_FB"));
  403. DATA.Subscribe($"{Module}.{Name}.OuterCurrent", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Current_FB"));
  404. DATA.Subscribe($"{Module}.{Name}.OuterVoltage", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Voltage_FB"));
  405. DATA.Subscribe($"{Module}.{Name}.OuterPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Power_FB"));
  406. DATA.Subscribe($"{Module}.{Name}.OuterResistance", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Resistance_FB"));
  407. DATA.Subscribe($"{Module}.{Name}.PurgeN2Flow", () => GetAiValue($"{Module}.AI_Heater_Purge_N2_Flow"));
  408. DATA.Subscribe($"{Module}.{Name}.ShaftTCTemp", () => GetAiValue($"{Module}.AI_HTR_Shaft_TC_Temp"));
  409. DATA.Subscribe($"{Module}.{Name}.SourceTCTemp", () => GetAiValue($"{Module}.AI_Source_TC_Temp"));
  410. DATA.Subscribe($"{Module}.{Name}.HeaterDriverAlarm", () => _diMhtrErrorHeatStop.Value);
  411. //DATA.Subscribe($"{Module}.{Name}.InnerAlarmWord1", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Alarm_Word1"));
  412. //DATA.Subscribe($"{Module}.{Name}.InnerAlarmWord2", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Alarm_Word2"));
  413. //DATA.Subscribe($"{Module}.{Name}.OuterAlarmWord1", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Alarm_Word1"));
  414. //DATA.Subscribe($"{Module}.{Name}.OuterAlarmWord2", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Alarm_Word2"));
  415. DATA.Subscribe($"{Module}.{Name}.Ratio", () => HighTemperatureHeaterRatio);
  416. _SetRealFloat(_aoLiftServoPosition1, 20);
  417. _SetRealFloat(_aoLiftServoPosition2, -30);
  418. _SetRealFloat(_aoLiftServoPosition3, -40);
  419. _SetRealFloat(_aoLiftServoPosition4, 20);
  420. _SetRealFloat(_aoLiftServoPosition5, 50);
  421. _SetRealFloat(_aoOriginSearchHighSpeed, 10);
  422. _SetRealFloat(_aoOriginSearchLowSpeed, 5);
  423. _SetRealFloat(_aoAbsMoveSpeed, 10);
  424. _SetRealFloat(_aoMaximusMoveSpeed, 20);
  425. _SetRealFloat(_aoSoftDownLimit, 100);
  426. _SetRealFloat(_aoSoftUpLimit, 300);
  427. _heaterControlStopWatch.Start();
  428. return true;
  429. }
  430. public void Stop()
  431. {
  432. }
  433. public void Terminate()
  434. {
  435. }
  436. public void Monitor()
  437. {
  438. if (_originTimer.IsTimeout())
  439. {
  440. _originTimer.Stop();
  441. if (_diGoOriginFeedback.Value == false)
  442. {
  443. LOG.Write(eEvent.ERR_HighTemperatureHeater_GoOriginTimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到原点");
  444. }
  445. }
  446. else if (_originTimer.IsIdle() == false)
  447. {
  448. if (_diGoOriginFeedback.Value == true)
  449. {
  450. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Origin");
  451. _doGoOriginOn.Value = false;
  452. _originTimer.Stop();
  453. }
  454. }
  455. if (_position1Timer.IsTimeout())
  456. {
  457. _position1Timer.Stop();
  458. if (_diGoPosition1Feedback.Value == false)
  459. {
  460. LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition1TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position1");
  461. }
  462. if (_diWaferTransferPosiSW.Value == false)
  463. {
  464. LOG.Write(eEvent.ERR_HighTemperatureHeater_TransferPosition, Module, $"{Name} {_goPositionTime / 1000} s 内未到传片位");
  465. }
  466. }
  467. else if (_position1Timer.IsIdle() == false)
  468. {
  469. if (_diGoPosition1Feedback.Value == true && _diWaferTransferPosiSW.Value == true)
  470. {
  471. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position1");
  472. _doGoPosition1On.Value = false;
  473. _position1Timer.Stop();
  474. }
  475. }
  476. if (_position2Timer.IsTimeout())
  477. {
  478. _position2Timer.Stop();
  479. if (_diGoPosition2Feedback.Value == false)
  480. {
  481. LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition2TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position2");
  482. }
  483. }
  484. else if (_position2Timer.IsIdle() == false)
  485. {
  486. if (_diGoPosition2Feedback.Value == true)
  487. {
  488. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position2");
  489. _doGoPosition2On.Value = false;
  490. _position2Timer.Stop();
  491. }
  492. }
  493. if (_position3Timer.IsTimeout())
  494. {
  495. _position3Timer.Stop();
  496. if (_diGoPosition3Feedback.Value == false)
  497. {
  498. LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition3TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position3");
  499. }
  500. }
  501. else if (_position3Timer.IsIdle() == false)
  502. {
  503. if (_diGoPosition3Feedback.Value == true)
  504. {
  505. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position3");
  506. _doGoPosition3On.Value = false;
  507. _position3Timer.Stop();
  508. }
  509. }
  510. if (_position4Timer.IsTimeout())
  511. {
  512. _position4Timer.Stop();
  513. if (_diGoPosition4Feedback.Value == false)
  514. {
  515. LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition4TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position4");
  516. }
  517. }
  518. else if (_position4Timer.IsIdle() == false)
  519. {
  520. if (_diGoPosition4Feedback.Value == true)
  521. {
  522. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position4");
  523. _doGoPosition4On.Value = false;
  524. _position4Timer.Stop();
  525. }
  526. }
  527. if (_position5Timer.IsTimeout())
  528. {
  529. _position5Timer.Stop();
  530. if (_diGoPosition5Feedback.Value == false)
  531. {
  532. LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition5TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position5");
  533. }
  534. }
  535. else if (_position5Timer.IsIdle() == false)
  536. {
  537. if (_diGoPosition5Feedback.Value == true)
  538. {
  539. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position5");
  540. _doGoPosition5On.Value = false;
  541. _position5Timer.Stop();
  542. }
  543. }
  544. var position1Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition1");
  545. var position2Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition2") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");
  546. var position3Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition3") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");
  547. var position4Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition4") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");
  548. var position5Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition5") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");
  549. _SetRealFloat(_aoLiftServoPosition1, position1Value);
  550. _SetRealFloat(_aoLiftServoPosition2, position2Value);
  551. _SetRealFloat(_aoLiftServoPosition3, position3Value);
  552. _SetRealFloat(_aoLiftServoPosition4, position4Value);
  553. _SetRealFloat(_aoLiftServoPosition5, position5Value);
  554. _isAutoRatio = SC.GetValue<bool>($"{Module}.HighTemperatureHeater.IsEnableAutoRatio");
  555. _SetRealFloat(_aoOriginSearchHighSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.OriginSearchHighSpeed"));
  556. _SetRealFloat(_aoOriginSearchLowSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.OriginSearchLowSpeed"));
  557. _SetRealFloat(_aoAbsMoveSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.AbsMoveSpeed"));
  558. _SetRealFloat(_aoMaximusMoveSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.MaximusMoveSpeed"));
  559. _SetRealFloat(_aoSoftDownLimit, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.SoftDownLimit"));
  560. _SetRealFloat(_aoSoftUpLimit, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.SoftUpLimit"));
  561. _SetRealFloat(_aoTemperatureSetPoint, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.Temperature"));
  562. _SetRealFloat(_aoRatio, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.Ratio"));
  563. _doPowerOn.Value = SC.GetValue<bool>($"{Module}.HighTemperatureHeater.IsOn");
  564. if (_heaterControlStopWatch.ElapsedMilliseconds > 10 * 1000)
  565. {
  566. _heaterControlStopWatch.Restart();
  567. var innerWord1 = (int)_GetRealFloat(_aiHeaterInnerAlarmWord1);
  568. if (innerWord1 > 0 && innerWord1 != _innerWord1)
  569. {
  570. var innerWord1Value = ConvertToBitArray(innerWord1);
  571. AlarmWord1(innerWord1Value, "Inner Word1");
  572. }
  573. _innerWord1 = innerWord1;
  574. var innerWord2 = (int)_GetRealFloat(_aiHeaterInnerAlarmWord2);
  575. //innerWord2_TRIG.CLK = innerWord2 > 0;
  576. if (innerWord2 > 0 && innerWord2 != _innerWord2)
  577. {
  578. var innerWord2Value = ConvertToBitArray(innerWord2);
  579. AlarmWord2(innerWord2Value, "Inner Word2");
  580. }
  581. _innerWord2 = innerWord2;
  582. var outerWord1 = (int)_GetRealFloat(_aiHeaterOuterAlarmWord1);
  583. //outerWord1_TRIG.CLK = outerWord1 > 0;
  584. if (outerWord1 > 0 && outerWord1 != _outerWord1)
  585. {
  586. var outerWord1Value = ConvertToBitArray(outerWord1);
  587. AlarmWord1(outerWord1Value, "Outer Word1");
  588. }
  589. _outerWord1 = outerWord1;
  590. var outerWord2 = (int)_GetRealFloat(_aiHeaterOuterAlarmWord2);
  591. //outerWord2_TRIG.CLK = outerWord2> 0;
  592. if (outerWord2 > 0 && outerWord2 != _outerWord2)
  593. {
  594. var outerWord2Value = ConvertToBitArray(outerWord2);
  595. AlarmWord2(outerWord2Value, "Outer Word2");
  596. }
  597. _outerWord2 = outerWord2;
  598. }
  599. if (_ratioStopwatch.ElapsedMilliseconds > 2000)
  600. {
  601. foreach (var item in _ratioValues)
  602. {
  603. int index= _ratioValues.IndexOf(item);
  604. if (_isAutoRatio == false)
  605. {
  606. RangeIndex = -1;
  607. break;
  608. }
  609. if (_isAutoRatio && HighTemperatureHighHeaterTemperature >= item.MinValue && HighTemperatureHighHeaterTemperature <= item.MaxValue && RangeIndex != index)
  610. {
  611. HighTemperatureHeaterRatio = item.Ratio;
  612. RangeIndex = index;
  613. break;
  614. }
  615. }
  616. }
  617. }
  618. public bool[] ConvertToBitArray(int number)
  619. {
  620. var bitArray = new bool[sizeof(int) * 8]; // 创建一个bool数组,大小为int类型的位数
  621. for (int i = 0; i < bitArray.Length; i++)
  622. {
  623. bitArray[i] = (number & (1 << i)) != 0; // 将number的第i位与1做位与运算,如果结果不为0,则该位为true
  624. }
  625. return bitArray;
  626. }
  627. private void AlarmWord1(bool[] word1, string name)
  628. {
  629. if (word1[0] == true)
  630. {
  631. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Missing Mains");
  632. }
  633. if (word1[1] == true)
  634. {
  635. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Thyristor short circuit");
  636. }
  637. if (word1[3] == true)
  638. {
  639. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Network Dips");
  640. }
  641. if (word1[4] == true)
  642. {
  643. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Frequency Fault");
  644. }
  645. if (word1[5] == true)
  646. {
  647. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} T.L.F");
  648. }
  649. if (word1[6] == true)
  650. {
  651. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Chop Off");
  652. }
  653. if (word1[7] == true)
  654. {
  655. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} P.L.F");
  656. }
  657. if (word1[8] == true)
  658. {
  659. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} P.L.U");
  660. }
  661. if (word1[9] == true)
  662. {
  663. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Over Voltage");
  664. }
  665. if (word1[10] == true)
  666. {
  667. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Under Voltage");
  668. }
  669. if (word1[12] == true)
  670. {
  671. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Over Current");
  672. }
  673. if (word1[14] == true)
  674. {
  675. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Analn Over Current");
  676. }
  677. if (word1[15] == true)
  678. {
  679. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} External Input");
  680. }
  681. }
  682. private void AlarmWord2(bool[] word2, string name)
  683. {
  684. if (word2[0] == true)
  685. {
  686. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Closed Loop break");
  687. }
  688. if (word2[1] == true)
  689. {
  690. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Transfer Active");
  691. }
  692. if (word2[2] == true)
  693. {
  694. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Limit Active");
  695. }
  696. }
  697. public bool LiftIsOK()
  698. {
  699. if (IsDriverAlarm)
  700. {
  701. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Driver Alarm");
  702. return false;
  703. }
  704. if (IsPosiModuleAlarm)
  705. {
  706. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Position Module Alarm");
  707. return false;
  708. }
  709. if (IsORGFailAlarm)
  710. {
  711. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo ORG Fail Alarm");
  712. return false;
  713. }
  714. return true;
  715. }
  716. private bool LiftHardwareIsOK()
  717. {
  718. if (IsDriverAlarm)
  719. {
  720. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Driver Alarm");
  721. return false;
  722. }
  723. if (IsPosiModuleAlarm)
  724. {
  725. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Position Module Alarm");
  726. return false;
  727. }
  728. return true;
  729. }
  730. private bool LiftSoftwareIsOK()
  731. {
  732. if (IsORGFailAlarm)
  733. {
  734. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo ORG Fail Alarm");
  735. return false;
  736. }
  737. return true;
  738. }
  739. public async void ResetLift()
  740. {
  741. if (_doResetHeater.Value == true)
  742. {
  743. _doResetHeater.Value = false;
  744. await Task.Delay(200);
  745. }
  746. _doResetHeater.Value = true;
  747. await Task.Delay(1000);
  748. _doResetHeater.Value = true;
  749. if (_doResetLift.Value == true)
  750. {
  751. _doResetLift.Value = false;
  752. await Task.Delay(200);
  753. }
  754. _doResetLift.Value = true;
  755. await Task.Delay(1000);
  756. _doResetLift.Value = false;
  757. _clearAlarmCounter = 0;
  758. while (IsDriverAlarm || IsPosiModuleAlarm)
  759. {
  760. _clearAlarmCounter += 1;
  761. if (_clearAlarmCounter > 5)
  762. {
  763. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Clear Alarm Failed");
  764. return;
  765. }
  766. else
  767. {
  768. LOG.Write(eEvent.INFO_PM, Module, $"{Name} Clearing Alarm,Please wait");
  769. }
  770. await Task.Delay(1000);
  771. }
  772. GotoPosition(HighTemperatureHeaterPosition.Origin);
  773. }
  774. public async void ResetHeater()
  775. {
  776. if (_diMhtrErrorHeatStop.Value)
  777. {
  778. if (_doMhtrErrorReset.Value == true)
  779. {
  780. _doMhtrErrorReset.Value = false;
  781. await Task.Delay(200);
  782. }
  783. _doMhtrErrorReset.Value = true;
  784. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} Reset Heater");
  785. }
  786. }
  787. private void UpdateAutoRatio()
  788. {
  789. try
  790. {
  791. RangeIndex = -1;
  792. var ratioValueString = SC.GetStringValue($"{Module}.HighTemperatureHeater.AutoRatioValue");
  793. _ratioValues = SerializeHelper.Instance.JsonStringToObject<List<RatioValue>>(ratioValueString);
  794. }
  795. catch
  796. {
  797. }
  798. }
  799. //private string FloatToHex(float value)
  800. //{
  801. // byte[] bytes = BitConverter.GetBytes(value);
  802. // StringBuilder stringBuffer = new StringBuilder();
  803. // for (int i = 0; i < bytes.Length; i++)
  804. // {
  805. // string hex = Convert.ToString(bytes[i], 2);
  806. // stringBuffer.Insert(0, hex);
  807. // for (int j = hex.Length; j < 8; j++)
  808. // {
  809. // stringBuffer.Insert(0, "0");
  810. // }
  811. // }
  812. // return stringBuffer.ToString();
  813. //}
  814. public void Reset()
  815. {
  816. }
  817. }
  818. }