MFLeakCheckRoutine.cs 4.7 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Venus_RT.Devices;
  4. using MECF.Framework.Common.Routine;
  5. using MECF.Framework.Common.Equipment;
  6. using Venus_Core;
  7. namespace Venus_RT.Modules.TM
  8. {
  9. class MFLeakCheckRoutine : ModuleRoutineBase, IRoutine
  10. {
  11. private enum LeakCheckStep
  12. {
  13. kCloseValves,
  14. kPumpToCrossing,
  15. kPumpToBasePressure,
  16. kPumpingDelay,
  17. kLeakCheckDelay,
  18. kLeakCheckCalc,
  19. kPumpToCrossing_2,
  20. kPumpToBasePressure_2,
  21. kEnd,
  22. }
  23. public double LeakRate { get; private set; }
  24. private double _basePressure = 100;
  25. private double _CrossingPressure = 2000;
  26. private int _leakcheckPumpTime = 180;
  27. private int _leakcheckWaitTime = 300;
  28. private double _startPressure = 0;
  29. private double _endPressure = 0;
  30. private double _leakRate = 30.0;
  31. private readonly JetTM _JetTM;
  32. public MFLeakCheckRoutine(JetTM tm, ModuleName mod) : base(mod)
  33. {
  34. Name = $"{Module} Leakcheck";
  35. _JetTM = tm;
  36. }
  37. public RState Start(params object[] objs)
  38. {
  39. if (_JetTM.CheckLidClosed(Module) &&
  40. _JetTM.CheckVentValveClosed(Module) &&
  41. _JetTM.CheckPurgeValveClosed(Module) &&
  42. _JetTM.CheckPumpValveClosed(Module))
  43. {
  44. Reset();
  45. _JetTM.CloseModuleAllValves(Module);
  46. _basePressure = SC.GetValue<double>($"{Module}.PumpBasePressure");
  47. _CrossingPressure = SC.GetValue<double>($"{Module}.PumpCrossingPressure");
  48. _leakcheckPumpTime = SC.GetValue<int>($"{Module}.LeakCheckPumpTime");
  49. _leakcheckWaitTime = SC.GetValue<int>($"{Module}.LeakCheckWaitTime");
  50. _leakRate = SC.GetValue<double>($"{Module}.LeakRate");
  51. return Runner.Start(Module, Name);
  52. }
  53. return RState.Failed;
  54. }
  55. public RState Monitor()
  56. {
  57. Runner.Delay((int)LeakCheckStep.kCloseValves, _delay_1s)
  58. .Run((int)LeakCheckStep.kPumpToCrossing, HOFs.WrapAction(_JetTM.TurnSoftPumpValve, Module, true), () => { return _JetTM.GetModulePressure(Module) <= _CrossingPressure; })
  59. .Run((int)LeakCheckStep.kPumpToBasePressure, SwitchFastPump, () => { return _JetTM.GetModulePressure(Module) <= _basePressure; })
  60. .Delay((int)LeakCheckStep.kPumpingDelay, _leakcheckPumpTime * 1000)
  61. .Run((int)LeakCheckStep.kLeakCheckDelay, StartLeakCheck, _leakcheckWaitTime * 1000)
  62. .Run((int)LeakCheckStep.kLeakCheckCalc, CalcLeakCheckResult, _delay_50ms)
  63. .Run((int)LeakCheckStep.kPumpToCrossing_2, HOFs.WrapAction(_JetTM.TurnSoftPumpValve, Module, true), () => { return _JetTM.GetModulePressure(Module) <= _CrossingPressure; })
  64. .Run((int)LeakCheckStep.kPumpToBasePressure_2, SwitchFastPump, () => { return _JetTM.GetModulePressure(Module) <= _basePressure; })
  65. .End((int)LeakCheckStep.kEnd, LeakCheckEnd, _delay_50ms);
  66. return Runner.Status;
  67. }
  68. public void Abort()
  69. {
  70. _JetTM.CloseModuleAllValves(Module);
  71. }
  72. bool StartLeakCheck()
  73. {
  74. _JetTM.TurnFastPumpValve(Module, false);
  75. _startPressure = _JetTM.GetModulePressure(Module);
  76. Notify($"{Module} 压力开始值 {_startPressure} mt");
  77. return true;
  78. }
  79. bool CalcLeakCheckResult()
  80. {
  81. _endPressure = _JetTM.GetModulePressure(Module);
  82. LeakRate = (_endPressure - _startPressure) * 60.0 / _leakcheckWaitTime;
  83. if (LeakRate < _leakRate)
  84. {
  85. Notify($"{Module} Leakcheck完成, 压力结束值: {_startPressure} mt, 漏率:{LeakRate} mt/min");
  86. }
  87. else
  88. {
  89. Stop($"{Module} Leakcheck失败, 腔体漏率 [{LeakRate}] mt/min, 高于 [{_leakRate}] mt/min");
  90. }
  91. return true;
  92. }
  93. bool LeakCheckEnd()
  94. {
  95. _JetTM.CloseModuleAllValves(Module);
  96. return true;
  97. }
  98. private bool SwitchFastPump()
  99. {
  100. _JetTM.TurnSoftPumpValve(Module, false);
  101. _JetTM.TurnFastPumpValve(Module, true);
  102. return true;
  103. }
  104. }
  105. }