| .. |
|
EFEM
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
1 jaar geleden |
|
EPD
|
4ffafb6001
EFEM界面优化
|
2 jaren geleden |
|
EPDs
|
4ffafb6001
EFEM界面优化
|
2 jaren geleden |
|
IODevices
|
e511d1f387
1.添加PM控压功能
|
1 jaar geleden |
|
PreAligner
|
31bbc4482b
update ui && rt && simu for Venus SE
|
1 jaar geleden |
|
SMIF
|
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
|
1 jaar geleden |
|
TM
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
1 jaar geleden |
|
VCE
|
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
|
1 jaar geleden |
|
AIRSYSChiller.cs
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
1 jaar geleden |
|
AdTecRF.cs
|
e511d1f387
1.添加PM控压功能
|
1 jaar geleden |
|
AdixenTurboPump.cs
|
171eef8acc
Add to chart@@to slot switch page function
|
2 jaren geleden |
|
CometRF.cs
|
20cc441578
1.kepler2200 ui优化
|
2 jaren geleden |
|
DataDefine.cs
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
1 jaar geleden |
|
DeviceManager.cs
|
e511d1f387
1.添加PM控压功能
|
1 jaar geleden |
|
ESC5HighVoltage.cs
|
f3bd6b016b
添加部分efem功能
|
2 jaren geleden |
|
EdwardsPump.cs
|
be22c5112d
TM 添加两个pump 串口23/24/25/26
|
2 jaren geleden |
|
FinsPlc.cs
|
c457973fa2
1.添加Revtech Match
|
1 jaar geleden |
|
JetEPDBase.cs
|
4ffafb6001
EFEM界面优化
|
2 jaren geleden |
|
JetEfem.cs
|
5fc13b3f0c
New Efem design
|
2 jaren geleden |
|
JetKepler2200APM.cs
|
e511d1f387
1.添加PM控压功能
|
1 jaar geleden |
|
JetKepler2300PM.cs
|
e511d1f387
1.添加PM控压功能
|
1 jaar geleden |
|
JetPMBase.cs
|
e511d1f387
1.添加PM控压功能
|
1 jaar geleden |
|
JetVenusPM.cs
|
e511d1f387
1.添加PM控压功能
|
1 jaar geleden |
|
JetVenusSEPM.cs
|
31bbc4482b
update ui && rt && simu for Venus SE
|
1 jaar geleden |
|
JetVenusSEPMBase.cs
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
2 jaren geleden |
|
PendulumValve.cs
|
6910d4754e
代码合并
|
1 jaar geleden |
|
PlasmaController.cs
|
75710d35d8
RF Match.
|
2 jaren geleden |
|
RevtechMatch.cs
|
e511d1f387
1.添加PM控压功能
|
1 jaar geleden |
|
SMCChiller.cs
|
c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
|
1 jaar geleden |
|
SkyPump.cs
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
2 jaren geleden |
|
VirgoSignalTower.cs
|
bdec2c0d74
1.修改TM robot模拟器
|
2 jaren geleden |
zhouhr
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.