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- using System;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Venus_RT.Devices;
- using MECF.Framework.Common.Routine;
- using Venus_Core;
- namespace Venus_RT.Modules.PMs
- {
- class PumpDownRoutine : PMRoutineBase, IRoutine
- {
- private enum PumpStep
- {
- kCloseValves,
- kSoftPump,
- kFastPump,
- kPVHe2,
- kISOValve,
- kTurboN2Purge,
- kVATValve,
- kGasFinal,
- }
- //private int _ventTime;
- private int _pump_delay = 5000;
- private int _roughPumpPressure = 75000;
- private int _vHe2FlowPressure = 200;
- private int _basePressure = 10;
- public PumpDownRoutine(JetPM chamber) : base(chamber)
- {
- Name = "PumpDown";
- }
- public RState Start(params object[] objs)
- {
- if (CheckLid() &&
- CheckSlitDoor())
- {
- Reset();
- _chamber.CloseValves();
- _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.RoughPumpDownPressure") * 1000;
- _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
- _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
- _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
- return Runner.Start(Module, Name);
- }
- return RState.Failed;
- }
- public RState Monitor()
- {
- Runner.Delay((int)PumpStep.kCloseValves, _delay_2s)
- .Run((int)PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
- .Run((int)PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
- .Run((int)PumpStep.kPVHe2, OpenHe2Valve, _delay_1s)
- .Run((int)PumpStep.kISOValve, OpenISOValve, _delay_1s)
- .Run((int)PumpStep.kTurboN2Purge, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPurge, true), _delay_1s)
- .Run((int)PumpStep.kVATValve, OpenVATValve, () => { return _chamber.ChamberPressure < _basePressure; })
- .End((int)PumpStep.kGasFinal, HOFs.WrapAction(_chamber.OpenValve, ValveType.GasFinal, true), _pump_delay);
- return Runner.Status;
- }
- private bool OpenFastPump()
- {
- _chamber.OpenValve(ValveType.SoftPump, false);
- _chamber.OpenValve(ValveType.FastPump, true);
- return true;
- }
- private bool OpenHe2Valve()
- {
- _chamber.OpenValve(ValveType.FastPump, false);
- _chamber.OpenValve(ValveType.PVHe2, true);
- return true;
- }
- private bool OpenISOValve()
- {
-
- _chamber.OpenValve(ValveType.PVHe2, false);
- // ISO Valve
- _chamber.OpenValve(ValveType.TurboPumpPumping, true);
- _chamber.OpenValve(ValveType.Guage, true);
- return true;
- }
- private bool OpenVATValve()
- {
- return _chamber.TurnPendulumValve(true);
- }
- public void Abort()
- {
- CloseAllValves();
- }
- }
- }
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