| .. |
|
Common
|
63d58afa42
1、SecsGem增加了UTF-8编码的支持；
|
il y a 1 an |
|
RTCore
|
d8b75084d0
添加RT UI 模块选择功能
|
il y a 1 an |
|
RTEquipmentLibrary
|
1929a3510b
1.新版ui界面开发
|
il y a 1 an |
|
RTModuleLibrary
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
il y a 1 an |
|
SequenceControl
|
124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
|
il y a 1 an |
|
SimulatorCore
|
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
|
il y a 1 an |
|
Test
|
da4e6f6a4e
Recipe功能完善
|
il y a 2 ans |
|
UICore
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
il y a 1 an |
chenkui
63d58afa42
1、SecsGem增加了UTF-8编码的支持；