PumpDownRoutine.cs 3.5 KB

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  1. using System;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using Venus_Core;
  7. namespace Venus_RT.Modules.PMs
  8. {
  9. class PumpDownRoutine : PMRoutineBase, IRoutine
  10. {
  11. private enum PumpStep
  12. {
  13. kCloseValves,
  14. kSoftPump,
  15. kFastPump,
  16. kPVHe2,
  17. kISOValve,
  18. kTurboN2Purge,
  19. kVATValve,
  20. kGasFinal,
  21. }
  22. //private int _ventTime;
  23. private int _pump_delay = 5000;
  24. private int _roughPumpPressure = 75000;
  25. private int _vHe2FlowPressure = 200;
  26. private int _basePressure = 10;
  27. public PumpDownRoutine(JetPM chamber) : base(chamber)
  28. {
  29. Name = "PumpDown";
  30. }
  31. public RState Start(params object[] objs)
  32. {
  33. if (CheckLid() &&
  34. CheckSlitDoor())
  35. {
  36. Reset();
  37. _chamber.CloseValves();
  38. _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.RoughPumpDownPressure") * 1000;
  39. _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
  40. _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
  41. _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  42. return Runner.Start(Module, Name);
  43. }
  44. return RState.Failed;
  45. }
  46. public RState Monitor()
  47. {
  48. Runner.Delay((int)PumpStep.kCloseValves, _delay_2s)
  49. .Run((int)PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  50. .Run((int)PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  51. .Run((int)PumpStep.kPVHe2, OpenHe2Valve, _delay_1s)
  52. .Run((int)PumpStep.kISOValve, OpenISOValve, _delay_1s)
  53. .Run((int)PumpStep.kTurboN2Purge, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPurge, true), _delay_1s)
  54. .Run((int)PumpStep.kVATValve, OpenVATValve, () => { return _chamber.ChamberPressure < _basePressure; })
  55. .End((int)PumpStep.kGasFinal, HOFs.WrapAction(_chamber.OpenValve, ValveType.GasFinal, true), _pump_delay);
  56. return Runner.Status;
  57. }
  58. private bool OpenFastPump()
  59. {
  60. _chamber.OpenValve(ValveType.SoftPump, false);
  61. _chamber.OpenValve(ValveType.FastPump, true);
  62. return true;
  63. }
  64. private bool OpenHe2Valve()
  65. {
  66. _chamber.OpenValve(ValveType.FastPump, false);
  67. _chamber.OpenValve(ValveType.PVHe2, true);
  68. return true;
  69. }
  70. private bool OpenISOValve()
  71. {
  72. _chamber.OpenValve(ValveType.PVHe2, false);
  73. // ISO Valve
  74. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  75. _chamber.OpenValve(ValveType.Guage, true);
  76. return true;
  77. }
  78. private bool OpenVATValve()
  79. {
  80. return _chamber.TurnPendulumValve(true);
  81. }
  82. public void Abort()
  83. {
  84. CloseAllValves();
  85. }
  86. }
  87. }