| .. |
|
EFEM
|
e61f018b66
Manual Return wafer while running cycle.
|
преди 1 година |
|
LLs
|
c3bef13a6e
Enhance Auto pump/vent algorithm.
|
преди 1 година |
|
LPs
|
03063bae6a
Enhance the routine framework.
|
преди 1 година |
|
PMs
|
e511d1f387
1.添加PM控压功能
|
преди 1 година |
|
Schedulers
|
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
|
преди 1 година |
|
TM
|
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
|
преди 1 година |
|
VCE
|
0dfd2f80f0
add VCE view in UI && add currentSlot for VceEntity while GotoSlot over && fix bug of SE SwapRoutine.
|
преди 1 година |
|
AutoCycle.cs
|
6ac9eafd1d
FIX minor bug for log.
|
преди 1 година |
|
Autotransfer_LP_FA.cs
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
преди 1 година |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
преди 2 години |
|
ManualTransfer.cs
|
501997ac38
TM/EFEM robot single arm option.
|
преди 1 година |
|
ResourceMonitor.cs
|
0ed42d17d1
fix bugs for WaferOffset
|
преди 1 година |
|
RouteManager.cs
|
724b0ca304
add ReturnWafer for Venus SE.
|
преди 1 година |
|
SEManualTransfer.cs
|
724b0ca304
add ReturnWafer for Venus SE.
|
преди 1 година |
|
SETMCycle.cs
|
376ce10782
增加LOG模块中特定eEvent id触发委托函数 && 移除UI中触发PMError && add SE TM Cycle throughput && fix vcedoor not show
|
преди 1 година |
|
TMCycle.cs
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
преди 1 година |
zhouhr
724b0ca304
add ReturnWafer for Venus SE.