using Aitex.Core.Common.DeviceData; using Aitex.Core.RT.Log; using MECF.Framework.Common.CommonData.DeviceData; using MECF.Framework.Common.DataCenter; using MECF.Framework.Common.OperationCenter; using OpenSEMI.ClientBase; using Prism.Commands; using Prism.Mvvm; using System; using System.Collections.Generic; using System.Collections.ObjectModel; using System.Diagnostics; using System.Linq; using System.Text; using System.Threading.Tasks; using System.Windows; using System.Windows.Threading; using Venus_Core; using Venus_MainPages.Unity; using Venus_MainPages.Views; using Venus_Themes.CustomControls; using Venus_Themes.UserControls; namespace Venus_MainPages.ViewModels { internal class KeplerGasLeakCheckViewModel : BindableBase { #region 私有字段 private List m_LeakCheckMode; private int m_LeakCheckModeSelectedIndex; private int m_VentTime; private int m_CheckTime; private double m_LeakRateUpperLimit; private int m_BasePressure; private bool[] m_GasIsCheck = new bool[12]; private bool[] m_PurgeGasIsCheck = new bool[12]; private int GasIndex = 9; public string m_ModuleName; private bool m_GasIsFlowing; private bool m_IsAutoMode; private AITMfcData m_MFC1Data; private AITMfcData m_MFC2Data; private AITMfcData m_MFC3Data; private AITMfcData m_MFC4Data; private AITMfcData m_MFC5Data; private AITMfcData m_MFC6Data; private AITMfcData m_MFC7Data; private AITMfcData m_MFC8Data; private AITMfcData m_MFCN2Data; private PMState m_PMCurrentState; private ObservableCollection m_LeakCheckResultList = new ObservableCollection(); private bool m_MFC1IsEnable; private bool m_MFC2IsEnable; private bool m_MFC3IsEnable; private bool m_MFC4IsEnable; private bool m_MFC5IsEnable; private bool m_MFC6IsEnable; private bool m_MFC7IsEnable; private bool m_MFC8IsEnable; private JetChamber m_JetChamber; private WaferInfo m_PMWafer; private bool m_IsHasWafer; #region 阀 private bool m_O2ValveIsOpen; private bool m_PVN21ValveIsOpen; private bool m_PVN22ValveIsOpen; private bool m_N2ValveIsOpen; private bool m_PV11ValveIsOpen; private bool m_PV12ValveIsOpen; private bool m_PV21ValveIsOpen; private bool m_PV22ValveIsOpen; private bool m_PV31ValveIsOpen; private bool m_PV32ValveIsOpen; private bool m_PV41ValveIsOpen; private bool m_PV42ValveIsOpen; private bool m_MFC1ValveIsOpen; private bool m_MFC2ValveIsOpen; private bool m_MFC3ValveIsOpen; private bool m_MFC4ValveIsOpen; private bool m_MFC5ValveIsOpen; private bool m_MFC6ValveIsOpen; private bool m_MFC7ValveIsOpen; private bool m_MFC8ValveIsOpen; private bool m_GasFinalValveIsOpen; private bool m_SoftPumpValveIsOpen; private bool m_FastPumpValveIsOpen; private bool m_TurboPumpPumpingValveIsOpen; private bool m_TurboPumpPurgeValveIsOpen; private bool m_GuageValveIsOpen; private bool m_PenningGaugeValveIsOpen; private double m_MFC1SetPoint; private double m_MFC2SetPoint; private double m_MFC3SetPoint; private double m_MFC4SetPoint; private double m_MFC5SetPoint; private double m_MFC6SetPoint; private double m_MFC7SetPoint; private double m_MFC8SetPoint; private bool m_PendulumValveIsOpen; private bool m_PurgeValveIsOpen; private bool m_N2Purge1ValveIsOpen; private bool m_N2Purge2ValveIsOpen; private int m_TurboPumpRotationalSpeed; #endregion private List m_RtDataKeys = new List(); private Dictionary m_RtDataValues = new Dictionary(); private string m_currentStep; public TimeSpan? m_stepTime; //private int stepTimeCountValue; private Stopwatch stopwatch = new Stopwatch(); private PressureType m_PressureType; private bool m_firstLoadFlag = true; private float m_PenningPressure; private bool m_PumpIsOpen; private bool m_TurboIsOpen; private bool m_IsATM; private bool m_IsVAC; private AITPendulumValveData m_PendulumValveData; private float m_ChamberPressure; private float m_ProcessPressure; private float m_ForelinePressurePressure; private AITHighTemperatureHeaterData m_HighTemperatureHeaterData; ButterflyValveView butterflyValveMessageBox; private DispatcherTimer timer; private bool m_IsSlitDoorClosed = true; private bool m_IsLidClosed = true; #endregion #region 属性 public bool IsAutoMode { get { return m_IsAutoMode; } set { SetProperty(ref m_IsAutoMode, value); } } public ObservableCollection LeakCheckResultList { get { return m_LeakCheckResultList; } set { SetProperty(ref m_LeakCheckResultList, value); } } public List LeakCheckMode { get { return m_LeakCheckMode; } set { SetProperty(ref m_LeakCheckMode, value); } } public int LeakCheckModeSelectedIndex { get { return m_LeakCheckModeSelectedIndex; } set { SetProperty(ref m_LeakCheckModeSelectedIndex, value); } } public int VentTime { get { return m_VentTime; } set { SetProperty(ref m_VentTime, value); } } public int CheckTime { get { return m_CheckTime; } set { SetProperty(ref m_CheckTime, value); } } public int BasePressure { get { return m_BasePressure; } set { SetProperty(ref m_BasePressure, value); } } public double LeakRateUpperLimit { get { return m_LeakRateUpperLimit; } set { SetProperty(ref m_LeakRateUpperLimit, value); } } public bool[] GasIsCheck { get { return m_GasIsCheck; } set { SetProperty(ref m_GasIsCheck, value); } } public bool[] PurgeGasIsCheck { get { return m_PurgeGasIsCheck; } set { SetProperty(ref m_PurgeGasIsCheck, value); } } public AITMfcData MFC1Data { get { return m_MFC1Data; } set { SetProperty(ref m_MFC1Data, value); } } public AITMfcData MFC2Data { get { return m_MFC2Data; } set { SetProperty(ref m_MFC2Data, value); } } public AITMfcData MFC3Data { get { return m_MFC3Data; } set { SetProperty(ref m_MFC3Data, value); } } public AITMfcData MFC4Data { get { return m_MFC4Data; } set { SetProperty(ref m_MFC4Data, value); } } public AITMfcData MFC5Data { get { return m_MFC5Data; } set { SetProperty(ref m_MFC5Data, value); } } public AITMfcData MFC6Data { get { return m_MFC6Data; } set { SetProperty(ref m_MFC6Data, value); } } public AITMfcData MFC7Data { get { return m_MFC7Data; } set { SetProperty(ref m_MFC7Data, value); } } public AITMfcData MFC8Data { get { return m_MFC8Data; } set { SetProperty(ref m_MFC8Data, value); } } public AITMfcData MFCN2Data { get { return m_MFCN2Data; } set { SetProperty(ref m_MFCN2Data, value); } } public double MFC1SetPoint { get { return m_MFC1SetPoint; } set { SetProperty(ref m_MFC1SetPoint, value); } } public double MFC2SetPoint { get { return m_MFC2SetPoint; } set { SetProperty(ref m_MFC2SetPoint, value); } } public double MFC3SetPoint { get { return m_MFC3SetPoint; } set { SetProperty(ref m_MFC3SetPoint, value); } } public double MFC4SetPoint { get { return m_MFC4SetPoint; } set { SetProperty(ref m_MFC4SetPoint, value); } } public double MFC5SetPoint { get { return m_MFC5SetPoint; } set { SetProperty(ref m_MFC5SetPoint, value); } } public double MFC6SetPoint { get { return m_MFC6SetPoint; } set { SetProperty(ref m_MFC6SetPoint, value); } } public double MFC7SetPoint { get { return m_MFC7SetPoint; } set { SetProperty(ref m_MFC7SetPoint, value); } } public double MFC8SetPoint { get { return m_MFC8SetPoint; } set { SetProperty(ref m_MFC8SetPoint, value); } } public PMState PMCurrentState { get { return m_PMCurrentState; } set { if ((m_PMCurrentState == PMState.GasBoxLeakCheck || m_PMCurrentState == PMState.LeakCheck) && value == PMState.Idle) { var AllLeakCheckDa = QueryDataClient.Instance.Service.GetPMLeakCheckResultWithBasePressure(ModuleName); if (AllLeakCheckDa != null) { LeakCheckResultList = new ObservableCollection(AllLeakCheckDa); } } SetProperty(ref m_PMCurrentState, value); } } public string CurrentStep { get { return m_currentStep; } set { if (value != m_currentStep) { //stepTimeCountValue = 0; stopwatch.Restart(); } SetProperty(ref m_currentStep, value); } } public TimeSpan? StepTime { get { return m_stepTime; } set { SetProperty(ref m_stepTime, value); } } public JetChamber ChamberType { get { return m_JetChamber; } set { SetProperty(ref m_JetChamber, value); } } #region 阀 public bool GasFinalValveIsOpen { get { return m_GasFinalValveIsOpen; } set { SetProperty(ref m_GasFinalValveIsOpen, value); } } public bool PVN21ValveIsOpen { get { return m_PVN21ValveIsOpen; } set { SetProperty(ref m_PVN21ValveIsOpen, value); } } public bool PVN22ValveIsOpen { get { return m_PVN22ValveIsOpen; } set { SetProperty(ref m_PVN22ValveIsOpen, value); } } public bool N2ValveIsOpen { get { return m_N2ValveIsOpen; } set { SetProperty(ref m_N2ValveIsOpen, value); } } public bool PV11ValveIsOpen { get { return m_PV11ValveIsOpen; } set { SetProperty(ref m_PV11ValveIsOpen, value); } } public bool PV12ValveIsOpen { get { return m_PV12ValveIsOpen; } set { SetProperty(ref m_PV12ValveIsOpen, value); } } public bool MFC1ValveIsOpen { get { return m_MFC1ValveIsOpen; } set { SetProperty(ref m_MFC1ValveIsOpen, value); } } public bool PV21ValveIsOpen { get { return m_PV21ValveIsOpen; } set { SetProperty(ref m_PV21ValveIsOpen, value); } } public bool PV22ValveIsOpen { get { return m_PV22ValveIsOpen; } set { SetProperty(ref m_PV22ValveIsOpen, value); } } public bool MFC2ValveIsOpen { get { return m_MFC2ValveIsOpen; } set { SetProperty(ref m_MFC2ValveIsOpen, value); } } public bool PV31ValveIsOpen { get { return m_PV31ValveIsOpen; } set { SetProperty(ref m_PV31ValveIsOpen, value); } } public bool PV32ValveIsOpen { get { return m_PV32ValveIsOpen; } set { SetProperty(ref m_PV32ValveIsOpen, value); } } public bool MFC3ValveIsOpen { get { return m_MFC3ValveIsOpen; } set { SetProperty(ref m_MFC3ValveIsOpen, value); } } public bool PV41ValveIsOpen { get { return m_PV41ValveIsOpen; } set { SetProperty(ref m_PV41ValveIsOpen, value); } } public bool PV42ValveIsOpen { get { return m_PV42ValveIsOpen; } set { SetProperty(ref m_PV42ValveIsOpen, value); } } public bool MFC4ValveIsOpen { get { return m_MFC4ValveIsOpen; } set { SetProperty(ref m_MFC4ValveIsOpen, value); } } public bool MFC5ValveIsOpen { get { return m_MFC5ValveIsOpen; } set { SetProperty(ref m_MFC5ValveIsOpen, value); } } public bool MFC6ValveIsOpen { get { return m_MFC6ValveIsOpen; } set { SetProperty(ref m_MFC6ValveIsOpen, value); } } public bool MFC7ValveIsOpen { get { return m_MFC7ValveIsOpen; } set { SetProperty(ref m_MFC7ValveIsOpen, value); } } public bool MFC8ValveIsOpen { get { return m_MFC8ValveIsOpen; } set { SetProperty(ref m_MFC8ValveIsOpen, value); } } public bool TurboPumpPumpingValveIsOpen { get { return m_TurboPumpPumpingValveIsOpen; } set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); } } public bool TurboPumpPurgeValveIsOpen { get { return m_TurboPumpPurgeValveIsOpen; } set { if (value != m_TurboPumpPurgeValveIsOpen) { if (value == true) { var setpoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint")); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", setpoint); } else { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0); } } SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); } } public bool SoftPumpValveIsOpen { get { return m_SoftPumpValveIsOpen; } set { SetProperty(ref m_SoftPumpValveIsOpen, value); } } public bool FastPumpValveIsOpen { get { return m_FastPumpValveIsOpen; } set { SetProperty(ref m_FastPumpValveIsOpen, value); } } public bool GuageValveIsOpen { get { return m_GuageValveIsOpen; } set { SetProperty(ref m_GuageValveIsOpen, value); } } public Dictionary RtDataValues { get { return m_RtDataValues; } set { SetProperty(ref m_RtDataValues, value); } } public bool GasIsFlowing { get { return m_GasIsFlowing; } set { SetProperty(ref m_GasIsFlowing, value); } } #endregion public bool MFC1IsEnable { get { return m_MFC1IsEnable; } set { SetProperty(ref m_MFC1IsEnable, value); } } public bool MFC2IsEnable { get { return m_MFC2IsEnable; } set { SetProperty(ref m_MFC2IsEnable, value); } } public bool MFC3IsEnable { get { return m_MFC3IsEnable; } set { SetProperty(ref m_MFC3IsEnable, value); } } public bool MFC4IsEnable { get { return m_MFC4IsEnable; } set { SetProperty(ref m_MFC4IsEnable, value); } } public bool MFC5IsEnable { get { return m_MFC5IsEnable; } set { SetProperty(ref m_MFC5IsEnable, value); } } public bool MFC6IsEnable { get { return m_MFC6IsEnable; } set { SetProperty(ref m_MFC6IsEnable, value); } } public bool MFC7IsEnable { get { return m_MFC7IsEnable; } set { SetProperty(ref m_MFC7IsEnable, value); } } public bool MFC8IsEnable { get { return m_MFC8IsEnable; } set { SetProperty(ref m_MFC8IsEnable, value); } } public bool O2ValveIsOpen { get { return m_O2ValveIsOpen; } set { SetProperty(ref m_O2ValveIsOpen, value); } } //private bool m_GasIs8; //private bool m_GasIs12; //public bool GasIs8 //{ // get { return m_GasIs8; } // set { SetProperty(ref m_GasIs8, value); } //} //public bool GasIs12 //{ // get { return m_GasIs12; } // set { SetProperty(ref m_GasIs12, value); } //} public PressureType PressureType { get { return m_PressureType; } set { SetProperty(ref m_PressureType, value); } } public bool N2Purge1ValveIsOpen { get { return m_N2Purge1ValveIsOpen; } set { SetProperty(ref m_N2Purge1ValveIsOpen, value); } } public bool N2Purge2ValveIsOpen { get { return m_N2Purge2ValveIsOpen; } set { SetProperty(ref m_N2Purge2ValveIsOpen, value); } } public bool PurgeValveIsOpen { get { return m_PurgeValveIsOpen; } set { SetProperty(ref m_PurgeValveIsOpen, value); } } public float PenningPressure { get { return m_PenningPressure; } set { SetProperty(ref m_PenningPressure, value); } } public bool IsATM { get { return m_IsATM; } set { SetProperty(ref m_IsATM, value); } } public bool IsVAC { get { return m_IsVAC; } set { SetProperty(ref m_IsVAC, value); } } public bool PumpIsOpen { get { return m_PumpIsOpen; } set { SetProperty(ref m_PumpIsOpen, value); } } public bool TurboIsOpen { get { return m_TurboIsOpen; } set { SetProperty(ref m_TurboIsOpen, value); } } public bool PenningGaugeValveIsOpen { get { return m_PenningGaugeValveIsOpen; } set { SetProperty(ref m_PenningGaugeValveIsOpen, value); } } public AITPendulumValveData PendulumValveData { get { return m_PendulumValveData; } set { SetProperty(ref m_PendulumValveData, value); } } public float ChamberPressure { get { return m_ChamberPressure; } set { SetProperty(ref m_ChamberPressure, value); } } public float ProcessPressure { get { return m_ProcessPressure; } set { SetProperty(ref m_ProcessPressure, value); } } public float ForelinePressure { get { return m_ForelinePressurePressure; } set { SetProperty(ref m_ForelinePressurePressure, value); } } public int TurboPumpRotationalSpeed { get { return m_TurboPumpRotationalSpeed; } set { SetProperty(ref m_TurboPumpRotationalSpeed, value); } } public AITHighTemperatureHeaterData HighTemperatureHeaterData { get { return m_HighTemperatureHeaterData; } set { SetProperty(ref m_HighTemperatureHeaterData, value); } } public bool IsLidClosed { get { return m_IsLidClosed; } set { SetProperty(ref m_IsLidClosed, value); } } public bool IsSlitDoorClosed { get { return m_IsSlitDoorClosed; } set { SetProperty(ref m_IsSlitDoorClosed, value); } } public string ModuleName { get { return m_ModuleName; } set { SetProperty(ref m_ModuleName, value); } } public WaferInfo PMWafer { get { return m_PMWafer; } set { SetProperty(ref m_PMWafer, value); } } public bool IsHasWafer { get { return m_IsHasWafer; } set { SetProperty(ref m_IsHasWafer, value); } } #endregion #region 命令 private DelegateCommand _CheckCommand; public DelegateCommand CheckCommand => _CheckCommand ?? (_CheckCommand = new DelegateCommand(OnCheck)); private DelegateCommand _AbortCommand; public DelegateCommand AbortCommand => _AbortCommand ?? (_AbortCommand = new DelegateCommand(OnAbort)); //private DelegateCommand _ExportCommand; //public DelegateCommand ExportCommand => // _ExportCommand ?? (_ExportCommand = new DelegateCommand(OnExport)); private DelegateCommand _LoadedCommand; public DelegateCommand LoadedCommand => _LoadedCommand ?? (_LoadedCommand = new DelegateCommand(OnLoaded)); private DelegateCommand _ControlValveCommand; public DelegateCommand ControlValveCommand => _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand(OnControlValve)); private DelegateCommand _Control12ValveCommand; public DelegateCommand Control12ValveCommand => _Control12ValveCommand ?? (_Control12ValveCommand = new DelegateCommand(OnControl12Valve)); private DelegateCommand _GasPurgeCommand; public DelegateCommand GasPurgeCommand => _GasPurgeCommand ?? (_GasPurgeCommand = new DelegateCommand(OnGasPurge)); private DelegateCommand _GasCommand; public DelegateCommand GasCommand => _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas)); private DelegateCommand _OpenButterflyValveViewCommand; public DelegateCommand OpenButterflyValveViewCommand => _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView)); private DelegateCommand _OpenPumpCommand; public DelegateCommand OpenPumpCommand => _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump)); private DelegateCommand _ClosePumpCommand; public DelegateCommand ClosePumpCommand => _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump)); private DelegateCommand _OpenTurboPumpCommand; public DelegateCommand OpenTurboPumpCommand => _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump)); private DelegateCommand _CloseTurboPumpCommand; public DelegateCommand CloseTurboPumpCommand => _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump)); private DelegateCommand _OpenPendulumValveCommand; public DelegateCommand OpenPendulumValveCommand => _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve)); private DelegateCommand _ClosePendulumValveCommand; public DelegateCommand ClosePendulumValveCommand => _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve)); #endregion #region 构造函数 public KeplerGasLeakCheckViewModel() { m_LeakCheckMode = new List() { "ChamberOnly", "ChamberAndGasLine", "ChamberAndGasLineAndFAC" }; m_LeakCheckModeSelectedIndex = 0; m_VentTime = 120; m_CheckTime = 180; m_LeakRateUpperLimit = 10; BasePressure = 100; GasIndex = 9; addDataKeys(); timer = new DispatcherTimer(); timer.Interval = TimeSpan.FromSeconds(1); timer.Tick += timer_Tick; //timer.Start(); } #endregion #region 命令方法 private void OnCheck() { ChamberType = (JetChamber)Enum.Parse(typeof(JetChamber), QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.ChamberType").ToString()); if (LeakCheckModeSelectedIndex == 0) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.LeakCheck", VentTime, CheckTime, LeakRateUpperLimit); } else if (LeakCheckModeSelectedIndex == 1 || LeakCheckModeSelectedIndex == 2) { StringBuilder stringBuilder = new StringBuilder(); if (ChamberType == JetChamber.VenusSE || ChamberType == JetChamber.VenusDE) { GasIndex = 11; } for (int i = 1; i < GasIndex; i++) { if (GasIsCheck[i] == true) { var value = i.ToString(); stringBuilder.Append(value); stringBuilder.Append(','); } } if (stringBuilder.Length > 0) { stringBuilder.Remove(stringBuilder.Length - 1, 1); } InvokeClient.Instance.Service.DoOperation($"{ModuleName}.GasLeakCheck", VentTime, CheckTime, LeakRateUpperLimit, stringBuilder.ToString(), GasIsCheck[0], LeakCheckMode[LeakCheckModeSelectedIndex]); } } private void OnAbort() { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}"); } private void OnControlValve(object obj) { CommonValveControl commonValveControl = (CommonValveControl)obj; if (commonValveControl.IsCanEdit == true) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status); } } private void OnControl12Valve(object obj) { CommonValveControl commonValveControl = (CommonValveControl)obj; if (commonValveControl.IsCanEdit == true) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", commonValveControl.Tag.ToString(), !commonValveControl.Status); } } private void OnGasPurge() { //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.GasLinePurge"); StringBuilder stringBuilder = new StringBuilder(); for (int i = 1; i < 5; i++) { if (PurgeGasIsCheck[i] == true) { var value = i.ToString(); stringBuilder.Append(value); stringBuilder.Append(','); } } if (stringBuilder.Length > 0) { stringBuilder.Remove(stringBuilder.Length - 1, 1); } InvokeClient.Instance.Service.DoOperation($"{ModuleName}.GasLinePurge", stringBuilder.ToString()); } private async void OnGas() { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint); await Task.Delay(500); object[] mfc = new object[8]; mfc[0] = MFC1Data.SetPoint; mfc[1] = MFC2Data.SetPoint; mfc[2] = MFC3Data.SetPoint; mfc[3] = MFC4Data.SetPoint; mfc[4] = MFC5Data.SetPoint; mfc[5] = MFC6Data.SetPoint; mfc[6] = MFC7Data.SetPoint; mfc[7] = MFC8Data.SetPoint; InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc); } private void OnLoaded() { ChamberType = (JetChamber)Enum.Parse(typeof(JetChamber), QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.ChamberType").ToString()); if (m_firstLoadFlag == true) { var AllLeakCheckDa = QueryDataClient.Instance.Service.GetPMLeakCheckResultWithBasePressure(ModuleName); if (AllLeakCheckDa != null) { LeakCheckResultList = new ObservableCollection(AllLeakCheckDa); } var m_ChamberType = (JetChamber)Enum.Parse(typeof(JetChamber), QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.ChamberType").ToString()); if (m_ChamberType == JetChamber.Kepler2200A || m_ChamberType == JetChamber.Kepler2200B) { PressureType = PressureType.Pa; } m_firstLoadFlag = false; } } private void OnOpenButterflyValveView() { var _mainWindow = Application.Current.Windows.Cast().FirstOrDefault(window => window is Window) as Window; if (butterflyValveMessageBox == null || butterflyValveMessageBox.IsVisible == false) { butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString()); butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual; butterflyValveMessageBox.Left = 700; butterflyValveMessageBox.Top = 600; butterflyValveMessageBox.Show(); butterflyValveMessageBox.Owner = _mainWindow; } } private void OnOpenPump() { if (PMCurrentState == PMState.LaunchingPump) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}"); return; } InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump"); LOG.Info($"{ModuleName},打开Pump"); } private void OnClosePump() { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump"); LOG.Info($"{ModuleName},关闭Pump"); } private void OnOpenTurboPump() { if (PMCurrentState == PMState.LaunchingTurboPump) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}"); return; } InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump"); LOG.Info($"{ModuleName},打开分子泵"); } private void OnCloseTurboPump() { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump"); LOG.Info($"{ModuleName},关闭分子泵"); } private void OnOpenPendulumValve() { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true); LOG.Info($"{ModuleName},打开钟摆阀"); } private void OnClosePendulumValve() { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false); LOG.Info($"{ModuleName},关闭钟摆阀"); } #endregion #region 私有方法 void timer_Tick(object sender, EventArgs e) { RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys); N2ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveN2.IsOpen"]; GasFinalValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveGasFinal.IsOpen"]; PV11ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV11.IsOpen"]; PV12ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV12.IsOpen"]; PV21ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV21.IsOpen"]; PV22ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV22.IsOpen"]; PV31ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV31.IsOpen"]; PV32ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV32.IsOpen"]; PV41ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV41.IsOpen"]; PV42ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV42.IsOpen"]; MFC1ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc1.IsOpen"]; MFC2ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc2.IsOpen"]; MFC3ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc3.IsOpen"]; MFC4ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc4.IsOpen"]; MFC5ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc5.IsOpen"]; MFC6ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc6.IsOpen"]; MFC7ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc7.IsOpen"]; MFC8ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc8.IsOpen"]; PVN21ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN21.IsOpen"]; PVN22ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN22.IsOpen"]; O2ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveO2.IsOpen"); //MFC1Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas1"]; //MFC2Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas2"]; //MFC3Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas3"]; //MFC4Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas4"]; //MFC5Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas5"]; //MFC6Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas6"]; //MFC7Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas7"]; //MFC8Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas8"]; MFC1Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas1"); MFC2Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas2"); MFC3Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas3"); MFC4Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas4"); MFC5Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas5"); MFC6Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas6"); MFC7Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas7"); MFC8Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas8"); MFCN2Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcN2"]; N2ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveN2.IsOpen"); O2ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveO2.IsOpen"); SoftPumpValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen"); FastPumpValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen"); GuageValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen"); PenningGaugeValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePenningGauge.IsOpen"); //PVHe1ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen"); //PVHe2ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen"); PVN21ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen"); PVN22ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen"); TurboPumpPumpingValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen"); TurboPumpPurgeValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen"); PurgeValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePurge.IsOpen"); N2Purge1ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveN2Purge1.IsOpen"); N2Purge2ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveN2Purge2.IsOpen"); IsATM = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsATM"); IsVAC = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsVAC"); PendulumValveData = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData"); PumpIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.PumpIsRunning"); TurboIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.TurboPumpIsRunning"); TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString()); PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString()); GasIsFlowing = (PMState)RtDataValues[$"{ModuleName}.FsmState"] == PMState.GasFlowing; IsAutoMode = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsOnline"); HighTemperatureHeaterData = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.HighTemperatureHeater.DeviceData"); ChamberPressure = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ChamberPressure"); ProcessPressure = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ProcessPressure"); ForelinePressure = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ForelinePressure"); PenningPressure = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.PenningPressure"); IsSlitDoorClosed = CommonFunction.GetValue(RtDataValues, $"TM.{ModuleName}SlitDoor.IsClosed"); IsLidClosed = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsLidClosed"); if ((PMState)RtDataValues[$"{ModuleName}.FsmState"] == PMState.GasBoxLeakCheck) { CurrentStep = RtDataValues[$"{ModuleName}.GasLeakCheck.Step"]?.ToString(); //stepTimeCountValue += 1; StepTime = TimeSpan.FromSeconds(stopwatch.ElapsedMilliseconds/1000); } else if ((PMState)RtDataValues[$"{ModuleName}.FsmState"] == PMState.LeakCheck) { CurrentStep = RtDataValues[$"{ModuleName}.LeakCheck.Step"]?.ToString(); //stepTimeCountValue += 1; StepTime = TimeSpan.FromSeconds(stopwatch.ElapsedMilliseconds / 1000); } else { CurrentStep = ""; stopwatch.Stop(); StepTime = null; } PMWafer = ModuleManager.ModuleInfos[$"{ModuleName}"].WaferManager.Wafers[0]; IsHasWafer = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.HasWafer"); } public void addDataKeys() { m_RtDataKeys.Clear(); m_RtDataKeys.Add("System.IsAutoMode"); m_RtDataKeys.Add($"{ModuleName}.MfcGas1"); m_RtDataKeys.Add($"{ModuleName}.MfcGas2"); m_RtDataKeys.Add($"{ModuleName}.MfcGas3"); m_RtDataKeys.Add($"{ModuleName}.MfcGas4"); m_RtDataKeys.Add($"{ModuleName}.MfcGas5"); m_RtDataKeys.Add($"{ModuleName}.MfcGas6"); m_RtDataKeys.Add($"{ModuleName}.MfcGas7"); m_RtDataKeys.Add($"{ModuleName}.MfcGas8"); m_RtDataKeys.Add($"{ModuleName}.MfcGas9"); m_RtDataKeys.Add($"{ModuleName}.MfcGas10"); m_RtDataKeys.Add($"{ModuleName}.MfcGas11"); m_RtDataKeys.Add($"{ModuleName}.MfcGas12"); m_RtDataKeys.Add($"{ModuleName}.MfcN2"); m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveO2.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.FsmState"); m_RtDataKeys.Add($"{ModuleName}.GasLeakCheck.Step"); m_RtDataKeys.Add($"{ModuleName}.LeakCheck.Step"); m_RtDataKeys.Add($"{ModuleName}.IsOnline"); m_RtDataKeys.Add($"{ModuleName}.ValveN2Purge2.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePurge.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.IsATM"); m_RtDataKeys.Add($"{ModuleName}.IsVAC"); m_RtDataKeys.Add($"{ModuleName}.ValveN2Purge1.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveN2Purge2.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning"); m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning"); m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData"); m_RtDataKeys.Add($"{ModuleName}.ForelinePressure"); m_RtDataKeys.Add($"{ModuleName}.ChamberPressure"); m_RtDataKeys.Add($"{ModuleName}.ProcessPressure"); m_RtDataKeys.Add($"{ModuleName}.PenningPressure"); m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed"); m_RtDataKeys.Add($"{ModuleName}.HighTemperatureHeater.DeviceData"); m_RtDataKeys.Add($"TM.{ModuleName}SlitDoor.IsClosed"); m_RtDataKeys.Add($"{ModuleName}.IsLidClosed"); m_RtDataKeys.Add($"{ModuleName}.HasWafer"); } public void EnterExitView(bool isEnter) { if (isEnter) { timer_Tick(null, null); timer.Start(); MFC1IsEnable = (bool)QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas1.Enable"); MFC2IsEnable = (bool)(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas2.Enable")); MFC3IsEnable = (bool)(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas3.Enable")); MFC4IsEnable = (bool)(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas4.Enable")); MFC5IsEnable = (bool)(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas5.Enable")); MFC6IsEnable = (bool)(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas6.Enable")); MFC7IsEnable = (bool)(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas7.Enable")); MFC8IsEnable = (bool)(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas8.Enable")); } else { timer.Stop(); } } #endregion } }