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VenusEntity
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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1 anno fa |
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MFHomeRoutine.cs
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ed38ed5c95
1.check load function bugs fix
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1 anno fa |
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MFLeakCheckRoutine.cs
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 anno fa |
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MFPMExtendRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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MFPMPickRoutine.cs
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 anno fa |
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MFPMPlaceRoutine.cs
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 anno fa |
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MFPMRetractRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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MFPMSwapRoutine.cs
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 anno fa |
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MFPickRoutine.cs
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b2406d6f78
1.添加signalTonwer ui界面
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1 anno fa |
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MFPlaceRoutine.cs
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b2406d6f78
1.添加signalTonwer ui界面
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1 anno fa |
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MFPumpRoutine.cs
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 anno fa |
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MFPurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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MFSwapRoutine.cs
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73f0d306a7
Enhance routing algorithm.
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1 anno fa |
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MFVentRoutine.cs
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b2406d6f78
1.添加signalTonwer ui界面
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1 anno fa |
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TMEntity.cs
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af631c4aaa
1.添加RF Calibration功能
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1 anno fa |
lixiang
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能