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VenusEntity
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2ffdf6e535
1Venus DE LinerDoor update
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1 year ago |
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MFHomeRoutine.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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MFLeakCheckRoutine.cs
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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MFPMExtendRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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MFPMPickRoutine.cs
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9e14bbee6a
1.由于PM种类变多，且分配置，PM 加载device 功能重写
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1 year ago |
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MFPMPlaceRoutine.cs
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1929a3510b
1.新版ui界面开发
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1 year ago |
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MFPMRetractRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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MFPMSwapRoutine.cs
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
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MFPickRoutine.cs
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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MFPlaceRoutine.cs
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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MFPumpRoutine.cs
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
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MFPurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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MFSwapRoutine.cs
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73f0d306a7
Enhance routing algorithm.
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1 year ago |
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MFVentRoutine.cs
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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TMEntity.cs
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af631c4aaa
1.添加RF Calibration功能
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1 year ago |
lixiang
9e14bbee6a
1.由于PM种类变多，且分配置，PM 加载device 功能重写