KeplerGasLeakCheckViewModel.cs 46 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using Aitex.Core.RT.Log;
  3. using MECF.Framework.Common.CommonData.DeviceData;
  4. using MECF.Framework.Common.DataCenter;
  5. using MECF.Framework.Common.OperationCenter;
  6. using OpenSEMI.ClientBase;
  7. using Prism.Commands;
  8. using Prism.Mvvm;
  9. using System;
  10. using System.Collections.Generic;
  11. using System.Collections.ObjectModel;
  12. using System.Diagnostics;
  13. using System.Linq;
  14. using System.Text;
  15. using System.Threading.Tasks;
  16. using System.Windows;
  17. using System.Windows.Threading;
  18. using Venus_Core;
  19. using Venus_MainPages.Unity;
  20. using Venus_MainPages.Views;
  21. using Venus_Themes.CustomControls;
  22. using Venus_Themes.UserControls;
  23. namespace Venus_MainPages.ViewModels
  24. {
  25. internal class KeplerGasLeakCheckViewModel : BindableBase
  26. {
  27. #region 私有字段
  28. private List<string> m_LeakCheckMode;
  29. private int m_LeakCheckModeSelectedIndex;
  30. private int m_VentTime;
  31. private int m_CheckTime;
  32. private double m_LeakRateUpperLimit;
  33. private int m_BasePressure;
  34. private bool[] m_GasIsCheck = new bool[12];
  35. private bool[] m_PurgeGasIsCheck = new bool[12];
  36. private int GasIndex = 9;
  37. public string m_ModuleName;
  38. private bool m_GasIsFlowing;
  39. private bool m_IsAutoMode;
  40. private AITMfcData m_MFC1Data;
  41. private AITMfcData m_MFC2Data;
  42. private AITMfcData m_MFC3Data;
  43. private AITMfcData m_MFC4Data;
  44. private AITMfcData m_MFC5Data;
  45. private AITMfcData m_MFC6Data;
  46. private AITMfcData m_MFC7Data;
  47. private AITMfcData m_MFC8Data;
  48. private AITMfcData m_MFCN2Data;
  49. private PMState m_PMCurrentState;
  50. private ObservableCollection<PMLeakCheckResult> m_LeakCheckResultList = new ObservableCollection<PMLeakCheckResult>();
  51. private bool m_MFC1IsEnable;
  52. private bool m_MFC2IsEnable;
  53. private bool m_MFC3IsEnable;
  54. private bool m_MFC4IsEnable;
  55. private bool m_MFC5IsEnable;
  56. private bool m_MFC6IsEnable;
  57. private bool m_MFC7IsEnable;
  58. private bool m_MFC8IsEnable;
  59. private JetChamber m_JetChamber;
  60. private WaferInfo m_PMWafer;
  61. private bool m_IsHasWafer;
  62. #region 阀
  63. private bool m_O2ValveIsOpen;
  64. private bool m_PVN21ValveIsOpen;
  65. private bool m_PVN22ValveIsOpen;
  66. private bool m_N2ValveIsOpen;
  67. private bool m_PV11ValveIsOpen;
  68. private bool m_PV12ValveIsOpen;
  69. private bool m_PV21ValveIsOpen;
  70. private bool m_PV22ValveIsOpen;
  71. private bool m_PV31ValveIsOpen;
  72. private bool m_PV32ValveIsOpen;
  73. private bool m_PV41ValveIsOpen;
  74. private bool m_PV42ValveIsOpen;
  75. private bool m_MFC1ValveIsOpen;
  76. private bool m_MFC2ValveIsOpen;
  77. private bool m_MFC3ValveIsOpen;
  78. private bool m_MFC4ValveIsOpen;
  79. private bool m_MFC5ValveIsOpen;
  80. private bool m_MFC6ValveIsOpen;
  81. private bool m_MFC7ValveIsOpen;
  82. private bool m_MFC8ValveIsOpen;
  83. private bool m_GasFinalValveIsOpen;
  84. private bool m_SoftPumpValveIsOpen;
  85. private bool m_FastPumpValveIsOpen;
  86. private bool m_TurboPumpPumpingValveIsOpen;
  87. private bool m_TurboPumpPurgeValveIsOpen;
  88. private bool m_GuageValveIsOpen;
  89. private bool m_PenningGaugeValveIsOpen;
  90. private double m_MFC1SetPoint;
  91. private double m_MFC2SetPoint;
  92. private double m_MFC3SetPoint;
  93. private double m_MFC4SetPoint;
  94. private double m_MFC5SetPoint;
  95. private double m_MFC6SetPoint;
  96. private double m_MFC7SetPoint;
  97. private double m_MFC8SetPoint;
  98. private bool m_PendulumValveIsOpen;
  99. private bool m_PurgeValveIsOpen;
  100. private bool m_N2Purge1ValveIsOpen;
  101. private bool m_N2Purge2ValveIsOpen;
  102. private int m_TurboPumpRotationalSpeed;
  103. #endregion
  104. private List<string> m_RtDataKeys = new List<string>();
  105. private Dictionary<string, object> m_RtDataValues = new Dictionary<string, object>();
  106. private string m_currentStep;
  107. public TimeSpan? m_stepTime;
  108. //private int stepTimeCountValue;
  109. private Stopwatch stopwatch = new Stopwatch();
  110. private PressureType m_PressureType;
  111. private bool m_firstLoadFlag = true;
  112. private float m_PenningPressure;
  113. private bool m_PumpIsOpen;
  114. private bool m_TurboIsOpen;
  115. private bool m_IsATM;
  116. private bool m_IsVAC;
  117. private AITPendulumValveData m_PendulumValveData;
  118. private float m_ChamberPressure;
  119. private float m_ProcessPressure;
  120. private float m_ForelinePressurePressure;
  121. private AITHighTemperatureHeaterData m_HighTemperatureHeaterData;
  122. ButterflyValveView butterflyValveMessageBox;
  123. private DispatcherTimer timer;
  124. private bool m_IsSlitDoorClosed = true;
  125. private bool m_IsLidClosed = true;
  126. #endregion
  127. #region 属性
  128. public bool IsAutoMode
  129. {
  130. get { return m_IsAutoMode; }
  131. set { SetProperty(ref m_IsAutoMode, value); }
  132. }
  133. public ObservableCollection<PMLeakCheckResult> LeakCheckResultList
  134. {
  135. get { return m_LeakCheckResultList; }
  136. set { SetProperty(ref m_LeakCheckResultList, value); }
  137. }
  138. public List<string> LeakCheckMode
  139. {
  140. get { return m_LeakCheckMode; }
  141. set { SetProperty(ref m_LeakCheckMode, value); }
  142. }
  143. public int LeakCheckModeSelectedIndex
  144. {
  145. get { return m_LeakCheckModeSelectedIndex; }
  146. set { SetProperty(ref m_LeakCheckModeSelectedIndex, value); }
  147. }
  148. public int VentTime
  149. {
  150. get { return m_VentTime; }
  151. set { SetProperty(ref m_VentTime, value); }
  152. }
  153. public int CheckTime
  154. {
  155. get { return m_CheckTime; }
  156. set { SetProperty(ref m_CheckTime, value); }
  157. }
  158. public int BasePressure
  159. {
  160. get { return m_BasePressure; }
  161. set { SetProperty(ref m_BasePressure, value); }
  162. }
  163. public double LeakRateUpperLimit
  164. {
  165. get { return m_LeakRateUpperLimit; }
  166. set { SetProperty(ref m_LeakRateUpperLimit, value); }
  167. }
  168. public bool[] GasIsCheck
  169. {
  170. get { return m_GasIsCheck; }
  171. set { SetProperty(ref m_GasIsCheck, value); }
  172. }
  173. public bool[] PurgeGasIsCheck
  174. {
  175. get { return m_PurgeGasIsCheck; }
  176. set { SetProperty(ref m_PurgeGasIsCheck, value); }
  177. }
  178. public AITMfcData MFC1Data
  179. {
  180. get { return m_MFC1Data; }
  181. set { SetProperty(ref m_MFC1Data, value); }
  182. }
  183. public AITMfcData MFC2Data
  184. {
  185. get { return m_MFC2Data; }
  186. set { SetProperty(ref m_MFC2Data, value); }
  187. }
  188. public AITMfcData MFC3Data
  189. {
  190. get { return m_MFC3Data; }
  191. set { SetProperty(ref m_MFC3Data, value); }
  192. }
  193. public AITMfcData MFC4Data
  194. {
  195. get { return m_MFC4Data; }
  196. set { SetProperty(ref m_MFC4Data, value); }
  197. }
  198. public AITMfcData MFC5Data
  199. {
  200. get { return m_MFC5Data; }
  201. set { SetProperty(ref m_MFC5Data, value); }
  202. }
  203. public AITMfcData MFC6Data
  204. {
  205. get { return m_MFC6Data; }
  206. set { SetProperty(ref m_MFC6Data, value); }
  207. }
  208. public AITMfcData MFC7Data
  209. {
  210. get { return m_MFC7Data; }
  211. set { SetProperty(ref m_MFC7Data, value); }
  212. }
  213. public AITMfcData MFC8Data
  214. {
  215. get { return m_MFC8Data; }
  216. set { SetProperty(ref m_MFC8Data, value); }
  217. }
  218. public AITMfcData MFCN2Data
  219. {
  220. get { return m_MFCN2Data; }
  221. set { SetProperty(ref m_MFCN2Data, value); }
  222. }
  223. public double MFC1SetPoint
  224. {
  225. get { return m_MFC1SetPoint; }
  226. set { SetProperty(ref m_MFC1SetPoint, value); }
  227. }
  228. public double MFC2SetPoint
  229. {
  230. get { return m_MFC2SetPoint; }
  231. set { SetProperty(ref m_MFC2SetPoint, value); }
  232. }
  233. public double MFC3SetPoint
  234. {
  235. get { return m_MFC3SetPoint; }
  236. set { SetProperty(ref m_MFC3SetPoint, value); }
  237. }
  238. public double MFC4SetPoint
  239. {
  240. get { return m_MFC4SetPoint; }
  241. set { SetProperty(ref m_MFC4SetPoint, value); }
  242. }
  243. public double MFC5SetPoint
  244. {
  245. get { return m_MFC5SetPoint; }
  246. set { SetProperty(ref m_MFC5SetPoint, value); }
  247. }
  248. public double MFC6SetPoint
  249. {
  250. get { return m_MFC6SetPoint; }
  251. set { SetProperty(ref m_MFC6SetPoint, value); }
  252. }
  253. public double MFC7SetPoint
  254. {
  255. get { return m_MFC7SetPoint; }
  256. set { SetProperty(ref m_MFC7SetPoint, value); }
  257. }
  258. public double MFC8SetPoint
  259. {
  260. get { return m_MFC8SetPoint; }
  261. set { SetProperty(ref m_MFC8SetPoint, value); }
  262. }
  263. public PMState PMCurrentState
  264. {
  265. get { return m_PMCurrentState; }
  266. set
  267. {
  268. if ((m_PMCurrentState == PMState.GasBoxLeakCheck || m_PMCurrentState == PMState.LeakCheck) && value == PMState.Idle)
  269. {
  270. var AllLeakCheckDa = QueryDataClient.Instance.Service.GetPMLeakCheckResultWithBasePressure(ModuleName);
  271. if (AllLeakCheckDa != null)
  272. {
  273. LeakCheckResultList = new ObservableCollection<PMLeakCheckResult>(AllLeakCheckDa);
  274. }
  275. }
  276. SetProperty(ref m_PMCurrentState, value);
  277. }
  278. }
  279. public string CurrentStep
  280. {
  281. get { return m_currentStep; }
  282. set
  283. {
  284. if (value != m_currentStep)
  285. {
  286. //stepTimeCountValue = 0;
  287. stopwatch.Restart();
  288. }
  289. SetProperty(ref m_currentStep, value);
  290. }
  291. }
  292. public TimeSpan? StepTime
  293. {
  294. get { return m_stepTime; }
  295. set
  296. {
  297. SetProperty(ref m_stepTime, value);
  298. }
  299. }
  300. public JetChamber ChamberType
  301. {
  302. get { return m_JetChamber; }
  303. set
  304. {
  305. SetProperty(ref m_JetChamber, value);
  306. }
  307. }
  308. #region 阀
  309. public bool GasFinalValveIsOpen
  310. {
  311. get { return m_GasFinalValveIsOpen; }
  312. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  313. }
  314. public bool PVN21ValveIsOpen
  315. {
  316. get { return m_PVN21ValveIsOpen; }
  317. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  318. }
  319. public bool PVN22ValveIsOpen
  320. {
  321. get { return m_PVN22ValveIsOpen; }
  322. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  323. }
  324. public bool N2ValveIsOpen
  325. {
  326. get { return m_N2ValveIsOpen; }
  327. set { SetProperty(ref m_N2ValveIsOpen, value); }
  328. }
  329. public bool PV11ValveIsOpen
  330. {
  331. get { return m_PV11ValveIsOpen; }
  332. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  333. }
  334. public bool PV12ValveIsOpen
  335. {
  336. get { return m_PV12ValveIsOpen; }
  337. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  338. }
  339. public bool MFC1ValveIsOpen
  340. {
  341. get { return m_MFC1ValveIsOpen; }
  342. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  343. }
  344. public bool PV21ValveIsOpen
  345. {
  346. get { return m_PV21ValveIsOpen; }
  347. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  348. }
  349. public bool PV22ValveIsOpen
  350. {
  351. get { return m_PV22ValveIsOpen; }
  352. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  353. }
  354. public bool MFC2ValveIsOpen
  355. {
  356. get { return m_MFC2ValveIsOpen; }
  357. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  358. }
  359. public bool PV31ValveIsOpen
  360. {
  361. get { return m_PV31ValveIsOpen; }
  362. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  363. }
  364. public bool PV32ValveIsOpen
  365. {
  366. get { return m_PV32ValveIsOpen; }
  367. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  368. }
  369. public bool MFC3ValveIsOpen
  370. {
  371. get { return m_MFC3ValveIsOpen; }
  372. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  373. }
  374. public bool PV41ValveIsOpen
  375. {
  376. get { return m_PV41ValveIsOpen; }
  377. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  378. }
  379. public bool PV42ValveIsOpen
  380. {
  381. get { return m_PV42ValveIsOpen; }
  382. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  383. }
  384. public bool MFC4ValveIsOpen
  385. {
  386. get { return m_MFC4ValveIsOpen; }
  387. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  388. }
  389. public bool MFC5ValveIsOpen
  390. {
  391. get { return m_MFC5ValveIsOpen; }
  392. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  393. }
  394. public bool MFC6ValveIsOpen
  395. {
  396. get { return m_MFC6ValveIsOpen; }
  397. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  398. }
  399. public bool MFC7ValveIsOpen
  400. {
  401. get { return m_MFC7ValveIsOpen; }
  402. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  403. }
  404. public bool MFC8ValveIsOpen
  405. {
  406. get { return m_MFC8ValveIsOpen; }
  407. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  408. }
  409. public bool TurboPumpPumpingValveIsOpen
  410. {
  411. get { return m_TurboPumpPumpingValveIsOpen; }
  412. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  413. }
  414. public bool TurboPumpPurgeValveIsOpen
  415. {
  416. get { return m_TurboPumpPurgeValveIsOpen; }
  417. set
  418. {
  419. if (value != m_TurboPumpPurgeValveIsOpen)
  420. {
  421. if (value == true)
  422. {
  423. var setpoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  424. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", setpoint);
  425. }
  426. else
  427. {
  428. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  429. }
  430. }
  431. SetProperty(ref m_TurboPumpPurgeValveIsOpen, value);
  432. }
  433. }
  434. public bool SoftPumpValveIsOpen
  435. {
  436. get { return m_SoftPumpValveIsOpen; }
  437. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  438. }
  439. public bool FastPumpValveIsOpen
  440. {
  441. get { return m_FastPumpValveIsOpen; }
  442. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  443. }
  444. public bool GuageValveIsOpen
  445. {
  446. get { return m_GuageValveIsOpen; }
  447. set { SetProperty(ref m_GuageValveIsOpen, value); }
  448. }
  449. public Dictionary<string, object> RtDataValues
  450. {
  451. get { return m_RtDataValues; }
  452. set { SetProperty(ref m_RtDataValues, value); }
  453. }
  454. public bool GasIsFlowing
  455. {
  456. get { return m_GasIsFlowing; }
  457. set { SetProperty(ref m_GasIsFlowing, value); }
  458. }
  459. #endregion
  460. public bool MFC1IsEnable
  461. {
  462. get { return m_MFC1IsEnable; }
  463. set { SetProperty(ref m_MFC1IsEnable, value); }
  464. }
  465. public bool MFC2IsEnable
  466. {
  467. get { return m_MFC2IsEnable; }
  468. set { SetProperty(ref m_MFC2IsEnable, value); }
  469. }
  470. public bool MFC3IsEnable
  471. {
  472. get { return m_MFC3IsEnable; }
  473. set { SetProperty(ref m_MFC3IsEnable, value); }
  474. }
  475. public bool MFC4IsEnable
  476. {
  477. get { return m_MFC4IsEnable; }
  478. set { SetProperty(ref m_MFC4IsEnable, value); }
  479. }
  480. public bool MFC5IsEnable
  481. {
  482. get { return m_MFC5IsEnable; }
  483. set { SetProperty(ref m_MFC5IsEnable, value); }
  484. }
  485. public bool MFC6IsEnable
  486. {
  487. get { return m_MFC6IsEnable; }
  488. set { SetProperty(ref m_MFC6IsEnable, value); }
  489. }
  490. public bool MFC7IsEnable
  491. {
  492. get { return m_MFC7IsEnable; }
  493. set { SetProperty(ref m_MFC7IsEnable, value); }
  494. }
  495. public bool MFC8IsEnable
  496. {
  497. get { return m_MFC8IsEnable; }
  498. set { SetProperty(ref m_MFC8IsEnable, value); }
  499. }
  500. public bool O2ValveIsOpen
  501. {
  502. get { return m_O2ValveIsOpen; }
  503. set { SetProperty(ref m_O2ValveIsOpen, value); }
  504. }
  505. //private bool m_GasIs8;
  506. //private bool m_GasIs12;
  507. //public bool GasIs8
  508. //{
  509. // get { return m_GasIs8; }
  510. // set { SetProperty(ref m_GasIs8, value); }
  511. //}
  512. //public bool GasIs12
  513. //{
  514. // get { return m_GasIs12; }
  515. // set { SetProperty(ref m_GasIs12, value); }
  516. //}
  517. public PressureType PressureType
  518. {
  519. get { return m_PressureType; }
  520. set { SetProperty(ref m_PressureType, value); }
  521. }
  522. public bool N2Purge1ValveIsOpen
  523. {
  524. get { return m_N2Purge1ValveIsOpen; }
  525. set { SetProperty(ref m_N2Purge1ValveIsOpen, value); }
  526. }
  527. public bool N2Purge2ValveIsOpen
  528. {
  529. get { return m_N2Purge2ValveIsOpen; }
  530. set { SetProperty(ref m_N2Purge2ValveIsOpen, value); }
  531. }
  532. public bool PurgeValveIsOpen
  533. {
  534. get { return m_PurgeValveIsOpen; }
  535. set { SetProperty(ref m_PurgeValveIsOpen, value); }
  536. }
  537. public float PenningPressure
  538. {
  539. get { return m_PenningPressure; }
  540. set
  541. {
  542. SetProperty(ref m_PenningPressure, value);
  543. }
  544. }
  545. public bool IsATM
  546. {
  547. get { return m_IsATM; }
  548. set { SetProperty(ref m_IsATM, value); }
  549. }
  550. public bool IsVAC
  551. {
  552. get { return m_IsVAC; }
  553. set { SetProperty(ref m_IsVAC, value); }
  554. }
  555. public bool PumpIsOpen
  556. {
  557. get { return m_PumpIsOpen; }
  558. set { SetProperty(ref m_PumpIsOpen, value); }
  559. }
  560. public bool TurboIsOpen
  561. {
  562. get { return m_TurboIsOpen; }
  563. set { SetProperty(ref m_TurboIsOpen, value); }
  564. }
  565. public bool PenningGaugeValveIsOpen
  566. {
  567. get { return m_PenningGaugeValveIsOpen; }
  568. set { SetProperty(ref m_PenningGaugeValveIsOpen, value); }
  569. }
  570. public AITPendulumValveData PendulumValveData
  571. {
  572. get { return m_PendulumValveData; }
  573. set
  574. {
  575. SetProperty(ref m_PendulumValveData, value);
  576. }
  577. }
  578. public float ChamberPressure
  579. {
  580. get { return m_ChamberPressure; }
  581. set
  582. {
  583. SetProperty(ref m_ChamberPressure, value);
  584. }
  585. }
  586. public float ProcessPressure
  587. {
  588. get { return m_ProcessPressure; }
  589. set
  590. {
  591. SetProperty(ref m_ProcessPressure, value);
  592. }
  593. }
  594. public float ForelinePressure
  595. {
  596. get { return m_ForelinePressurePressure; }
  597. set
  598. {
  599. SetProperty(ref m_ForelinePressurePressure, value);
  600. }
  601. }
  602. public int TurboPumpRotationalSpeed
  603. {
  604. get { return m_TurboPumpRotationalSpeed; }
  605. set
  606. {
  607. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  608. }
  609. }
  610. public AITHighTemperatureHeaterData HighTemperatureHeaterData
  611. {
  612. get { return m_HighTemperatureHeaterData; }
  613. set { SetProperty(ref m_HighTemperatureHeaterData, value); }
  614. }
  615. public bool IsLidClosed
  616. {
  617. get { return m_IsLidClosed; }
  618. set
  619. {
  620. SetProperty(ref m_IsLidClosed, value);
  621. }
  622. }
  623. public bool IsSlitDoorClosed
  624. {
  625. get { return m_IsSlitDoorClosed; }
  626. set
  627. {
  628. SetProperty(ref m_IsSlitDoorClosed, value);
  629. }
  630. }
  631. public string ModuleName
  632. {
  633. get { return m_ModuleName; }
  634. set
  635. {
  636. SetProperty(ref m_ModuleName, value);
  637. }
  638. }
  639. public WaferInfo PMWafer
  640. {
  641. get { return m_PMWafer; }
  642. set { SetProperty(ref m_PMWafer, value); }
  643. }
  644. public bool IsHasWafer
  645. {
  646. get { return m_IsHasWafer; }
  647. set { SetProperty(ref m_IsHasWafer, value); }
  648. }
  649. #endregion
  650. #region 命令
  651. private DelegateCommand _CheckCommand;
  652. public DelegateCommand CheckCommand =>
  653. _CheckCommand ?? (_CheckCommand = new DelegateCommand(OnCheck));
  654. private DelegateCommand _AbortCommand;
  655. public DelegateCommand AbortCommand =>
  656. _AbortCommand ?? (_AbortCommand = new DelegateCommand(OnAbort));
  657. //private DelegateCommand _ExportCommand;
  658. //public DelegateCommand ExportCommand =>
  659. // _ExportCommand ?? (_ExportCommand = new DelegateCommand(OnExport));
  660. private DelegateCommand _LoadedCommand;
  661. public DelegateCommand LoadedCommand =>
  662. _LoadedCommand ?? (_LoadedCommand = new DelegateCommand(OnLoaded));
  663. private DelegateCommand<object> _ControlValveCommand;
  664. public DelegateCommand<object> ControlValveCommand =>
  665. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  666. private DelegateCommand<object> _Control12ValveCommand;
  667. public DelegateCommand<object> Control12ValveCommand =>
  668. _Control12ValveCommand ?? (_Control12ValveCommand = new DelegateCommand<object>(OnControl12Valve));
  669. private DelegateCommand _GasPurgeCommand;
  670. public DelegateCommand GasPurgeCommand =>
  671. _GasPurgeCommand ?? (_GasPurgeCommand = new DelegateCommand(OnGasPurge));
  672. private DelegateCommand _GasCommand;
  673. public DelegateCommand GasCommand =>
  674. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  675. private DelegateCommand _OpenButterflyValveViewCommand;
  676. public DelegateCommand OpenButterflyValveViewCommand =>
  677. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  678. private DelegateCommand _OpenPumpCommand;
  679. public DelegateCommand OpenPumpCommand =>
  680. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  681. private DelegateCommand _ClosePumpCommand;
  682. public DelegateCommand ClosePumpCommand =>
  683. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  684. private DelegateCommand _OpenTurboPumpCommand;
  685. public DelegateCommand OpenTurboPumpCommand =>
  686. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  687. private DelegateCommand _CloseTurboPumpCommand;
  688. public DelegateCommand CloseTurboPumpCommand =>
  689. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  690. private DelegateCommand _OpenPendulumValveCommand;
  691. public DelegateCommand OpenPendulumValveCommand =>
  692. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  693. private DelegateCommand _ClosePendulumValveCommand;
  694. public DelegateCommand ClosePendulumValveCommand =>
  695. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  696. #endregion
  697. #region 构造函数
  698. public KeplerGasLeakCheckViewModel()
  699. {
  700. m_LeakCheckMode = new List<string>() { "ChamberOnly", "ChamberAndGasLine", "ChamberAndGasLineAndFAC" };
  701. m_LeakCheckModeSelectedIndex = 0;
  702. m_VentTime = 120;
  703. m_CheckTime = 180;
  704. m_LeakRateUpperLimit = 10;
  705. BasePressure = 100;
  706. GasIndex = 9;
  707. addDataKeys();
  708. timer = new DispatcherTimer();
  709. timer.Interval = TimeSpan.FromSeconds(1);
  710. timer.Tick += timer_Tick;
  711. //timer.Start();
  712. }
  713. #endregion
  714. #region 命令方法
  715. private void OnCheck()
  716. {
  717. ChamberType = (JetChamber)Enum.Parse(typeof(JetChamber), QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.ChamberType").ToString());
  718. if (LeakCheckModeSelectedIndex == 0)
  719. {
  720. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.LeakCheck", VentTime, CheckTime, LeakRateUpperLimit);
  721. }
  722. else if (LeakCheckModeSelectedIndex == 1 || LeakCheckModeSelectedIndex == 2)
  723. {
  724. StringBuilder stringBuilder = new StringBuilder();
  725. if (ChamberType == JetChamber.VenusSE || ChamberType == JetChamber.VenusDE)
  726. {
  727. GasIndex = 11;
  728. }
  729. for (int i = 1; i < GasIndex; i++)
  730. {
  731. if (GasIsCheck[i] == true)
  732. {
  733. var value = i.ToString();
  734. stringBuilder.Append(value);
  735. stringBuilder.Append(',');
  736. }
  737. }
  738. if (stringBuilder.Length > 0)
  739. {
  740. stringBuilder.Remove(stringBuilder.Length - 1, 1);
  741. }
  742. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.GasLeakCheck", VentTime, CheckTime, LeakRateUpperLimit, stringBuilder.ToString(), GasIsCheck[0], LeakCheckMode[LeakCheckModeSelectedIndex]);
  743. }
  744. }
  745. private void OnAbort()
  746. {
  747. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  748. }
  749. private void OnControlValve(object obj)
  750. {
  751. CommonValveControl commonValveControl = (CommonValveControl)obj;
  752. if (commonValveControl.IsCanEdit == true)
  753. {
  754. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status);
  755. }
  756. }
  757. private void OnControl12Valve(object obj)
  758. {
  759. CommonValveControl commonValveControl = (CommonValveControl)obj;
  760. if (commonValveControl.IsCanEdit == true)
  761. {
  762. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", commonValveControl.Tag.ToString(), !commonValveControl.Status);
  763. }
  764. }
  765. private void OnGasPurge()
  766. {
  767. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.GasLinePurge");
  768. StringBuilder stringBuilder = new StringBuilder();
  769. for (int i = 1; i < 5; i++)
  770. {
  771. if (PurgeGasIsCheck[i] == true)
  772. {
  773. var value = i.ToString();
  774. stringBuilder.Append(value);
  775. stringBuilder.Append(',');
  776. }
  777. }
  778. if (stringBuilder.Length > 0)
  779. {
  780. stringBuilder.Remove(stringBuilder.Length - 1, 1);
  781. }
  782. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.GasLinePurge", stringBuilder.ToString());
  783. }
  784. private async void OnGas()
  785. {
  786. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  787. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  788. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  789. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  790. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  791. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  792. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  793. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  794. await Task.Delay(500);
  795. object[] mfc = new object[8];
  796. mfc[0] = MFC1Data.SetPoint;
  797. mfc[1] = MFC2Data.SetPoint;
  798. mfc[2] = MFC3Data.SetPoint;
  799. mfc[3] = MFC4Data.SetPoint;
  800. mfc[4] = MFC5Data.SetPoint;
  801. mfc[5] = MFC6Data.SetPoint;
  802. mfc[6] = MFC7Data.SetPoint;
  803. mfc[7] = MFC8Data.SetPoint;
  804. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  805. }
  806. private void OnLoaded()
  807. {
  808. ChamberType = (JetChamber)Enum.Parse(typeof(JetChamber), QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.ChamberType").ToString());
  809. if (m_firstLoadFlag == true)
  810. {
  811. var AllLeakCheckDa = QueryDataClient.Instance.Service.GetPMLeakCheckResultWithBasePressure(ModuleName);
  812. if (AllLeakCheckDa != null)
  813. {
  814. LeakCheckResultList = new ObservableCollection<PMLeakCheckResult>(AllLeakCheckDa);
  815. }
  816. var m_ChamberType = (JetChamber)Enum.Parse(typeof(JetChamber), QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.ChamberType").ToString());
  817. if (m_ChamberType == JetChamber.Kepler2200A || m_ChamberType == JetChamber.Kepler2200B)
  818. {
  819. PressureType = PressureType.Pa;
  820. }
  821. m_firstLoadFlag = false;
  822. }
  823. }
  824. private void OnOpenButterflyValveView()
  825. {
  826. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  827. if (butterflyValveMessageBox == null || butterflyValveMessageBox.IsVisible == false)
  828. {
  829. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  830. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  831. butterflyValveMessageBox.Left = 700;
  832. butterflyValveMessageBox.Top = 600;
  833. butterflyValveMessageBox.Show();
  834. butterflyValveMessageBox.Owner = _mainWindow;
  835. }
  836. }
  837. private void OnOpenPump()
  838. {
  839. if (PMCurrentState == PMState.LaunchingPump)
  840. {
  841. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  842. return;
  843. }
  844. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  845. LOG.Info($"{ModuleName},打开Pump");
  846. }
  847. private void OnClosePump()
  848. {
  849. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  850. LOG.Info($"{ModuleName},关闭Pump");
  851. }
  852. private void OnOpenTurboPump()
  853. {
  854. if (PMCurrentState == PMState.LaunchingTurboPump)
  855. {
  856. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  857. return;
  858. }
  859. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  860. LOG.Info($"{ModuleName},打开分子泵");
  861. }
  862. private void OnCloseTurboPump()
  863. {
  864. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  865. LOG.Info($"{ModuleName},关闭分子泵");
  866. }
  867. private void OnOpenPendulumValve()
  868. {
  869. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
  870. LOG.Info($"{ModuleName},打开钟摆阀");
  871. }
  872. private void OnClosePendulumValve()
  873. {
  874. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
  875. LOG.Info($"{ModuleName},关闭钟摆阀");
  876. }
  877. #endregion
  878. #region 私有方法
  879. void timer_Tick(object sender, EventArgs e)
  880. {
  881. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  882. N2ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveN2.IsOpen"];
  883. GasFinalValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveGasFinal.IsOpen"];
  884. PV11ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV11.IsOpen"];
  885. PV12ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV12.IsOpen"];
  886. PV21ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV21.IsOpen"];
  887. PV22ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV22.IsOpen"];
  888. PV31ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV31.IsOpen"];
  889. PV32ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV32.IsOpen"];
  890. PV41ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV41.IsOpen"];
  891. PV42ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV42.IsOpen"];
  892. MFC1ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc1.IsOpen"];
  893. MFC2ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc2.IsOpen"];
  894. MFC3ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc3.IsOpen"];
  895. MFC4ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc4.IsOpen"];
  896. MFC5ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc5.IsOpen"];
  897. MFC6ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc6.IsOpen"];
  898. MFC7ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc7.IsOpen"];
  899. MFC8ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc8.IsOpen"];
  900. PVN21ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN21.IsOpen"];
  901. PVN22ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN22.IsOpen"];
  902. O2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveO2.IsOpen");
  903. //MFC1Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas1"];
  904. //MFC2Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas2"];
  905. //MFC3Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas3"];
  906. //MFC4Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas4"];
  907. //MFC5Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas5"];
  908. //MFC6Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas6"];
  909. //MFC7Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas7"];
  910. //MFC8Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas8"];
  911. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  912. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  913. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  914. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  915. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  916. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  917. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  918. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  919. MFCN2Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcN2"];
  920. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  921. O2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveO2.IsOpen");
  922. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  923. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  924. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  925. PenningGaugeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePenningGauge.IsOpen");
  926. //PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  927. //PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  928. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  929. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  930. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  931. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  932. PurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePurge.IsOpen");
  933. N2Purge1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2Purge1.IsOpen");
  934. N2Purge2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2Purge2.IsOpen");
  935. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  936. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  937. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  938. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  939. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  940. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  941. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  942. GasIsFlowing = (PMState)RtDataValues[$"{ModuleName}.FsmState"] == PMState.GasFlowing;
  943. IsAutoMode = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsOnline");
  944. HighTemperatureHeaterData = CommonFunction.GetValue<AITHighTemperatureHeaterData>(RtDataValues, $"{ModuleName}.HighTemperatureHeater.DeviceData");
  945. ChamberPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChamberPressure");
  946. ProcessPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessPressure");
  947. ForelinePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ForelinePressure");
  948. PenningPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.PenningPressure");
  949. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"TM.{ModuleName}SlitDoor.IsClosed");
  950. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  951. if ((PMState)RtDataValues[$"{ModuleName}.FsmState"] == PMState.GasBoxLeakCheck)
  952. {
  953. CurrentStep = RtDataValues[$"{ModuleName}.GasLeakCheck.Step"]?.ToString();
  954. //stepTimeCountValue += 1;
  955. StepTime = TimeSpan.FromSeconds(stopwatch.ElapsedMilliseconds/1000);
  956. }
  957. else if ((PMState)RtDataValues[$"{ModuleName}.FsmState"] == PMState.LeakCheck)
  958. {
  959. CurrentStep = RtDataValues[$"{ModuleName}.LeakCheck.Step"]?.ToString();
  960. //stepTimeCountValue += 1;
  961. StepTime = TimeSpan.FromSeconds(stopwatch.ElapsedMilliseconds / 1000);
  962. }
  963. else
  964. {
  965. CurrentStep = "";
  966. stopwatch.Stop();
  967. StepTime = null;
  968. }
  969. PMWafer = ModuleManager.ModuleInfos[$"{ModuleName}"].WaferManager.Wafers[0];
  970. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  971. }
  972. public void addDataKeys()
  973. {
  974. m_RtDataKeys.Clear();
  975. m_RtDataKeys.Add("System.IsAutoMode");
  976. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  977. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  978. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  979. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  980. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  981. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  982. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  983. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  984. m_RtDataKeys.Add($"{ModuleName}.MfcGas9");
  985. m_RtDataKeys.Add($"{ModuleName}.MfcGas10");
  986. m_RtDataKeys.Add($"{ModuleName}.MfcGas11");
  987. m_RtDataKeys.Add($"{ModuleName}.MfcGas12");
  988. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  989. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  990. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  991. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  992. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  993. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  994. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  995. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  996. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  997. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  998. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  999. m_RtDataKeys.Add($"{ModuleName}.ValveO2.IsOpen");
  1000. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1001. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1002. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1003. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1004. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1005. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1006. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1007. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1008. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1009. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1010. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1011. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1012. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1013. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1014. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1015. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1016. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1017. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1018. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1019. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1020. m_RtDataKeys.Add($"{ModuleName}.GasLeakCheck.Step");
  1021. m_RtDataKeys.Add($"{ModuleName}.LeakCheck.Step");
  1022. m_RtDataKeys.Add($"{ModuleName}.IsOnline");
  1023. m_RtDataKeys.Add($"{ModuleName}.ValveN2Purge2.IsOpen");
  1024. m_RtDataKeys.Add($"{ModuleName}.ValvePurge.IsOpen");
  1025. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1026. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1027. m_RtDataKeys.Add($"{ModuleName}.ValveN2Purge1.IsOpen");
  1028. m_RtDataKeys.Add($"{ModuleName}.ValveN2Purge2.IsOpen");
  1029. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1030. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1031. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1032. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1033. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1034. m_RtDataKeys.Add($"{ModuleName}.ProcessPressure");
  1035. m_RtDataKeys.Add($"{ModuleName}.PenningPressure");
  1036. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1037. m_RtDataKeys.Add($"{ModuleName}.HighTemperatureHeater.DeviceData");
  1038. m_RtDataKeys.Add($"TM.{ModuleName}SlitDoor.IsClosed");
  1039. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1040. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1041. }
  1042. public void EnterExitView(bool isEnter)
  1043. {
  1044. if (isEnter)
  1045. {
  1046. timer_Tick(null, null);
  1047. timer.Start();
  1048. MFC1IsEnable = (bool)QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas1.Enable");
  1049. MFC2IsEnable = (bool)(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas2.Enable"));
  1050. MFC3IsEnable = (bool)(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas3.Enable"));
  1051. MFC4IsEnable = (bool)(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas4.Enable"));
  1052. MFC5IsEnable = (bool)(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas5.Enable"));
  1053. MFC6IsEnable = (bool)(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas6.Enable"));
  1054. MFC7IsEnable = (bool)(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas7.Enable"));
  1055. MFC8IsEnable = (bool)(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas8.Enable"));
  1056. }
  1057. else
  1058. {
  1059. timer.Stop();
  1060. }
  1061. }
  1062. #endregion
  1063. }
  1064. }