| .. |
|
AdLinkEthercat
|
ee26035034
1.添加Ethercat 励兆 Match DeviceData
|
1 rok temu |
|
EFEM
|
8bb5f3f4f9
fixed loadport event notify;
|
1 rok temu |
|
EPD
|
4ffafb6001
EFEM界面优化
|
2 lat temu |
|
EPDs
|
4ffafb6001
EFEM界面优化
|
2 lat temu |
|
IODevices
|
5c5936c32c
1.修复mfc verification单点ui不显示bug
|
1 rok temu |
|
PreAligner
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 rok temu |
|
SMIF
|
8436daeb68
Eliminate SE generation warning.
|
1 rok temu |
|
TM
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 rok temu |
|
VCE
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 rok temu |
|
AIRSYSChiller.cs
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
1 rok temu |
|
AdTecRF.cs
|
e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
|
1 rok temu |
|
AdixenTurboPump.cs
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 rok temu |
|
CometRF.cs
|
c0ff9f251e
1.添加kepler2200B
|
1 rok temu |
|
DataDefine.cs
|
ee26035034
1.添加Ethercat 励兆 Match DeviceData
|
1 rok temu |
|
DeviceManager.cs
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 rok temu |
|
ESC5HighVoltage.cs
|
f3bd6b016b
添加部分efem功能
|
2 lat temu |
|
EdwardsPump.cs
|
be22c5112d
TM 添加两个pump 串口23/24/25/26
|
2 lat temu |
|
FinsPlc.cs
|
c457973fa2
1.添加Revtech Match
|
2 lat temu |
|
JetEPDBase.cs
|
4ffafb6001
EFEM界面优化
|
2 lat temu |
|
JetEfem.cs
|
5fc13b3f0c
New Efem design
|
2 lat temu |
|
JetKepler2200APM.cs
|
e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
|
1 rok temu |
|
JetKepler2200BPM.cs
|
e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
|
1 rok temu |
|
JetKepler2300PM.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 rok temu |
|
JetPMBase.cs
|
1929a3510b
1.新版ui界面开发
|
1 rok temu |
|
JetVenusDEPM.cs
|
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
|
1 rok temu |
|
JetVenusPM.cs
|
1929a3510b
1.新版ui界面开发
|
1 rok temu |
|
JetVenusSEPM.cs
|
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
|
1 rok temu |
|
JetVenusSEPMBase.cs
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
2 lat temu |
|
LzMatch_Ethercat.cs
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 rok temu |
|
PendulumValve.cs
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 rok temu |
|
PlasmaController.cs
|
75710d35d8
RF Match.
|
2 lat temu |
|
RevtechMatch.cs
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 rok temu |
|
SMCChiller.cs
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
1 rok temu |
|
SkyPump.cs
|
44fc6989ef
1、Remove FabConnect dll file;
|
1 rok temu |
|
TruPlasmaRF.cs
|
4338503e2a
1.添加霍庭格RF Device
|
1 rok temu |
|
TruPlasmaRF_Ethercat.cs
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 rok temu |
|
VirgoSignalTower.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 rok temu |
hecl
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes