lixiang 6d6f659b77 1.Kepler2200 TM/PM控大压力10Pa,添加工艺结束,等待压力稳定(TM/PM压差满足要求)TM再Pick功能 1 gadu atpakaļ
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ChillerBase.cs cdf41d68fe 1.优化数据库实时数据插入功能,恢复数据查询/实时数据查看等功能 1 gadu atpakaļ
HeaterBase.cs 56cd0ab611 add framework 2 gadi atpakaļ
LidBase.cs 56cd0ab611 add framework 2 gadi atpakaļ
MfcBase.cs 56cd0ab611 add framework 2 gadi atpakaļ
MotorBase.cs 56cd0ab611 add framework 2 gadi atpakaļ
PressureGaugeBase.cs 56cd0ab611 add framework 2 gadi atpakaļ
PumpBase.cs a4b75ecb2e 1.每个Chamber做成可配,默认PMA Venus,PMB Kepler2300 1 gadu atpakaļ
RfMatchBase.cs 68b4ba9640 1.添加mtorr与Pa切换功能 1 gadu atpakaļ
RfPowerBase.cs 6d6f659b77 1.Kepler2200 TM/PM控大压力10Pa,添加工艺结束,等待压力稳定(TM/PM压差满足要求)TM再Pick功能 1 gadu atpakaļ
SignalLightBase.cs 56cd0ab611 add framework 2 gadi atpakaļ
SignalTowerBase.cs a48b743e88 1.完成PartialPressure功能 2 gadi atpakaļ
SlitValveBase.cs 56cd0ab611 add framework 2 gadi atpakaļ
ThrottleValveBase.cs 56cd0ab611 add framework 2 gadi atpakaļ