SimulatorSystem.cs 66 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. namespace Venus_Simulator.Instances
  13. {
  14. public class SimulatorSystem : Singleton<SimulatorSystem>
  15. {
  16. private PeriodicJob _thread;
  17. private Random _rd = new Random();
  18. private RD_TRIG _trigATM = new RD_TRIG();
  19. private RD_TRIG _trigVAC = new RD_TRIG();
  20. private R_TRIG _trigLLExtend = new R_TRIG();
  21. private R_TRIG _trigLLRetract = new R_TRIG();
  22. private static int count = 0;
  23. private readonly float ATM_THRESHOLD = 750000;
  24. private readonly float ATM_PRESSURE = 760000;
  25. private readonly float ATM_LoadLock_PRESSURE = 760000;
  26. private readonly uint VAC_SW_PRESSURE = 9500;
  27. private readonly uint PROCESS_GAUGE = 10000;
  28. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  29. public SimulatorSystem()
  30. {
  31. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  32. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  33. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  34. // TODO
  35. }
  36. ~SimulatorSystem()
  37. {
  38. _thread?.Stop();
  39. }
  40. public void Initialize()
  41. {
  42. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  43. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  44. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  45. SetTMDefaultValue();
  46. Singleton<DataManager>.Instance.Initialize(false);
  47. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  48. }
  49. private void SetDefaultValue(ModuleName mod,JetChamber jetChamber)
  50. {
  51. switch (jetChamber)
  52. {
  53. case JetChamber.Venus:
  54. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  55. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  56. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  57. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  58. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  59. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  60. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  61. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  62. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  63. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  64. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  65. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  66. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  67. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  68. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  69. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  70. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  71. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  72. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  73. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  74. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  75. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  76. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  78. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  79. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  80. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  82. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  83. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  84. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  85. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  86. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  87. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  88. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  89. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  90. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  91. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  92. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  93. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  94. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  95. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  96. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  97. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  98. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  99. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  100. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  101. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  102. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  103. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  104. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  105. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  106. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  107. //// pressure
  108. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  109. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  110. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
  111. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  112. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  113. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  114. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  115. //// Temperature
  116. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  117. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  118. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  119. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  120. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  121. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  122. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  123. //if (mod == ModuleName.PMA)
  124. //{
  125. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  126. //}
  127. //else if (mod == ModuleName.PMB)
  128. //{
  129. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  130. //}
  131. // Datetime
  132. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  133. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  134. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  135. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  136. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  137. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  138. break;
  139. case JetChamber.Kepler2300:
  140. // chamber
  141. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  142. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  143. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  144. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  145. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  146. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  147. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  148. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  149. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  150. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  151. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  152. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  153. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  154. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  155. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  156. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  157. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  158. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  159. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  160. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  161. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  162. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  163. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  164. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  165. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  167. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  168. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  169. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  170. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  171. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  172. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  173. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  174. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  175. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  176. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  177. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  178. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  179. //// pressure
  180. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  181. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  182. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
  183. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  184. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  185. //// Temperature
  186. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  187. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  188. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  189. // Datetime
  190. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  191. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  192. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  193. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  194. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  195. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  196. break;
  197. case JetChamber.Kepler2200A:
  198. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  199. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  200. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  201. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  202. IO.DI[$"{mod}.DI_Lift_Pin_Up_Position"].Value = false;
  203. IO.DI[$"{mod}.DI_Lift_Pin_Down_Position"].Value = true;
  204. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  205. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  206. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  207. IO.DI[$"{mod}.DI_Slit_Door_Open_Position"].Value = false;
  208. IO.DI[$"{mod}.DI_Slit_Door_Close_Position"].Value = true;
  209. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  210. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  211. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  212. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  213. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  214. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  215. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  216. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  217. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  218. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  219. IO.DI[$"{mod}.DI_CHB_H-HT_Control_TC_Broken_Alarm"].Value = false;
  220. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  221. IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = false;
  222. IO.DI[$"{mod}.DI_CHB_H-HT_OT_Switch_Alarm"].Value = false;
  223. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  224. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  225. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  226. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  227. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  228. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  229. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  230. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  231. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  232. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  233. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  234. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  235. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  236. //// pressure
  237. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  238. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
  239. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  240. //// Temperature
  241. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  242. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  243. SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", 28);
  244. // Datetime
  245. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  246. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  247. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  248. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  249. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  250. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  251. break;
  252. }
  253. }
  254. private void SetTMDefaultValue()
  255. {
  256. ModuleName mod = ModuleName.TM;
  257. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  258. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  259. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  260. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  261. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  262. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  263. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  264. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  265. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  266. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  267. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  268. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  269. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  270. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  271. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  272. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  273. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  274. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  275. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  276. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  277. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  278. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  279. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  280. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  281. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  282. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  283. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  284. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  285. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  286. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  287. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  288. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  289. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  290. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  291. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  292. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  293. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  294. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  295. // Datetime
  296. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  297. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  298. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  299. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  300. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  301. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  302. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  303. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  304. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  305. SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
  306. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  307. }
  308. private bool OnMonitor()
  309. {
  310. try
  311. {
  312. switch (SimulatorJetChamber.CurrentPMAChamber)
  313. {
  314. case JetChamber.Venus:
  315. // PMA
  316. MonitorSlitDoor(ModuleName.PMA);
  317. MonitorPin(ModuleName.PMA);
  318. MonitorPressure(ModuleName.PMA);
  319. MonitorExtendAndRetract(ModuleName.PMA);
  320. //MonitorTemperature(ModuleName.PMA);
  321. MonitorGas(ModuleName.PMA);
  322. //MonitorRF(ModuleName.PMA);
  323. ChangeTime(ModuleName.PMA);
  324. //MonitorIOPumpCtrl(ModuleName.PMA);
  325. break;
  326. case JetChamber.Kepler2300:
  327. case JetChamber.Kepler2200A:
  328. case JetChamber.Kepler2200B:
  329. // PMA
  330. MonitorSlitDoor(ModuleName.PMA);
  331. MonitorPin(ModuleName.PMA);
  332. MonitorPressure_Kepler(ModuleName.PMA);
  333. //MonitorTemperature(ModuleName.PMA);
  334. MonitorGas(ModuleName.PMA);
  335. //MonitorRF(ModuleName.PMA);
  336. ChangeTime(ModuleName.PMA);
  337. //MonitorIOPumpCtrl(ModuleName.PMA);
  338. MonitorLid(ModuleName.PMA);
  339. break;
  340. }
  341. switch (SimulatorJetChamber.CurrentPMBChamber)
  342. {
  343. case JetChamber.Venus:
  344. // PMB
  345. MonitorSlitDoor(ModuleName.PMB);
  346. MonitorPin(ModuleName.PMB);
  347. MonitorPressure(ModuleName.PMB);
  348. //MonitorTemperature(ModuleName.PMB);
  349. MonitorGas(ModuleName.PMB);
  350. // MonitorRF(ModuleName.PMB);
  351. ChangeTime(ModuleName.PMB);
  352. //MonitorIOPumpCtrl(ModuleName.PMB);
  353. break;
  354. case JetChamber.Kepler2300:
  355. case JetChamber.Kepler2200A:
  356. case JetChamber.Kepler2200B:
  357. // PMB
  358. MonitorSlitDoor(ModuleName.PMB);
  359. MonitorPin(ModuleName.PMB);
  360. MonitorPressure_Kepler(ModuleName.PMB);
  361. //MonitorTemperature(ModuleName.PMB);
  362. MonitorGas(ModuleName.PMB);
  363. // MonitorRF(ModuleName.PMB);
  364. ChangeTime(ModuleName.PMB);
  365. //MonitorIOPumpCtrl(ModuleName.PMB);
  366. MonitorLid(ModuleName.PMB);
  367. break;
  368. }
  369. ChangeTime(ModuleName.TM);
  370. MonitorMFSlitDoor();
  371. MonitorMFPressure();
  372. }
  373. catch (Exception e)
  374. {
  375. LOG.WriteExeption(e);
  376. }
  377. return true;
  378. }
  379. private void ChangeTime(ModuleName mod)
  380. {
  381. // Heartbeat with PLC
  382. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  383. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  384. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  385. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  386. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  387. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  388. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  389. }
  390. void MonitorSlitDoor(ModuleName mod)
  391. {
  392. // slit door open
  393. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  394. {
  395. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  396. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  397. }
  398. // slit door close
  399. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  400. {
  401. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  402. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  403. }
  404. }
  405. void MonitorMFSlitDoor()
  406. {
  407. ModuleName mod = ModuleName.TM;
  408. // LLA T door open
  409. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  410. {
  411. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  412. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  413. }
  414. // LLB T door open
  415. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  416. {
  417. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  418. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  419. }
  420. // LLA E door open
  421. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  422. {
  423. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  424. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  425. }
  426. // LLB E door open
  427. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  428. {
  429. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  430. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  431. }
  432. // LLA T door close
  433. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  434. {
  435. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  436. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  437. }
  438. // LLB T door close
  439. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  440. {
  441. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  442. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  443. }
  444. // LLA E door close
  445. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  446. {
  447. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  448. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  449. }
  450. // LLB E door close
  451. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  452. {
  453. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  454. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  455. }
  456. }
  457. void MonitorPin(ModuleName mod)
  458. {
  459. // lift pin up
  460. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  461. {
  462. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  463. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  464. }
  465. }
  466. void MonitorLid(ModuleName mod)
  467. {
  468. // lift pin up
  469. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  470. {
  471. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  472. }
  473. }
  474. void MonitorExtendAndRetract(ModuleName mod)
  475. {
  476. // Extend
  477. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  478. if (_trigLLExtend.Q)
  479. {
  480. _trigLLRetract.RST = true;
  481. Thread.Sleep(500);
  482. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  483. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  484. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  485. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  486. }
  487. // Retract
  488. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  489. if (_trigLLRetract.Q)
  490. {
  491. count++;
  492. _trigLLExtend.RST = true;
  493. Thread.Sleep(500);
  494. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  495. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  496. if (count == 1)
  497. {
  498. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  499. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  500. }
  501. else if (count == 2)
  502. {
  503. count = 0;
  504. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  505. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  506. }
  507. }
  508. }
  509. void MonitorPressure(ModuleName mod)
  510. {
  511. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  512. // Loadlock pressure
  513. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  514. // Foreline
  515. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  516. {
  517. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  518. }
  519. else
  520. {
  521. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  522. }
  523. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  524. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  525. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  526. //float chamber_pressure = GetMockChamberPressure(mod);
  527. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  528. // soft pump & fast pump
  529. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  530. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  531. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  532. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  533. {
  534. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  535. {
  536. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  537. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  538. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  539. {
  540. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  541. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  542. }
  543. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  544. {
  545. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  546. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  547. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  548. }
  549. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  550. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  551. }
  552. else if (fast_pump_vlv.Value)
  553. {
  554. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  555. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  556. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  557. {
  558. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  559. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  560. }
  561. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  562. {
  563. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  564. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  565. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  566. }
  567. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  568. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  569. }
  570. else if (soft_pump_vlv.Value)
  571. {
  572. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  573. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  574. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  575. {
  576. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  577. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  578. }
  579. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  580. {
  581. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  582. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  583. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  584. }
  585. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  586. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  587. }
  588. else if (turbo_pump_vlv.Value)
  589. {
  590. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  591. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  592. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  593. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  594. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  595. }
  596. }
  597. // fast vent & purge
  598. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  599. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  600. //if (vent_vlv.Value || purge_vlv.Value)
  601. //{
  602. // if (vent_vlv.Value && purge_vlv.Value)
  603. // {
  604. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  605. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  606. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  607. // {
  608. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  609. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  610. // }
  611. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  612. // {
  613. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  614. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  615. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  616. // }
  617. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  618. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  619. // }
  620. // else
  621. //
  622. if (vent_vlv.Value)
  623. {
  624. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  625. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  626. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  627. {
  628. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  629. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  630. }
  631. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  632. {
  633. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  634. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  635. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  636. }
  637. else
  638. {
  639. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  640. }
  641. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  642. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  643. }
  644. // Loadlock Pumping Valve
  645. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  646. if (Loadlock_pump_vlv.Value)
  647. {
  648. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  649. }
  650. // Loadlock vent
  651. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  652. if (Loadlock_vent_vlv.Value)
  653. {
  654. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  655. }
  656. // 压力值越界,复位
  657. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  658. if (chamber_pressure1 > ATM_PRESSURE)
  659. {
  660. SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  661. }
  662. else if (chamber_pressure1 < 20)
  663. {
  664. SetAiValue($"{mod}.AI_Chamber_Pressure_760t", 20);
  665. }
  666. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  667. if (process_pressure1 > PROCESS_GAUGE)
  668. {
  669. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  670. }
  671. else if (process_pressure1 < 20)
  672. {
  673. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  674. }
  675. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  676. if (foreline_pressure > 10000)
  677. {
  678. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  679. }
  680. else if (foreline_pressure < 150)
  681. {
  682. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  683. }
  684. // 模拟压力计漂移
  685. //int p1 = (int)GetMockChamberPressure(mod);
  686. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  687. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  688. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  689. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  690. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  691. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  692. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  693. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  694. // 根据当前压力值设定信号
  695. //float chamber_pressure2 = GetMockChamberPressure(mod);
  696. // ATM switch
  697. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  698. // VAC switch
  699. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  700. // Throttle valve
  701. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  702. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  703. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  704. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  705. // 压力值
  706. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  707. //{
  708. // short increase = (short)_rd.Next(20, 30);
  709. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  710. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  711. // {
  712. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  713. // }
  714. //}
  715. //else
  716. //{
  717. // short increase = (short)_rd.Next(20, 30);
  718. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  719. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  720. // {
  721. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  722. // }
  723. //}
  724. //// 位置值
  725. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  726. //{
  727. // short increase = (short)_rd.Next(20, 30);
  728. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  729. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  730. // {
  731. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  732. // }
  733. //}
  734. //else
  735. //{
  736. // short increase = (short)_rd.Next(20, 30);
  737. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  738. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  739. // {
  740. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  741. // }
  742. //}
  743. }
  744. void MonitorPressure_Kepler(ModuleName mod)
  745. {
  746. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  747. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  748. {
  749. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  750. }
  751. else
  752. {
  753. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  754. }
  755. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  756. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  757. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  758. //float chamber_pressure = GetMockChamberPressure(mod);
  759. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  760. // soft pump & fast pump
  761. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  762. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  763. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  764. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  765. {
  766. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  767. {
  768. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  769. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  770. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  771. {
  772. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  773. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  774. }
  775. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  776. {
  777. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  778. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  779. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  780. }
  781. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  782. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  783. }
  784. else if (fast_pump_vlv.Value)
  785. {
  786. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  787. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  788. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  789. {
  790. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  791. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  792. }
  793. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  794. {
  795. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  796. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  797. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  798. }
  799. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  800. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  801. }
  802. else if (soft_pump_vlv.Value)
  803. {
  804. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  805. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  806. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  807. {
  808. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  809. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  810. }
  811. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  812. {
  813. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  814. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  815. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  816. }
  817. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  818. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  819. }
  820. else if (turbo_pump_vlv.Value)
  821. {
  822. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  823. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  824. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  825. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  826. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  827. }
  828. }
  829. // fast vent & purge
  830. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  831. if (vent_vlv.Value)
  832. {
  833. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  834. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  835. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  836. {
  837. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  838. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  839. }
  840. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  841. {
  842. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  843. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  844. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  845. }
  846. else
  847. {
  848. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  849. }
  850. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  851. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  852. }
  853. // Loadlock Pumping Valve
  854. // 压力值越界,复位
  855. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  856. if (chamber_pressure1 > ATM_PRESSURE)
  857. {
  858. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  859. }
  860. else if (chamber_pressure1 < 20)
  861. {
  862. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  863. }
  864. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  865. if (process_pressure1 > PROCESS_GAUGE)
  866. {
  867. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  868. }
  869. else if (process_pressure1 < 20)
  870. {
  871. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  872. }
  873. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  874. if (foreline_pressure > 10000)
  875. {
  876. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  877. }
  878. else if (foreline_pressure < 150)
  879. {
  880. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  881. }
  882. // ATM switch
  883. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  884. // VAC switch
  885. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  886. }
  887. void MonitorMFPressure()
  888. {
  889. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  890. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  891. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  892. ModuleName mod = ModuleName.TM;
  893. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  894. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  895. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  896. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  897. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  898. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  899. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  900. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  901. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  902. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  903. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  904. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  905. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  906. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  907. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  908. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  909. {
  910. if ( getAiValue_LLA_ChamberPressure > 10000)
  911. {
  912. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  913. }
  914. else if (getAiValue_LLA_ChamberPressure <= 10000)
  915. {
  916. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  917. }
  918. }
  919. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  920. {
  921. if (getAiValue_LLB_ChamberPressure > 10000)
  922. {
  923. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  924. }
  925. else if (getAiValue_LLB_ChamberPressure <= 10000)
  926. {
  927. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  928. }
  929. }
  930. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  931. {
  932. if (getAiValue_TM_ChamberPressure > 10000)
  933. {
  934. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  935. }
  936. else if (getAiValue_TM_ChamberPressure <= 10000)
  937. {
  938. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  939. }
  940. }
  941. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  942. {
  943. if (getAiValue_LLA_ChamberPressure > 10000)
  944. {
  945. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  946. }
  947. else if (getAiValue_LLA_ChamberPressure <= 10000)
  948. {
  949. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  950. }
  951. }
  952. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  953. {
  954. if (getAiValue_LLB_ChamberPressure > 10000)
  955. {
  956. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  957. }
  958. else if (getAiValue_LLB_ChamberPressure <= 10000)
  959. {
  960. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  961. }
  962. }
  963. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  964. {
  965. if (getAiValue_TM_ChamberPressure > 10000)
  966. {
  967. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  968. }
  969. else if (getAiValue_TM_ChamberPressure <= 10000)
  970. {
  971. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  972. }
  973. }
  974. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  975. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  976. {
  977. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  978. }
  979. else if (getAiValue_LLA_ChamberPressure < 20)
  980. {
  981. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  982. }
  983. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  984. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  985. {
  986. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  987. }
  988. else if (getAiValue_LLB_ChamberPressure < 20)
  989. {
  990. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  991. }
  992. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  993. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  994. {
  995. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  996. }
  997. else if (getAiValue_TM_ChamberPressure < 20)
  998. {
  999. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1000. }
  1001. // ATM switch
  1002. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1003. // VAC switch
  1004. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1005. // ATM switch
  1006. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  1007. // VAC switch
  1008. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1009. // ATM switch
  1010. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  1011. // VAC switch
  1012. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1013. }
  1014. void SetAiValue(string name, float value)
  1015. {
  1016. byte[] flow = BitConverter.GetBytes(value);
  1017. short high1 = BitConverter.ToInt16(flow, 0);
  1018. short low1 = BitConverter.ToInt16(flow, 2);
  1019. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  1020. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  1021. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1022. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1023. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1024. }
  1025. float GetAiValue(string name)
  1026. {
  1027. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1028. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1029. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1030. return flow;
  1031. }
  1032. float GetAoValue(string name)
  1033. {
  1034. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  1035. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  1036. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1037. return flow;
  1038. }
  1039. void MonitorTemperature(ModuleName mod)
  1040. {
  1041. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  1042. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  1043. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  1044. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  1045. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  1046. // 底座
  1047. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1048. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1049. //{
  1050. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  1051. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  1052. //}
  1053. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1054. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1055. //{
  1056. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  1057. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  1058. //}
  1059. // Foreline
  1060. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1061. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1062. {
  1063. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  1064. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  1065. }
  1066. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1067. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1068. {
  1069. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  1070. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  1071. }
  1072. // Wall
  1073. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1074. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1075. {
  1076. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  1077. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  1078. }
  1079. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1080. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1081. {
  1082. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  1083. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  1084. }
  1085. }
  1086. void MonitorGas(ModuleName mod)
  1087. {
  1088. // gas
  1089. this.SimulateMFC(ModuleName.PMA, 1);
  1090. this.SimulateMFC(ModuleName.PMA, 2);
  1091. this.SimulateMFC(ModuleName.PMA, 3);
  1092. this.SimulateMFC(ModuleName.PMA, 4);
  1093. this.SimulateMFC(ModuleName.PMA, 5);
  1094. this.SimulateMFC(ModuleName.PMA, 6);
  1095. this.SimulateMFC(ModuleName.PMA, 7);
  1096. this.SimulateMFC(ModuleName.PMA, 8);
  1097. this.SimulateN2(ModuleName.PMA);
  1098. this.SimulateHe(ModuleName.PMA);
  1099. }
  1100. private void SimulateMFC(ModuleName mod, byte gasNum)
  1101. {
  1102. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  1103. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1104. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  1105. }
  1106. private void SimulateN2(ModuleName mod)
  1107. {
  1108. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  1109. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1110. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)mock_fb);
  1111. }
  1112. private void SimulateHe(ModuleName mod)
  1113. {
  1114. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  1115. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1116. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  1117. }
  1118. void MonitorRF(ModuleName mod)
  1119. {
  1120. // RF generator
  1121. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  1122. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1123. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1124. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  1125. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  1126. }
  1127. void MonitorIOPumpCtrl(ModuleName mod)
  1128. {
  1129. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  1130. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  1131. }
  1132. public void Terminate()
  1133. {
  1134. _thread.Stop();
  1135. }
  1136. public void SetCoolantOutletTemp(string module, int Temp)
  1137. {
  1138. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  1139. //{
  1140. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  1141. //}
  1142. }
  1143. }
  1144. }