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Common
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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RTCore
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d8b75084d0
添加RT UI 模块选择功能
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1 year ago |
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RTEquipmentLibrary
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
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RTModuleLibrary
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 year ago |
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SequenceControl
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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1 year ago |
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SimulatorCore
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c0ff9f251e
1.添加kepler2200B
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1 year ago |
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Test
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da4e6f6a4e
Recipe功能完善
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2 years ago |
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UICore
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
lixiang
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能