| .. |
|
MFControlPressureRoutine.cs
|
69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
|
il y a 2 ans |
|
MFHomeRoutine.cs
|
883eb268eb
add TM Robot Home && delete PrefixPath of the selected recipe in sequence
|
il y a 2 ans |
|
MFLeakCheckRoutine.cs
|
b5616b7378
解决冲突，合并代码
|
il y a 2 ans |
|
MFPMExtendRoutine.cs
|
072e5d0d01
ui Module TM 名变TMRobot
|
il y a 2 ans |
|
MFPMPickRoutine.cs
|
8f9b95ae8f
Develop transfer cycle.
|
il y a 2 ans |
|
MFPMPlaceRoutine.cs
|
2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
|
il y a 2 ans |
|
MFPMRetractRoutine.cs
|
8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
|
il y a 2 ans |
|
MFPMSwapRoutine.cs
|
8f9b95ae8f
Develop transfer cycle.
|
il y a 2 ans |
|
MFPickRoutine.cs
|
8f9b95ae8f
Develop transfer cycle.
|
il y a 2 ans |
|
MFPlaceRoutine.cs
|
8f9b95ae8f
Develop transfer cycle.
|
il y a 2 ans |
|
MFPumpRoutine.cs
|
038e0b984a
1.Add LL pump preemptive lock
|
il y a 2 ans |
|
MFPurgeRoutine.cs
|
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
|
il y a 2 ans |
|
MFSwapRoutine.cs
|
8020492bf4
fix action list buffer not reset while swap wafer.
|
il y a 2 ans |
|
MFVentRoutine.cs
|
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
|
il y a 2 ans |
|
TMEntity.cs
|
9144014f90
enhance the routing algorithm and module online/offline control logic.
|
il y a 2 ans |
sangwq
9144014f90
enhance the routing algorithm and module online/offline control logic.