PendulumValve.cs 16 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using Venus_RT.Modules;
  5. using MECF.Framework.Common.Communications;
  6. using MECF.Framework.Common.Equipment;
  7. using Venus_Core;
  8. using Aitex.Core.RT.SCCore;
  9. using Aitex.Core.RT.Event;
  10. using Aitex.Core.RT.Device;
  11. using Aitex.Core.RT.Log;
  12. using System.Threading.Tasks;
  13. using System.Collections.Concurrent;
  14. using Aitex.Core.Common.DeviceData;
  15. using MECF.Framework.Common.CommonData.DeviceData;
  16. using Aitex.Core.RT.DataCenter;
  17. using Venus_RT.Modules.PMs;
  18. namespace Venus_RT.Devices
  19. {
  20. class PendulumValve : IDevice
  21. {
  22. public enum Operation
  23. {
  24. SetPosition,
  25. GetPositionSP,
  26. Hold,
  27. OpenValve,
  28. CloseValve,
  29. SetPressure,
  30. GetPressureSP,
  31. GetAssembly,
  32. GetPosition,
  33. GetPressure,
  34. GetSensor1Data,
  35. GetSensor2Data,
  36. GetPressureCtrlStatus,
  37. GetDeviceStatus,
  38. GetWarnings,
  39. GetSensorOffset,
  40. GetSensor1Offset,
  41. GetSensor2Offset,
  42. GetLearnStatus,
  43. GetLearnPressureLimit,
  44. GetErrorStatus,
  45. GetFatalErrorStatus,
  46. GetThrottleCycleCounter,
  47. GetIsolationCycleCounter,
  48. GetPowerUpCounter,
  49. GetHardwareConfiguration,
  50. GetFirmwareConfiguration,
  51. GetIdentification,
  52. SetAccessMode,
  53. SetInterfaceConfiguration,
  54. SetValveConfiguration,
  55. SetSensorConfiguration,
  56. SetRangeConfiguration,
  57. SetZero,
  58. SetPressureAlignment,
  59. SetLearn,
  60. DownloadLearnData,
  61. UploadLearnData,
  62. SetPIDConfiguration,
  63. GetPIDConfiguration,
  64. SetValveSpeed,
  65. GetValveSpeed,
  66. Reset,
  67. Invalid,
  68. }
  69. private readonly Dictionary<Operation, string> _noneParaCommandOp = new Dictionary<Operation, string>
  70. {
  71. {Operation.GetPositionSP, "i:38" },
  72. {Operation.Hold, "H:" },
  73. {Operation.CloseValve, "C:" },
  74. {Operation.OpenValve, "O:" },
  75. {Operation.GetPressureSP, "i:38" },
  76. {Operation.GetAssembly, "i:76" },
  77. {Operation.GetPosition, "A:" },
  78. {Operation.GetPressure, "P:" },
  79. {Operation.GetSensor1Data, "i:64" },
  80. {Operation.GetSensor2Data, "i:65" },
  81. {Operation.GetPressureCtrlStatus, "i:36" },
  82. {Operation.GetDeviceStatus, "i:30" },
  83. {Operation.GetWarnings, "i:35" },
  84. {Operation.GetSensorOffset, "i:62" },
  85. {Operation.GetSensor1Offset, "i:60" },
  86. {Operation.GetSensor2Offset, "i:61" },
  87. {Operation.GetLearnStatus, "i:32" },
  88. {Operation.GetLearnPressureLimit, "i:34" },
  89. {Operation.GetErrorStatus, "i:52" },
  90. {Operation.GetFatalErrorStatus, "i:50" },
  91. {Operation.GetThrottleCycleCounter, "i:70" },
  92. {Operation.GetIsolationCycleCounter, "i:71" },
  93. {Operation.GetPowerUpCounter, "i:72" },
  94. {Operation.GetHardwareConfiguration, "i:80" },
  95. {Operation.GetFirmwareConfiguration, "i:82" },
  96. {Operation.GetIdentification, "i:83" },
  97. };
  98. private readonly Dictionary<Operation, string> _singleParaCommandOp = new Dictionary<Operation, string>
  99. {
  100. {Operation.SetPosition, "R:{0:D6}" },
  101. {Operation.SetPressure, "S:{0:D8}" },
  102. {Operation.SetAccessMode, "c:01{0:D2}" },
  103. {Operation.SetInterfaceConfiguration, "s:20{0:D8}" },
  104. {Operation.SetValveConfiguration, "s:04{0:D2}000000" },
  105. {Operation.SetSensorConfiguration, "s:01{0:D8}" },
  106. {Operation.SetRangeConfiguration, "s:21{0:D8}" },
  107. {Operation.SetPressureAlignment, "c:6002{0:D8}" },
  108. {Operation.SetLearn, "L:{0:D8}" },
  109. {Operation.UploadLearnData, "u:{0:D3}" },
  110. {Operation.SetPIDConfiguration, "s:02{0:D8}" },
  111. {Operation.SetValveSpeed, "V:00{0:D4}" }
  112. };
  113. private readonly Dictionary<Operation, string> _twoParaCommandOp = new Dictionary<Operation, string>
  114. {
  115. {Operation.DownloadLearnData, "d:{0:D3}{1:D8}" }
  116. };
  117. private readonly Dictionary<string, string> _deviceError = new Dictionary<string, string>
  118. {
  119. {"000001", "Parity error" },
  120. {"000002", "Input buffer overflow (to many characters) " },
  121. {"000003", "Framing error (data length, number of stop bits)" },
  122. {"000010", "<CR> or <LF> missing" },
  123. {"000011", ": missing" },
  124. {"000012", "Invalid number of characters (between : and [CR][LF])" },
  125. {"000020", "Unknown command" },
  126. {"000021", "Unknown command" },
  127. {"000022", "Invalid value" },
  128. {"000023", "Invalid value" },
  129. {"000030", "Value out of range" },
  130. {"000041", "Command not applicable for hardware configuration" },
  131. {"000060", "ZERO disabled" },
  132. {"000080", "Command not accepted due to local operation" },
  133. {"000082", "Command not accepted due to synchronization, CLOSED or OPEN by digital input, safety mode or fatal error" },
  134. };
  135. public string Module { get; set; }
  136. public string Name { get; set; }
  137. public int Pressure { get; private set; }
  138. public int Position { get; private set; }
  139. public string Status { get; private set; }
  140. public bool IsOpen { get; private set; }
  141. private readonly string EOF = "\r\n";
  142. private readonly int _readInterval = 1000;
  143. private readonly int _position_unit = 100;
  144. private readonly int _pressure_ful_range = 500;
  145. private int _queryFlag = 0;
  146. private readonly AsyncSerialPort _serial;
  147. private Stopwatch _queryWatch = new Stopwatch();
  148. private string _lastAlarmString = string.Empty;
  149. private Operation[] _querys = new Operation[] { Operation.GetPressure, Operation.GetPosition, Operation.GetDeviceStatus, Operation.GetPressureSP };
  150. BlockingCollection<string> blockingCollection = new BlockingCollection<string>();
  151. public AITPendulumValveData DeviceData
  152. {
  153. get
  154. {
  155. AITPendulumValveData deviceData = new AITPendulumValveData
  156. {
  157. DeviceName = Name,
  158. Module = Module,
  159. Pressure = Pressure,
  160. IsOpen = IsOpen,
  161. Position = IsOpen ? Position : 0,
  162. };
  163. return deviceData;
  164. }
  165. }
  166. public PendulumValve(ModuleName mod)
  167. {
  168. Name = VenusDevice.PendulumValve.ToString();
  169. Module = mod.ToString();
  170. var _PortNum = SC.GetStringValue($"{mod}.PendulumValve.Port");
  171. _serial = new AsyncSerialPort(_PortNum, 9600, 8, System.IO.Ports.Parity.None, System.IO.Ports.StopBits.One, EOF);
  172. _pressure_ful_range = SC.GetValue<int>($"{mod}.PendulumValve.PressureFullRange");
  173. IsOpen = false;
  174. Task.Run(() =>
  175. {
  176. foreach (var data in blockingCollection.GetConsumingEnumerable())
  177. {
  178. _serial?.Write(data);
  179. System.Threading.Thread.Sleep(100);
  180. }
  181. });
  182. }
  183. public bool Initialize()
  184. {
  185. DATA.Subscribe($"{Module}.{Name}.DeviceData", () => DeviceData);
  186. if (!_serial.Open())
  187. {
  188. _noRepeatAlarm("Pendulum Valve 串口无法打开");
  189. return false;
  190. }
  191. _serial.OnDataChanged += OnPortDataChanged;
  192. _serial.OnErrorHappened += OnErrorOccurred;
  193. _queryWatch.Restart();
  194. return true;
  195. }
  196. public void Monitor()
  197. {
  198. if(_queryWatch.ElapsedMilliseconds > _readInterval)
  199. {
  200. SendCommand(_querys[_queryFlag++ % 4]);
  201. _queryWatch.Restart();
  202. }
  203. }
  204. public void Reset()
  205. {
  206. }
  207. public void Terminate()
  208. {
  209. _serial?.Close();
  210. }
  211. private void OnErrorOccurred(string obj)
  212. {
  213. _noRepeatAlarm($"[{Module}] VAT Pendulum Valve error: [{obj}]");
  214. }
  215. private void OnPortDataChanged(string obj)
  216. {
  217. if (string.IsNullOrEmpty(obj))
  218. {
  219. _noRepeatAlarm("VAT Pendulum Valve receive empty message");
  220. return;
  221. }
  222. try
  223. {
  224. var data = obj.TrimEnd().Split(':');
  225. switch(data[0])
  226. {
  227. case "P":
  228. {
  229. int pressure;
  230. if (int.TryParse(data[1], out pressure))
  231. Pressure = pressure * _pressure_ful_range / 1000000;
  232. }
  233. break;
  234. case "A":
  235. {
  236. int position;
  237. if (int.TryParse(data[1], out position))
  238. Position = position / _position_unit;
  239. }
  240. break;
  241. case "i":
  242. {
  243. _tryParseInqueryData(obj);
  244. }
  245. break;
  246. case "C":
  247. case "O":
  248. case "H":
  249. case "R":
  250. case "S":
  251. break;
  252. case "E":
  253. {
  254. _noRepeatAlarm($"[{Module}] VAT Pendulum Valve device error: {_deviceError[data[1]]}");
  255. }
  256. break;
  257. default:
  258. {
  259. _noRepeatAlarm($"VAT Pendulum Valve: unrecognized received data: {obj}");
  260. break;
  261. }
  262. }
  263. }
  264. catch (Exception ex)
  265. {
  266. _noRepeatAlarm($"[{Module}] VAT Pendulum Valve error: [{ex.Message}], Data: {obj}");
  267. }
  268. }
  269. private bool SendCommand(Operation op)
  270. {
  271. if(_noneParaCommandOp.ContainsKey(op))
  272. {
  273. blockingCollection.Add(_noneParaCommandOp[op] + EOF);
  274. return true;
  275. //return _serial.Write(_noneParaCommandOp[op] + EOF);
  276. }
  277. else
  278. {
  279. return false;
  280. }
  281. }
  282. private bool SendCommand(Operation op, int data)
  283. {
  284. if(_singleParaCommandOp.ContainsKey(op))
  285. {
  286. var cmd = string.Format(_singleParaCommandOp[op], data) + EOF;
  287. return _sendCmd(cmd);
  288. }
  289. else
  290. {
  291. _noRepeatAlarm("This VAT Pendulum Valve command need 1 data");
  292. return false;
  293. }
  294. }
  295. private bool _sendCmd(string cmd)
  296. {
  297. blockingCollection.Add(cmd);
  298. return true;
  299. //return _serial.Write(cmd);
  300. }
  301. private void _noRepeatAlarm(string alarm)
  302. {
  303. if (_lastAlarmString != alarm)
  304. {
  305. _lastAlarmString = alarm;
  306. LOG.Write(eEvent.ERR_PENDULUM_VALVE, ModuleHelper.Converter(Module), alarm);
  307. EV.PostAlarmLog(Module, alarm);
  308. }
  309. }
  310. private bool _tryParseInqueryData(string data)
  311. {
  312. var cmdPrix = data.Substring(0, 4);
  313. Operation oper = Operation.Invalid;
  314. foreach( var item in _noneParaCommandOp)
  315. {
  316. if(item.Value == cmdPrix)
  317. {
  318. oper = item.Key;
  319. break;
  320. }
  321. }
  322. if( oper == Operation.Invalid)
  323. {
  324. return false;
  325. }
  326. switch(oper)
  327. {
  328. case Operation.GetDeviceStatus:
  329. {
  330. Status = data.Substring(4, 8);
  331. if(Status[1] == 'E')
  332. {
  333. // Fatal Error
  334. _noRepeatAlarm($"Device Status error:{Status}");
  335. }
  336. else if(Status[3] == '1')
  337. {
  338. // Warning Present
  339. _noRepeatAlarm($"Device Warning Present:{Status}");
  340. }
  341. }
  342. break;
  343. case Operation.GetPressureSP:
  344. case Operation.GetPositionSP:
  345. {
  346. string Pressure = data.Substring(4, 8);
  347. //LOG.Write(eEvent.EV_DEVICE_INFO, Module, $" PV Pressure SetPoint: {Pressure}");
  348. }
  349. break;
  350. default:
  351. break;
  352. }
  353. return true;
  354. }
  355. public bool SetPosition(int postion)
  356. {
  357. if(_CheckStatus())
  358. {
  359. IsOpen = postion > 0;
  360. return SendCommand(Operation.SetPosition, postion * _position_unit);
  361. }
  362. return false;
  363. }
  364. public bool SetPressure(int pressure)
  365. {
  366. if(_CheckStatus())
  367. {
  368. IsOpen = true;
  369. return SendCommand(Operation.SetPressure, pressure * 1000000 / _pressure_ful_range);
  370. }
  371. return false;
  372. }
  373. public bool Hold()
  374. {
  375. return SendCommand(Operation.Hold);
  376. }
  377. public bool TurnValve(bool on)
  378. {
  379. if(_CheckStatus(on))
  380. {
  381. IsOpen = on;
  382. if (IsOpen == false)
  383. {
  384. SetPosition(0);
  385. SetPressure(0);
  386. }
  387. return SendCommand(on ? Operation.OpenValve : Operation.CloseValve);
  388. }
  389. return false;
  390. }
  391. bool _CheckStatus(bool bTurnOn = false)
  392. {
  393. if (Status != null && Status[1] == 'E')
  394. {
  395. _noRepeatAlarm($"PendulumValve is error status, can do turn on/off operation.");
  396. return false;
  397. }
  398. var _chamber = DEVICE.GetDevice<JetPMBase>(Module);
  399. if (bTurnOn && !_chamber.IsTurboPumpAtSpeed)
  400. {
  401. _noRepeatAlarm($"Turbo Pump not at speed, can not turn on pendulum valve.");
  402. return false;
  403. }
  404. if (_chamber.ForelinePressure > 750)
  405. {
  406. LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"Foreline Pressure:{_chamber.ForelinePressure} is higher than 500mtorr, can not turn on pendulum valve.");
  407. //_noRepeatAlarm($"Foreline Pressure:{_chamber.ForelinePressure} is too high, can not turn on pendulum valve.");
  408. return false;
  409. }
  410. if(_chamber.ProcessHighPressure > 600 && _chamber.TurboPumpSpeed > 100)
  411. {
  412. LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"Chamber Pressure:{_chamber.ChamberPressure} is higher than 600mtorr and Chamber.TurboPumpSpeed is higher than 100, can not turn on pendulum valve.");
  413. //_noRepeatAlarm($"Foreline Pressure:{_chamber.ForelinePressure} is too high, can not turn on pendulum valve.");
  414. return false;
  415. }
  416. return true;
  417. }
  418. }
  419. }