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- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Venus_RT.Devices;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Equipment;
- using Venus_Core;
- namespace Venus_RT.Modules.TM
- {
- class MFLeakCheckRoutine : ModuleRoutineBase, IRoutine
- {
- private enum LeakCheckStep
- {
- kCloseValves,
- kPumpToCrossing,
- kPumpToBasePressure,
- kPumpingDelay,
- kLeakCheckDelay,
- kLeakCheckCalc,
- kPumpToCrossing_2,
- kPumpToBasePressure_2,
- kEnd,
- }
- public double LeakRate { get; private set; }
- private double _basePressure = 100;
- private double _CrossingPressure = 2000;
- private int _leakcheckPumpTime = 180;
- private int _leakcheckWaitTime = 300;
- private double _startPressure = 0;
- private double _endPressure = 0;
- private double _leakRate = 30.0;
- private readonly JetTM _JetTM;
- public MFLeakCheckRoutine(JetTM tm, ModuleName mod) : base(mod)
- {
- Name = $"{Module} Leakcheck";
- _JetTM = tm;
- }
- public RState Start(params object[] objs)
- {
- if (_JetTM.CheckLidClosed(Module) &&
- _JetTM.CheckVentValveClosed(Module) &&
- _JetTM.CheckPurgeValveClosed(Module) &&
- _JetTM.CheckPumpValveClosed(Module))
- {
- Reset();
- _JetTM.CloseModuleAllValves(Module);
- _basePressure = SC.GetValue<double>($"{Module}.PumpBasePressure");
- _CrossingPressure = SC.GetValue<double>($"{Module}.PumpCrossingPressure");
- _leakcheckPumpTime = SC.GetValue<int>($"{Module}.LeakCheckPumpTime");
- _leakcheckWaitTime = SC.GetValue<int>($"{Module}.LeakCheckWaitTime");
- _leakRate = SC.GetValue<double>($"{Module}.LeakRate");
- return Runner.Start(Module, Name);
- }
- return RState.Failed;
- }
- public RState Monitor()
- {
- Runner.Delay((int)LeakCheckStep.kCloseValves, _delay_1s)
- .Run((int)LeakCheckStep.kPumpToCrossing, HOFs.WrapAction(_JetTM.TurnSoftPumpValve, Module, true), () => { return _JetTM.GetModulePressure(Module) <= _CrossingPressure; })
- .Run((int)LeakCheckStep.kPumpToBasePressure, SwitchFastPump, () => { return _JetTM.GetModulePressure(Module) <= _basePressure; })
- .Delay((int)LeakCheckStep.kPumpingDelay, _leakcheckPumpTime * 1000)
- .Run((int)LeakCheckStep.kLeakCheckDelay, StartLeakCheck, _leakcheckWaitTime * 1000)
- .Run((int)LeakCheckStep.kLeakCheckCalc, CalcLeakCheckResult, _delay_50ms)
- .Run((int)LeakCheckStep.kPumpToCrossing_2, HOFs.WrapAction(_JetTM.TurnSoftPumpValve, Module, true), () => { return _JetTM.GetModulePressure(Module) <= _CrossingPressure; })
- .Run((int)LeakCheckStep.kPumpToBasePressure_2, SwitchFastPump, () => { return _JetTM.GetModulePressure(Module) <= _basePressure; })
- .End((int)LeakCheckStep.kEnd, LeakCheckEnd, _delay_50ms);
- return Runner.Status;
- }
- public void Abort()
- {
- _JetTM.CloseModuleAllValves(Module);
- }
- bool StartLeakCheck()
- {
- _JetTM.TurnFastPumpValve(Module, false);
- _startPressure = _JetTM.GetModulePressure(Module);
- Notify($"{Module} 压力开始值 {_startPressure} mt");
- return true;
- }
- bool CalcLeakCheckResult()
- {
- _endPressure = _JetTM.GetModulePressure(Module);
- LeakRate = (_endPressure - _startPressure) * 60.0 / _leakcheckWaitTime;
- if (LeakRate < _leakRate)
- {
- Notify($"{Module} Leakcheck完成, 压力结束值: {_startPressure} mt, 漏率:{LeakRate} mt/min");
- }
- else
- {
- Stop($"{Module} Leakcheck失败, 腔体漏率 [{LeakRate}] mt/min, 高于 [{_leakRate}] mt/min");
- }
- return true;
- }
- bool LeakCheckEnd()
- {
- _JetTM.CloseModuleAllValves(Module);
- return true;
- }
- private bool SwitchFastPump()
- {
- _JetTM.TurnSoftPumpValve(Module, false);
- _JetTM.TurnFastPumpValve(Module, true);
- return true;
- }
- }
- }
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