SimulatorSystem.cs 144 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. using MECF.Framework.Common.CommonData;
  15. using MECF.Framework.Common.DataCenter;
  16. using System.Configuration;
  17. namespace Venus_Simulator.Instances
  18. {
  19. public class SimulatorSystem : Singleton<SimulatorSystem>
  20. {
  21. private PeriodicJob _thread;
  22. private Random _rd = new Random();
  23. ConfigType type;
  24. private RD_TRIG _trigATM = new RD_TRIG();
  25. private RD_TRIG _trigVAC = new RD_TRIG();
  26. private R_TRIG _trigLLExtend = new R_TRIG();
  27. private R_TRIG _trigLLRetract = new R_TRIG();
  28. private static int count = 0;
  29. private readonly float ATM_THRESHOLD = 750000;
  30. private readonly float ATM_PRESSURE = 760000;
  31. private readonly float ATM_LoadLock_PRESSURE = 760000;
  32. private readonly uint VAC_SW_PRESSURE = 9500;
  33. private readonly uint PROCESS_GAUGE = 10000;
  34. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  35. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  36. public SimulatorSystem()
  37. {
  38. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  39. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  40. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  41. // TODO
  42. var section = ConfigurationManager.GetSection("customSettings") as System.Collections.Specialized.NameValueCollection;
  43. type = (ConfigType)Convert.ToInt32(section["SimulatorType"]);
  44. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  45. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  46. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  47. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  48. }
  49. ~SimulatorSystem()
  50. {
  51. _thread?.Stop();
  52. }
  53. public void Initialize()
  54. {
  55. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  56. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  57. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  58. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  59. if (type == ConfigType.Kepler2200)
  60. {
  61. SetKepler2200TMDefaultValue();
  62. }
  63. else if (type == ConfigType.Kepler2300)
  64. {
  65. SetKepler2300TMDefaultValue();
  66. }
  67. else if (type == ConfigType.VenusSE)
  68. {
  69. SetSETMDefaultValue();
  70. }
  71. else if (type == ConfigType.VenusDE)
  72. {
  73. SetDETMDefaultValue();
  74. }
  75. Singleton<DataManager>.Instance.Initialize(false);
  76. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  77. }
  78. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  79. {
  80. switch (jetChamber)
  81. {
  82. case JetChamber.VenusSE:
  83. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  84. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  85. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  86. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  87. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  88. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  89. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  90. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  91. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  92. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  93. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  94. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  95. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  96. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  98. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  99. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  100. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  101. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  102. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  103. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  104. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  105. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  106. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  107. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  108. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  109. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  110. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  111. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  112. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  113. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  114. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  115. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  116. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  117. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  118. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  119. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  120. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  121. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  122. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  123. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  124. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  125. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  126. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  127. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  128. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  129. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  130. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  131. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  132. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  133. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  134. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  135. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  136. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  137. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  138. //// pressure
  139. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  140. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  141. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  142. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  143. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  144. //// Temperature
  145. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  146. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  147. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  148. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  149. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  150. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  151. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  152. // Datetime
  153. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  154. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  155. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  156. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  157. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  158. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  159. break;
  160. case JetChamber.VenusDE:
  161. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  162. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  163. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  164. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  165. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  166. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  167. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  168. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  169. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  170. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  171. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  172. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  173. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  174. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  175. IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  176. IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false;
  177. IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  178. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  179. IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false;
  180. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  181. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  182. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  183. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  184. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  185. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  186. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  187. //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  188. //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  189. //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  190. //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  191. //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  192. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  195. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  196. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  197. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  198. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  199. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  200. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  201. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  202. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  203. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  204. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  205. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  206. //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  207. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  208. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  209. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  210. IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true;
  211. IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true;
  212. //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  213. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  214. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  215. //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  216. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  217. //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  218. //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  219. //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  220. //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  221. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  222. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  223. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  224. IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true;
  225. //// pressure
  226. SetAiValue($"{mod}.AI_Process_Pressure_1t", 100);
  227. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  228. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  229. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  230. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  231. //// Temperature
  232. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  233. //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27);
  234. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  235. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28);
  236. //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27);
  237. SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28);
  238. SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27);
  239. SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28);
  240. SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28);
  241. // Datetime
  242. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  243. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  244. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  245. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  246. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  247. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  248. break;
  249. case JetChamber.Kepler2300:
  250. // chamber
  251. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  252. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  253. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  254. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  255. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  256. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  257. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  258. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  259. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  260. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  261. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  262. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  264. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  265. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  266. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  267. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  268. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  269. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  270. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  271. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  272. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  273. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  274. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  275. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  276. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  277. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  278. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  279. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  280. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  281. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  282. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  283. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  284. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  285. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  286. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  287. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  288. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  289. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  290. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  291. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  292. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  293. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  294. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  295. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  296. //// pressure
  297. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  298. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  299. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  300. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  301. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  302. //// Temperature
  303. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  304. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  305. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  306. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  307. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  308. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  309. // Datetime
  310. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  311. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  312. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  313. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  314. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  315. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  316. break;
  317. case JetChamber.Kepler2200A:
  318. case JetChamber.Kepler2200B:
  319. if (jetChamber == JetChamber.Kepler2200B)
  320. {
  321. IO.DI[$"{mod}.DI_RF_Box_Interlock"].Value = true;
  322. }
  323. IO.DI[$"{mod}.DI_Wafer_Transfer_Posi_SW"].Value = true;
  324. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  325. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  326. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  327. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  328. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  329. IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
  330. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  331. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  332. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  333. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  334. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  335. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  336. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  337. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  338. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  339. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  340. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  341. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  342. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  343. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  344. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  345. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  346. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  347. IO.DI[$"{mod}.DI_GasBox_N2_Flow_Switch"].Value = true;
  348. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  349. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  350. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  351. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  352. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  353. //IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  354. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  355. IO.DI[$"{mod}.DI_CHB_Water_Flow_Switch"].Value = true;
  356. //IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  357. //// pressure
  358. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 100);
  359. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 100);
  360. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  361. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  362. //// Temperature
  363. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  364. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  365. SetAiValue($"{mod}.AI_Penning_Gauge_Pressure1", 100);
  366. // Datetime
  367. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  368. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  369. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  370. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  371. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  372. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  373. break;
  374. }
  375. }
  376. private void SetKepler2200TMDefaultValue()
  377. {
  378. ModuleName mod = ModuleName.TM;
  379. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  380. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  381. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  382. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  383. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  384. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  385. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  386. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  387. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  388. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  389. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  390. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  391. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  392. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  393. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  394. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  395. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  396. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  397. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  398. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  399. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  400. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  401. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  402. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  403. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  404. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  405. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  406. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  407. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  408. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  409. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  410. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  411. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  412. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  413. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  414. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  415. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  416. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  417. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  418. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  419. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  420. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  421. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  422. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  423. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  424. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  425. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  426. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  427. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  428. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  429. // Datetime
  430. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  431. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  432. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  433. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  434. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  435. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  436. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  437. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  438. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  439. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  440. {
  441. SetAiValue($"{mod}.AI_TM_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  442. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  443. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  444. }
  445. else
  446. {
  447. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 666);
  448. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 666);
  449. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 666);
  450. }
  451. }
  452. private void SetKepler2300TMDefaultValue()
  453. {
  454. ModuleName mod = ModuleName.TM;
  455. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  456. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  457. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  458. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  459. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  460. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  461. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  462. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  463. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  464. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  465. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  466. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  467. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  468. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  469. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  470. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  471. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  472. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  473. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  474. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  475. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  476. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  477. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  478. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  479. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  480. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  481. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  482. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  483. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  484. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  485. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  486. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  487. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  488. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  489. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  490. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  491. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  492. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  493. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  494. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  495. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  496. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  497. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  498. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  499. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  500. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  501. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  502. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  503. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  504. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  505. // Datetime
  506. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  507. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  508. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  509. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  510. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  511. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  512. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  513. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  514. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  515. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  516. {
  517. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  518. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  519. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  520. }
  521. else
  522. {
  523. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  524. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  525. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  526. }
  527. }
  528. private void SetSETMDefaultValue()
  529. {
  530. string mod = "SETM";
  531. IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true;
  532. IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true;
  533. IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  534. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  535. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  536. IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true;
  537. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  538. IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = true;
  539. IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = true;
  540. IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = true;
  541. IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = true;
  542. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  543. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false;
  544. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false;
  545. IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false;
  546. IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false;
  547. IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true;
  548. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  549. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  550. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  551. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  552. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  553. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  554. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  555. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  556. IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true;
  557. IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true;
  558. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  559. IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true;
  560. IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true;
  561. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false;
  562. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false;
  563. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true;
  564. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true;
  565. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true;
  566. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true;
  567. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  568. SetAiValue($"{mod}.AI_VCE_Pressure", 3000);
  569. SetAiValue($"{mod}.AI_Foreline_Pressure", 3000);
  570. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  571. }
  572. private void SetDETMDefaultValue()
  573. {
  574. string mod = "DETM";
  575. IO.DI[$"{mod}.DI_Smif1_Ready_to_load"].Value = true;
  576. IO.DI[$"{mod}.DI_Smif1_Ready_to_unload"].Value = true;
  577. IO.DI[$"{mod}.DI_Smif2_Ready_to_load"].Value = true;
  578. IO.DI[$"{mod}.DI_Smif2_Ready_to_unload"].Value = true;
  579. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  580. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  581. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  582. IO.DI[$"{mod}.DI_ROBOT_TO_VCEA_RETRACT"].Value = true;
  583. IO.DI[$"{mod}.DI_ROBOT_TO_VCEB_RETRACT"].Value = true;
  584. IO.DI[$"{mod}.DI_ROBOT_TO_PMA_RETRACT"].Value = true;
  585. IO.DI[$"{mod}.DI_ROBOT_TO_PMB_RETRACT"].Value = true;
  586. IO.DI[$"{mod}.DI_ROBOT_TO_PMC_RETRACT"].Value = true;
  587. IO.DI[$"{mod}.DI_ROBOT_TO_PMD_RETRACT"].Value = true;
  588. IO.DI[$"{mod}.DI_VCEA_Wafer_Sensor"].Value = true;
  589. IO.DI[$"{mod}.DI_VCEB_Wafer_Sensor"].Value = true;
  590. IO.DI[$"{mod}.DI_PMA_Wafer_Sensor"].Value = true;
  591. IO.DI[$"{mod}.DI_PMB_Wafer_Sensor"].Value = true;
  592. IO.DI[$"{mod}.DI_PMC_Wafer_Sensor"].Value = true;
  593. IO.DI[$"{mod}.DI_PMD_Wafer_Sensor"].Value = true;
  594. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  595. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  596. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  597. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  598. IO.DI[$"{mod}.DI_TM_N2_1_SW"].Value = true;
  599. IO.DI[$"{mod}.DI_TM_N2_2_SW"].Value = true;
  600. IO.DI[$"{mod}.DI_TM_CDA_SW"].Value = true;
  601. IO.DI[$"{mod}.DI_TM_He_SW"].Value = true;
  602. IO.DI[$"{mod}.DI_LEAK"].Value = true;
  603. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = true;
  604. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = true;
  605. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  606. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  607. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out1"].Value = false;
  608. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out2"].Value = false;
  609. IO.DI[$"{mod}.DI_FACTORY_SMOKE_Out"].Value = false;
  610. IO.DI[$"{mod}.DI_Abnormal_Exhaust_Gas"].Value = true;
  611. IO.DI[$"{mod}.DI_VCEA_Cassette_Present"].Value = true;
  612. IO.DI[$"{mod}.DI_VCEB_Cassette_Present"].Value = true;
  613. IO.DI[$"{mod}.DI_VCEA_ADR_LOCKED"].Value = true;
  614. IO.DI[$"{mod}.DI_VCEB_ADR_LOCKED"].Value = true;
  615. IO.DI[$"{mod}.DI_TM_LID_Close"].Value = true;
  616. IO.DI[$"{mod}.DI_LEFT_SMIF_READY"].Value = true;
  617. IO.DI[$"{mod}.DI_LEFT_SMIF_POD_INPLACE"].Value = true;
  618. IO.DI[$"{mod}.DI_RIGHT_SMIF_POD_INPLACE"].Value = true;
  619. IO.DI[$"{mod}.DI_LEFT_SMIF_ERROR"].Value = true;
  620. IO.DI[$"{mod}.DI_RIGHT_SMIF_ERROR"].Value = true;
  621. IO.DI[$"{mod}.DI_VCEA_EXTEND_ENABLE"].Value = true;
  622. IO.DI[$"{mod}.DI_VCEB_EXTEND_ENABLE"].Value = true;
  623. IO.DI[$"{mod}.DI_PMA_EXTEND_ENABLE"].Value = true;
  624. IO.DI[$"{mod}.DI_PMB_EXTEND_ENABLE"].Value = true;
  625. IO.DI[$"{mod}.DI_PMC_EXTEND_ENABLE"].Value = true;
  626. IO.DI[$"{mod}.DI_EMO"].Value = false;
  627. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  628. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  629. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  630. SetAiValue($"{mod}.AI_Left_VCE_Pressure", 3000);
  631. SetAiValue($"{mod}.AI_Right_VCE_Pressure", 3000);
  632. SetAiValue($"{mod}.AI_VCE_Foreline_Pressure", 20);
  633. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 20);
  634. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  635. }
  636. private bool OnMonitor()
  637. {
  638. try
  639. {
  640. foreach (var item in jetChambers)
  641. {
  642. switch (item.Value)
  643. {
  644. case JetChamber.Kepler2300:
  645. MonitorSlitDoorInTM(item.Key);
  646. MonitorPin(item.Key);
  647. MonitorPressure_Kepler(item.Key);
  648. //MonitorTemperature(item.Key);
  649. MonitorGas(item.Key);
  650. this.SimulateHe(item.Key);
  651. //MonitorRF(item.Key);
  652. ChangeTime(item.Key);
  653. //MonitorIOPumpCtrl(item.Key);
  654. MonitorLid(item.Key);
  655. break;
  656. case JetChamber.Kepler2200A:
  657. case JetChamber.Kepler2200B:
  658. MonitorSlitDoorInTM(item.Key);
  659. MonitorPressure_Kepler2200(item.Key);
  660. //MonitorTemperature(item.Key);
  661. MonitorGas(item.Key);
  662. MonitorKeplerTMGas();
  663. // MonitorRF(item.Key);
  664. ChangeTime(item.Key);
  665. //MonitorIOPumpCtrl(item.Key);
  666. MonitorLid(item.Key);
  667. MonitorIOHighTemperatureHeater(item.Key);
  668. MonitorKepler2200Heater(item.Key);
  669. break;
  670. case JetChamber.VenusSE:
  671. MonitorPin(item.Key);
  672. //MonitorVenuSESlitDoor(item.Key);
  673. MonitorSEPressure(item.Key);
  674. MonitorSEGas(item.Key);
  675. ChangeTime(item.Key);
  676. this.SimulateSEHe(item.Key);
  677. break;
  678. case JetChamber.VenusDE:
  679. MonitorPin(item.Key);
  680. MonitorDEGas(item.Key);
  681. //MonitorVenuDESlitDoor(item.Key);
  682. MonitorDEPressure(item.Key);
  683. ChangeTime(item.Key);
  684. MonitorLinerDoor(item.Key);
  685. this.SimulateDEHe(item.Key);
  686. break;
  687. }
  688. }
  689. //ChangeTime(ModuleName.TM);
  690. if (type == ConfigType.Kepler2200)
  691. {
  692. ChangeTime(ModuleName.TM);
  693. MonitorMFSlitDoor();
  694. MonitorMFKepler2200Pressure();
  695. }
  696. else if (type == ConfigType.Kepler2300)
  697. {
  698. ChangeTime(ModuleName.TM);
  699. MonitorMFSlitDoor();
  700. MonitorMFKepler2300Pressure();
  701. }
  702. else if (type == ConfigType.VenusSE)
  703. {
  704. MonitorSEMFSlitDoor();
  705. MonitorSEMFPressure();
  706. //MonitorDEMFSlitDoor();
  707. //MonitorDEMFPressure();
  708. }
  709. else if (type == ConfigType.VenusDE)
  710. {
  711. MonitorDEMFSlitDoor();
  712. MonitorDEMFPressure();
  713. }
  714. }
  715. catch (Exception e)
  716. {
  717. LOG.WriteExeption(e);
  718. }
  719. return true;
  720. }
  721. private void ChangeTime(ModuleName mod)
  722. {
  723. // Heartbeat with PLC
  724. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  725. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  726. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  727. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  728. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  729. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  730. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  731. }
  732. //void MonitorVenuSESlitDoor(ModuleName mod)
  733. //{
  734. //}
  735. void MonitorSlitDoorInPM(ModuleName mod)
  736. {
  737. // slit door open
  738. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  739. {
  740. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  741. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  742. }
  743. // slit door close
  744. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  745. {
  746. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  747. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  748. }
  749. }
  750. void MonitorLinerDoor(ModuleName mod)
  751. {
  752. // slit door open
  753. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Open"].Value)
  754. {
  755. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  756. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  757. }
  758. // slit door close
  759. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Close"].Value)
  760. {
  761. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = false;
  762. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = true;
  763. }
  764. }
  765. void MonitorSlitDoorInTM(ModuleName mod)
  766. {
  767. // slit door open
  768. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Open"].Value)
  769. {
  770. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  771. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  772. }
  773. // slit door close
  774. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Close"].Value)
  775. {
  776. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  777. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  778. }
  779. }
  780. void MonitorMFSlitDoor()
  781. {
  782. ModuleName mod = ModuleName.TM;
  783. // LLA T door open
  784. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  785. {
  786. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  787. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  788. }
  789. // LLB T door open
  790. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  791. {
  792. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  793. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  794. }
  795. // LLA E door open
  796. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  797. {
  798. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  799. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  800. }
  801. // LLB E door open
  802. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  803. {
  804. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  805. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  806. }
  807. // LLA T door close
  808. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  809. {
  810. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  811. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  812. }
  813. // LLB T door close
  814. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  815. {
  816. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  817. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  818. }
  819. // LLA E door close
  820. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  821. {
  822. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  823. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  824. }
  825. // LLB E door close
  826. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  827. {
  828. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  829. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  830. }
  831. // PMA slitdoor door close/open
  832. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  833. {
  834. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  835. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  836. }
  837. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  838. {
  839. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = true;
  840. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = false;
  841. }
  842. // PMB slitdoor door close/open
  843. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  844. {
  845. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  846. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  847. }
  848. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  849. {
  850. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = true;
  851. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = false;
  852. }
  853. // PMC slitdoor door close/open
  854. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  855. {
  856. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  857. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  858. }
  859. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  860. {
  861. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = true;
  862. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = false;
  863. }
  864. // PMD slitdoor door close/open
  865. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  866. {
  867. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  868. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  869. }
  870. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  871. {
  872. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = true;
  873. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = false;
  874. }
  875. }
  876. void MonitorSEMFSlitDoor()
  877. {
  878. string mod = "SETM";
  879. // VCE T door open
  880. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value)
  881. {
  882. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true;
  883. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false;
  884. }
  885. // VCE T door Close
  886. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value)
  887. {
  888. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  889. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  890. }
  891. //pma
  892. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value)
  893. {
  894. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true;
  895. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false;
  896. }
  897. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value)
  898. {
  899. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  900. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  901. }
  902. //pmb
  903. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value)
  904. {
  905. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true;
  906. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false;
  907. }
  908. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value)
  909. {
  910. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  911. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  912. }
  913. //pmc
  914. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value)
  915. {
  916. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true;
  917. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false;
  918. }
  919. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value)
  920. {
  921. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  922. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  923. }
  924. }
  925. void MonitorDEMFSlitDoor()
  926. {
  927. string mod = "DETM";
  928. // VCE L door open
  929. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Open"].Value)
  930. {
  931. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = true;
  932. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = false;
  933. }
  934. // VCE R door open
  935. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Open"].Value)
  936. {
  937. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = true;
  938. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = false;
  939. }
  940. // VCE L door Close
  941. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Close"].Value)
  942. {
  943. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  944. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  945. }
  946. // VCE R door Close
  947. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Close"].Value)
  948. {
  949. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  950. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  951. }
  952. //pma
  953. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  954. {
  955. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = true;
  956. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = false;
  957. }
  958. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  959. {
  960. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = false;
  961. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = true;
  962. }
  963. //pmb
  964. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  965. {
  966. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = true;
  967. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = false;
  968. }
  969. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  970. {
  971. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = false;
  972. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = true;
  973. }
  974. //pmc
  975. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  976. {
  977. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = true;
  978. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = false;
  979. }
  980. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  981. {
  982. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = false;
  983. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = true;
  984. }
  985. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  986. {
  987. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_POS"].Value = true;
  988. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_POS"].Value = false;
  989. }
  990. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  991. {
  992. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_POS"].Value = false;
  993. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_POS"].Value = true;
  994. }
  995. if (IO.DO[$"{mod}.DO_TM_Soft_Pump"].Value)
  996. {
  997. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  998. }
  999. else
  1000. {
  1001. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = false;
  1002. }
  1003. if (IO.DO[$"{mod}.DO_TM_Fast_Pump"].Value)
  1004. {
  1005. IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = true;
  1006. }
  1007. else
  1008. {
  1009. IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = false;
  1010. }
  1011. if (IO.DO[$"{mod}.DO_TM_Soft_Vent"].Value)
  1012. {
  1013. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  1014. }
  1015. else
  1016. {
  1017. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = false;
  1018. }
  1019. }
  1020. void MonitorPin(ModuleName mod)
  1021. {
  1022. // lift pin up
  1023. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  1024. {
  1025. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  1026. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  1027. }
  1028. }
  1029. void MonitorLid(ModuleName mod)
  1030. {
  1031. // lift pin up
  1032. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  1033. {
  1034. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  1035. }
  1036. }
  1037. void MonitorExtendAndRetract(ModuleName mod)
  1038. {
  1039. // Extend
  1040. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  1041. if (_trigLLExtend.Q)
  1042. {
  1043. _trigLLRetract.RST = true;
  1044. Thread.Sleep(500);
  1045. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  1046. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  1047. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1048. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1049. }
  1050. // Retract
  1051. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  1052. if (_trigLLRetract.Q)
  1053. {
  1054. count++;
  1055. _trigLLExtend.RST = true;
  1056. Thread.Sleep(500);
  1057. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  1058. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  1059. if (count == 1)
  1060. {
  1061. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1062. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1063. }
  1064. else if (count == 2)
  1065. {
  1066. count = 0;
  1067. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  1068. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1069. }
  1070. }
  1071. }
  1072. void MonitorPressure(ModuleName mod)
  1073. {
  1074. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  1075. // Loadlock pressure
  1076. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  1077. // Foreline
  1078. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1079. {
  1080. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1081. }
  1082. else
  1083. {
  1084. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1085. }
  1086. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1087. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1088. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1089. //float chamber_pressure = GetMockChamberPressure(mod);
  1090. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1091. // soft pump & fast pump
  1092. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1093. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1094. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1095. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1096. {
  1097. //任意泵打开
  1098. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1099. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1100. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1101. {//开双泵
  1102. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1103. {
  1104. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1105. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1106. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1107. }
  1108. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1109. {
  1110. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1111. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1112. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1113. }
  1114. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1115. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1116. }
  1117. else if (fast_pump_vlv.Value)//开
  1118. {
  1119. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1120. {
  1121. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1122. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1123. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1124. }
  1125. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1126. {
  1127. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1128. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1129. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1130. }
  1131. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1132. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1133. }
  1134. else if (soft_pump_vlv.Value)
  1135. {
  1136. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1137. {
  1138. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1139. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1140. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1141. }
  1142. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1143. {
  1144. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1145. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1146. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1147. }
  1148. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1149. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1150. }
  1151. else if (turbo_pump_vlv.Value)
  1152. {
  1153. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1154. if ((getAiValue_ChamberPressure - 500) >= 0)
  1155. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1156. else
  1157. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1158. if ((getAiValue_ProcessPressure - 500) >= 0)
  1159. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1160. else
  1161. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1162. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1163. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1164. }
  1165. }
  1166. // fast vent & purge
  1167. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1168. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  1169. //if (vent_vlv.Value || purge_vlv.Value)
  1170. //{
  1171. // if (vent_vlv.Value && purge_vlv.Value)
  1172. // {
  1173. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1174. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1175. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1176. // {
  1177. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  1178. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1179. // }
  1180. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1181. // {
  1182. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1183. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1184. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1185. // }
  1186. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  1187. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  1188. // }
  1189. // else
  1190. //
  1191. if (vent_vlv.Value)
  1192. {
  1193. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1194. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1195. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1196. {
  1197. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1198. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1199. }
  1200. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1201. {
  1202. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1203. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1204. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1205. }
  1206. else
  1207. {
  1208. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1209. }
  1210. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1211. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1212. }
  1213. // Loadlock Pumping Valve
  1214. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  1215. if (Loadlock_pump_vlv.Value)
  1216. {
  1217. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  1218. }
  1219. // Loadlock vent
  1220. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  1221. if (Loadlock_vent_vlv.Value)
  1222. {
  1223. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  1224. }
  1225. // 压力值越界,复位
  1226. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1227. if (chamber_pressure1 > ATM_PRESSURE)
  1228. {
  1229. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1230. }
  1231. else if (chamber_pressure1 < 20)
  1232. {
  1233. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1234. }
  1235. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1236. if (process_pressure1 > PROCESS_GAUGE)
  1237. {
  1238. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1239. }
  1240. else if (process_pressure1 < 20)
  1241. {
  1242. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1243. }
  1244. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1245. if (foreline_pressure > 10000)
  1246. {
  1247. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  1248. }
  1249. else if (foreline_pressure < 150)
  1250. {
  1251. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  1252. }
  1253. // 模拟压力计漂移
  1254. //int p1 = (int)GetMockChamberPressure(mod);
  1255. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  1256. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  1257. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  1258. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  1259. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  1260. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1261. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  1262. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  1263. // 根据当前压力值设定信号
  1264. //float chamber_pressure2 = GetMockChamberPressure(mod);
  1265. // ATM switch
  1266. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1267. // VAC switch
  1268. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1269. // Throttle valve
  1270. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  1271. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  1272. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  1273. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  1274. // 压力值
  1275. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1276. //{
  1277. // short increase = (short)_rd.Next(20, 30);
  1278. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  1279. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1280. // {
  1281. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1282. // }
  1283. //}
  1284. //else
  1285. //{
  1286. // short increase = (short)_rd.Next(20, 30);
  1287. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  1288. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1289. // {
  1290. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1291. // }
  1292. //}
  1293. //// 位置值
  1294. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1295. //{
  1296. // short increase = (short)_rd.Next(20, 30);
  1297. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  1298. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1299. // {
  1300. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1301. // }
  1302. //}
  1303. //else
  1304. //{
  1305. // short increase = (short)_rd.Next(20, 30);
  1306. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  1307. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1308. // {
  1309. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1310. // }
  1311. //}
  1312. }
  1313. void MonitorSEPressure(ModuleName mod)
  1314. {
  1315. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1316. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1317. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1318. // Foreline
  1319. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1320. {
  1321. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1322. }
  1323. else
  1324. {
  1325. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1326. }
  1327. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1328. // soft pump & fast pump
  1329. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1330. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1331. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1332. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1333. {
  1334. //任意泵打开
  1335. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1336. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1337. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1338. {//开双泵
  1339. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1340. {
  1341. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1342. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1343. }
  1344. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1345. {
  1346. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1347. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1348. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1349. }
  1350. }
  1351. else if (fast_pump_vlv.Value)//开
  1352. {
  1353. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1354. {
  1355. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1356. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1357. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1358. }
  1359. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1360. {
  1361. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1362. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1363. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1364. }
  1365. }
  1366. else if (soft_pump_vlv.Value)
  1367. {
  1368. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1369. {
  1370. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1371. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1372. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1373. }
  1374. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1375. {
  1376. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1377. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1378. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1379. }
  1380. }
  1381. else if (turbo_pump_vlv.Value)
  1382. {
  1383. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1384. if ((getAiValue_ChamberPressure - 500) >= 0)
  1385. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1386. else
  1387. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1388. if ((getAiValue_ProcessPressure - 500) >= 0)
  1389. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1390. else
  1391. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1392. }
  1393. }
  1394. // fast vent & purge
  1395. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1396. if (vent_vlv.Value)
  1397. {
  1398. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1399. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1400. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1401. {
  1402. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1403. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1404. }
  1405. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1406. {
  1407. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1408. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1409. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1410. }
  1411. else
  1412. {
  1413. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1414. }
  1415. }
  1416. // Loadlock Pumping Valve
  1417. // 压力值越界,复位
  1418. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1419. if (chamber_pressure1 > ATM_PRESSURE)
  1420. {
  1421. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1422. }
  1423. else if (chamber_pressure1 < 20)
  1424. {
  1425. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1426. }
  1427. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1428. if (process_pressure1 > PROCESS_GAUGE)
  1429. {
  1430. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1431. }
  1432. else if (process_pressure1 < 20)
  1433. {
  1434. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1435. }
  1436. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1437. if (foreline_pressure > 1999)
  1438. {
  1439. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999);
  1440. }
  1441. else if (foreline_pressure < 150)
  1442. {
  1443. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1444. }
  1445. // ATM switch
  1446. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1447. // VAC switch
  1448. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1449. }
  1450. void MonitorDEPressure(ModuleName mod)
  1451. {
  1452. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1453. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1454. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1455. // Foreline
  1456. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1457. {
  1458. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1459. }
  1460. else
  1461. {
  1462. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1463. }
  1464. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1465. // soft pump & fast pump
  1466. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1467. //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1468. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1469. if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
  1470. {
  1471. //任意泵打开
  1472. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1473. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1474. if (fast_pump_vlv.Value)
  1475. {//开双泵
  1476. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1477. {
  1478. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1479. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1480. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1481. }
  1482. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1483. {
  1484. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1485. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1486. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1487. }
  1488. }
  1489. else if (turbo_pump_vlv.Value)
  1490. {
  1491. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1492. if ((getAiValue_ChamberPressure - 500) >= 0)
  1493. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1494. else
  1495. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1496. if ((getAiValue_ProcessPressure - 500) >= 0)
  1497. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1498. else
  1499. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1500. }
  1501. }
  1502. // fast vent & purge
  1503. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1504. if (vent_vlv.Value)
  1505. {
  1506. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1507. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1508. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1509. {
  1510. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1511. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1512. }
  1513. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1514. {
  1515. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1516. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1517. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1518. }
  1519. else
  1520. {
  1521. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1522. }
  1523. }
  1524. // Loadlock Pumping Valve
  1525. // 压力值越界,复位
  1526. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1527. if (chamber_pressure1 > ATM_PRESSURE)
  1528. {
  1529. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1530. }
  1531. else if (chamber_pressure1 < 20)
  1532. {
  1533. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1534. }
  1535. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1536. if (process_pressure1 > PROCESS_GAUGE)
  1537. {
  1538. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1539. }
  1540. else if (process_pressure1 < 20)
  1541. {
  1542. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1543. }
  1544. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1545. if (foreline_pressure > 10000)
  1546. {
  1547. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1548. }
  1549. else if (foreline_pressure < 150)
  1550. {
  1551. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1552. }
  1553. // ATM switch
  1554. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1555. // VAC switch
  1556. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1557. }
  1558. void MonitorPressure_Kepler(ModuleName mod)
  1559. {
  1560. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1561. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1562. {
  1563. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1564. }
  1565. else
  1566. {
  1567. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1568. }
  1569. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1570. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1571. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1572. //float chamber_pressure = GetMockChamberPressure(mod);
  1573. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1574. // soft pump & fast pump
  1575. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1576. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1577. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1578. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1579. {
  1580. //任意泵打开
  1581. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1582. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1583. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1584. {//开双泵
  1585. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1586. {
  1587. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1588. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1589. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1590. }
  1591. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1592. {
  1593. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1594. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1595. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1596. }
  1597. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1598. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1599. }
  1600. else if (fast_pump_vlv.Value)//开
  1601. {
  1602. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1603. {
  1604. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1605. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1606. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1607. }
  1608. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1609. {
  1610. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1611. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1612. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1613. }
  1614. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1615. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1616. }
  1617. else if (soft_pump_vlv.Value)
  1618. {
  1619. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1620. {
  1621. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1622. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1623. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1624. }
  1625. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1626. {
  1627. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1628. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1629. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1630. }
  1631. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1632. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1633. }
  1634. else if (turbo_pump_vlv.Value)
  1635. {
  1636. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1637. if ((getAiValue_ChamberPressure - 500) >= 0)
  1638. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1639. else
  1640. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1641. if ((getAiValue_ProcessPressure - 500) >= 0)
  1642. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1643. else
  1644. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1645. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1646. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1647. }
  1648. }
  1649. // fast vent & purge
  1650. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1651. if (vent_vlv.Value)
  1652. {
  1653. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1654. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1655. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1656. {
  1657. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1658. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1659. }
  1660. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1661. {
  1662. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1663. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1664. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1665. }
  1666. else
  1667. {
  1668. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1669. }
  1670. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1671. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1672. }
  1673. // Loadlock Pumping Valve
  1674. // 压力值越界,复位
  1675. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1676. if (chamber_pressure1 > ATM_PRESSURE)
  1677. {
  1678. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1679. }
  1680. else if (chamber_pressure1 < 20)
  1681. {
  1682. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 1);
  1683. }
  1684. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1685. if (process_pressure1 > PROCESS_GAUGE)
  1686. {
  1687. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1688. }
  1689. else if (process_pressure1 < 20)
  1690. {
  1691. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1692. }
  1693. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1694. if (foreline_pressure > 10000)
  1695. {
  1696. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1697. }
  1698. else if (foreline_pressure < 150)
  1699. {
  1700. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1701. }
  1702. // ATM switch
  1703. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1704. // VAC switch
  1705. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1706. }
  1707. void MonitorPressure_Kepler2200(ModuleName mod)
  1708. {
  1709. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1710. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1711. {
  1712. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(50, 60));
  1713. }
  1714. else
  1715. {
  1716. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(50, 60));
  1717. }
  1718. //SetAiValue($"{mod}.{sAI_Foreline}", 3000);
  1719. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1720. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1721. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1722. //float chamber_pressure = GetMockChamberPressure(mod);
  1723. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1724. // soft pump & fast pump
  1725. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1726. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1727. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1728. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1729. {
  1730. //任意泵打开
  1731. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1732. //float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1733. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1734. {
  1735. //开双泵
  1736. if ((getAiValue_ChamberPressure - 12000) >= 0)
  1737. {
  1738. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 12000);
  1739. }
  1740. else
  1741. {
  1742. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1743. }
  1744. //if (getAiValue_ChamberPressure > 1000)
  1745. //{
  1746. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa( getAiValue_ChamberPressure - 3000 > 0 ? getAiValue_ChamberPressure - 3000 : 0);
  1747. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1748. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1749. //}
  1750. //else if ( getAiValue_ChamberPressure <= 1000)
  1751. //{
  1752. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 150 > 0 ? getAiValue_ProcessPressure - 150 : 0);
  1753. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1754. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1755. //}
  1756. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1757. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1758. }
  1759. else if (fast_pump_vlv.Value)//开
  1760. {
  1761. if ((getAiValue_ChamberPressure - 8000) >= 0)
  1762. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 8000);
  1763. else
  1764. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1765. }
  1766. else if (soft_pump_vlv.Value)
  1767. {
  1768. if ((getAiValue_ChamberPressure - 4000) >= 0)
  1769. {
  1770. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 4000);
  1771. }
  1772. else
  1773. {
  1774. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1775. }
  1776. //if (getAiValue_ChamberPressure > 5000)
  1777. //{
  1778. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ChamberPressure - 1000 > 0 ? getAiValue_ChamberPressure - 1000 : 0);
  1779. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1780. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1781. //}
  1782. //else if (getAiValue_ChamberPressure <= 1000)
  1783. //{
  1784. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 110 > 0 ? getAiValue_ProcessPressure - 110 : 0);
  1785. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1786. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1787. //}
  1788. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1789. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1790. }
  1791. else if (turbo_pump_vlv.Value)
  1792. {
  1793. if ((getAiValue_ChamberPressure - 50) >= 0)
  1794. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 50);
  1795. else
  1796. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1797. }
  1798. }
  1799. // fast vent & purge
  1800. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1801. DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"];
  1802. if (vent_vlv.Value && gas_final_vlv.Value)
  1803. {
  1804. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1805. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1806. if (getAiValue_ChamberPressure > 1000)
  1807. {
  1808. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1809. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1810. }
  1811. else if (getAiValue_ChamberPressure <= 1000)
  1812. {
  1813. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1814. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1815. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1816. }
  1817. else
  1818. {
  1819. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 2500);
  1820. }
  1821. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1822. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1823. }
  1824. // Loadlock Pumping Valve
  1825. // 压力值越界,复位
  1826. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1827. if (chamber_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  1828. {
  1829. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  1830. }
  1831. else if (chamber_pressure1 < 20)
  1832. {
  1833. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 0.5F);
  1834. }
  1835. //float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1836. //if (process_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(PROCESS_GAUGE))
  1837. //{
  1838. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1839. //}
  1840. //else if (process_pressure1 < 20)
  1841. //{
  1842. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1843. //}
  1844. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1845. if (foreline_pressure > 1000)
  1846. {
  1847. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1000);
  1848. }
  1849. else if (foreline_pressure < 15)
  1850. {
  1851. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 15);
  1852. }
  1853. // ATM switch
  1854. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  1855. // VAC switch
  1856. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  1857. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  1858. //var chamberPressure = GetAiValue($"{mod}.AI_Chamber_Pressure_10t");
  1859. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa( GetAiValue($"{mod}.AI_Chamber_Pressure_10t")));
  1860. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(GetAiValue($"{mod}.AI_Foreline_Pressure_10t")));
  1861. SetAiValue($"{mod}.{sAI_Foreline}",200);
  1862. }
  1863. void MonitorSEMFPressure()
  1864. {
  1865. string mod = "SETM";
  1866. string VCE_ChamberPressure = "AI_VCE_Pressure";
  1867. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1868. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"];
  1869. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"];
  1870. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1871. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1872. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"];
  1873. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"];
  1874. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"];
  1875. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"];
  1876. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1877. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1878. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1879. {
  1880. if (getAiValue_TM_ChamberPressure > 10000)
  1881. {
  1882. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1883. }
  1884. else if (getAiValue_TM_ChamberPressure <= 10000)
  1885. {
  1886. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1887. }
  1888. }
  1889. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1890. {
  1891. if (getAiValue_TM_ChamberPressure > 10000)
  1892. {
  1893. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1894. }
  1895. else if (getAiValue_TM_ChamberPressure <= 10000)
  1896. {
  1897. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1898. }
  1899. }
  1900. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1901. {
  1902. if (getAiValue_VCE_ChamberPressure > 10000)
  1903. {
  1904. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1905. }
  1906. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1907. {
  1908. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1909. }
  1910. }
  1911. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1912. {
  1913. if (getAiValue_VCE_ChamberPressure > 10000)
  1914. {
  1915. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1916. }
  1917. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1918. {
  1919. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1920. }
  1921. }
  1922. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1923. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1924. {
  1925. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1926. }
  1927. else if (getAiValue_VCE_ChamberPressure < 20)
  1928. {
  1929. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1930. }
  1931. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1932. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1933. {
  1934. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1935. }
  1936. else if (getAiValue_TM_ChamberPressure < 20)
  1937. {
  1938. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1939. }
  1940. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1941. // VAC switch
  1942. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1943. }
  1944. void MonitorDEMFPressure()
  1945. {
  1946. string mod = "DETM";
  1947. string AI_Left_VCE_Pressure = "AI_Left_VCE_Pressure";
  1948. string AI_Right_VCE_Pressure = "AI_Right_VCE_Pressure";
  1949. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1950. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pump"];
  1951. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pump"];
  1952. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1953. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1954. DOAccessor DO_VCEA_Fast_Pump = IO.DO[$"{mod}.DO_VCEA_Fast_Pump"];
  1955. DOAccessor DO_VCEA_Soft_Pump = IO.DO[$"{mod}.DO_VCEA_Soft_Pump"];
  1956. DOAccessor DO_VCEB_Fast_Pump = IO.DO[$"{mod}.DO_VCEB_Fast_Pump"];
  1957. DOAccessor DO_VCEB_Soft_Pump = IO.DO[$"{mod}.DO_VCEB_Soft_Pump"];
  1958. DOAccessor DO_VCEA_Fast_Vent = IO.DO[$"{mod}.DO_VCEA_Fast_Vent"];
  1959. DOAccessor DO_VCEA_Soft_Vent = IO.DO[$"{mod}.DO_VCEA_Soft_Vent"];
  1960. DOAccessor DO_VCEB_Fast_Vent = IO.DO[$"{mod}.DO_VCEB_Fast_Vent"];
  1961. DOAccessor DO_VCEB_Soft_Vent = IO.DO[$"{mod}.DO_VCEB_Soft_Vent"];
  1962. float getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1963. float getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1964. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1965. if (DO_VCEA_Fast_Pump.Value || DO_VCEA_Soft_Pump.Value)
  1966. {
  1967. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1968. {
  1969. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 30000);
  1970. }
  1971. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1972. {
  1973. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 1500);
  1974. }
  1975. }
  1976. if (DO_VCEB_Fast_Pump.Value || DO_VCEB_Soft_Pump.Value)
  1977. {
  1978. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1979. {
  1980. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 30000);
  1981. }
  1982. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1983. {
  1984. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 1500);
  1985. }
  1986. }
  1987. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1988. {
  1989. if (getAiValue_TM_ChamberPressure > 10000)
  1990. {
  1991. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1992. }
  1993. else if (getAiValue_TM_ChamberPressure <= 10000)
  1994. {
  1995. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1996. }
  1997. }
  1998. if (DO_VCEA_Fast_Vent.Value || DO_VCEA_Soft_Vent.Value)
  1999. {
  2000. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  2001. {
  2002. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 30000);
  2003. }
  2004. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  2005. {
  2006. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 1500);
  2007. }
  2008. }
  2009. if (DO_VCEB_Fast_Vent.Value || DO_VCEB_Soft_Vent.Value)
  2010. {
  2011. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  2012. {
  2013. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 30000);
  2014. }
  2015. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  2016. {
  2017. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 1500);
  2018. }
  2019. }
  2020. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2021. {
  2022. if (getAiValue_TM_ChamberPressure > 10000)
  2023. {
  2024. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2025. }
  2026. else if (getAiValue_TM_ChamberPressure <= 10000)
  2027. {
  2028. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2029. }
  2030. }
  2031. getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  2032. if (getAiValue_AI_Left_VCE_Pressure > ATM_PRESSURE)
  2033. {
  2034. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", ATM_PRESSURE);
  2035. }
  2036. else if (getAiValue_AI_Left_VCE_Pressure < 20)
  2037. {
  2038. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", 20);
  2039. }
  2040. getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  2041. if (getAiValue_AI_Right_VCE_Pressure > ATM_PRESSURE)
  2042. {
  2043. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", ATM_PRESSURE);
  2044. }
  2045. else if (getAiValue_AI_Right_VCE_Pressure < 20)
  2046. {
  2047. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", 20);
  2048. }
  2049. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2050. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2051. {
  2052. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2053. }
  2054. else if (getAiValue_TM_ChamberPressure < 20)
  2055. {
  2056. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2057. }
  2058. // ATM switch
  2059. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2060. // VAC switch
  2061. // ATM switch
  2062. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") > ATM_THRESHOLD;
  2063. // ATM switch
  2064. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") > ATM_THRESHOLD;
  2065. }
  2066. void MonitorMFKepler2200Pressure()
  2067. {
  2068. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2069. //{
  2070. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2071. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2072. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2073. ModuleName mod = ModuleName.TM;
  2074. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2075. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2076. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2077. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2078. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2079. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2080. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2081. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2082. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2083. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2084. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2085. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2086. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2087. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2088. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2089. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2090. {
  2091. if (getAiValue_LLA_ChamberPressure > 10000)
  2092. {
  2093. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2094. }
  2095. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2096. {
  2097. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2098. }
  2099. }
  2100. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2101. {
  2102. if (getAiValue_LLB_ChamberPressure > 10000)
  2103. {
  2104. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2105. }
  2106. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2107. {
  2108. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2109. }
  2110. }
  2111. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2112. {
  2113. if (getAiValue_TM_ChamberPressure > 10000)
  2114. {
  2115. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2116. }
  2117. else if (getAiValue_TM_ChamberPressure <= 10000)
  2118. {
  2119. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2120. }
  2121. }
  2122. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2123. {
  2124. if (getAiValue_LLA_ChamberPressure > 10000)
  2125. {
  2126. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2127. }
  2128. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2129. {
  2130. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2131. }
  2132. }
  2133. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2134. {
  2135. if (getAiValue_LLB_ChamberPressure > 10000)
  2136. {
  2137. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2138. }
  2139. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2140. {
  2141. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2142. }
  2143. }
  2144. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2145. {
  2146. if (getAiValue_TM_ChamberPressure > 10000)
  2147. {
  2148. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2149. }
  2150. else if (getAiValue_TM_ChamberPressure <= 10000)
  2151. {
  2152. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2153. }
  2154. }
  2155. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2156. if (getAiValue_LLA_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2157. {
  2158. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2159. }
  2160. else if (getAiValue_LLA_ChamberPressure < 3)
  2161. {
  2162. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 0.5F);
  2163. }
  2164. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2165. if (getAiValue_LLB_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2166. {
  2167. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2168. }
  2169. else if (getAiValue_LLB_ChamberPressure < 3)
  2170. {
  2171. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 3);
  2172. }
  2173. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2174. if (getAiValue_TM_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2175. {
  2176. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2177. }
  2178. else if (getAiValue_TM_ChamberPressure < 3)
  2179. {
  2180. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 3);
  2181. }
  2182. // ATM switch
  2183. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2184. // VAC switch
  2185. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2186. // ATM switch
  2187. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2188. // VAC switch
  2189. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2190. // ATM switch
  2191. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2192. // VAC switch
  2193. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2194. }
  2195. void MonitorMFKepler2300Pressure()
  2196. {
  2197. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2198. //{
  2199. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2200. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2201. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2202. ModuleName mod = ModuleName.TM;
  2203. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2204. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2205. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2206. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2207. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2208. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2209. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2210. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2211. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2212. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2213. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2214. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2215. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2216. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2217. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2218. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2219. {
  2220. if (getAiValue_LLA_ChamberPressure > 10000)
  2221. {
  2222. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2223. }
  2224. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2225. {
  2226. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2227. }
  2228. }
  2229. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2230. {
  2231. if (getAiValue_LLB_ChamberPressure > 10000)
  2232. {
  2233. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2234. }
  2235. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2236. {
  2237. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2238. }
  2239. }
  2240. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2241. {
  2242. if (getAiValue_TM_ChamberPressure > 10000)
  2243. {
  2244. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2245. }
  2246. else if (getAiValue_TM_ChamberPressure <= 10000)
  2247. {
  2248. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2249. }
  2250. }
  2251. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2252. {
  2253. if (getAiValue_LLA_ChamberPressure > 10000)
  2254. {
  2255. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2256. }
  2257. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2258. {
  2259. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2260. }
  2261. }
  2262. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2263. {
  2264. if (getAiValue_LLB_ChamberPressure > 10000)
  2265. {
  2266. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2267. }
  2268. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2269. {
  2270. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2271. }
  2272. }
  2273. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2274. {
  2275. if (getAiValue_TM_ChamberPressure > 10000)
  2276. {
  2277. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2278. }
  2279. else if (getAiValue_TM_ChamberPressure <= 10000)
  2280. {
  2281. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2282. }
  2283. }
  2284. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2285. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  2286. {
  2287. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  2288. }
  2289. else if (getAiValue_LLA_ChamberPressure < 20)
  2290. {
  2291. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  2292. }
  2293. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2294. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  2295. {
  2296. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  2297. }
  2298. else if (getAiValue_LLB_ChamberPressure < 20)
  2299. {
  2300. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  2301. }
  2302. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2303. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2304. {
  2305. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2306. }
  2307. else if (getAiValue_TM_ChamberPressure < 20)
  2308. {
  2309. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2310. }
  2311. // ATM switch
  2312. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2313. // VAC switch
  2314. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2315. // ATM switch
  2316. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  2317. // VAC switch
  2318. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2319. // ATM switch
  2320. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  2321. // VAC switch
  2322. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2323. // }
  2324. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  2325. //{
  2326. // ModuleName mod = ModuleName.TM;
  2327. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2328. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2329. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2330. //}
  2331. }
  2332. void SetAiValue(string name, float value)
  2333. {
  2334. byte[] flow = BitConverter.GetBytes(value);
  2335. short high1 = BitConverter.ToInt16(flow, 0);
  2336. short low1 = BitConverter.ToInt16(flow, 2);
  2337. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  2338. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  2339. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2340. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2341. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2342. }
  2343. float GetAiValue(string name)
  2344. {
  2345. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2346. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2347. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2348. return flow;
  2349. }
  2350. float GetAoValue(string name)
  2351. {
  2352. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  2353. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  2354. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2355. return flow;
  2356. }
  2357. void MonitorTemperature(ModuleName mod)
  2358. {
  2359. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  2360. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  2361. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  2362. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  2363. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  2364. // 底座
  2365. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2366. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2367. //{
  2368. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  2369. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  2370. //}
  2371. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2372. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2373. //{
  2374. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  2375. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  2376. //}
  2377. // Foreline
  2378. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2379. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2380. {
  2381. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  2382. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  2383. }
  2384. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2385. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2386. {
  2387. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  2388. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  2389. }
  2390. // Wall
  2391. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2392. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2393. {
  2394. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  2395. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  2396. }
  2397. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2398. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2399. {
  2400. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  2401. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  2402. }
  2403. }
  2404. void MonitorGas(ModuleName mod)
  2405. {
  2406. // gas
  2407. this.SimulateMFC(mod, 1);
  2408. this.SimulateMFC(mod, 2);
  2409. this.SimulateMFC(mod, 3);
  2410. this.SimulateMFC(mod, 4);
  2411. this.SimulateMFC(mod, 5);
  2412. this.SimulateMFC(mod, 6);
  2413. this.SimulateMFC(mod, 7);
  2414. this.SimulateMFC(mod, 8);
  2415. this.SimulateN2(mod);
  2416. }
  2417. void MonitorKeplerTMGas()
  2418. {
  2419. this.SimulateKeplerMFC(ModuleName.LLA, 1);
  2420. this.SimulateKeplerMFC(ModuleName.LLB, 1);
  2421. this.SimulateKeplerMFC(ModuleName.TM, 1);
  2422. }
  2423. void MonitorSEGas(ModuleName mod)
  2424. {
  2425. SimulateMFC(mod, 1);
  2426. SimulateMFC(mod, 2);
  2427. SimulateMFC(mod, 3);
  2428. SimulateMFC(mod, 4);
  2429. SimulateMFC(mod, 5);
  2430. SimulateMFC(mod, 6);
  2431. SimulateMFC(mod, 7);
  2432. SimulateMFC(mod, 8);
  2433. SimulateMFC(mod, 9);
  2434. SimulateMFC(mod, 10);
  2435. SimulateMFC(mod, 11);
  2436. SimulateMFC(mod, 12);
  2437. }
  2438. void MonitorDEGas(ModuleName mod)
  2439. {
  2440. SimulateMFC(mod, 1);
  2441. SimulateMFC(mod, 2);
  2442. SimulateMFC(mod, 3);
  2443. SimulateMFC(mod, 4);
  2444. SimulateMFC(mod, 5);
  2445. SimulateMFC(mod, 6);
  2446. SimulateMFC(mod, 7);
  2447. SimulateMFC(mod, 8);
  2448. SimulateMFC(mod, 9);
  2449. SimulateMFC(mod, 10);
  2450. SimulateMFC(mod, 11);
  2451. SimulateMFC(mod, 12);
  2452. }
  2453. private void SimulateMFC(ModuleName mod, byte gasNum)
  2454. {
  2455. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  2456. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  2457. }
  2458. private void SimulateKeplerMFC(ModuleName mod, byte gasNum)
  2459. {
  2460. var sp = GetAoValue($"TM.AO_{mod}_MFC{gasNum}_Flow_Setpoint");
  2461. SetAiValue($"TM.AI_{mod}_MFC{gasNum}_Flow", (float)sp);
  2462. }
  2463. private void SimulateN2(ModuleName mod)
  2464. {
  2465. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  2466. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2467. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  2468. }
  2469. private void SimulateSEHe(ModuleName mod)
  2470. {
  2471. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint");
  2472. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2473. SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb);
  2474. }
  2475. private void SimulateDEHe(ModuleName mod)
  2476. {
  2477. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint1");
  2478. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2479. SetAiValue($"{mod}.AI_MFC_He1_Flow", (float)mock_fb);
  2480. }
  2481. private void SimulateHe(ModuleName mod)
  2482. {
  2483. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  2484. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2485. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  2486. }
  2487. void MonitorRF(ModuleName mod)
  2488. {
  2489. // RF generator
  2490. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  2491. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2492. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2493. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  2494. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  2495. }
  2496. void MonitorIOPumpCtrl(ModuleName mod)
  2497. {
  2498. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  2499. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  2500. }
  2501. void MonitorIOHighTemperatureHeater(ModuleName mod)
  2502. {
  2503. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  2504. {
  2505. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  2506. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2507. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2508. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2509. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2510. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2511. }
  2512. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  2513. {
  2514. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2515. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  2516. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2517. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2518. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2519. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2520. }
  2521. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  2522. {
  2523. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2524. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2525. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  2526. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2527. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2528. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2529. }
  2530. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  2531. {
  2532. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2533. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2534. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2535. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  2536. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2537. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2538. }
  2539. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  2540. {
  2541. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2542. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2543. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2544. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2545. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  2546. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2547. }
  2548. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  2549. {
  2550. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2551. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2552. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2553. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2554. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2555. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  2556. }
  2557. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  2558. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  2559. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  2560. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2561. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  2562. }
  2563. void MonitorKepler2200Heater(ModuleName mod)
  2564. {
  2565. var pendulumHeaterSetpoint = GetAoValue($"{mod}.AO_P_Valve_Temperature_Setpoint");
  2566. SetAiValue($"{mod}.AI_P_Valve_Control_TC_Temp", (float)pendulumHeaterSetpoint);
  2567. }
  2568. public void Terminate()
  2569. {
  2570. _thread.Stop();
  2571. }
  2572. public void SetCoolantOutletTemp(string module, int Temp)
  2573. {
  2574. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  2575. //{
  2576. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  2577. //}
  2578. }
  2579. }
  2580. }