| .. |
|
VenusEntity
|
cfd9253e8a
Modified the style of the venusDE page and added the DERobot movement.
|
1 year ago |
|
MFCoolingRoutine.cs
|
465f0690e7
Cooling功能bug修复
|
1 year ago |
|
MFHomeRoutine.cs
|
ed38ed5c95
1.check load function bugs fix
|
1 year ago |
|
MFLeakCheckRoutine.cs
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 year ago |
|
MFPMExtendRoutine.cs
|
a4f8a29122
1.Kepler2200 Gas 改造,六路变八路
|
1 year ago |
|
MFPMPickRoutine.cs
|
5ce110574e
1,添加cooling功能
|
1 year ago |
|
MFPMPlaceRoutine.cs
|
5ce110574e
1,添加cooling功能
|
1 year ago |
|
MFPMRetractRoutine.cs
|
a4f8a29122
1.Kepler2200 Gas 改造,六路变八路
|
1 year ago |
|
MFPMSwapRoutine.cs
|
5ce110574e
1,添加cooling功能
|
1 year ago |
|
MFPickRoutine.cs
|
5ce110574e
1,添加cooling功能
|
1 year ago |
|
MFPlaceRoutine.cs
|
465f0690e7
Cooling功能bug修复
|
1 year ago |
|
MFPumpRoutine.cs
|
5ce110574e
1,添加cooling功能
|
1 year ago |
|
MFPurgeRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
MFSwapRoutine.cs
|
465f0690e7
Cooling功能bug修复
|
1 year ago |
|
MFVentRoutine.cs
|
5ce110574e
1,添加cooling功能
|
1 year ago |
|
TMEntity.cs
|
3fb3984bd3
1.添加 Heater 伺服到位信号,手臂进腔前check
|
1 year ago |