using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.IOCore; using Aitex.Core.RT.Log; using Aitex.Core.Util; using MECF.Framework.Common.Equipment; using MECF.Framework.Simulator.Core.Driver; using System; using System.Collections.Generic; using Venus_Simulator.Devices; using System.Threading; using Venus_Core; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs; using System.Diagnostics.Eventing.Reader; using MECF.Framework.Common.CommonData; using MECF.Framework.Common.DataCenter; using System.Configuration; namespace Venus_Simulator.Instances { public class SimulatorSystem : Singleton { private PeriodicJob _thread; private Random _rd = new Random(); ConfigType type; private RD_TRIG _trigATM = new RD_TRIG(); private RD_TRIG _trigVAC = new RD_TRIG(); private R_TRIG _trigLLExtend = new R_TRIG(); private R_TRIG _trigLLRetract = new R_TRIG(); private static int count = 0; private readonly float ATM_THRESHOLD = 750000; private readonly float ATM_PRESSURE = 760000; private readonly float ATM_LoadLock_PRESSURE = 760000; private readonly uint VAC_SW_PRESSURE = 9500; private readonly uint PROCESS_GAUGE = 10000; private Dictionary _MockDevices = new Dictionary(); private Dictionary jetChambers = new Dictionary(); public SimulatorSystem() { //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock()); //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock()); //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock()); // TODO var section = ConfigurationManager.GetSection("customSettings") as System.Collections.Specialized.NameValueCollection; type = (ConfigType)Convert.ToInt32(section["SimulatorType"]); jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber); jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber); jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber); jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber); } ~SimulatorSystem() { _thread?.Stop(); } public void Initialize() { SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber); SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber); SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber); SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber); if (type == ConfigType.Kepler2200) { SetKepler2200TMDefaultValue(); } else if (type == ConfigType.Kepler2300) { SetKepler2300TMDefaultValue(); } else if (type == ConfigType.VenusSE) { SetSETMDefaultValue(); } else if (type == ConfigType.VenusDE) { SetDETMDefaultValue(); } Singleton.Instance.Initialize(false); _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true); } private void SetDefaultValue(ModuleName mod, JetChamber jetChamber) { switch (jetChamber) { case JetChamber.VenusSE: IO.DI[$"{mod}.DI_Lid_Closed"].Value = true; IO.DI[$"{mod}.DI_ATM_Switch"].Value = true; IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false; IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true; IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true; IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false; IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true; //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true; //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true; IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true; IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true; IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false; IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true; IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true; IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true; IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true; IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true; IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true; IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true; IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true; IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true; IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true; IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true; IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true; IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true; IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true; IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true; IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true; IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true; IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true; //// pressure SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100); //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE); SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE); SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001); SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000); //// Temperature SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28); //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27); SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28); //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27); SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28); SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27); SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28); // Datetime SetAiValue($"{mod}.AI_Year", DateTime.Today.Year); SetAiValue($"{mod}.AI_Month", DateTime.Today.Month); SetAiValue($"{mod}.AI_Day", DateTime.Today.Day); SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour); SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute); SetAiValue($"{mod}.AI_Second", DateTime.Now.Second); break; case JetChamber.VenusDE: IO.DI[$"{mod}.DI_Lid_Closed"].Value = true; IO.DI[$"{mod}.DI_ATM_Switch"].Value = true; IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false; IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true; IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true; IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false; IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true; IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true; //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true; //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true; IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true; IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true; IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true; IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false; IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false; IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false; IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false; IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false; //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true; //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true; //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true; //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true; //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true; IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true; //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true; IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true; IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true; //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true; IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true; //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true; IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true; //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true; //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true; //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true; //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true; IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true; IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true; IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true; IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true; //// pressure SetAiValue($"{mod}.AI_Process_Pressure_1t", 100); //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE); SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE); SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001); SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000); //// Temperature SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28); //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27); SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28); SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28); //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27); SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28); SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27); SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28); SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28); // Datetime SetAiValue($"{mod}.AI_Year", DateTime.Today.Year); SetAiValue($"{mod}.AI_Month", DateTime.Today.Month); SetAiValue($"{mod}.AI_Day", DateTime.Today.Day); SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour); SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute); SetAiValue($"{mod}.AI_Second", DateTime.Now.Second); break; case JetChamber.Kepler2300: // chamber IO.DI[$"{mod}.DI_Lid_Closed"].Value = true; IO.DI[$"{mod}.DI_ATM_Switch"].Value = true; IO.DI[$"{mod}.DI_VAC_Switch"].Value = false; IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true; IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false; IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true; IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true; IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true; IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true; IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false; IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true; IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false; IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false; IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false; IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false; IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false; IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false; IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false; IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false; IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true; IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false; IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false; IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true; IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true; IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true; IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true; //// pressure SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001); //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000); SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100); //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE); SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE); //// Temperature SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28); SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28); SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28); SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20); SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30); SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40); // Datetime SetAiValue($"{mod}.AI_Year", DateTime.Today.Year); SetAiValue($"{mod}.AI_Month", DateTime.Today.Month); SetAiValue($"{mod}.AI_Day", DateTime.Today.Day); SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour); SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute); SetAiValue($"{mod}.AI_Second", DateTime.Now.Second); break; case JetChamber.Kepler2200A: case JetChamber.Kepler2200B: if (jetChamber == JetChamber.Kepler2200B) { IO.DI[$"{mod}.DI_RF_Box_Interlock"].Value = true; } IO.DI[$"{mod}.DI_Wafer_Transfer_Posi_SW"].Value = true; IO.DI[$"{mod}.DI_Lid_Closed"].Value = true; IO.DI[$"{mod}.DI_ATM_Switch"].Value = true; IO.DI[$"{mod}.DI_VAC_Switch"].Value = false; IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true; IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true; IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true; IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true; IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false; IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true; IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false; IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false; IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_GasBox_N2_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true; IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true; //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false; IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true; IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true; //IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true; IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true; IO.DI[$"{mod}.DI_CHB_Water_Flow_Switch"].Value = true; //IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true; //// pressure SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 100); SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 100); SetAiValue($"{mod}.AI_Process_Pressure_2t", 0); SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE); //// Temperature // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28); SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28); SetAiValue($"{mod}.AI_Penning_Gauge_Pressure1", 100); // Datetime SetAiValue($"{mod}.AI_Year", DateTime.Today.Year); SetAiValue($"{mod}.AI_Month", DateTime.Today.Month); SetAiValue($"{mod}.AI_Day", DateTime.Today.Day); SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour); SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute); SetAiValue($"{mod}.AI_Second", DateTime.Now.Second); break; } } private void SetKepler2200TMDefaultValue() { ModuleName mod = ModuleName.TM; IO.DI[$"{mod}.DI_TM_Power_On"].Value = true; IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true; IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true; IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true; IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true; IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true; IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true; IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true; IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true; IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true; IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true; IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true; IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true; IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false; IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true; IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false; IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true; IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false; IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true; IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false; IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true; IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true; IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true; IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true; IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true; IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true; IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true; IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true; // Datetime SetAiValue($"{mod}.AI_Year", DateTime.Today.Year); SetAiValue($"{mod}.AI_Month", DateTime.Today.Month); SetAiValue($"{mod}.AI_Day", DateTime.Today.Day); SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour); SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute); SetAiValue($"{mod}.AI_Second", DateTime.Now.Second); SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100); SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150); SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200); if (SystemConfig.Instance.GetValue("System.IsATMMode")) { SetAiValue($"{mod}.AI_TM_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000)); SetAiValue($"{mod}.AI_LLA_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000)); SetAiValue($"{mod}.AI_LLB_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000)); } else { SetAiValue($"{mod}.AI_TM_CHB_Pressure", 666); SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 666); SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 666); } } private void SetKepler2300TMDefaultValue() { ModuleName mod = ModuleName.TM; IO.DI[$"{mod}.DI_TM_Power_On"].Value = true; IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true; IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true; IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true; IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true; IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true; IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true; IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true; IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true; IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true; IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true; IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true; IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true; IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false; IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true; IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false; IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true; IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false; IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true; IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false; IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true; IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true; IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true; IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true; IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true; IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true; IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true; IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true; // Datetime SetAiValue($"{mod}.AI_Year", DateTime.Today.Year); SetAiValue($"{mod}.AI_Month", DateTime.Today.Month); SetAiValue($"{mod}.AI_Day", DateTime.Today.Day); SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour); SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute); SetAiValue($"{mod}.AI_Second", DateTime.Now.Second); SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100); SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150); SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200); if (SystemConfig.Instance.GetValue("System.IsATMMode")) { SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000); SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000); SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000); } else { SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000); SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002); SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004); } } private void SetSETMDefaultValue() { string mod = "SETM"; IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true; IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true; IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true; IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true; IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true; IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true; IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true; IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = true; IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = true; IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = true; IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = true; IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true; IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false; IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false; IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false; IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false; IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true; IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false; IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true; IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false; IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true; IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false; IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true; IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false; IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true; IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true; IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true; IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true; IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true; IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true; IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false; IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false; IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true; IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true; IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true; IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true; SetAiValue($"{mod}.AI_MFC_Flow", 3000); SetAiValue($"{mod}.AI_VCE_Pressure", 3000); SetAiValue($"{mod}.AI_Foreline_Pressure", 3000); SetAiValue($"{mod}.AI_TM_Pressure", 20); } private void SetDETMDefaultValue() { string mod = "DETM"; IO.DI[$"{mod}.DI_Smif1_Ready_to_load"].Value = true; IO.DI[$"{mod}.DI_Smif1_Ready_to_unload"].Value = true; IO.DI[$"{mod}.DI_Smif2_Ready_to_load"].Value = true; IO.DI[$"{mod}.DI_Smif2_Ready_to_unload"].Value = true; IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true; IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true; IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true; IO.DI[$"{mod}.DI_ROBOT_TO_VCEA_RETRACT"].Value = true; IO.DI[$"{mod}.DI_ROBOT_TO_VCEB_RETRACT"].Value = true; IO.DI[$"{mod}.DI_ROBOT_TO_PMA_RETRACT"].Value = true; IO.DI[$"{mod}.DI_ROBOT_TO_PMB_RETRACT"].Value = true; IO.DI[$"{mod}.DI_ROBOT_TO_PMC_RETRACT"].Value = true; IO.DI[$"{mod}.DI_ROBOT_TO_PMD_RETRACT"].Value = true; IO.DI[$"{mod}.DI_VCEA_Wafer_Sensor"].Value = true; IO.DI[$"{mod}.DI_VCEB_Wafer_Sensor"].Value = true; IO.DI[$"{mod}.DI_PMA_Wafer_Sensor"].Value = true; IO.DI[$"{mod}.DI_PMB_Wafer_Sensor"].Value = true; IO.DI[$"{mod}.DI_PMC_Wafer_Sensor"].Value = true; IO.DI[$"{mod}.DI_PMD_Wafer_Sensor"].Value = true; IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false; IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true; IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false; IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true; IO.DI[$"{mod}.DI_TM_N2_1_SW"].Value = true; IO.DI[$"{mod}.DI_TM_N2_2_SW"].Value = true; IO.DI[$"{mod}.DI_TM_CDA_SW"].Value = true; IO.DI[$"{mod}.DI_TM_He_SW"].Value = true; IO.DI[$"{mod}.DI_LEAK"].Value = true; IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = true; IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = true; IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true; IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true; IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out1"].Value = false; IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out2"].Value = false; IO.DI[$"{mod}.DI_FACTORY_SMOKE_Out"].Value = false; IO.DI[$"{mod}.DI_Abnormal_Exhaust_Gas"].Value = true; IO.DI[$"{mod}.DI_VCEA_Cassette_Present"].Value = true; IO.DI[$"{mod}.DI_VCEB_Cassette_Present"].Value = true; IO.DI[$"{mod}.DI_VCEA_ADR_LOCKED"].Value = true; IO.DI[$"{mod}.DI_VCEB_ADR_LOCKED"].Value = true; IO.DI[$"{mod}.DI_TM_LID_Close"].Value = true; IO.DI[$"{mod}.DI_LEFT_SMIF_READY"].Value = true; IO.DI[$"{mod}.DI_LEFT_SMIF_POD_INPLACE"].Value = true; IO.DI[$"{mod}.DI_RIGHT_SMIF_POD_INPLACE"].Value = true; IO.DI[$"{mod}.DI_LEFT_SMIF_ERROR"].Value = true; IO.DI[$"{mod}.DI_RIGHT_SMIF_ERROR"].Value = true; IO.DI[$"{mod}.DI_VCEA_EXTEND_ENABLE"].Value = true; IO.DI[$"{mod}.DI_VCEB_EXTEND_ENABLE"].Value = true; IO.DI[$"{mod}.DI_PMA_EXTEND_ENABLE"].Value = true; IO.DI[$"{mod}.DI_PMB_EXTEND_ENABLE"].Value = true; IO.DI[$"{mod}.DI_PMC_EXTEND_ENABLE"].Value = true; IO.DI[$"{mod}.DI_EMO"].Value = false; IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true; IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true; SetAiValue($"{mod}.AI_MFC_Flow", 3000); SetAiValue($"{mod}.AI_Left_VCE_Pressure", 3000); SetAiValue($"{mod}.AI_Right_VCE_Pressure", 3000); SetAiValue($"{mod}.AI_VCE_Foreline_Pressure", 20); SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 20); SetAiValue($"{mod}.AI_TM_Pressure", 20); } private bool OnMonitor() { try { foreach (var item in jetChambers) { switch (item.Value) { case JetChamber.Kepler2300: MonitorSlitDoorInTM(item.Key); MonitorPin(item.Key); MonitorPressure_Kepler(item.Key); //MonitorTemperature(item.Key); MonitorGas(item.Key); this.SimulateHe(item.Key); //MonitorRF(item.Key); ChangeTime(item.Key); //MonitorIOPumpCtrl(item.Key); MonitorLid(item.Key); break; case JetChamber.Kepler2200A: case JetChamber.Kepler2200B: MonitorSlitDoorInTM(item.Key); MonitorPressure_Kepler2200(item.Key); //MonitorTemperature(item.Key); MonitorGas(item.Key); MonitorKeplerTMGas(); // MonitorRF(item.Key); ChangeTime(item.Key); //MonitorIOPumpCtrl(item.Key); MonitorLid(item.Key); MonitorIOHighTemperatureHeater(item.Key); MonitorKepler2200Heater(item.Key); break; case JetChamber.VenusSE: MonitorPin(item.Key); //MonitorVenuSESlitDoor(item.Key); MonitorSEPressure(item.Key); MonitorSEGas(item.Key); ChangeTime(item.Key); this.SimulateSEHe(item.Key); break; case JetChamber.VenusDE: MonitorPin(item.Key); MonitorDEGas(item.Key); //MonitorVenuDESlitDoor(item.Key); MonitorDEPressure(item.Key); ChangeTime(item.Key); MonitorLinerDoor(item.Key); this.SimulateDEHe(item.Key); break; } } //ChangeTime(ModuleName.TM); if (type == ConfigType.Kepler2200) { ChangeTime(ModuleName.TM); MonitorMFSlitDoor(); MonitorMFKepler2200Pressure(); } else if (type == ConfigType.Kepler2300) { ChangeTime(ModuleName.TM); MonitorMFSlitDoor(); MonitorMFKepler2300Pressure(); } else if (type == ConfigType.VenusSE) { MonitorSEMFSlitDoor(); MonitorSEMFPressure(); //MonitorDEMFSlitDoor(); //MonitorDEMFPressure(); } else if (type == ConfigType.VenusDE) { MonitorDEMFSlitDoor(); MonitorDEMFPressure(); } } catch (Exception e) { LOG.WriteExeption(e); } return true; } private void ChangeTime(ModuleName mod) { // Heartbeat with PLC SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat")); SetAiValue($"{mod}.AI_Year", DateTime.Now.Year); SetAiValue($"{mod}.AI_Month", DateTime.Now.Month); SetAiValue($"{mod}.AI_Day", DateTime.Now.Day); SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour); SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute); SetAiValue($"{mod}.AI_Second", DateTime.Now.Second); } //void MonitorVenuSESlitDoor(ModuleName mod) //{ //} void MonitorSlitDoorInPM(ModuleName mod) { // slit door open if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value) { IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true; IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false; } // slit door close if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value) { IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false; IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true; } } void MonitorLinerDoor(ModuleName mod) { // slit door open if (IO.DO[$"{mod}.DO_PM_Liner_Door_Open"].Value) { IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true; IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false; } // slit door close if (IO.DO[$"{mod}.DO_PM_Liner_Door_Close"].Value) { IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = false; IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = true; } } void MonitorSlitDoorInTM(ModuleName mod) { // slit door open if (IO.DO[$"TM.DO_{mod}_SlitDoor_Open"].Value) { IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true; IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false; } // slit door close if (IO.DO[$"TM.DO_{mod}_SlitDoor_Close"].Value) { IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false; IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true; } } void MonitorMFSlitDoor() { ModuleName mod = ModuleName.TM; // LLA T door open if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value) { IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true; IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false; } // LLB T door open if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value) { IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true; IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false; } // LLA E door open if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value) { IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true; IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false; } // LLB E door open if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value) { IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true; IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false; } // LLA T door close if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value) { IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true; } // LLB T door close if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value) { IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true; } // LLA E door close if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value) { IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true; } // LLB E door close if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value) { IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true; } // PMA slitdoor door close/open if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value) { IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false; IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true; } if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value) { IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = true; IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = false; } // PMB slitdoor door close/open if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value) { IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false; IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true; } if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value) { IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = true; IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = false; } // PMC slitdoor door close/open if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value) { IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false; IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true; } if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value) { IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = true; IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = false; } // PMD slitdoor door close/open if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value) { IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false; IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true; } if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value) { IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = true; IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = false; } } void MonitorSEMFSlitDoor() { string mod = "SETM"; // VCE T door open if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value) { IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true; IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false; } // VCE T door Close if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value) { IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false; IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true; } //pma if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value) { IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true; IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false; } if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value) { IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false; IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true; } //pmb if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value) { IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true; IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false; } if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value) { IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false; IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true; } //pmc if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value) { IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true; IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false; } if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value) { IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false; IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true; } } void MonitorDEMFSlitDoor() { string mod = "DETM"; // VCE L door open if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Open"].Value) { IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = true; IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = false; } // VCE R door open if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Open"].Value) { IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = true; IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = false; } // VCE L door Close if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Close"].Value) { IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false; IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true; } // VCE R door Close if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Close"].Value) { IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false; IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true; } //pma if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value) { IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = true; IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = false; } if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value) { IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = false; IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = true; } //pmb if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value) { IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = true; IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = false; } if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value) { IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = false; IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = true; } //pmc if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value) { IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = true; IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = false; } if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value) { IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = false; IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = true; } if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value) { IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_POS"].Value = true; IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_POS"].Value = false; } if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value) { IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_POS"].Value = false; IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_POS"].Value = true; } if (IO.DO[$"{mod}.DO_TM_Soft_Pump"].Value) { IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true; } else { IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = false; } if (IO.DO[$"{mod}.DO_TM_Fast_Pump"].Value) { IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = true; } else { IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = false; } if (IO.DO[$"{mod}.DO_TM_Soft_Vent"].Value) { IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true; } else { IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = false; } } void MonitorPin(ModuleName mod) { // lift pin up if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value) { IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value; IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value; } } void MonitorLid(ModuleName mod) { // lift pin up if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value) { IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value; } } void MonitorExtendAndRetract(ModuleName mod) { // Extend _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value; if (_trigLLExtend.Q) { _trigLLRetract.RST = true; Thread.Sleep(500); IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true; IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false; IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false; IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false; } // Retract _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value; if (_trigLLRetract.Q) { count++; _trigLLExtend.RST = true; Thread.Sleep(500); IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false; IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true; if (count == 1) { IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false; IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false; } else if (count == 2) { count = 0; IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true; IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false; } } } void MonitorPressure(ModuleName mod) { string sAI_Foreline = "AI_Foreline_Pressure_760t"; // Loadlock pressure string sAI_LoadLockPressure = "AI_LL_Pressure_760t"; // Foreline if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open) { SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600)); } else { SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600)); } // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr] string sAI_ChamberPressure = "AI_Chamber_Pressure_10t"; string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual"; //float chamber_pressure = GetMockChamberPressure(mod); //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual"); // soft pump & fast pump DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"]; DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"]; DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"]; if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value) { //任意泵打开 float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (fast_pump_vlv.Value && soft_pump_vlv.Value) {//开双泵 if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160)); } else if (fast_pump_vlv.Value)//开 { if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130)); } else if (soft_pump_vlv.Value) { if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110)); } else if (turbo_pump_vlv.Value) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; if ((getAiValue_ChamberPressure - 500) >= 0) SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500); else SetAiValue($"{mod}.{sAI_ChamberPressure}", 0); if ((getAiValue_ProcessPressure - 500) >= 0) SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500); else SetAiValue($"{mod}.{sAI_ProcessPressure}", 0); //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500); } } // fast vent & purge DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"]; //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"]; //if (vent_vlv.Value || purge_vlv.Value) //{ // if (vent_vlv.Value && purge_vlv.Value) // { // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) // { // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000); // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); // } // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) // { // getAiValue_ProcessPressure = getAiValue_ChamberPressure; // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500); // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500); // } // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000)); // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160)); // } // else // if (vent_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300); } else { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150)); } // Loadlock Pumping Valve DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"]; if (Loadlock_pump_vlv.Value) { SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000); } // Loadlock vent DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"]; if (Loadlock_vent_vlv.Value) { SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000); } // 压力值越界,复位 float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}"); if (chamber_pressure1 > ATM_PRESSURE) { SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE); } else if (chamber_pressure1 < 20) { SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20); } float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (process_pressure1 > PROCESS_GAUGE) { SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE); } else if (process_pressure1 < 20) { SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20); } float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}"); if (foreline_pressure > 10000) { SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000); } else if (foreline_pressure < 150) { SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150); } // 模拟压力计漂移 //int p1 = (int)GetMockChamberPressure(mod); //int new_p1 = _rd.Next(p1 - 2, p1 + 2); //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1); //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t"); //int new_p2 = _rd.Next(p2 - 1, p2 + 1); //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2); //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual"); //int new_p3 = _rd.Next(p3 - 1, p3 + 1); //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3); // 根据当前压力值设定信号 //float chamber_pressure2 = GetMockChamberPressure(mod); // ATM switch IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD; // VAC switch IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE; // Throttle valve //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value; //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2); ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb; //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb); // 压力值 //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")) //{ // short increase = (short)_rd.Next(20, 30); // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase); // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")) // { // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")); // } //} //else //{ // short increase = (short)_rd.Next(20, 30); // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase); // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")) // { // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")); // } //} //// 位置值 //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")) //{ // short increase = (short)_rd.Next(20, 30); // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase); // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")) // { // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")); // } //} //else //{ // short increase = (short)_rd.Next(20, 30); // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase); // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")) // { // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")); // } //} } void MonitorSEPressure(ModuleName mod) { string sAI_Foreline = "AI_Foreline_Pressure_10t"; string sAI_ChamberPressure = "AI_Chamber_Pressure_10t"; string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual"; // Foreline if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open) { SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600)); } else { SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600)); } // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr] // soft pump & fast pump DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"]; DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"]; DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"]; if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value) { //任意泵打开 float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (fast_pump_vlv.Value && soft_pump_vlv.Value) {//开双泵 if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure); } } else if (fast_pump_vlv.Value)//开 { if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure); } } else if (soft_pump_vlv.Value) { if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure); } } else if (turbo_pump_vlv.Value) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; if ((getAiValue_ChamberPressure - 500) >= 0) SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500); else SetAiValue($"{mod}.{sAI_ChamberPressure}", 0); if ((getAiValue_ProcessPressure - 500) >= 0) SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500); else SetAiValue($"{mod}.{sAI_ProcessPressure}", 0); } } // fast vent & purge DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"]; if (vent_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300); } else { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000); } } // Loadlock Pumping Valve // 压力值越界,复位 float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}"); if (chamber_pressure1 > ATM_PRESSURE) { SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE); } else if (chamber_pressure1 < 20) { SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5); } float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (process_pressure1 > PROCESS_GAUGE) { SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE); } else if (process_pressure1 < 20) { SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5); } float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}"); if (foreline_pressure > 1999) { SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999); } else if (foreline_pressure < 150) { SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150); } // ATM switch IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD; // VAC switch IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE; } void MonitorDEPressure(ModuleName mod) { string sAI_Foreline = "AI_Foreline_Pressure_10t"; string sAI_ChamberPressure = "AI_Chamber_Pressure_10t"; string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual"; // Foreline if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open) { SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600)); } else { SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600)); } // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr] // soft pump & fast pump DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"]; //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"]; DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"]; if (fast_pump_vlv.Value || turbo_pump_vlv.Value) { //任意泵打开 float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (fast_pump_vlv.Value) {//开双泵 if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure); } } else if (turbo_pump_vlv.Value) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; if ((getAiValue_ChamberPressure - 500) >= 0) SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500); else SetAiValue($"{mod}.{sAI_ChamberPressure}", 0); if ((getAiValue_ProcessPressure - 500) >= 0) SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500); else SetAiValue($"{mod}.{sAI_ProcessPressure}", 0); } } // fast vent & purge DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"]; if (vent_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300); } else { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000); } } // Loadlock Pumping Valve // 压力值越界,复位 float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}"); if (chamber_pressure1 > ATM_PRESSURE) { SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE); } else if (chamber_pressure1 < 20) { SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5); } float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (process_pressure1 > PROCESS_GAUGE) { SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE); } else if (process_pressure1 < 20) { SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5); } float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}"); if (foreline_pressure > 10000) { SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000); } else if (foreline_pressure < 150) { SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150); } // ATM switch IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD; // VAC switch IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE; } void MonitorPressure_Kepler(ModuleName mod) { string sAI_Foreline = "AI_Foreline_Pressure_10t"; if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open) { SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600)); } else { SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600)); } // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr] string sAI_ChamberPressure = "AI_Chamber_Pressure_10t"; string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual"; //float chamber_pressure = GetMockChamberPressure(mod); //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual"); // soft pump & fast pump DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"]; DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"]; DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"]; if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value) { //任意泵打开 float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (fast_pump_vlv.Value && soft_pump_vlv.Value) {//开双泵 if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160)); } else if (fast_pump_vlv.Value)//开 { if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130)); } else if (soft_pump_vlv.Value) { if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0; SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110)); } else if (turbo_pump_vlv.Value) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; if ((getAiValue_ChamberPressure - 500) >= 0) SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500); else SetAiValue($"{mod}.{sAI_ChamberPressure}", 0); if ((getAiValue_ProcessPressure - 500) >= 0) SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500); else SetAiValue($"{mod}.{sAI_ProcessPressure}", 0); //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500); } } // fast vent & purge DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"]; if (vent_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300); } else { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150)); } // Loadlock Pumping Valve // 压力值越界,复位 float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}"); if (chamber_pressure1 > ATM_PRESSURE) { SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE); } else if (chamber_pressure1 < 20) { SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 1); } float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (process_pressure1 > PROCESS_GAUGE) { SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE); } else if (process_pressure1 < 20) { SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20); } float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}"); if (foreline_pressure > 10000) { SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000); } else if (foreline_pressure < 150) { SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150); } // ATM switch IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD; // VAC switch IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE; } void MonitorPressure_Kepler2200(ModuleName mod) { string sAI_Foreline = "AI_Foreline_Pressure_10t"; if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open) { SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(50, 60)); } else { SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(50, 60)); } //SetAiValue($"{mod}.{sAI_Foreline}", 3000); // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr] string sAI_ChamberPressure = "AI_Chamber_Pressure_10t"; string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual"; //float chamber_pressure = GetMockChamberPressure(mod); //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual"); // soft pump & fast pump DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"]; DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"]; DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"]; if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value) { //任意泵打开 float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); //float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (fast_pump_vlv.Value && soft_pump_vlv.Value) { //开双泵 if ((getAiValue_ChamberPressure - 12000) >= 0) { SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 12000); } else { SetAiValue($"{mod}.{sAI_ChamberPressure}", 0); } //if (getAiValue_ChamberPressure > 1000) //{ // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa( getAiValue_ChamberPressure - 3000 > 0 ? getAiValue_ChamberPressure - 3000 : 0); // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); //} //else if ( getAiValue_ChamberPressure <= 1000) //{ // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 150 > 0 ? getAiValue_ProcessPressure - 150 : 0); // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure); //} //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160)); } else if (fast_pump_vlv.Value)//开 { if ((getAiValue_ChamberPressure - 8000) >= 0) SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 8000); else SetAiValue($"{mod}.{sAI_ChamberPressure}", 0); } else if (soft_pump_vlv.Value) { if ((getAiValue_ChamberPressure - 4000) >= 0) { SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 4000); } else { SetAiValue($"{mod}.{sAI_ChamberPressure}", 0); } //if (getAiValue_ChamberPressure > 5000) //{ // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ChamberPressure - 1000 > 0 ? getAiValue_ChamberPressure - 1000 : 0); // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); //} //else if (getAiValue_ChamberPressure <= 1000) //{ // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 110 > 0 ? getAiValue_ProcessPressure - 110 : 0); // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure); // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure); //} //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110)); } else if (turbo_pump_vlv.Value) { if ((getAiValue_ChamberPressure - 50) >= 0) SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 50); else SetAiValue($"{mod}.{sAI_ChamberPressure}", 0); } } // fast vent & purge DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"]; DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"]; if (vent_vlv.Value && gas_final_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ChamberPressure > 1000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ChamberPressure <= 1000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130); } else { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 2500); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150)); } // Loadlock Pumping Valve // 压力值越界,复位 float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}"); if (chamber_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE)) { SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE)); } else if (chamber_pressure1 < 20) { SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 0.5F); } //float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}"); //if (process_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(PROCESS_GAUGE)) //{ // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE); //} //else if (process_pressure1 < 20) //{ // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20); //} float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}"); if (foreline_pressure > 1000) { SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1000); } else if (foreline_pressure < 15) { SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 15); } // ATM switch IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD); // VAC switch IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE); SetAiValue($"{mod}.AI_Process_Pressure_2t", 0); //var chamberPressure = GetAiValue($"{mod}.AI_Chamber_Pressure_10t"); //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa( GetAiValue($"{mod}.AI_Chamber_Pressure_10t"))); //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(GetAiValue($"{mod}.AI_Foreline_Pressure_10t"))); SetAiValue($"{mod}.{sAI_Foreline}",200); } void MonitorSEMFPressure() { string mod = "SETM"; string VCE_ChamberPressure = "AI_VCE_Pressure"; string TM_AI_ChamberPressure = "AI_TM_Pressure"; DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"]; DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"]; DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"]; DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"]; DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"]; DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"]; DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"]; DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"]; float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}"); float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}"); if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value) { if (getAiValue_TM_ChamberPressure > 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000); } else if (getAiValue_TM_ChamberPressure <= 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500); } } if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value) { if (getAiValue_TM_ChamberPressure > 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000); } else if (getAiValue_TM_ChamberPressure <= 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500); } } if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value) { if (getAiValue_VCE_ChamberPressure > 10000) { SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000); } else if (getAiValue_VCE_ChamberPressure <= 10000) { SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500); } } if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value) { if (getAiValue_VCE_ChamberPressure > 10000) { SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000); } else if (getAiValue_VCE_ChamberPressure <= 10000) { SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500); } } getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}"); if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE) { SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE); } else if (getAiValue_VCE_ChamberPressure < 20) { SetAiValue($"{mod}.{VCE_ChamberPressure}", 20); } getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}"); if (getAiValue_TM_ChamberPressure > ATM_PRESSURE) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE); } else if (getAiValue_TM_ChamberPressure < 20) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20); } IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE; // VAC switch IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE; } void MonitorDEMFPressure() { string mod = "DETM"; string AI_Left_VCE_Pressure = "AI_Left_VCE_Pressure"; string AI_Right_VCE_Pressure = "AI_Right_VCE_Pressure"; string TM_AI_ChamberPressure = "AI_TM_Pressure"; DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pump"]; DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pump"]; DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"]; DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"]; DOAccessor DO_VCEA_Fast_Pump = IO.DO[$"{mod}.DO_VCEA_Fast_Pump"]; DOAccessor DO_VCEA_Soft_Pump = IO.DO[$"{mod}.DO_VCEA_Soft_Pump"]; DOAccessor DO_VCEB_Fast_Pump = IO.DO[$"{mod}.DO_VCEB_Fast_Pump"]; DOAccessor DO_VCEB_Soft_Pump = IO.DO[$"{mod}.DO_VCEB_Soft_Pump"]; DOAccessor DO_VCEA_Fast_Vent = IO.DO[$"{mod}.DO_VCEA_Fast_Vent"]; DOAccessor DO_VCEA_Soft_Vent = IO.DO[$"{mod}.DO_VCEA_Soft_Vent"]; DOAccessor DO_VCEB_Fast_Vent = IO.DO[$"{mod}.DO_VCEB_Fast_Vent"]; DOAccessor DO_VCEB_Soft_Vent = IO.DO[$"{mod}.DO_VCEB_Soft_Vent"]; float getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}"); float getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}"); float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}"); if (DO_VCEA_Fast_Pump.Value || DO_VCEA_Soft_Pump.Value) { if (getAiValue_AI_Left_VCE_Pressure > 10000) { SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 30000); } else if (getAiValue_AI_Left_VCE_Pressure <= 10000) { SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 1500); } } if (DO_VCEB_Fast_Pump.Value || DO_VCEB_Soft_Pump.Value) { if (getAiValue_AI_Right_VCE_Pressure > 10000) { SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 30000); } else if (getAiValue_AI_Right_VCE_Pressure <= 10000) { SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 1500); } } if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value) { if (getAiValue_TM_ChamberPressure > 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000); } else if (getAiValue_TM_ChamberPressure <= 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500); } } if (DO_VCEA_Fast_Vent.Value || DO_VCEA_Soft_Vent.Value) { if (getAiValue_AI_Left_VCE_Pressure > 10000) { SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 30000); } else if (getAiValue_AI_Left_VCE_Pressure <= 10000) { SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 1500); } } if (DO_VCEB_Fast_Vent.Value || DO_VCEB_Soft_Vent.Value) { if (getAiValue_AI_Right_VCE_Pressure > 10000) { SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 30000); } else if (getAiValue_AI_Right_VCE_Pressure <= 10000) { SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 1500); } } if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value) { if (getAiValue_TM_ChamberPressure > 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000); } else if (getAiValue_TM_ChamberPressure <= 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500); } } getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}"); if (getAiValue_AI_Left_VCE_Pressure > ATM_PRESSURE) { SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", ATM_PRESSURE); } else if (getAiValue_AI_Left_VCE_Pressure < 20) { SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", 20); } getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}"); if (getAiValue_AI_Right_VCE_Pressure > ATM_PRESSURE) { SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", ATM_PRESSURE); } else if (getAiValue_AI_Right_VCE_Pressure < 20) { SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", 20); } getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}"); if (getAiValue_TM_ChamberPressure > ATM_PRESSURE) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE); } else if (getAiValue_TM_ChamberPressure < 20) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20); } // ATM switch IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD; // VAC switch // ATM switch IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") > ATM_THRESHOLD; // ATM switch IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") > ATM_THRESHOLD; } void MonitorMFKepler2200Pressure() { //if (SimulatorJetTM.CurrentTM == JetTMType.Venus) //{ string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure"; string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure"; string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure"; ModuleName mod = ModuleName.TM; DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"]; DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"]; DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"]; DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"]; DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"]; DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"]; DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"]; DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"]; DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"]; DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"]; DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"]; DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"]; float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}"); float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}"); float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}"); if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value) { if (getAiValue_LLA_ChamberPressure > 10000) { SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000); } else if (getAiValue_LLA_ChamberPressure <= 10000) { SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500); } } if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value) { if (getAiValue_LLB_ChamberPressure > 10000) { SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000); } else if (getAiValue_LLB_ChamberPressure <= 10000) { SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500); } } if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value) { if (getAiValue_TM_ChamberPressure > 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000); } else if (getAiValue_TM_ChamberPressure <= 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500); } } if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value) { if (getAiValue_LLA_ChamberPressure > 10000) { SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000); } else if (getAiValue_LLA_ChamberPressure <= 10000) { SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500); } } if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value) { if (getAiValue_LLB_ChamberPressure > 10000) { SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000); } else if (getAiValue_LLB_ChamberPressure <= 10000) { SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500); } } if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value) { if (getAiValue_TM_ChamberPressure > 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000); } else if (getAiValue_TM_ChamberPressure <= 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500); } } getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}"); if (getAiValue_LLA_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE)) { SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE)); } else if (getAiValue_LLA_ChamberPressure < 3) { SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 0.5F); } getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}"); if (getAiValue_LLB_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE)) { SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE)); } else if (getAiValue_LLB_ChamberPressure < 3) { SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 3); } getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}"); if (getAiValue_TM_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE)) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE)); } else if (getAiValue_TM_ChamberPressure < 3) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 3); } // ATM switch IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD); // VAC switch IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE); // ATM switch IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD); // VAC switch IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE); // ATM switch IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD); // VAC switch IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE); } void MonitorMFKepler2300Pressure() { //if (SimulatorJetTM.CurrentTM == JetTMType.Venus) //{ string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure"; string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure"; string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure"; ModuleName mod = ModuleName.TM; DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"]; DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"]; DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"]; DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"]; DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"]; DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"]; DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"]; DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"]; DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"]; DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"]; DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"]; DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"]; float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}"); float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}"); float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}"); if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value) { if (getAiValue_LLA_ChamberPressure > 10000) { SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000); } else if (getAiValue_LLA_ChamberPressure <= 10000) { SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500); } } if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value) { if (getAiValue_LLB_ChamberPressure > 10000) { SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000); } else if (getAiValue_LLB_ChamberPressure <= 10000) { SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500); } } if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value) { if (getAiValue_TM_ChamberPressure > 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000); } else if (getAiValue_TM_ChamberPressure <= 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500); } } if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value) { if (getAiValue_LLA_ChamberPressure > 10000) { SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000); } else if (getAiValue_LLA_ChamberPressure <= 10000) { SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500); } } if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value) { if (getAiValue_LLB_ChamberPressure > 10000) { SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000); } else if (getAiValue_LLB_ChamberPressure <= 10000) { SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500); } } if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value) { if (getAiValue_TM_ChamberPressure > 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000); } else if (getAiValue_TM_ChamberPressure <= 10000) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500); } } getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}"); if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE) { SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE); } else if (getAiValue_LLA_ChamberPressure < 20) { SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20); } getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}"); if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE) { SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE); } else if (getAiValue_LLB_ChamberPressure < 20) { SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20); } getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}"); if (getAiValue_TM_ChamberPressure > ATM_PRESSURE) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE); } else if (getAiValue_TM_ChamberPressure < 20) { SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20); } // ATM switch IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD; // VAC switch IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE; // ATM switch IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD; // VAC switch IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE; // ATM switch IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD; // VAC switch IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE; // } //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE) //{ // ModuleName mod = ModuleName.TM; // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}"); // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}"); // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}"); //} } void SetAiValue(string name, float value) { byte[] flow = BitConverter.GetBytes(value); short high1 = BitConverter.ToInt16(flow, 0); short low1 = BitConverter.ToInt16(flow, 2); IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0); IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2); byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]); byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]); float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0); } float GetAiValue(string name) { byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]); byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]); float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0); return flow; } float GetAoValue(string name) { byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]); byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]); float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0); return flow; } void MonitorTemperature(ModuleName mod) { //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value; IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value; IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value; IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false; IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false; // 底座 //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value && // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint")) //{ // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2)); // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2)); //} //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value && // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint")) //{ // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2)); // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2)); //} // Foreline if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value && GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint")) { SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2)); SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2)); } else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value && GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint")) { SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2)); SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2)); } // Wall if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value && GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint")) { SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2)); SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2)); } else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value && GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint")) { SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2)); SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2)); } } void MonitorGas(ModuleName mod) { // gas this.SimulateMFC(mod, 1); this.SimulateMFC(mod, 2); this.SimulateMFC(mod, 3); this.SimulateMFC(mod, 4); this.SimulateMFC(mod, 5); this.SimulateMFC(mod, 6); this.SimulateMFC(mod, 7); this.SimulateMFC(mod, 8); this.SimulateN2(mod); } void MonitorKeplerTMGas() { this.SimulateKeplerMFC(ModuleName.LLA, 1); this.SimulateKeplerMFC(ModuleName.LLB, 1); this.SimulateKeplerMFC(ModuleName.TM, 1); } void MonitorSEGas(ModuleName mod) { SimulateMFC(mod, 1); SimulateMFC(mod, 2); SimulateMFC(mod, 3); SimulateMFC(mod, 4); SimulateMFC(mod, 5); SimulateMFC(mod, 6); SimulateMFC(mod, 7); SimulateMFC(mod, 8); SimulateMFC(mod, 9); SimulateMFC(mod, 10); SimulateMFC(mod, 11); SimulateMFC(mod, 12); } void MonitorDEGas(ModuleName mod) { SimulateMFC(mod, 1); SimulateMFC(mod, 2); SimulateMFC(mod, 3); SimulateMFC(mod, 4); SimulateMFC(mod, 5); SimulateMFC(mod, 6); SimulateMFC(mod, 7); SimulateMFC(mod, 8); SimulateMFC(mod, 9); SimulateMFC(mod, 10); SimulateMFC(mod, 11); SimulateMFC(mod, 12); } private void SimulateMFC(ModuleName mod, byte gasNum) { var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint"); SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp); } private void SimulateKeplerMFC(ModuleName mod, byte gasNum) { var sp = GetAoValue($"TM.AO_{mod}_MFC{gasNum}_Flow_Setpoint"); SetAiValue($"TM.AI_{mod}_MFC{gasNum}_Flow", (float)sp); } private void SimulateN2(ModuleName mod) { var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint"); //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble(); SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp); } private void SimulateSEHe(ModuleName mod) { var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint"); var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble(); SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb); } private void SimulateDEHe(ModuleName mod) { var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint1"); var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble(); SetAiValue($"{mod}.AI_MFC_He1_Flow", (float)mock_fb); } private void SimulateHe(ModuleName mod) { var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint"); var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble(); SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb); } void MonitorRF(ModuleName mod) { // RF generator var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint"); var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble(); //var mock_sp = _rd.Next(sp - 3, sp + 3); SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb); //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value; } void MonitorIOPumpCtrl(ModuleName mod) { if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true; if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false; } void MonitorIOHighTemperatureHeater(ModuleName mod) { if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value) { IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false; } if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value) { IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false; } if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value) { IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false; } if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value) { IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false; } if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value) { IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true; IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false; } if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value) { IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false; IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true; } IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value; var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint"); var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble(); //var mock_sp = _rd.Next(sp - 3, sp + 3); SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb); } void MonitorKepler2200Heater(ModuleName mod) { var pendulumHeaterSetpoint = GetAoValue($"{mod}.AO_P_Valve_Temperature_Setpoint"); SetAiValue($"{mod}.AI_P_Valve_Control_TC_Temp", (float)pendulumHeaterSetpoint); } public void Terminate() { _thread.Stop(); } public void SetCoolantOutletTemp(string module, int Temp) { //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus) //{ //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp); //} } } }