| .. |
|
EFEM
|
d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
|
1 jaar geleden |
|
LLs
|
6d393bb86d
new routing algorithm with prediction.
|
1 jaar geleden |
|
LPs
|
8bb5f3f4f9
fixed loadport event notify;
|
1 jaar geleden |
|
PMs
|
4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）
|
1 jaar geleden |
|
SMIF
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 jaar geleden |
|
Schedulers
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 jaar geleden |
|
TM
|
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
|
1 jaar geleden |
|
VCE
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 jaar geleden |
|
AutoCycle.cs
|
2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
|
1 jaar geleden |
|
Autotransfer_LP_FA.cs
|
774c804aa9
fixed pm event occurs carrierid is null
|
1 jaar geleden |
|
DVIDName.cs
|
44fc6989ef
1、Remove FabConnect dll file;
|
1 jaar geleden |
|
EntityErrorRaiseTrigger.cs
|
d35b997884
1.优化RevtechMatch状态机
|
1 jaar geleden |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
2 jaren geleden |
|
ManualTransfer.cs
|
501997ac38
TM/EFEM robot single arm option.
|
2 jaren geleden |
|
ResourceMonitor.cs
|
8436daeb68
Eliminate SE generation warning.
|
1 jaar geleden |
|
RouteManager.cs
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 jaar geleden |
|
SEManualTransfer.cs
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 jaar geleden |
|
SETMCycle.cs
|
ea68c5c25d
add clean for Venus SE.
|
1 jaar geleden |
|
SystemDispatcher.cs
|
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
|
1 jaar geleden |
|
TMCycle.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 jaar geleden |
lixiang
4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）