SEMFPickRoutine.cs 12 KB

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  1. using Aitex.Core.RT.Log;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Aitex.Core.Util;
  5. using Aitex.Sorter.Common;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.Schedulers;
  8. using MECF.Framework.Common.SubstrateTrackings;
  9. using System;
  10. using System.Collections.Generic;
  11. using System.Linq;
  12. using System.Text;
  13. using System.Threading.Tasks;
  14. using Venus_Core;
  15. using Venus_RT.Devices;
  16. using Venus_RT.Devices.PreAligner;
  17. using Venus_RT.Devices.TM;
  18. using Venus_RT.Modules.VCE;
  19. namespace Venus_RT.Modules.TM.VenusEntity
  20. {
  21. public class SEMFPickRoutine : ModuleRoutineBase, IRoutine
  22. {
  23. private enum PickStep
  24. {
  25. seWaitModuleReady,
  26. sePrepareModule,
  27. seDoorOpen,
  28. sePAQuery,
  29. sePicking,
  30. seNotifyDone,
  31. }
  32. private TMBase _tm;
  33. private IPreAlign _vpa;
  34. private ITransferRobot _robot;
  35. private VceEntity _vceModule;
  36. private ModuleName _targetModule;
  37. private int _targetSlot;
  38. private int _pickingTimeout;
  39. public int currentStepNo;
  40. Hand _hand;
  41. /// <summary>
  42. /// 完整pick动作仅可vce vpa取片
  43. /// </summary>
  44. /// <param name="tm"></param>
  45. /// <param name="robot"></param>
  46. /// <param name="vpa"></param>
  47. public SEMFPickRoutine(TMBase tm, ITransferRobot robot, IPreAlign vpa, ModuleName module) : base(module)
  48. {
  49. _tm = tm;
  50. _robot = robot;
  51. _vpa = vpa;
  52. }
  53. public RState Start(params object[] objs)
  54. {
  55. if (!_robot.IsHomed)
  56. {
  57. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  58. return RState.Failed;
  59. }
  60. //MoveItem pickItem = new MoveItem() { SourceModule = , };
  61. var pickItem = (Queue<MoveItem>)objs[0];
  62. _targetModule = pickItem.Peek().SourceModule;
  63. _targetSlot = pickItem.Peek().SourceSlot;
  64. _hand = pickItem.Peek().RobotHand;
  65. //如果目标是Vce 否则是vpa
  66. if (ModuleHelper.IsVCE(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  67. {
  68. _vceModule = Singleton<RouteManager>.Instance.GetVCE(_targetModule);
  69. //如果vce有错误 报错
  70. if (_vceModule.IsError)
  71. {
  72. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} is Error! Please solve Error first!");
  73. return RState.Failed;
  74. }
  75. if (_targetSlot < 0)
  76. {
  77. LOG.Write(eEvent.ERR_TM, Module, $"VCE target slot cannot be {_targetSlot}. Please check it first.");
  78. return RState.Failed;
  79. }
  80. //if (_tm.VCESlitDoorClosed)
  81. //{
  82. // LOG.Write(eEvent.ERR_TM, Module, $"cannot pick cause vce slitdoor not open.");
  83. // return RState.Failed;
  84. //}
  85. //如果VCE门是关闭的 说明还未进行pump 无法取片等
  86. //if (_tm.VCESlitDoorClosed)
  87. //{
  88. // LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} slitdoor not open! Please pump down vce and open it first!");
  89. // return RState.Failed;
  90. //}
  91. }
  92. //如果目标又不是VPA 报错
  93. else if (!ModuleHelper.IsVPA(_targetModule))
  94. {
  95. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for pick action");
  96. return RState.Failed;
  97. }
  98. //检查目标手臂上没有wafer
  99. if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))
  100. {
  101. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");
  102. return RState.Failed;
  103. }
  104. //检查目标槽位上有wafer
  105. if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
  106. {
  107. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");
  108. return RState.Failed;
  109. }
  110. //2023/10/13 朱永吉 atm mode的判断不允许自动pump vent 信号不满足手动pump vent
  111. //if (RouteManager.IsATMMode && _targetModule == ModuleName.VCE1)
  112. //{
  113. // if (!_tm.IsVCEATM)
  114. // {
  115. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but VCE is not ATM!");
  116. // return RState.Failed;
  117. // }
  118. //
  119. // if (!_tm.IsTMATM)
  120. // {
  121. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but TM is not ATM!");
  122. // return RState.Failed;
  123. // }
  124. //}
  125. //else
  126. //{
  127. // if (_tm.IsVCEATM)
  128. // {
  129. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but VCE is ATM!");
  130. // return RState.Failed;
  131. // }
  132. //
  133. // if (_tm.IsTMATM)
  134. // {
  135. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but TM is ATM!");
  136. // return RState.Failed;
  137. // }
  138. //}
  139. Reset();
  140. _pickingTimeout = SC.GetValue<int>($"{Module}.PickTimeout") * 1000;
  141. return Runner.Start(Module, $"Pick from {_targetModule}");
  142. }
  143. public RState Monitor()
  144. {
  145. Runner.Wait(PickStep.seWaitModuleReady, CheckModuleReady, _delay_60s)
  146. .Run(PickStep.sePrepareModule, PrepareModule, CheckModuleReady)
  147. .RunIf(PickStep.seDoorOpen, ModuleHelper.IsVCE(_targetModule), VCEDoorOpen, CheckVCEDoorOpen)
  148. .RunIf(PickStep.sePAQuery, _targetModule == ModuleName.VPA, QueryOffset, VPAIsIdle, _pickingTimeout)
  149. .Run (PickStep.sePicking, Picking, WaitPickDone, _pickingTimeout)
  150. .End (PickStep.seNotifyDone, NullFun, 500);
  151. return Runner.Status;
  152. }
  153. private bool PrepareModule()
  154. {
  155. switch (_targetModule)
  156. {
  157. case ModuleName.VCE1:
  158. case ModuleName.VCEA:
  159. case ModuleName.VCEB:
  160. return _vceModule.CheckToPostMessage((int)VceMSG.Goto, _targetSlot);//移动到目标槽位
  161. case ModuleName.VPA:
  162. return true;//10/17暂时为true 后可能要求旋转到0
  163. default:
  164. return false;
  165. }
  166. }
  167. private bool WaitPickDone()
  168. {
  169. if (_robot.Status == RState.Running)
  170. {
  171. return false;
  172. }
  173. else if (_robot.Status == RState.End)
  174. {
  175. if (ModuleHelper.IsVCE(_targetModule))
  176. {
  177. switch (_targetModule)
  178. {
  179. case ModuleName.VCE1:
  180. WaferManager.Instance.WaferMoved(ModuleName.LP1, _targetSlot, ModuleName.TMRobot, (int)_hand);
  181. break;
  182. case ModuleName.VCEA:
  183. WaferManager.Instance.WaferMoved(ModuleName.LP1, _targetSlot, ModuleName.TMRobot, (int)_hand);
  184. break;
  185. case ModuleName.VCEB:
  186. WaferManager.Instance.WaferMoved(ModuleName.LP2, _targetSlot, ModuleName.TMRobot, (int)_hand);
  187. break;
  188. }
  189. }
  190. else
  191. WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);
  192. return true;
  193. }
  194. else
  195. {
  196. Runner.Stop($"TM Robot Picking failed, {_robot.Status}");
  197. return true;
  198. }
  199. }
  200. private bool VCEDoorOpen()
  201. {
  202. return _tm.TurnSlitDoor(_targetModule, true);
  203. }
  204. private bool CheckVCEDoorOpen()
  205. {
  206. return _tm.CheckSlitValveOpen(_targetModule);
  207. }
  208. private bool CheckIsPA() => _targetModule == ModuleName.VPA;
  209. private bool QueryOffset()
  210. {
  211. return _vpa.QueryOffset();
  212. }
  213. private bool VPAIsIdle()
  214. {
  215. if (_vpa.Status == RState.Running)
  216. {
  217. return false;
  218. }
  219. else if (_vpa.Status == RState.End)
  220. {
  221. return true;
  222. }
  223. else
  224. {
  225. Runner.Stop($"VPA Query Offset failed, {_vpa.Status}");
  226. return true;
  227. }
  228. }
  229. private bool WaitRobotIsIdle()
  230. {
  231. if (_robot.Status == RState.Running)
  232. {
  233. return false;
  234. }
  235. else if (_robot.Status == RState.End)
  236. {
  237. return true;
  238. }
  239. else
  240. {
  241. Runner.Stop($"TM Robot QueryOffset failed, {_robot.Status}");
  242. return true;
  243. }
  244. }
  245. private bool Picking()
  246. {
  247. //到达目标点位 pick固定槽位点的wafer
  248. if (_targetModule == ModuleName.VPA && (_vpa.ROffset!=0 || _vpa.TOffset!=0))
  249. {
  250. int[] RT = calculateRT(_vpa.ROffset, _vpa.TOffset);
  251. LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"will pick from PA with R:{RT[1]} D:{RT[0]}");
  252. return _robot.PickWithOffset(_targetModule, 0, _hand, RT[1], RT[0]);
  253. }
  254. else
  255. return _robot.Pick(_targetModule, 0, _hand);
  256. }
  257. private int[] calculateRT(int OriginR,int OriginS)
  258. {
  259. int[] RT = new int[2];
  260. try
  261. {
  262. bool desflag = false;
  263. double angle = 0;
  264. if (OriginR / 10 < 90)
  265. angle = OriginR / 10;
  266. if (OriginR / 10 < 270 && OriginR / 10 > 90)
  267. {
  268. desflag = true;
  269. angle = OriginR / 10 - 90;
  270. }
  271. if (OriginR / 10 > 270)
  272. angle = 450 - OriginR / 10;
  273. double angleInRadians = angle * Math.PI / 180;
  274. //OriginS * 25.4 inch 转化为 mm
  275. double Robot2PA = OriginS * 25.4 / 10000;
  276. double Robot2Wafer = Math.Sqrt(Robot2PA * Robot2PA + 402.5 * 402.5 - 2 * Robot2PA * 402.5 * Math.Cos(angleInRadians));
  277. //距离(mm)
  278. double distance = Robot2Wafer - 402.5;
  279. //角度(度)
  280. double angleA = Math.Asin(Robot2PA * Math.Sin(angleInRadians) / Robot2Wafer) * 180 / Math.PI;
  281. if (desflag)
  282. angleA = -angleA;
  283. RT[0] = (int)(angleA * 1000);
  284. RT[1] = (int)(distance * 1000);
  285. }
  286. catch
  287. {
  288. LOG.Write(eEvent.ERR_TM_ROBOT,ModuleName.TMRobot,"错误纠偏计算");
  289. RT[0] = 0;
  290. RT[1] = 0;
  291. }
  292. return RT;
  293. }
  294. private bool CheckModuleReady()
  295. {
  296. switch (_targetModule)
  297. {
  298. case ModuleName.VCE1:
  299. case ModuleName.VCEA:
  300. case ModuleName.VCEB:
  301. return _vceModule.IsIdle;
  302. case ModuleName.VPA:
  303. return _vpa.Status == RState.End;
  304. default:
  305. return false;
  306. }
  307. }
  308. public void Abort()
  309. {
  310. _robot.Halt();
  311. }
  312. }
  313. }