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- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using Aitex.Core.Common;
- using Venus_RT.Devices;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using Venus_Core;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using Venus_RT.Modules.PMs;
- using MECF.Framework.Common.Schedulers;
- using System.Collections.Generic;
- using System;
- using MECF.Framework.Common.DBCore;
- namespace Venus_RT.Modules.TM
- {
- class MFPMPickRoutine : ModuleRoutineBase, IRoutine
- {
- private enum PickStep
- {
- WaitPMReady,
- OpenPMSlitDoor,
- PMPrepare,
- ArmExtend,
- QueryAWC,
- DropDownWafer,
- PickDelay,
- ArmRetract,
- SavePickeData,
- ClosePMSlitDoor,
- NotifyDone,
- }
- private enum PickStepWithHeater
- {
- WaitPMReady,
- WaitPressreDifference,
- OpenPMSlitDoor,
- PMPrepare,
- Picking,
- QueryAWC,
- SavePickeData,
- ClosePMSlitDoor,
- NotifyDone,
- }
- private readonly JetTM _JetTM;
- private readonly ITransferRobot _robot;
- private int _pickingTimeout = 120 * 1000;
- private int _pickDelayTime = 0;
- private ModuleName _targetModule;
- private PMEntity _pmModule;
- //private TMEntity _tmModule;
- private int _targetSlot;
- private Hand _hand;
- private DateTime _starttime;
- private bool _queryAwc;
- double maxPressureDifference ;
- public MFPMPickRoutine(JetTM tm, ITransferRobot robot) : base(ModuleName.TMRobot)
- {
- _JetTM = tm;
- _robot = robot;
- Name = "Pick from PM";
- if (SC.GetValue<int>($"TM.QueryAWCOption") == 1 || SC.GetValue<int>($"TM.QueryAWCOption") == 3)
- _queryAwc = true;
- else
- _queryAwc = false;
- maxPressureDifference=SC.GetValue<double>("System.PMTMMaxPressureDifference");
- }
- public RState Start(params object[] objs)
- {
- _starttime = DateTime.Now;
- if (!_robot.IsHomed)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
- return RState.Failed;
- }
- var pickItem = (Queue<MoveItem>)objs[0];
- _targetModule = pickItem.Peek().SourceModule;
- _targetSlot = pickItem.Peek().SourceSlot;
- _hand = pickItem.Peek().RobotHand;
- if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
- {
- _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
- }
- else
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for picking action");
- return RState.Failed;
- }
- if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");
- return RState.Failed;
- }
- if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");
- return RState.Failed;
- }
- var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot);
- if(wafer.ChuckState == EnumWaferChuckStatus.Chucked)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick the wafer in {_targetModule }as the wafer is chucked");
- return RState.Failed;
- }
- LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_targetModule} {_targetSlot + 1} to TM Robot {_hand}");
- Reset();
- _pickingTimeout = SC.GetValue<int>("TM.PickTimeout") * 1000;
- _pickDelayTime = SC.GetValue<int>($"{_targetModule}.PickDelayTime");
- return Runner.Start(Module, $"Pick from {_targetModule}");
- }
- public RState Monitor()
- {
- switch (_pmModule.ChamberType)
- {
- //case JetChamber.Venus:
- case JetChamber.Kepler2300:
- Runner.Wait(PickStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
- .Run(PickStep.OpenPMSlitDoor, OpenPMSlitDoor, OpenPMSlitDoorIsOK)
- .Run(PickStep.PMPrepare, PMPrepare, IsPMPrepareReady)
- .Run(PickStep.ArmExtend, ArmExtend, WaitRobotExtendDone)
- .Run(PickStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s)
- .Run(PickStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)
- .Delay(PickStep.PickDelay, _pickDelayTime)
- .Run(PickStep.ArmRetract, ArmRetract, WaitRobotRetractDone)
- .Run(PickStep.ClosePMSlitDoor, ClosePMSlitDoor, ClosePMSlitDoorIsOK)
- .End(PickStep.NotifyDone, NotifyPMDone, _delay_50ms);
- break;
- case JetChamber.Kepler2200A:
- case JetChamber.Kepler2200B:
- Runner.Wait(PickStepWithHeater.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
- .Wait(PickStepWithHeater.WaitPressreDifference, TMPMPressureIsOK, _delay_60s)
- .Run(PickStepWithHeater.OpenPMSlitDoor, OpenPMSlitDoor, OpenPMSlitDoorIsOK)
- .Run(PickStepWithHeater.PMPrepare, PMPrepare, IsPMPrepareReady)
- .Run(PickStepWithHeater.Picking, Picking, WaitPickDone)
- .Run(PickStepWithHeater.QueryAWC, QueryAWC, WaitRobotQueryDone)
- .Run(PickStepWithHeater.SavePickeData, RecordAWCData, NullFun)
- .Run(PickStepWithHeater.ClosePMSlitDoor, ClosePMSlitDoor, ClosePMSlitDoorIsOK)
- .End(PickStepWithHeater.NotifyDone, NotifyPMDone, _delay_1s);
- break;
- }
-
- return Runner.Status;
- }
- private bool TMPMPressureIsOK()
- {
- if (Math.Abs((_pmModule.ChamberPressure - _JetTM.ChamberPressure)) < maxPressureDifference)
- {
- return true;
- }
- else
- {
- return false;
- }
- }
- private bool PMPrepare()
- {
- _pmModule.PostMsg(PMEntity.MSG.PreparePick);
- return true;
- }
- private bool OpenPMSlitDoor()
- {
- return _JetTM.TurnMFSlitDoor(_targetModule, true, out _);
- }
- private bool OpenPMSlitDoorIsOK()
- {
- return _JetTM.IsPMSlitdoorOpened(_targetModule);
- }
- private bool ClosePMSlitDoor()
- {
- return _JetTM.TurnMFSlitDoor(_targetModule, false, out _);
- }
- private bool ClosePMSlitDoorIsOK()
- {
- return _JetTM.IsPMSlitdoorClosed(_targetModule);
- }
- private bool IsPMPrepareReady()
- {
- return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick;
-
- }
- private bool Picking()
- {
- return _robot.Pick(_targetModule, _targetSlot, _hand);
- }
- private bool WaitPickDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- //WaferManager.Instance.WaferMoved(ModuleName.TM, (int)_hand, _targetModule, _targetSlot);
- WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Picking failed, {_robot.Status}");
- return true;
- }
- }
- private bool ArmExtend()
- {
- return _robot.PickExtend(_targetModule, _targetSlot, _hand);
- }
- private bool ArmRetract()
- {
- return _robot.PickRetract(_targetModule, _targetSlot, _hand);
- }
- private bool WaitRobotExtendDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Pick Extend failed, {_robot.Status}");
- return true;
- }
- }
- private bool QueryAWC()
- {
- if (!_queryAwc)
- return true;
- else
- return _robot.QueryAwc(); ;
- }
- private bool WaitRobotQueryDone()
- {
- if (!_queryAwc)
- return true;
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}");
- return true;
- }
- }
- private bool RecordAWCData()
- {
- if (!_queryAwc)
- return true;
- //已经move后的数据
- string _origin_module = $"LP{WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginStation}";
- int _origin_slot = WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginSlot;
- //查询完毕 插入数据
- OffsetDataRecorder.RecordOffsetData(
- Guid.NewGuid().ToString(),
- _targetModule, _targetSlot,
- ModuleName.TMRobot, 0,
- _origin_module, _origin_slot,
- _hand, RobotArmPan.None,
- _robot.Offset_X, _robot.Offset_Y, _robot.Offset_D,
- _starttime, DateTime.Now);
- return true;
- }
- private bool NotifyPMPickWafer()
- {
- _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);
- return true;
- }
- private bool WaitPMWaferDropDown()
- {
- return _pmModule.Status == PMEntity.PMStatus.Exchange_Ready;
- }
- private bool WaitRobotRetractDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Pick Retract failed, {_robot.Status}");
- return true;
- }
- }
- private bool NotifyPMDone()
- {
- _pmModule.PostMsg(PMEntity.MSG.PickReady);
- return true;
- }
- public void Abort()
- {
- _robot.Halt();
- }
- }
- }
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