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- using System;
- using System.Collections.Generic;
- using System.IO;
- using Aitex.Core.Common;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.SCCore;
- using Aitex.RT.Device.Custom;
- using MECF.Framework.Common.Equipment;
- using Venus_RT.Modules;
- using Venus_RT.Devices;
- using Venus_RT.Devices.EPD;
- using Venus_Core;
- using Aitex.Common.Util;
- using System.Reflection;
- using Venus_RT.Devices.AdLinkEthercat;
- using System.Windows;
- using Aitex.Core.RT.Log;
- using Venus_RT.Devices.TM;
- namespace Venus_RT.Instances
- {
- public class DeviceEntity : DeviceEntityT<DeviceManager>
- {
- public DeviceEntity()
- {
- }
- }
- public class DeviceManager : DeviceManagerBase
- {
- private string device_model_file;
- private readonly string device_model_file_MF;
- private readonly string device_model_file_SEMF;
- private readonly string device_model_file_DEMF;
- Int32 v_board_id = -1;
- Int32 v_StartAxisID = 0;
- Int32 BUS_No = 0;
- private bool startEthercatOK;
- public DeviceManager()
- {
- device_model_file_MF = Path.Combine(AppDomain.CurrentDomain.BaseDirectory, "Config\\", "TM", RtInstance.DeviceModelFileName_MF);
- device_model_file_SEMF = Path.Combine(AppDomain.CurrentDomain.BaseDirectory, "Config\\", "TM", RtInstance.DeviceModelFileName_SE);
- device_model_file_DEMF = Path.Combine(AppDomain.CurrentDomain.BaseDirectory, "Config\\", "TM", RtInstance.DeviceModelFileName_DE);
- }
- public bool InitEthercat()
- {
- Int32 boardID_InBits = 0;
- Int32 mode = 0;
- Int32 ret = 0;
- Int32 card_name = 0;
- Int32 tamp = 0;
- Int32 StartAxisID = 0;
- Int32 TotalAxisNum = 0;
- // Card(Board) initial
- ret = APS168.APS_initial(ref boardID_InBits, mode);
- if (ret == 0)
- {
- for (int i = 0; i < 16; i++)
- {
- tamp = (boardID_InBits >> i) & 1;
- if (tamp == 1)
- {
- ret = APS168.APS_get_card_name(i, ref card_name);
- if ((card_name >= (Int32)APS_Define.DEVICE_NAME_EM_2P00)
- && (card_name <= (Int32)APS_Define.DEVICE_NAME_EM_FA00))
- {
- ret = APS168.APS_get_first_axisId(i, ref StartAxisID, ref TotalAxisNum);
- //v_card_name = card_name;
- v_board_id = i;
- v_StartAxisID = StartAxisID;
- LOG.Write(eEvent.EV_DEVICE_INFO, ModuleName.System, "Ethercat Initial Success!");
- break;
- }
- }
- }
- if (v_board_id == -1)
- {
- LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.System, $"Ethercat Board Id search Fail!");
- }
- else
- {
- LOG.Write(eEvent.EV_DEVICE_INFO, ModuleName.System, "Ethercat Board Id search Success!");
- return true;
- }
- }
- else
- {
- LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.System, $"Ethercat Initial Fail!");
- }
- return false;
- }
- public bool StarteEthercat()
- {
- Int32 ret = 0;
- Int32 Board_ID = v_board_id;
- ret = APS168.APS_start_field_bus(Board_ID, BUS_No, v_StartAxisID);
- if (ret != 0)
- {
- LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.System, $"Ethercat Start field bus Fail");
- return false;
- }
- else
- {
- LOG.Write(eEvent.EV_DEVICE_INFO, ModuleName.System, $"Ethercat Start field bus Success");
- return true;
- }
- }
- public override bool Initialize()
- {
- if (SC.GetValue<bool>("System.IsEnableEthercat"))
- {
- if (InitEthercat())
- {
- if (StarteEthercat())
- {
- startEthercatOK = true;
- }
- }
- }
- if (ModuleHelper.IsInstalled(ModuleName.PMA))
- {
- JetChamber jetChamber = (JetChamber)SC.GetValue<int>("PMA.ChamberType");
- InitPM(ModuleName.PMA, jetChamber);
- }
- if (ModuleHelper.IsInstalled(ModuleName.PMB))
- {
- JetChamber jetChamber = (JetChamber)SC.GetValue<int>("PMB.ChamberType");
- InitPM(ModuleName.PMB, jetChamber);
- }
- if (ModuleHelper.IsInstalled(ModuleName.PMC))
- {
- JetChamber jetChamber = (JetChamber)SC.GetValue<int>("PMC.ChamberType");
- InitPM(ModuleName.PMC, jetChamber);
- }
- if (ModuleHelper.IsInstalled(ModuleName.PMD))
- {
- JetChamber jetChamber = (JetChamber)SC.GetValue<int>("PMD.ChamberType");
- InitPM(ModuleName.PMD, jetChamber);
- }
- if (ModuleHelper.IsInstalled(ModuleName.TM))
- {
- if (RtInstance.ConfigType == ConfigType.Kepler2200 || RtInstance.ConfigType == ConfigType.Kepler2300)
- InitTM(ModuleName.TM);
- //if (RtInstance.ConfigType == ConfigType.VenusSE)
- //{
- // InitSETM(ModuleName.TM);
- //}
- //if (RtInstance.ConfigType == ConfigType.VenusDE)
- //{
- // InitDETM(ModuleName.TM);
- //}
- }
- if (RtInstance.ConfigType != ConfigType.VenusDE && RtInstance.ConfigType != ConfigType.VenusSE)
- AddCustomModuleDevice(new KeplerSignalTower("System", "SignalTower"));
- OP.Subscribe("DeviceOperation", this.Invoke);
- return true;
- }
- private void InitPM(ModuleName mod, JetChamber jetChamber)
- {
- device_model_file = PathManager.GetCfgDir() + "PM" + "\\" + jetChamber.ToString() + "\\" + $"{jetChamber.ToString()}DeviceModel.xml";
- Initialize(device_model_file, jetChamber.ToString(), mod, mod.ToString());
- switch (jetChamber)
- {
- case JetChamber.Kepler2300:
- AddAdixenTurboPump(mod);
- AddEPD(mod);
- AddPendulumValve(mod);
- AddChiller(ChillerType.InnerChiller, mod);
- AddChiller(ChillerType.OuterChiller, mod);
- AddChiller(ChillerType.TopChiller, mod);
- AddMatch(mod);
- AddBiasMatch(mod);
- AddRF(mod);
- AddBiasRF(mod);
- AddDryPump(mod);
- AddCustomDevice(new JetKepler2300PM(mod));
- break;
- case JetChamber.Kepler2200A:
- AddAdixenTurboPump(mod);
- AddPendulumValve(mod, PressureType.Pa);
- AddMatch(mod);
- AddRF(mod);
- AddDryPump(mod);
- AddCustomDevice(new JetKepler2200APM(mod));
- break;
- case JetChamber.Kepler2200B:
- AddAdixenTurboPump(mod);
- AddPendulumValve(mod, PressureType.Pa);
- AddMatch(mod);
- AddRF(mod);
- AddDryPump(mod);
- AddRFBox(mod);
- AddCustomDevice(new JetKepler2200BPM(mod));
- break;
- }
- }
- private void AddEPD(ModuleName mod)
- {
- if (SC.GetValue<bool>($"{mod}.EPD.IsEnabled") == true)
- {
- if (SC.GetValue<int>($"{mod}.EPD.EPDType") == 0)
- {
- AddCustomModuleDevice(new EPDClient(mod));
- }
- else
- {
- AddCustomModuleDevice(new EPDDevice(mod));
- }
- }
- }
- private void AddAdixenTurboPump(ModuleName mod)
- {
- AddCustomModuleDevice(new AdixenTurboPump(mod));
- }
- private void AddPendulumValve(ModuleName mod, PressureType pressureType = PressureType.mTorr)
- {
- AddCustomModuleDevice(new PendulumValve(mod, pressureType));
- }
- private void AddChiller(ChillerType chillerType, ModuleName mod)
- {
- if (SC.GetValue<bool>($"{mod}.{chillerType}.EnableChiller") &&
- SC.GetValue<int>($"{mod}.{chillerType}.CommunicationType") == (int)CommunicationType.RS232)
- {
- if (SC.GetValue<int>($"{mod}.{chillerType}.MFG") == (int)ChillerMFG.SMC)
- {
- AddCustomModuleDevice(new SMCChiller(mod, chillerType.ToString()));
- }
- else if (SC.GetValue<int>($"{mod}.{chillerType}.MFG") == (int)ChillerMFG.AIRSYS)
- {
- AddCustomModuleDevice(new AIRSYSChiller(mod, chillerType.ToString()));
- }
- }
- else if (SC.GetValue<bool>($"{mod}.{chillerType}.EnableChiller") &&
- SC.GetValue<int>($"{mod}.{chillerType}.CommunicationType") == (int)CommunicationType.RS485 &&
- SC.GetValue<bool>($"{mod}.{chillerType}.ShareCOM"))
- {
- if (SC.GetValue<int>($"{mod}.{chillerType}.MFG") == (int)ChillerMFG.SMC)
- {
- AddCustomModuleDevice(new SMCShareChiller(mod, chillerType.ToString()));
- }
- //else if (SC.GetValue<int>($"{mod}.{chillerType}.MFG") == (int)ChillerMFG.AIRSYS)
- //{
- // AddCustomModuleDevice(new AIRSYSChiller(mod, chillerType.ToString()));
- //}
- }
- }
- private void AddMatch(ModuleName mod)
- {
- if (SC.GetValue<bool>($"{mod}.Match.EnableMatch") &&
- SC.GetValue<int>($"{mod}.Match.CommunicationType") == (int)CommunicationType.RS232 &&
- SC.GetValue<int>($"{mod}.Match.MFG") == (int)MatchMFG.AdTec)
- {
- AddCustomModuleDevice(new AdTecMatch(mod, Venus_Core.VenusDevice.Match));
- }
- else if (SC.GetValue<bool>($"{mod}.Match.EnableMatch") &&
- SC.GetValue<int>($"{mod}.Match.CommunicationType") == (int)CommunicationType.RS232 &&
- SC.GetValue<int>($"{mod}.Match.MFG") == (int)MatchMFG.Revtech)
- {
- AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.Match, MatchCommunicationType.RS232));
- }
- else if (SC.GetValue<bool>($"{mod}.Match.EnableMatch") &&
- SC.GetValue<int>($"{mod}.Match.CommunicationType") == (int)CommunicationType.Ethernet &&
- SC.GetValue<int>($"{mod}.Match.MFG") == (int)MatchMFG.Revtech)
- {
- AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.Match, MatchCommunicationType.Ethernet));
- }
- }
- private void AddRFBox(ModuleName mod)
- {
- if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
- SC.GetValue<int>($"{mod}.RFBox.CommunicationType") == (int)CommunicationType.RS232 &&
- SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.AdTec)
- {
- AddCustomModuleDevice(new AdTecMatch(mod, Venus_Core.VenusDevice.RFBox));
- }
- else if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
- SC.GetValue<int>($"{mod}.RFBox.CommunicationType") == (int)CommunicationType.RS232 &&
- SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.Revtech)
- {
- AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.RFBox, MatchCommunicationType.RS232));
- }
- else if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
- SC.GetValue<int>($"{mod}.RFBox.CommunicationType") == (int)CommunicationType.Ethernet &&
- SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.Revtech)
- {
- AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.RFBox, MatchCommunicationType.Ethernet));
- }
- else if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
- SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.Lz_Ethercat && startEthercatOK)
- {
- AddCustomModuleDevice(new LzMatch_Ethercat(mod, Venus_Core.VenusDevice.RFBox, v_board_id));
- }
- }
- private void AddBiasMatch(ModuleName mod)
- {
- if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
- SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232 &&
- SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.AdTec)
- {
- AddCustomModuleDevice(new AdTecMatch(mod, Venus_Core.VenusDevice.BiasMatch));
- }
- else if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
- SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232 &&
- SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.Revtech)
- {
- AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.BiasMatch, MatchCommunicationType.RS232));
- }
- else if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
- SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.Ethernet &&
- SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.Revtech)
- {
- AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.BiasMatch, MatchCommunicationType.Ethernet));
- }
- else if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
- SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.Lz_Ethercat && startEthercatOK)
- {
- AddCustomModuleDevice(new LzMatch_Ethercat(mod, Venus_Core.VenusDevice.BiasMatch, v_board_id));
- }
- else if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
- SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232 &&
- SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.Tru)
- {
- AddCustomModuleDevice(new TruPlasmaMatch(mod, Venus_Core.VenusDevice.BiasMatch));
- }
- }
- private void AddRF(ModuleName mod)
- {
- if (SC.GetValue<int>($"{mod}.Rf.CommunicationType") == (int)CommunicationType.RS232 &&
- SC.GetValue<int>($"{mod}.Rf.MFG") == (int)GeneratorMFG.AdTec)
- {
- AddCustomModuleDevice(new AdTecGenerator(mod, Venus_Core.VenusDevice.Rf));
- }
- }
- private void AddBiasRF(ModuleName mod)
- {
- if (SC.GetValue<bool>($"{mod}.BiasRf.EnableBiasRF"))
- {
- if (SC.GetValue<int>($"{mod}.BiasRf.CommunicationType") == (int)CommunicationType.Ethernet &&
- SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.Comet)
- {
- AddCustomModuleDevice(new CometRF(mod, SC.GetStringValue($"{mod}.BiasRf.IPAddress")));
- }
- else if (SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.AdTec)
- {
- AddCustomModuleDevice(new AdTecGenerator(mod, Venus_Core.VenusDevice.BiasRf));
- }
- else if (SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.Truplasma)
- {
- AddCustomModuleDevice(new TruPlasmaRF(mod, Venus_Core.VenusDevice.BiasRf));
- }
- else if (SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.Truplasma_Ethercat && startEthercatOK)
- {
- AddCustomModuleDevice(new TruPlasmaRF_Ethercat(mod, Venus_Core.VenusDevice.BiasRf, v_board_id));
- }
- }
- }
- private void AddDryPump(ModuleName mod)
- {
- if (SC.GetValue<int>($"{mod}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
- {
- if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.SKY)
- {
- AddCustomModuleDevice(new SkyPump(mod));
- }
- else if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.Edwards)
- {
- AddCustomModuleDevice(new EdwardsPump(mod));
- }
- }
- }
- private void AddEscHighVoltage(ModuleName mod)
- {
- AddCustomModuleDevice(new ESC5HighVoltage(mod));
- }
- private void InitTM(ModuleName mod)
- {
- Initialize(device_model_file_MF, mod.ToString(), mod, mod.ToString());
- if (SC.GetValue<int>($"LLA.DryPump.CommunicationType") == (int)CommunicationType.RS232)
- {
- if (SC.GetValue<int>($"LLA.DryPump.MFG") == (int)DryPumpMFG.SKY)
- {
- AddCustomModuleDevice(new SkyPump(ModuleName.LLA));
- }
- else if (SC.GetValue<int>($"LLA.DryPump.MFG") == (int)DryPumpMFG.Edwards)
- {
- AddCustomModuleDevice(new EdwardsPump(ModuleName.LLA));
- }
- }
- if (SC.GetValue<int>($"LLB.DryPump.CommunicationType") == (int)CommunicationType.RS232)
- {
- if (SC.GetValue<int>($"LLB.DryPump.MFG") == (int)DryPumpMFG.SKY)
- {
- AddCustomModuleDevice(new SkyPump(ModuleName.LLB));
- }
- else if (SC.GetValue<int>($"LLB.DryPump.MFG") == (int)DryPumpMFG.Edwards)
- {
- AddCustomModuleDevice(new EdwardsPump(ModuleName.LLB));
- }
- }
- if (SC.GetValue<int>($"{mod}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
- {
- if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.SKY)
- {
- AddCustomModuleDevice(new SkyPump(mod));
- }
- else if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.Edwards)
- {
- AddCustomModuleDevice(new EdwardsPump(mod));
- }
- }
- //AddCustomModuleDevice(new SkyPump(mod));
- //AddCustomModuleDevice(new SkyPump(ModuleName.LLA));
- AddCustomDevice(new JetTM());
- }
- //private void InitSETM(ModuleName mod)
- //{
- // Initialize(device_model_file_SEMF, mod.ToString(), mod, mod.ToString());
- // if (SC.GetValue<int>($"{mod}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
- // {
- // if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.SKY)
- // {
- // AddCustomModuleDevice(new SkyPump(mod));
- // }
- // else if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.Edwards)
- // {
- // AddCustomModuleDevice(new EdwardsPump(mod));
- // }
- // }
- // AddCustomDevice(new HongHuTM());
- //}
- //private void InitDETM(ModuleName mod)
- //{
- // Initialize(device_model_file_DEMF, mod.ToString(), mod, mod.ToString());
- // if (SC.GetValue<int>($"{mod}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
- // {
- // if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.SKY)
- // {
- // AddCustomModuleDevice(new SkyPump(mod));
- // }
- // else if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.Edwards)
- // {
- // AddCustomModuleDevice(new EdwardsPump(mod));
- // }
- // }
- // if (SC.GetValue<int>($"VCEA.DryPump.CommunicationType") == (int)CommunicationType.RS232)
- // {
- // if (SC.GetValue<int>($"VCEA.DryPump.MFG") == (int)DryPumpMFG.SKY)
- // {
- // AddCustomModuleDevice(new SkyPump(ModuleName.VCEA));
- // }
- // else if (SC.GetValue<int>($"VCEA.DryPump.MFG") == (int)DryPumpMFG.Edwards)
- // {
- // AddCustomModuleDevice(new EdwardsPump(ModuleName.VCEA));
- // }
- // }
- // AddCustomDevice(new HongHuDETM());
- //}
- private WaferSize MapWaferSize(int value)
- {
- switch (value)
- {
- case 3: return WaferSize.WS3;
- case 4: return WaferSize.WS4;
- case 6: return WaferSize.WS6;
- case 8: return WaferSize.WS8;
- }
- return WaferSize.WS0;
- }
- private bool Invoke(string arg1, object[] args)
- {
- string name = (string)args[0];
- string func = (string)args[1];
- object[] param = new object[args.Length - 2];
- for (int i = 2; i < args.Length; i++)
- param[i - 2] = args[i].ToString();
- DEVICE.Do(string.Format("{0}.{1}", name, func), 0, true, param);
- return true;
- }
- public void RTExitPMEvent()
- {
- if (ModuleHelper.IsInstalled(ModuleName.PMA))
- {
- DEVICE.GetDevice<JetPMBase>("PMA")?.RTCloseEvent();
- }
- if (ModuleHelper.IsInstalled(ModuleName.PMB))
- {
- DEVICE.GetDevice<JetPMBase>("PMB")?.RTCloseEvent();
- }
- if (ModuleHelper.IsInstalled(ModuleName.PMC))
- {
- DEVICE.GetDevice<JetPMBase>("PMC")?.RTCloseEvent();
- }
- if (ModuleHelper.IsInstalled(ModuleName.PMD))
- {
- DEVICE.GetDevice<JetPMBase>("PMD")?.RTCloseEvent();
- }
- }
- public bool CheckPMDisconnetCondition(out string reason)
- {
- if (ModuleHelper.IsInstalled(ModuleName.PMA) && DEVICE.GetDevice<JetPMBase>("PMA")?.IsPenVOpen == true)
- {
- reason = "PMA VAT is open";
- return false;
- }
- if (ModuleHelper.IsInstalled(ModuleName.PMB) && DEVICE.GetDevice<JetPMBase>("PMB")?.IsPenVOpen == true)
- {
- reason = "PMB VAT is open";
- return false;
- }
- if (ModuleHelper.IsInstalled(ModuleName.PMC) && DEVICE.GetDevice<JetPMBase>("PMC")?.IsPenVOpen == true)
- {
- reason = "PMC VAT is open";
- return false;
- }
- if (ModuleHelper.IsInstalled(ModuleName.PMD) && DEVICE.GetDevice<JetPMBase>("PMD")?.IsPenVOpen == true)
- {
- reason = "PMD VAT is open";
- return false;
- }
- reason = "ALL is close";
- return true;
- }
- }
- }
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