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AdLinkEthercat
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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il y a 1 an |
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EFEM
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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il y a 1 an |
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EPD
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c3ef1d5a6e
Wafer loadlock delay function.
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il y a 1 an |
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EPDs
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4ffafb6001
EFEM界面优化
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il y a 1 an |
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IODevices
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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il y a 1 an |
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PreAligner
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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il y a 1 an |
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SMIF
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8436daeb68
Eliminate SE generation warning.
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il y a 1 an |
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TM
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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il y a 1 an |
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VCE
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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il y a 1 an |
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AIRSYSChiller.cs
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6bbe2e529b
1.删除或注释 Venus ChamberType
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il y a 1 an |
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AdTecRF.cs
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0f905564d0
加入登录界面和权限管理
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il y a 1 an |
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AdixenTurboPump.cs
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b2406d6f78
1.添加signalTonwer ui界面
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il y a 1 an |
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CometRF.cs
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709c7a1c10
fixed the routing bug while B In B Out.
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il y a 1 an |
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DataDefine.cs
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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il y a 1 an |
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DeviceManager.cs
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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il y a 1 an |
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ESC5HighVoltage.cs
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f3bd6b016b
添加部分efem功能
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il y a 1 an |
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EdwardsPump.cs
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be22c5112d
TM 添加两个pump 串口23/24/25/26
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il y a 1 an |
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FinsPlc.cs
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c457973fa2
1.添加Revtech Match
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il y a 1 an |
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JetEPDBase.cs
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4ffafb6001
EFEM界面优化
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il y a 1 an |
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JetEfem.cs
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5fc13b3f0c
New Efem design
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il y a 1 an |
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JetKepler2200APM.cs
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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il y a 1 an |
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JetKepler2200BPM.cs
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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il y a 1 an |
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JetKepler2300PM.cs
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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il y a 1 an |
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JetPMBase.cs
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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il y a 1 an |
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JetVenusDEPM.cs
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0b8a98a845
IoDevice IoMagnet Add
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il y a 1 an |
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JetVenusSEPM.cs
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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il y a 1 an |
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JetVenusSEPMBase.cs
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56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
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il y a 1 an |
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LzMatch_Ethercat.cs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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il y a 1 an |
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PendulumValve.cs
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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il y a 1 an |
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PlasmaController.cs
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75710d35d8
RF Match.
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il y a 2 ans |
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RevtechMatch.cs
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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il y a 1 an |
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SMCChiller.cs
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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il y a 1 an |
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SkyPump.cs
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44fc6989ef
1、Remove FabConnect dll file;
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il y a 1 an |
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TruPlasmaRF.cs
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0b8a98a845
IoDevice IoMagnet Add
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il y a 1 an |
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TruPlasmaRF_Ethercat.cs
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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il y a 1 an |
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VirgoSignalTower.cs
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0f905564d0
加入登录界面和权限管理
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il y a 1 an |
lixiang
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存