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VenusSE
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afc3b9494f
VenusSE TM pressurecontrol update
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1 anno fa |
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DeviceModelVenusSE_MF.xml
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e2c4a51efe
1.Add VenusDE JetVenusDEPM control
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1 anno fa |
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DeviceModelVenus_MF.xml
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76a22f462f
1.根据tps提供sequence 添加控压功能
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1 anno fa |
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SETMInterlock.xml
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58b65c3ff0
VenusSE Simulator PM Update
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1 anno fa |
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TMInterlock.xml
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 anno fa |
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_ioDefineVenusSETest_MF.xml
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 anno fa |
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_ioDefineVenusSE_MF.xml
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e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
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1 anno fa |
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_ioDefineVenus_MF.xml
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b6acfe2e29
优化TM leak check功能
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1 anno fa |
lixiang
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能