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- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.IOCore;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using MECF.Framework.Common.CommonData.DeviceData;
- using System;
- using System.Collections.Generic;
- using System.Diagnostics;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using System.Xml;
- using Venus_Core;
- using Venus_Unity;
- namespace Venus_RT.Devices.IODevices
- {
- public class IoHighTemperatureHeater : BaseDevice, IDevice
- {
- private readonly DIAccessor _diPowerOnFeedback;
- private readonly DOAccessor _doPowerOn;
- private readonly AIAccessor _aiTemperatureFeedback;
- private readonly AOAccessor _aoTemperatureSetPoint;
- private readonly DIAccessor _diGoPosition1Feedback;
- private readonly DOAccessor _doGoPosition1On;
- private readonly DIAccessor _diGoPosition2Feedback;
- private readonly DOAccessor _doGoPosition2On;
- private readonly DIAccessor _diGoPosition3Feedback;
- private readonly DOAccessor _doGoPosition3On;
- private readonly DIAccessor _diGoPosition4Feedback;
- private readonly DOAccessor _doGoPosition4On;
- private readonly DIAccessor _diGoPosition5Feedback;
- private readonly DOAccessor _doGoPosition5On;
- private readonly DIAccessor _diGoOriginFeedback;
- private readonly DOAccessor _doGoOriginOn;
- private readonly AOAccessor _aoLiftServoPosition1;
- private readonly AOAccessor _aoLiftServoPosition2;
- private readonly AOAccessor _aoLiftServoPosition3;
- private readonly AOAccessor _aoLiftServoPosition4;
- private readonly AOAccessor _aoLiftServoPosition5;
- private readonly AOAccessor _aoOriginSearchHighSpeed;
- private readonly AOAccessor _aoOriginSearchLowSpeed;
- private readonly AOAccessor _aoAbsMoveSpeed;
- private readonly AOAccessor _aoMaximusMoveSpeed;
- private readonly AOAccessor _aoSoftDownLimit;
- private readonly AOAccessor _aoSoftUpLimit;
- private readonly AOAccessor _aoRatio;
- private readonly DIAccessor _diDriverAlarm;
- private readonly DIAccessor _diPosiModuleAlarm;
- private readonly DIAccessor _diORGFailAlarm;
- private readonly DOAccessor _doResetLift;
- private readonly DOAccessor _doResetHeater;
- private readonly AIAccessor _aiHeaterPurgeN2Flow;
- private readonly DIAccessor _diMhtrErrorHeatStop;
- private readonly DOAccessor _doMhtrErrorReset;
- private readonly DIAccessor _diWaferTransferPosiSW;
- private readonly AIAccessor _aiHeaterInnerAlarmWord1;
- private readonly AIAccessor _aiHeaterInnerAlarmWord2;
- private readonly AIAccessor _aiHeaterOuterAlarmWord1;
- private readonly AIAccessor _aiHeaterOuterAlarmWord2;
- private readonly DeviceTimer _originTimer = new DeviceTimer();
- private readonly DeviceTimer _position1Timer = new DeviceTimer();
- private readonly DeviceTimer _position2Timer = new DeviceTimer();
- private readonly DeviceTimer _position3Timer = new DeviceTimer();
- private readonly DeviceTimer _position4Timer = new DeviceTimer();
- private readonly DeviceTimer _position5Timer = new DeviceTimer();
- private int _goPositionTime = 30 * 1000;
- private float HighTemperatureHeaterTemperatureSetPoint;
- private string HighTemperatureHeaterPositipnSetPoint;
- private float HighTemperatureHeaterRatioSetPoint;
- private float _maxTemperatureSetPoint;
- private float _minTemperatureSetPoint;
- private float _maxRatioSetPoint;
- private float _minRatioSetPoint;
- private int _clearAlarmCounter;
- private Stopwatch _heaterControlStopWatch = new Stopwatch();
- //private R_TRIG innerWord1_TRIG = new R_TRIG();
- //private R_TRIG innerWord2_TRIG = new R_TRIG();
- //private R_TRIG outerWord1_TRIG = new R_TRIG();
- //private R_TRIG outerWord2_TRIG = new R_TRIG();
- private int _innerWord1;
- private int _innerWord2;
- private int _outerWord1;
- private int _outerWord2;
- private bool _isAutoRatio;
- private List<RatioValue> _ratioValues = new List<RatioValue>();
- private Stopwatch _ratioStopwatch=new Stopwatch();
- private int RangeIndex=-1;
- private AITHighTemperatureHeaterData DeviceData
- {
- get
- {
- return new AITHighTemperatureHeaterData
- {
- Module = Module,
- DeviceName = Name,
- DisplayName = Display,
- HighTemperatureHeaterPositionFeedBack = CurrentPosition.ToString(),
- HighTemperatureHeaterIsonFeedBack = HighTemperatureHeaterIsOn,
- HighTemperatureHeaterTemperatureFeedBack = HighTemperatureHighHeaterTemperature,
- HighTemperatureHeaterRatioFeedBack = HighTemperatureHeaterRatio,
- HighTemperatureHeaterPositionSetPoint = HighTemperatureHeaterPositipnSetPoint,
- HighTemperatureHeaterTemperatureSetPoint = HighTemperatureHeaterTemperatureSetPoint,
- HighTemperatureHeaterRatioSetPoint = HighTemperatureHeaterRatioSetPoint,
- HighTemperatureHeaterN2Flow = HighTemperatureHeaterN2Flow,
- LiftIsAlarm = IsDriverAlarm || IsPosiModuleAlarm || IsORGFailAlarm,
- HeaterIsAlarm = _diMhtrErrorHeatStop.Value,
- IsAutoRatio = _isAutoRatio
- };
- }
- }
- public bool IsDriverAlarm => _diDriverAlarm.Value;
- public bool IsPosiModuleAlarm => _diPosiModuleAlarm.Value;
- public bool IsORGFailAlarm => _diORGFailAlarm.Value;
- public HighTemperatureHeaterPosition CurrentPosition
- {
- get
- {
- if (_diDriverAlarm.Value || _diPosiModuleAlarm.Value || _diORGFailAlarm.Value)
- {
- return HighTemperatureHeaterPosition.UnKnow;
- }
- if (_diGoOriginFeedback.Value == true && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)
- {
- return HighTemperatureHeaterPosition.Origin;
- }
- if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == true && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)
- {
- return HighTemperatureHeaterPosition.Position1;
- }
- else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == true && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)
- {
- return HighTemperatureHeaterPosition.Position2;
- }
- else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == true && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)
- {
- return HighTemperatureHeaterPosition.Position3;
- }
- else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == true && _diGoPosition5Feedback.Value == false)
- {
- return HighTemperatureHeaterPosition.Position4;
- }
- else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == true)
- {
- return HighTemperatureHeaterPosition.Position5;
- }
- else
- {
- return HighTemperatureHeaterPosition.UnKnow;
- }
- }
- }
- public bool HighTemperatureHeaterIsOn
- {
- get
- {
- if (_diPowerOnFeedback.Value == true && _doPowerOn.Value == true)
- {
- return true;
- }
- else
- {
- return false;
- }
- }
- set
- {
- SC.SetItemValue($"{Module}.HighTemperatureHeater.IsOn", value);
- }
- }
- public float HighTemperatureHighHeaterTemperature
- {
- get
- {
- if (_aiTemperatureFeedback == null) return -1;
- return _GetRealFloat(_aiTemperatureFeedback);
- }
- set
- {
- if (value <= _maxTemperatureSetPoint && value >= _minTemperatureSetPoint)
- {
- LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $" Set Temperature to {value}");
- HighTemperatureHeaterTemperatureSetPoint = value;
- SC.SetItemValue($"{Module}.HighTemperatureHeater.Temperature", value);
- }
- else
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater_SetTemperature_OverRange, Module, value.ToString(), _minTemperatureSetPoint.ToString(), _maxTemperatureSetPoint.ToString());
- }
- }
- }
- public float HighTemperatureHeaterRatio
- {
- get
- {
- if (_aoRatio == null) return -1;
- return _GetRealFloat(_aoRatio);
- }
- set
- {
- if (value <= _maxRatioSetPoint && value >= _minRatioSetPoint)
- {
- LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $" Set Ratio to {value}");
- HighTemperatureHeaterRatioSetPoint = value;
- SC.SetItemValue($"{Module}.HighTemperatureHeater.Ratio", value);
- }
- else
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater_SetRatio_OverRange, Module, value.ToString(), _minRatioSetPoint.ToString(), _maxRatioSetPoint.ToString());
- }
- }
- }
- public float HighTemperatureHeaterN2Flow
- {
- get
- {
- if (_aiHeaterPurgeN2Flow == null) return -1;
- return _GetRealFloat(_aiHeaterPurgeN2Flow);
- }
- }
- public IoHighTemperatureHeater(string module, XmlElement node, string ioModule = "")
- {
- base.Module = module;
- base.Name = node.GetAttribute("id");
- base.Display = node.GetAttribute("display");
- base.DeviceID = node.GetAttribute("schematicId");
- _diPowerOnFeedback = ParseDiNode("diPowerOnFeedback", node, ioModule);
- _doPowerOn = ParseDoNode("doPowerOn", node, ioModule);
- _aiTemperatureFeedback = ParseAiNode("aiTemperatureFeedback", node, ioModule);
- _aoTemperatureSetPoint = ParseAoNode("aoTemperatureSetPoint", node, ioModule);
- _diGoPosition1Feedback = ParseDiNode("diGoPosition1Feedback", node, ioModule);
- _doGoPosition1On = ParseDoNode("doGoPosition1On", node, ioModule);
- _diGoPosition2Feedback = ParseDiNode("diGoPosition2Feedback", node, ioModule);
- _doGoPosition2On = ParseDoNode("doGoPosition2On", node, ioModule);
- _diGoPosition3Feedback = ParseDiNode("diGoPosition3Feedback", node, ioModule);
- _doGoPosition3On = ParseDoNode("doGoPosition3On", node, ioModule);
- _diGoPosition4Feedback = ParseDiNode("diGoPosition4Feedback", node, ioModule);
- _doGoPosition4On = ParseDoNode("doGoPosition4On", node, ioModule);
- _diGoPosition5Feedback = ParseDiNode("diGoPosition5Feedback", node, ioModule);
- _doGoPosition5On = ParseDoNode("doGoPosition5On", node, ioModule);
- _diGoOriginFeedback = ParseDiNode("diGoOriginFeedback", node, ioModule);
- _doGoOriginOn = ParseDoNode("doGoOriginOn", node, ioModule);
- _aoLiftServoPosition1 = ParseAoNode("aoLiftServoPosition1", node, ioModule);
- _aoLiftServoPosition2 = ParseAoNode("aoLiftServoPosition2", node, ioModule);
- _aoLiftServoPosition3 = ParseAoNode("aoLiftServoPosition3", node, ioModule);
- _aoLiftServoPosition4 = ParseAoNode("aoLiftServoPosition4", node, ioModule);
- _aoLiftServoPosition5 = ParseAoNode("aoLiftServoPosition5", node, ioModule);
- _aoOriginSearchHighSpeed = ParseAoNode("aoOriginSearchHighSpeed", node, ioModule);
- _aoOriginSearchLowSpeed = ParseAoNode("aoOriginSearchLowSpeed", node, ioModule);
- _aoAbsMoveSpeed = ParseAoNode("aoAbsMoveSpeed", node, ioModule);
- _aoMaximusMoveSpeed = ParseAoNode("aoMaximusMoveSpeed", node, ioModule);
- _aoSoftDownLimit = ParseAoNode("aoSoftDownLimit", node, ioModule);
- _aoSoftUpLimit = ParseAoNode("aoSoftUpLimit", node, ioModule);
- _aoRatio = ParseAoNode("aoRatio", node, ioModule);
- _aiHeaterInnerAlarmWord1 = ParseAiNode("aiHeaterInnerAlarmWord1", node, ioModule);
- _aiHeaterInnerAlarmWord2 = ParseAiNode("aiHeaterInnerAlarmWord2", node, ioModule);
- _aiHeaterOuterAlarmWord1 = ParseAiNode("aiHeaterOuterAlarmWord1", node, ioModule);
- _aiHeaterOuterAlarmWord2 = ParseAiNode("aiHeaterOuterAlarmWord2", node, ioModule);
- _maxTemperatureSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Temperature").Max);
- _minTemperatureSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Temperature").Min);
- _maxRatioSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Ratio").Max);
- _minRatioSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Ratio").Min);
- _diDriverAlarm = ParseDiNode("diDriverAlarm", node, ioModule);
- _diPosiModuleAlarm = ParseDiNode("diPosiModuleAlarm", node, ioModule);
- _diORGFailAlarm = ParseDiNode("diORGFailAlarm", node, ioModule);
- _doResetLift = ParseDoNode("doResetLift", node, ioModule);
- _doResetHeater = ParseDoNode("doResetHeater", node, ioModule);
- _aiHeaterPurgeN2Flow = ParseAiNode("aiHeaterPurgeN2Flow", node, ioModule);
- _diMhtrErrorHeatStop = ParseDiNode("diMhtrErrorHeatStop", node, ioModule);
- _doMhtrErrorReset = ParseDoNode("doMhtrErrorReset", node, ioModule);
- _diWaferTransferPosiSW = ParseDiNode("diWaferTransferPosiSW", node, ioModule);
- UpdateAutoRatio();
- _ratioStopwatch.Start();
- }
- public bool GotoPosition(HighTemperatureHeaterPosition highTemperatureHeaterPosition)
- {
- if (!LiftHardwareIsOK())
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Alarm,can not go to {highTemperatureHeaterPosition}");
- return false;
- }
- if (highTemperatureHeaterPosition != HighTemperatureHeaterPosition.Origin && !LiftSoftwareIsOK())
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Alarm,can not go to {highTemperatureHeaterPosition}");
- return false;
- }
- LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} start to {highTemperatureHeaterPosition.ToString()}");
- HighTemperatureHeaterPositipnSetPoint = highTemperatureHeaterPosition.ToString();
- switch (highTemperatureHeaterPosition)
- {
- case HighTemperatureHeaterPosition.Origin:
- _doGoPosition1On.Value = false;
- _doGoPosition2On.Value = false;
- _doGoPosition3On.Value = false;
- _doGoPosition4On.Value = false;
- _doGoPosition5On.Value = false;
- _doGoOriginOn.Value = true;
- _originTimer.Start(_goPositionTime);
- break;
- case HighTemperatureHeaterPosition.Position1:
- _doGoPosition2On.Value = false;
- _doGoPosition3On.Value = false;
- _doGoPosition4On.Value = false;
- _doGoPosition5On.Value = false;
- _doGoOriginOn.Value = false;
- _doGoPosition1On.Value = true;
- _position1Timer.Start(_goPositionTime);
- break;
- case HighTemperatureHeaterPosition.Position2:
- _doGoPosition1On.Value = false;
- _doGoPosition3On.Value = false;
- _doGoPosition4On.Value = false;
- _doGoPosition5On.Value = false;
- _doGoOriginOn.Value = false;
- _doGoPosition2On.Value = true;
- _position2Timer.Start(_goPositionTime);
- break;
- case HighTemperatureHeaterPosition.Position3:
- _doGoPosition1On.Value = false;
- _doGoPosition2On.Value = false;
- _doGoPosition4On.Value = false;
- _doGoPosition5On.Value = false;
- _doGoOriginOn.Value = false;
- _doGoPosition3On.Value = true;
- _position3Timer.Start(_goPositionTime);
- break;
- case HighTemperatureHeaterPosition.Position4:
- _doGoPosition1On.Value = false;
- _doGoPosition2On.Value = false;
- _doGoPosition3On.Value = false;
- _doGoPosition5On.Value = false;
- _doGoOriginOn.Value = false;
- _doGoPosition4On.Value = true;
- _position4Timer.Start(_goPositionTime);
- break;
- case HighTemperatureHeaterPosition.Position5:
- _doGoPosition1On.Value = false;
- _doGoPosition2On.Value = false;
- _doGoPosition3On.Value = false;
- _doGoPosition4On.Value = false;
- _doGoOriginOn.Value = false;
- _doGoPosition5On.Value = true;
- _position5Timer.Start(_goPositionTime);
- break;
- }
- return true;
- }
- public bool Initialize()
- {
- OP.Subscribe($"{Module}.{Name}.GotoPosition", (cmd, args) =>
- {
- var currentPosition = (HighTemperatureHeaterPosition)Enum.Parse(typeof(HighTemperatureHeaterPosition), args[0].ToString());
- GotoPosition(currentPosition);
- return true;
- });
- OP.Subscribe($"{Module}.{Name}.SwitchHighTemperatureHeater", (cmd, args) =>
- {
- HighTemperatureHeaterIsOn = Convert.ToBoolean(args[0].ToString());
- return true;
- });
- OP.Subscribe($"{Module}.{Name}.SetHighTemperatureHeaterTemperature", (cmd, args) =>
- {
- HighTemperatureHighHeaterTemperature = Convert.ToSingle(args[0]);
- return true;
- });
- OP.Subscribe($"{Module}.{Name}.SetHighTemperatureHeaterRatio", (cmd, args) =>
- {
- HighTemperatureHeaterRatio = Convert.ToSingle(args[0]);
- return true;
- });
- OP.Subscribe($"{Module}.{Name}.ResetHighTemperatureHeaterLift", (cmd, args) =>
- {
- ResetLift();
- return true;
- });
- OP.Subscribe($"{Module}.{Name}.ResetHighTemperatureHeater", (cmd, args) =>
- {
- ResetHeater();
- return true;
- });
- OP.Subscribe($"{Module}.{Name}.SetAutoRatio", (cmd, args) =>
- {
- UpdateAutoRatio();
- return true;
- });
- DATA.Subscribe($"{Module}.{Name}.DeviceData", () => DeviceData, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.{Name}.Temperature", () => DeviceData.HighTemperatureHeaterTemperatureFeedBack);
- DATA.Subscribe($"{Module}.{Name}.Position", () => (int)CurrentPosition - 1);
- DATA.Subscribe($"{Module}.{Name}.IsOn", () => DeviceData.HighTemperatureHeaterIsonFeedBack);
- DATA.Subscribe($"{Module}.{Name}.TemperatureSetPoint", () => DeviceData.HighTemperatureHeaterTemperatureSetPoint);
- DATA.Subscribe($"{Module}.{Name}.Power_Output", () => GetAiValue($"{Module}.AI_CHB_M-HT_Reference_Power_Output"));
- DATA.Subscribe($"{Module}.{Name}.MaxPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Max_Power"));
- DATA.Subscribe($"{Module}.{Name}.MinPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Min_Power"));
- DATA.Subscribe($"{Module}.{Name}.Speed", () => GetAiValue($"{Module}.AI_CHB_M-HT_Current_Speed"));
- DATA.Subscribe($"{Module}.{Name}.Posi_Mm", () => GetAiValue($"{Module}.AI_Lift_Servo_Current_Posi_Mm"));
- DATA.Subscribe($"{Module}.{Name}.TM_Temp", () => GetAiValue($"{Module}.AI_CHB_M-HT_Control_TM_Temp"));
- DATA.Subscribe($"{Module}.{Name}.InnerCurrent", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Current_FB"));
- DATA.Subscribe($"{Module}.{Name}.InnerVoltage", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Voltage_FB"));
- DATA.Subscribe($"{Module}.{Name}.InnerPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Power_FB"));
- DATA.Subscribe($"{Module}.{Name}.InnerResistance", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Resistance_FB"));
- DATA.Subscribe($"{Module}.{Name}.OuterCurrent", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Current_FB"));
- DATA.Subscribe($"{Module}.{Name}.OuterVoltage", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Voltage_FB"));
- DATA.Subscribe($"{Module}.{Name}.OuterPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Power_FB"));
- DATA.Subscribe($"{Module}.{Name}.OuterResistance", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Resistance_FB"));
- DATA.Subscribe($"{Module}.{Name}.PurgeN2Flow", () => GetAiValue($"{Module}.AI_Heater_Purge_N2_Flow"));
- DATA.Subscribe($"{Module}.{Name}.ShaftTCTemp", () => GetAiValue($"{Module}.AI_HTR_Shaft_TC_Temp"));
- DATA.Subscribe($"{Module}.{Name}.SourceTCTemp", () => GetAiValue($"{Module}.AI_Source_TC_Temp"));
- DATA.Subscribe($"{Module}.{Name}.HeaterDriverAlarm", () => _diMhtrErrorHeatStop.Value);
- //DATA.Subscribe($"{Module}.{Name}.InnerAlarmWord1", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Alarm_Word1"));
- //DATA.Subscribe($"{Module}.{Name}.InnerAlarmWord2", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Alarm_Word2"));
- //DATA.Subscribe($"{Module}.{Name}.OuterAlarmWord1", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Alarm_Word1"));
- //DATA.Subscribe($"{Module}.{Name}.OuterAlarmWord2", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Alarm_Word2"));
- DATA.Subscribe($"{Module}.{Name}.Ratio", () => HighTemperatureHeaterRatio);
- _SetRealFloat(_aoLiftServoPosition1, 20);
- _SetRealFloat(_aoLiftServoPosition2, -30);
- _SetRealFloat(_aoLiftServoPosition3, -40);
- _SetRealFloat(_aoLiftServoPosition4, 20);
- _SetRealFloat(_aoLiftServoPosition5, 50);
- _SetRealFloat(_aoOriginSearchHighSpeed, 10);
- _SetRealFloat(_aoOriginSearchLowSpeed, 5);
- _SetRealFloat(_aoAbsMoveSpeed, 10);
- _SetRealFloat(_aoMaximusMoveSpeed, 20);
- _SetRealFloat(_aoSoftDownLimit, 100);
- _SetRealFloat(_aoSoftUpLimit, 300);
- _heaterControlStopWatch.Start();
- return true;
- }
- public void Stop()
- {
- }
- public void Terminate()
- {
- }
- public void Monitor()
- {
- if (_originTimer.IsTimeout())
- {
- _originTimer.Stop();
- if (_diGoOriginFeedback.Value == false)
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater_GoOriginTimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到原点");
- }
- }
- else if (_originTimer.IsIdle() == false)
- {
- if (_diGoOriginFeedback.Value == true)
- {
- LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Origin");
- _doGoOriginOn.Value = false;
- _originTimer.Stop();
- }
- }
- if (_position1Timer.IsTimeout())
- {
- _position1Timer.Stop();
- if (_diGoPosition1Feedback.Value == false)
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition1TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position1");
- }
- if (_diWaferTransferPosiSW.Value == false)
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater_TransferPosition, Module, $"{Name} {_goPositionTime / 1000} s 内未到传片位");
- }
- }
- else if (_position1Timer.IsIdle() == false)
- {
- if (_diGoPosition1Feedback.Value == true && _diWaferTransferPosiSW.Value == true)
- {
- LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position1");
- _doGoPosition1On.Value = false;
- _position1Timer.Stop();
- }
- }
- if (_position2Timer.IsTimeout())
- {
- _position2Timer.Stop();
- if (_diGoPosition2Feedback.Value == false)
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition2TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position2");
- }
- }
- else if (_position2Timer.IsIdle() == false)
- {
- if (_diGoPosition2Feedback.Value == true)
- {
- LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position2");
- _doGoPosition2On.Value = false;
- _position2Timer.Stop();
- }
- }
- if (_position3Timer.IsTimeout())
- {
- _position3Timer.Stop();
- if (_diGoPosition3Feedback.Value == false)
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition3TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position3");
- }
- }
- else if (_position3Timer.IsIdle() == false)
- {
- if (_diGoPosition3Feedback.Value == true)
- {
- LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position3");
- _doGoPosition3On.Value = false;
- _position3Timer.Stop();
- }
- }
- if (_position4Timer.IsTimeout())
- {
- _position4Timer.Stop();
- if (_diGoPosition4Feedback.Value == false)
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition4TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position4");
- }
- }
- else if (_position4Timer.IsIdle() == false)
- {
- if (_diGoPosition4Feedback.Value == true)
- {
- LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position4");
- _doGoPosition4On.Value = false;
- _position4Timer.Stop();
- }
- }
- if (_position5Timer.IsTimeout())
- {
- _position5Timer.Stop();
- if (_diGoPosition5Feedback.Value == false)
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition5TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position5");
- }
- }
- else if (_position5Timer.IsIdle() == false)
- {
- if (_diGoPosition5Feedback.Value == true)
- {
- LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position5");
- _doGoPosition5On.Value = false;
- _position5Timer.Stop();
- }
- }
- var position1Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition1");
- var position2Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition2") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");
- var position3Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition3") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");
- var position4Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition4") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");
- var position5Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition5") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");
- _SetRealFloat(_aoLiftServoPosition1, position1Value);
- _SetRealFloat(_aoLiftServoPosition2, position2Value);
- _SetRealFloat(_aoLiftServoPosition3, position3Value);
- _SetRealFloat(_aoLiftServoPosition4, position4Value);
- _SetRealFloat(_aoLiftServoPosition5, position5Value);
- _isAutoRatio = SC.GetValue<bool>($"{Module}.HighTemperatureHeater.IsEnableAutoRatio");
- _SetRealFloat(_aoOriginSearchHighSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.OriginSearchHighSpeed"));
- _SetRealFloat(_aoOriginSearchLowSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.OriginSearchLowSpeed"));
- _SetRealFloat(_aoAbsMoveSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.AbsMoveSpeed"));
- _SetRealFloat(_aoMaximusMoveSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.MaximusMoveSpeed"));
- _SetRealFloat(_aoSoftDownLimit, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.SoftDownLimit"));
- _SetRealFloat(_aoSoftUpLimit, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.SoftUpLimit"));
- _SetRealFloat(_aoTemperatureSetPoint, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.Temperature"));
- _SetRealFloat(_aoRatio, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.Ratio"));
- _doPowerOn.Value = SC.GetValue<bool>($"{Module}.HighTemperatureHeater.IsOn");
- if (_heaterControlStopWatch.ElapsedMilliseconds > 10 * 1000)
- {
- _heaterControlStopWatch.Restart();
- var innerWord1 = (int)_GetRealFloat(_aiHeaterInnerAlarmWord1);
- if (innerWord1 > 0 && innerWord1 != _innerWord1)
- {
- var innerWord1Value = ConvertToBitArray(innerWord1);
- AlarmWord1(innerWord1Value, "Inner Word1");
- }
- _innerWord1 = innerWord1;
- var innerWord2 = (int)_GetRealFloat(_aiHeaterInnerAlarmWord2);
- //innerWord2_TRIG.CLK = innerWord2 > 0;
- if (innerWord2 > 0 && innerWord2 != _innerWord2)
- {
- var innerWord2Value = ConvertToBitArray(innerWord2);
- AlarmWord2(innerWord2Value, "Inner Word2");
- }
- _innerWord2 = innerWord2;
- var outerWord1 = (int)_GetRealFloat(_aiHeaterOuterAlarmWord1);
- //outerWord1_TRIG.CLK = outerWord1 > 0;
- if (outerWord1 > 0 && outerWord1 != _outerWord1)
- {
- var outerWord1Value = ConvertToBitArray(outerWord1);
- AlarmWord1(outerWord1Value, "Outer Word1");
- }
- _outerWord1 = outerWord1;
- var outerWord2 = (int)_GetRealFloat(_aiHeaterOuterAlarmWord2);
- //outerWord2_TRIG.CLK = outerWord2> 0;
- if (outerWord2 > 0 && outerWord2 != _outerWord2)
- {
- var outerWord2Value = ConvertToBitArray(outerWord2);
- AlarmWord2(outerWord2Value, "Outer Word2");
- }
- _outerWord2 = outerWord2;
- }
- if (_ratioStopwatch.ElapsedMilliseconds > 2000)
- {
- foreach (var item in _ratioValues)
- {
- int index= _ratioValues.IndexOf(item);
- if (_isAutoRatio == false)
- {
- RangeIndex = -1;
- break;
- }
- if (_isAutoRatio && HighTemperatureHighHeaterTemperature >= item.MinValue && HighTemperatureHighHeaterTemperature <= item.MaxValue && RangeIndex != index)
- {
- HighTemperatureHeaterRatio = item.Ratio;
- RangeIndex = index;
- break;
- }
- }
- }
- }
- public bool[] ConvertToBitArray(int number)
- {
- var bitArray = new bool[sizeof(int) * 8]; // 创建一个bool数组,大小为int类型的位数
- for (int i = 0; i < bitArray.Length; i++)
- {
- bitArray[i] = (number & (1 << i)) != 0; // 将number的第i位与1做位与运算,如果结果不为0,则该位为true
- }
- return bitArray;
- }
- private void AlarmWord1(bool[] word1, string name)
- {
- if (word1[0] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Missing Mains");
- }
- if (word1[1] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Thyristor short circuit");
- }
- if (word1[3] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Network Dips");
- }
- if (word1[4] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Frequency Fault");
- }
- if (word1[5] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} T.L.F");
- }
- if (word1[6] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Chop Off");
- }
- if (word1[7] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} P.L.F");
- }
- if (word1[8] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} P.L.U");
- }
- if (word1[9] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Over Voltage");
- }
- if (word1[10] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Under Voltage");
- }
- if (word1[12] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Over Current");
- }
- if (word1[14] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Analn Over Current");
- }
- if (word1[15] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} External Input");
- }
- }
- private void AlarmWord2(bool[] word2, string name)
- {
- if (word2[0] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Closed Loop break");
- }
- if (word2[1] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Transfer Active");
- }
- if (word2[2] == true)
- {
- LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Limit Active");
- }
- }
- public bool LiftIsOK()
- {
- if (IsDriverAlarm)
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Driver Alarm");
- return false;
- }
- if (IsPosiModuleAlarm)
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Position Module Alarm");
- return false;
- }
- if (IsORGFailAlarm)
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo ORG Fail Alarm");
- return false;
- }
- return true;
- }
- private bool LiftHardwareIsOK()
- {
- if (IsDriverAlarm)
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Driver Alarm");
- return false;
- }
- if (IsPosiModuleAlarm)
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Position Module Alarm");
- return false;
- }
- return true;
- }
- private bool LiftSoftwareIsOK()
- {
- if (IsORGFailAlarm)
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo ORG Fail Alarm");
- return false;
- }
- return true;
- }
- public async void ResetLift()
- {
- if (_doResetHeater.Value == true)
- {
- _doResetHeater.Value = false;
- await Task.Delay(200);
- }
- _doResetHeater.Value = true;
- await Task.Delay(1000);
- _doResetHeater.Value = true;
- if (_doResetLift.Value == true)
- {
- _doResetLift.Value = false;
- await Task.Delay(200);
- }
- _doResetLift.Value = true;
- await Task.Delay(1000);
- _doResetLift.Value = false;
- _clearAlarmCounter = 0;
- while (IsDriverAlarm || IsPosiModuleAlarm)
- {
- _clearAlarmCounter += 1;
- if (_clearAlarmCounter > 5)
- {
- LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Clear Alarm Failed");
- return;
- }
- else
- {
- LOG.Write(eEvent.INFO_PM, Module, $"{Name} Clearing Alarm,Please wait");
- }
- await Task.Delay(1000);
- }
- GotoPosition(HighTemperatureHeaterPosition.Origin);
- }
- public async void ResetHeater()
- {
- if (_diMhtrErrorHeatStop.Value)
- {
- if (_doMhtrErrorReset.Value == true)
- {
- _doMhtrErrorReset.Value = false;
- await Task.Delay(200);
- }
- _doMhtrErrorReset.Value = true;
- LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} Reset Heater");
- }
- }
- private void UpdateAutoRatio()
- {
- try
- {
- RangeIndex = -1;
- var ratioValueString = SC.GetStringValue($"{Module}.HighTemperatureHeater.AutoRatioValue");
- _ratioValues = SerializeHelper.Instance.JsonStringToObject<List<RatioValue>>(ratioValueString);
- }
- catch
- {
- }
- }
- //private string FloatToHex(float value)
- //{
- // byte[] bytes = BitConverter.GetBytes(value);
- // StringBuilder stringBuffer = new StringBuilder();
- // for (int i = 0; i < bytes.Length; i++)
- // {
- // string hex = Convert.ToString(bytes[i], 2);
- // stringBuffer.Insert(0, hex);
- // for (int j = hex.Length; j < 8; j++)
- // {
- // stringBuffer.Insert(0, "0");
- // }
- // }
- // return stringBuffer.ToString();
- //}
- public void Reset()
- {
- }
- }
- }
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