| .. |
|
EFEM
|
5ce110574e
1，添加cooling功能
|
1 year ago |
|
LLs
|
465f0690e7
Cooling功能bug修复
|
1 year ago |
|
LPs
|
9e9459c927
efem界面按钮功能优化
|
1 year ago |
|
PMs
|
5ce110574e
1，添加cooling功能
|
1 year ago |
|
SMIF
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 year ago |
|
Schedulers
|
09e8c5db30
Fix the post clean not running bug.
|
1 year ago |
|
TM
|
465f0690e7
Cooling功能bug修复
|
1 year ago |
|
VCE
|
4e783f1934
fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis
|
1 year ago |
|
AutoCycle.cs
|
2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
|
1 year ago |
|
Autotransfer_LP_FA.cs
|
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
|
1 year ago |
|
DVIDName.cs
|
44fc6989ef
1、Remove FabConnect dll file;
|
1 year ago |
|
EntityErrorRaiseTrigger.cs
|
d35b997884
1.优化RevtechMatch状态机
|
1 year ago |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
ManualTransfer.cs
|
3b1932fced
Add Loadport loaded check while manual transfer wafer.
|
1 year ago |
|
ResourceMonitor.cs
|
8436daeb68
Eliminate SE generation warning.
|
1 year ago |
|
RouteManager.cs
|
5ce110574e
1，添加cooling功能
|
1 year ago |
|
SEManualTransfer.cs
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
1 year ago |
|
SETMCycle.cs
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
1 year ago |
|
SystemDispatcher.cs
|
1b11b89cd6
handle the Scheduler wafers while destination PM unexpected offline.
|
1 year ago |
|
TMCycle.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
VenusDispatcher.cs
|
8a8ff0ced1
Fixed the cycle blocking bug with one wafer per cycle.
|
1 year ago |
lixiang
465f0690e7
Cooling功能bug修复