sangwq 9144014f90 enhance the routing algorithm and module online/offline control logic. il y a 2 ans
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MFControlPressureRoutine.cs 69eff33372 Force System Restart after change IsATM mode configuration item and add abort process. il y a 2 ans
MFHomeRoutine.cs 883eb268eb add TM Robot Home && delete PrefixPath of the selected recipe in sequence il y a 2 ans
MFLeakCheckRoutine.cs b5616b7378 解决冲突,合并代码 il y a 2 ans
MFPMExtendRoutine.cs 072e5d0d01 ui Module TM 名变TMRobot il y a 2 ans
MFPMPickRoutine.cs 8f9b95ae8f Develop transfer cycle. il y a 2 ans
MFPMPlaceRoutine.cs 2fb8490f3a Update TM software interlock about Loadlock slit door open issue. il y a 2 ans
MFPMRetractRoutine.cs 8826cc0cd0 开发 AutoCycle 模块, 增加TMRobot module id. il y a 2 ans
MFPMSwapRoutine.cs 8f9b95ae8f Develop transfer cycle. il y a 2 ans
MFPickRoutine.cs 8f9b95ae8f Develop transfer cycle. il y a 2 ans
MFPlaceRoutine.cs 8f9b95ae8f Develop transfer cycle. il y a 2 ans
MFPumpRoutine.cs 038e0b984a 1.Add LL pump preemptive lock il y a 2 ans
MFPurgeRoutine.cs 379fe79c7b 1.根据tps sequence修改tm/ll vent/pump等功能 il y a 2 ans
MFSwapRoutine.cs 8020492bf4 fix action list buffer not reset while swap wafer. il y a 2 ans
MFVentRoutine.cs 379fe79c7b 1.根据tps sequence修改tm/ll vent/pump等功能 il y a 2 ans
TMEntity.cs 9144014f90 enhance the routing algorithm and module online/offline control logic. il y a 2 ans