 zhouhr
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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1 éve%!(EXTRA string=óta) |
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zhouhr
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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1 éve%!(EXTRA string=óta) |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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1 éve%!(EXTRA string=óta) |
 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 éve%!(EXTRA string=óta) |
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zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 éve%!(EXTRA string=óta) |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 éve%!(EXTRA string=óta) |
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zhouhr
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9d9b666ea4
Venus SE Update
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1 éve%!(EXTRA string=óta) |
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zhouhr
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e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
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1 éve%!(EXTRA string=óta) |
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zhouhr
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 éve%!(EXTRA string=óta) |
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zhouhr
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5a2ac08f6f
fix bug in MoveWafer Dialog && SEMFPickRoutine
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1 éve%!(EXTRA string=óta) |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 éve%!(EXTRA string=óta) |
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zhouhr
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08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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2 éve%!(EXTRA string=óta) |
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zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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2 éve%!(EXTRA string=óta) |
