| .. |
|
AdLinkEthercat
|
ee26035034
1.添加Ethercat 励兆 Match DeviceData
|
1 rok temu |
|
EFEM
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
11 miesięcy temu |
|
EPD
|
2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
|
1 rok temu |
|
EPDs
|
4ffafb6001
EFEM界面优化
|
2 lat temu |
|
IODevices
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
11 miesięcy temu |
|
PreAligner
|
b6309f712c
upload for Venus SE/DE
|
11 miesięcy temu |
|
SMIF
|
8436daeb68
Eliminate SE generation warning.
|
1 rok temu |
|
TM
|
9e1a79673e
1. add the item of AutoUnLoad for Job
|
11 miesięcy temu |
|
VCE
|
ff6df5295a
add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType.
|
11 miesięcy temu |
|
AIRSYSChiller.cs
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 rok temu |
|
AdTecRF.cs
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
11 miesięcy temu |
|
AdixenTurboPump.cs
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
|
1 rok temu |
|
CometRF.cs
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
|
1 rok temu |
|
DataDefine.cs
|
12fa756895
1. SETM will be Init while While SETM Abort Homing
|
1 rok temu |
|
DeviceManager.cs
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
|
1 rok temu |
|
ESC5HighVoltage.cs
|
9e1a79673e
1. add the item of AutoUnLoad for Job
|
11 miesięcy temu |
|
EdwardsPump.cs
|
10c22069fe
1.添加EFEM光栅报警开关
|
1 rok temu |
|
FinsPlc.cs
|
9163903164
Kepler2200优化
|
1 rok temu |
|
JetEPDBase.cs
|
4ffafb6001
EFEM界面优化
|
2 lat temu |
|
JetEfem.cs
|
5fc13b3f0c
New Efem design
|
2 lat temu |
|
JetKepler2200APM.cs
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
11 miesięcy temu |
|
JetKepler2200BPM.cs
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
11 miesięcy temu |
|
JetKepler2300PM.cs
|
79ffe0c064
1.分开Kepler与Venus SequenceView界面
|
1 rok temu |
|
JetPMBase.cs
|
b6309f712c
upload for Venus SE/DE
|
11 miesięcy temu |
|
JetVenusDEPM.cs
|
9e1a79673e
1. add the item of AutoUnLoad for Job
|
11 miesięcy temu |
|
JetVenusSEPM.cs
|
9e1a79673e
1. add the item of AutoUnLoad for Job
|
11 miesięcy temu |
|
JetVenusSEPMBase.cs
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
2 lat temu |
|
KeplerSignalTower.cs
|
7a1faeac74
Redesign the EFEM module for thread safe issue.
|
1 rok temu |
|
LzMatch_Ethercat.cs
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 rok temu |
|
PendulumValve.cs
|
b6309f712c
upload for Venus SE/DE
|
11 miesięcy temu |
|
PlasmaController.cs
|
75710d35d8
RF Match.
|
2 lat temu |
|
RevtechMatch.cs
|
a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
|
1 rok temu |
|
SMCChiller.cs
|
b6309f712c
upload for Venus SE/DE
|
11 miesięcy temu |
|
SMCChillerDrive.cs
|
b6309f712c
upload for Venus SE/DE
|
11 miesięcy temu |
|
SMCShareChiller.cs
|
b6309f712c
upload for Venus SE/DE
|
11 miesięcy temu |
|
SkyPump.cs
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
11 miesięcy temu |
|
TruPlasmaRF.cs
|
b6309f712c
upload for Venus SE/DE
|
11 miesięcy temu |
|
TruPlasmaRF_Ethercat.cs
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 rok temu |
zhouhr
9e1a79673e
1. add the item of AutoUnLoad for Job