SIASUNRobot.cs 32 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using Venus_RT.Modules;
  4. using Venus_Core;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using Aitex.Sorter.Common;
  8. using MECF.Framework.Common.Equipment;
  9. using MECF.Framework.Common.SubstrateTrackings;
  10. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  11. using Aitex.Core.RT.Log;
  12. using System.Text.RegularExpressions;
  13. using MECF.Framework.Common.CommonData;
  14. using System.Threading;
  15. using System.Collections.Concurrent;
  16. using System.Threading.Tasks;
  17. using Venus_RT.Devices.VCE;
  18. namespace Venus_RT.Devices
  19. {
  20. class SIASUNRobot : ITransferRobot
  21. {
  22. enum OPStep
  23. {
  24. Idle,
  25. Home,
  26. Goto,
  27. MoveTo,
  28. CheckLoad_ArmA,
  29. CheckLoad_ArmB,
  30. Pick,
  31. Place,
  32. PickExtend,
  33. PickRetract,
  34. PlaceExtent,
  35. PlaceRetract,
  36. QueryAwc
  37. }
  38. private RState _status;
  39. private bool _IsHomed;
  40. private bool _HasReceiveMsg;
  41. public RState Status { get { return _status; } }
  42. public bool IsHomed { get { return _IsHomed; } }
  43. private double offset_x = 0;
  44. private double offset_y = 0;
  45. public double Offset_X => offset_x;
  46. public double Offset_Y => offset_y;
  47. public double Offset_D => Math.Round(Math.Sqrt(Math.Pow(offset_x, 2) + Math.Pow(offset_y, 2)), 2);//欧式距离 保留后两位
  48. public RobotMoveInfo TMRobotMoveInfo { get { return _robotMoveInfo; } }
  49. public string WithWaferSpeed => "";
  50. public string NoWaferSpeed => "";
  51. private readonly AsyncSocket _socket;
  52. private OPStep _currentOP = OPStep.Idle;
  53. private Dictionary<ModuleName, int> _StationNumbers = new Dictionary<ModuleName, int>();
  54. private readonly int _checkLoadStation = 1;
  55. private RobotMoveInfo _robotMoveInfo = new RobotMoveInfo();
  56. private string Hand2Arm(Hand hand) => hand == Hand.Blade1 ? "B" : "A";
  57. private readonly Regex _rex_check_load = new Regex(@"LOAD\s+(A|B)\s+(\w+)\s*");
  58. private readonly Regex _rex_error_code = new Regex(@"_ERR\s+(\d+)\s*");
  59. private readonly Regex _rex_event_offset = new Regex(@"_EVENT\sROBOT\s[0-9|\s]*.*");
  60. private readonly Regex _rex_event_getoffset = new Regex(@"(?<=_EVENT\sROBOT\s)(.+?)(?=\sB)");
  61. private readonly Regex _rex_query_awc = new Regex(@"WAF_CEN\sRT[-|0-9|\s]*LFT[-|0-9|\s]*OFFSET[-|0-9|\s]*");
  62. private readonly Regex _rex_query_getoffset = new Regex(@"(?<=WAF_CEN\sRT[-|0-9|\s]*LFT[-|0-9|\s]*OFFSET\s)(.*)");
  63. private const string EOF = "\r\n";
  64. private BlockingCollection<RobotAnimationData> blockingCollection = new BlockingCollection<RobotAnimationData>();
  65. public SIASUNRobot()
  66. {
  67. _socket = new AsyncSocket("", EOF);
  68. _socket.Connect(SC.GetStringValue($"TM.IPAddress"));
  69. _socket.OnDataChanged += OnReceiveMessage;
  70. _socket.OnErrorHappened += OnErrorHappen;
  71. _status = RState.Init;
  72. _IsHomed = false;
  73. _StationNumbers[ModuleName.LLA] = SC.GetValue<int>("TM.LLAStationNumber");
  74. _StationNumbers[ModuleName.LLB] = SC.GetValue<int>("TM.LLBStationNumber");
  75. _StationNumbers[ModuleName.PMA] = SC.GetValue<int>("TM.PMAStationNumber");
  76. _StationNumbers[ModuleName.PMB] = SC.GetValue<int>("TM.PMBStationNumber");
  77. _StationNumbers[ModuleName.PMC] = SC.GetValue<int>("TM.PMCStationNumber");
  78. _StationNumbers[ModuleName.PMD] = SC.GetValue<int>("TM.PMDStationNumber");
  79. _StationNumbers[ModuleName.PME] = SC.GetValue<int>("TM.PMEStationNumber");
  80. _StationNumbers[ModuleName.PMF] = SC.GetValue<int>("TM.PMFStationNumber");
  81. _checkLoadStation = SC.GetValue<int>("TM.CheckLoadStation");
  82. Task.Run(() =>
  83. {
  84. foreach (var data in blockingCollection.GetConsumingEnumerable())
  85. {
  86. _robotMoveInfo.Action = data.Action;
  87. _robotMoveInfo.ArmTarget = data.Hand == Hand.Blade1 ? RobotArm.ArmA : (data.Hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
  88. _robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{data.Target}";
  89. Thread.Sleep(600);
  90. }
  91. });
  92. }
  93. public bool Home()
  94. {
  95. _status = RState.Running;
  96. _currentOP = OPStep.Home;
  97. return _SendCommand("HOME ALL");
  98. }
  99. public bool Halt()
  100. {
  101. return _SendCommand("HALT");
  102. }
  103. public bool ReQueryLoadA()
  104. {
  105. return true;
  106. }
  107. public bool ReQueryLoadB()
  108. {
  109. return true;
  110. }
  111. public bool CheckLoad(Hand hand = Hand.Blade1)
  112. {
  113. if (_currentOP != OPStep.Home && _currentOP != OPStep.CheckLoad_ArmA && CheckRobotStatus() == false)
  114. return false;
  115. _currentOP = hand == Hand.Blade2 ? OPStep.CheckLoad_ArmB : OPStep.CheckLoad_ArmA;
  116. _status = RState.Running;
  117. return _SendCommand($"CHECK LOAD {_checkLoadStation} ARM {Hand2Arm(hand)}");
  118. }
  119. public bool QueryAwc()
  120. {
  121. //检查防止状态交叉
  122. if (CheckRobotStatus() == false)
  123. return false;
  124. offset_x = 0;
  125. offset_y = 0;
  126. _currentOP = OPStep.QueryAwc;
  127. _status = RState.Running;
  128. _HasReceiveMsg = false;
  129. return _SendCommand("RQ WAF_CEN DATA");
  130. }
  131. public bool Goto(ModuleName station, int slot, Hand hand)
  132. {
  133. if (CheckRobotStatus() == false)
  134. return false;
  135. _currentOP = OPStep.Goto;
  136. _status = RState.Running;
  137. SetRobotMovingInfo(RobotAction.Rotating, hand, station);
  138. return _SendCommand($"GOTO N {_StationNumbers[station]} R RE Z DOWN SLOT {slot + 1} ARM {Hand2Arm(hand)}");
  139. }
  140. public bool MoveTo(ModuleName stnFrom, ModuleName stnTo, Hand hand)
  141. {
  142. if (CheckRobotStatus() == false)
  143. return false;
  144. _currentOP = OPStep.MoveTo;
  145. _status = RState.Running;
  146. return _SendCommand($"XFER ARM {Hand2Arm(hand)} {_StationNumbers[stnFrom]} {_StationNumbers[stnTo]}");
  147. }
  148. public bool PickExtend(ModuleName chamber, int slot, Hand hand)
  149. {
  150. if (CheckRobotStatus() == false)
  151. return false;
  152. _currentOP = OPStep.PickExtend;
  153. _status = RState.Running;
  154. SetRobotMovingInfo(RobotAction.Extending, hand, chamber);
  155. return _SendCommand($"PICK {_StationNumbers[chamber]} SLOT {slot + 1} ARM {Hand2Arm(hand)} ENRT NR");
  156. }
  157. public bool PickRetract(ModuleName chamber, int slot, Hand hand)
  158. {
  159. if (CheckRobotStatus() == false)
  160. return false;
  161. _currentOP = OPStep.PickRetract;
  162. _status = RState.Running;
  163. SetRobotMovingInfo(RobotAction.Retracting, hand, chamber);
  164. return _SendCommand($"PICK {_StationNumbers[chamber]} SLOT {slot + 1} ARM {Hand2Arm(hand)} STRT NR");
  165. }
  166. public bool PlaceExtend(ModuleName chamber, int slot, Hand hand)
  167. {
  168. if (CheckRobotStatus() == false)
  169. return false;
  170. _currentOP = OPStep.PlaceExtent;
  171. _status = RState.Running;
  172. SetRobotMovingInfo(RobotAction.Extending, hand, chamber);
  173. return _SendCommand($"PLACE {_StationNumbers[chamber]} SLOT {slot + 1} ARM {Hand2Arm(hand)} ENRT NR");
  174. }
  175. public bool PlaceRetract(ModuleName chamber, int slot, Hand hand)
  176. {
  177. if (CheckRobotStatus() == false)
  178. return false;
  179. _currentOP = OPStep.PlaceExtent;
  180. _status = RState.Running;
  181. SetRobotMovingInfo(RobotAction.Retracting, hand, chamber);
  182. return _SendCommand($"PLACE {_StationNumbers[chamber]} SLOT {slot + 1} ARM {Hand2Arm(hand)} STRT NR");
  183. }
  184. public bool Pick(ModuleName station, int slot, Hand hand)
  185. {
  186. if (CheckRobotStatus() == false)
  187. return false;
  188. _currentOP = OPStep.Pick;
  189. _status = RState.Running;
  190. SetRobotMovingInfo(RobotAction.Picking, hand, station);
  191. return _SendCommand($"PICK {_StationNumbers[station]} SLOT {slot + 1} ARM {Hand2Arm(hand)}");
  192. }
  193. public bool Place(ModuleName station, int slot, Hand hand)
  194. {
  195. if (CheckRobotStatus() == false)
  196. return false;
  197. _currentOP = OPStep.Place;
  198. _status = RState.Running;
  199. SetRobotMovingInfo(RobotAction.Placing, hand, station);
  200. return _SendCommand($"PLACE {_StationNumbers[station]} SLOT {slot + 1} ARM {Hand2Arm(hand)}");
  201. }
  202. private bool _SendCommand(string cmd)
  203. {
  204. LOG.WriteSingeLine(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"Send Command to SIASUN TM Robot: {cmd}");
  205. return _socket.Write(cmd + EOF);
  206. }
  207. private bool CheckRobotStatus()
  208. {
  209. if (Status == RState.Init)
  210. {
  211. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, "TM Robot is not homed, please home first.");
  212. return false;
  213. }
  214. else if (Status == RState.Running)
  215. {
  216. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, "TM Robot is busy, please wait a minute");
  217. return false;
  218. }
  219. else if (Status == RState.Failed || Status == RState.Timeout)
  220. {
  221. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, "TM Robot has a error, please check and fix the hardware issue and home it");
  222. return false;
  223. }
  224. return true;
  225. }
  226. private void OnReceiveMessage(string RevMsg)
  227. {
  228. LOG.WriteSingeLine(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"Receive message from SIASUN TM Robot: {RevMsg}, while {_currentOP}");
  229. if (_rex_error_code.IsMatch(RevMsg))
  230. {
  231. _IsHomed = false;
  232. _status = RState.Failed;
  233. var results = _rex_error_code.Match(RevMsg);
  234. ErrorMessageHandler(results.Groups[1].Value);
  235. return;
  236. }
  237. switch (_currentOP)
  238. {
  239. case OPStep.Goto:
  240. case OPStep.MoveTo:
  241. case OPStep.Pick:
  242. case OPStep.PickExtend:
  243. case OPStep.PickRetract:
  244. case OPStep.Place:
  245. case OPStep.PlaceExtent:
  246. case OPStep.PlaceRetract:
  247. {
  248. if (RevMsg.Trim() == "_RDY" || (RevMsg.Contains("_RDY") && !RevMsg.Contains("_ERR")))
  249. {
  250. _currentOP = OPStep.Idle;
  251. _status = RState.End;
  252. //if (RevMsg.Contains("_EVENT"))
  253. //{
  254. // GetEventMsg(RevMsg);
  255. //}
  256. }
  257. else if (RevMsg.Trim().Contains( "_EVENT"))
  258. {
  259. GetEventMsg(RevMsg);
  260. }
  261. else
  262. {
  263. ReportWrongMsg(RevMsg);
  264. }
  265. if (_currentOP != OPStep.PickExtend && _currentOP != OPStep.PlaceExtent)
  266. {
  267. SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.TMRobot);
  268. }
  269. }
  270. break;
  271. case OPStep.Home:
  272. {
  273. if (RevMsg.Trim() == "_RDY")
  274. {
  275. //CheckLoad(Hand.Blade1);
  276. _currentOP = OPStep.Idle;
  277. _status = RState.End;
  278. _IsHomed = true;
  279. SetRobotMovingInfo(RobotAction.Homing, Hand.Both, ModuleName.TM);
  280. }
  281. else
  282. ReportWrongMsg(RevMsg);
  283. }
  284. break;
  285. case OPStep.CheckLoad_ArmA:
  286. {
  287. if (_rex_check_load.IsMatch(RevMsg))
  288. {
  289. GetCheckLoadResult(RevMsg);
  290. CheckLoad(Hand.Blade2);
  291. }
  292. else
  293. ReportWrongMsg(RevMsg);
  294. }
  295. break;
  296. case OPStep.CheckLoad_ArmB:
  297. {
  298. if (_rex_check_load.IsMatch(RevMsg))
  299. {
  300. GetCheckLoadResult(RevMsg);
  301. _currentOP = OPStep.Idle;
  302. _status = RState.End;
  303. _IsHomed = true;
  304. }
  305. }
  306. break;
  307. case OPStep.QueryAwc:
  308. QueryAwcData(RevMsg);
  309. break;
  310. default:
  311. if (!RevMsg.Contains("_EVENT"))
  312. ReportWrongMsg(RevMsg);
  313. else
  314. GetEventMsg(RevMsg);
  315. break;
  316. }
  317. }
  318. private void GetCheckLoadResult(string strRev)
  319. {
  320. Match result = _rex_check_load.Match(strRev);
  321. string Arm = result.Groups[1].Value;
  322. string WaferStatus = result.Groups[2].Value;
  323. if (WaferStatus == "ON")
  324. {
  325. WaferManager.Instance.CreateWafer(ModuleName.TMRobot, Arm == "A" ? 0 : 1, Aitex.Core.Common.WaferStatus.Unknown);
  326. }
  327. }
  328. private void OnErrorHappen(ErrorEventArgs args)
  329. {
  330. Singleton<RouteManager>.Instance.TM.PostMsg(TMEntity.MSG.Error);
  331. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, $"SIASUN TM Robot Error: {args.Reason} while {_currentOP}");
  332. }
  333. private void ReportWrongMsg(string revMsg)
  334. {
  335. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, $"Receive wrong message:{revMsg} while {_currentOP}");
  336. }
  337. private void ErrorMessageHandler(string errCode)
  338. {
  339. int ErrCode;
  340. string ErrorInfo;
  341. if (int.TryParse(errCode, out ErrCode))
  342. {
  343. switch (ErrCode)
  344. {
  345. // 系统及硬件错误信息
  346. case 901:
  347. ErrorInfo = $"_Err {errCode}: 主电柜急停启动";
  348. break;
  349. case 902:
  350. ErrorInfo = $"_Err {errCode}: 示教盒急停启动";
  351. break;
  352. case 862:
  353. ErrorInfo = $"_Err {errCode}: 驱动器 RDY 信号断开";
  354. break;
  355. // 执行错误信息
  356. case 3001:
  357. ErrorInfo = $"_Err {errCode}: 系统发生碰撞,按取消恢复";
  358. break;
  359. case 7300:
  360. ErrorInfo = $"_Err {errCode}: 旋转信号不允许";
  361. break;
  362. case 7301:
  363. ErrorInfo = $"_Err {errCode}: 伸缩信号不允许";
  364. break;
  365. case 2200:
  366. ErrorInfo = $"_Err {errCode}: 输出端口 NO.不存在";
  367. break;
  368. case 3100:
  369. ErrorInfo = $"_Err {errCode}: 关节 N 位置超界";
  370. break;
  371. case 3120:
  372. ErrorInfo = $"_Err {errCode}: 关节 N 速度超界";
  373. break;
  374. case 100:
  375. ErrorInfo = $"_Err {errCode}: 手臂电源上电失败(手臂电源未打开)";
  376. break;
  377. // 通信错误信息
  378. case 7307:
  379. ErrorInfo = $"_Err {errCode}: GOTO 工位号超范围";
  380. break;
  381. case 7308:
  382. ErrorInfo = $"_Err {errCode}: 不支持的传感器类型";
  383. break;
  384. case 7312:
  385. ErrorInfo = $"_Err {errCode}: PICK工位号超范围";
  386. break;
  387. case 7313:
  388. ErrorInfo = $"_Err {errCode}: PLACE工位号超范围";
  389. break;
  390. case 7314:
  391. ErrorInfo = $"_Err {errCode}: XFER工位号超范围";
  392. break;
  393. case 7315:
  394. ErrorInfo = $"_Err {errCode}: REMOVE不支持的IO类型";
  395. break;
  396. case 7316:
  397. ErrorInfo = $"_Err {errCode}: RQ INTLCK不识别的参数";
  398. break;
  399. case 7317:
  400. ErrorInfo = $"_Err {errCode}: RQ IO不识别的参数";
  401. break;
  402. case 7319:
  403. ErrorInfo = $"_Err {errCode}: RQ STN工位号超范围";
  404. break;
  405. case 7320:
  406. ErrorInfo = $"_Err {errCode}: wafre(WAF_SEN)参数未设置";
  407. break;
  408. case 7321:
  409. ErrorInfo = $"_Err {errCode}: wafex(RETRACT_PIN)参数未设置";
  410. break;
  411. case 7322:
  412. ErrorInfo = $"_Err {errCode}: svlv(SBIT_SVLV_SEN)参数未设置";
  413. break;
  414. case 7323:
  415. ErrorInfo = $"_Err {errCode}: ens(EX_ENABLE)参数未设置";
  416. break;
  417. case 7324:
  418. ErrorInfo = $"_Err {errCode}: RQ命令不支持的参数";
  419. break;
  420. case 7325:
  421. ErrorInfo = $"_Err {errCode}: SET INTLOCK WAF_SEN参数错";
  422. break;
  423. case 7326:
  424. ErrorInfo = $"_Err {errCode}: SET INTLOCK RZ参数错";
  425. break;
  426. case 7327:
  427. ErrorInfo = $"_Err {errCode}: SET INTLOCK参数错";
  428. break;
  429. case 7328:
  430. ErrorInfo = $"_Err {errCode}: SET IO ECHO参数错";
  431. break;
  432. case 7329:
  433. ErrorInfo = $"_Err {errCode}: SET IO STATE不支持";
  434. break;
  435. case 7330:
  436. ErrorInfo = $"_Err {errCode}: SET IO不支持的参数";
  437. break;
  438. case 7331:
  439. ErrorInfo = $"_Err {errCode}: SET STN工位号超范围";
  440. break;
  441. case 7332:
  442. ErrorInfo = $"_Err {errCode}: 手臂参数读取错误";
  443. break;
  444. case 7333:
  445. ErrorInfo = $"_Err {errCode}: WAF_SEN不识别的参数";
  446. break;
  447. case 7334:
  448. ErrorInfo = $"_Err {errCode}: SET不支持的传感器类型";
  449. break;
  450. case 7335:
  451. ErrorInfo = $"_Err {errCode}: SET 指令输入不完整";
  452. break;
  453. case 7336:
  454. ErrorInfo = $"_Err {errCode}: STORE IO命令不支持该参数";
  455. break;
  456. case 7337:
  457. ErrorInfo = $"_Err {errCode}: STORE LOAD命令不支持该参数";
  458. break;
  459. case 7338:
  460. ErrorInfo = $"_Err {errCode}: STORE STN指令工位号大于20";
  461. break;
  462. case 7339:
  463. ErrorInfo = $"_Err {errCode}: STORE STN命令手臂参数错误";
  464. break;
  465. case 7340:
  466. ErrorInfo = $"_Err {errCode}: STORE不支持的传感器类型";
  467. break;
  468. case 7341:
  469. ErrorInfo = $"_Err {errCode}: STORE指令输入不完整";
  470. break;
  471. case 7342:
  472. ErrorInfo = $"_Err {errCode}: 无法识别的命令";
  473. break;
  474. case 7343:
  475. ErrorInfo = $"_Err {errCode}: HOME参数未指定";
  476. break;
  477. case 7344:
  478. ErrorInfo = $"_Err {errCode}: GOTO指令R轴参数未指定";
  479. break;
  480. case 7345:
  481. ErrorInfo = $"_Err {errCode}: GOTO指令Z轴参数未指定";
  482. break;
  483. case 7346:
  484. ErrorInfo = $"_Err {errCode}: ARM参数错误";
  485. break;
  486. case 7347:
  487. ErrorInfo = $"_Err {errCode}: GOTO指令未指定参数";
  488. break;
  489. case 7349:
  490. ErrorInfo = $"_Err {errCode}: MOVE指令未指定模式或轴";
  491. break;
  492. case 7350:
  493. ErrorInfo = $"_Err {errCode}: MOVE 指令中字段名字错";
  494. break;
  495. case 7351:
  496. ErrorInfo = $"_Err {errCode}: PICK未指定参数";
  497. break;
  498. case 7352:
  499. ErrorInfo = $"_Err {errCode}: PLACE未指定参数";
  500. break;
  501. case 7353:
  502. ErrorInfo = $"_Err {errCode}: REMOVE未指定参数";
  503. break;
  504. case 7354:
  505. ErrorInfo = $"_Err {errCode}: 指令执行未结束";
  506. break;
  507. case 7355:
  508. ErrorInfo = $"_Err {errCode}: GOTO指令未指定工位号";
  509. break;
  510. case 7356:
  511. ErrorInfo = $"_Err {errCode}: PICK指令未指定工位号";
  512. break;
  513. case 7357:
  514. ErrorInfo = $"_Err {errCode}: PLACE指令未指定工位号";
  515. break;
  516. case 7358:
  517. ErrorInfo = $"_Err {errCode}: ABS未指定数值";
  518. break;
  519. case 7359:
  520. ErrorInfo = $"_Err {errCode}: REL未指定数值";
  521. break;
  522. case 7360:
  523. ErrorInfo = $"_Err {errCode}: 没有指定主程序";
  524. break;
  525. case 7361:
  526. ErrorInfo = $"_Err {errCode}: 当前没有打开作业";
  527. break;
  528. case 7362:
  529. ErrorInfo = $"_Err {errCode}: 当前作业不是主作业";
  530. break;
  531. case 7363:
  532. ErrorInfo = $"_Err {errCode}: ex_ena(EX_ENABLE_SEN)参数未设置";
  533. break;
  534. case 7364:
  535. ErrorInfo = $"_Err {errCode}: stable(STABLE_ SIGNAL)参数未设置";
  536. break;
  537. case 7365:
  538. ErrorInfo = $"_Err {errCode}: VIA参数设置有误";
  539. break;
  540. case 7366:
  541. ErrorInfo = $"_Err {errCode}: 系统处于非启动状态";
  542. break;
  543. case 7367:
  544. ErrorInfo = $"_Err {errCode}: extend(EX_SIGNAL)参数未设置";
  545. break;
  546. case 7368:
  547. ErrorInfo = $"_Err {errCode}: retract(RE_ SIGNAL)参数未设置";
  548. break;
  549. case 7371:
  550. ErrorInfo = $"_Err {errCode}: place动作前:未检测到晶圆";
  551. break;
  552. case 7372:
  553. ErrorInfo = $"_Err {errCode}: pick动作前:检测到晶圆";
  554. break;
  555. case 7373:
  556. ErrorInfo = $"_Err {errCode}: place动作后:检测到晶圆";
  557. break;
  558. case 7374:
  559. ErrorInfo = $"_Err {errCode}: pick动作后:未检测到晶圆";
  560. break;
  561. case 7375:
  562. ErrorInfo = $"_Err {errCode}: 系统未上电或当前不是执行模式";
  563. break;
  564. case 7376:
  565. ErrorInfo = $"_Err {errCode}: 参数中存在非数字";
  566. break;
  567. case 7385:
  568. ErrorInfo = $"_Err {errCode}: 驱动器异常停止";
  569. break;
  570. case 7387:
  571. ErrorInfo = $"_Err {errCode}: 驱动器ID1报警";
  572. break;
  573. case 7388:
  574. ErrorInfo = $"_Err {errCode}: 驱动器ID2报警";
  575. break;
  576. case 7389:
  577. ErrorInfo = $"_Err {errCode}: 驱动器ID3报警";
  578. break;
  579. case 7391:
  580. ErrorInfo = $"_Err {errCode}: AWC工位号超范围";
  581. break;
  582. case 7392:
  583. ErrorInfo = $"_Err {errCode}: 偏差过大AWC报警";
  584. break;
  585. case 7393:
  586. ErrorInfo = $"_Err {errCode}: 标定失败,请重新标定";
  587. break;
  588. case 7398:
  589. ErrorInfo = $"_Err {errCode}: 触发点计算半径有误";
  590. break;
  591. case 7399:
  592. ErrorInfo = $"_Err {errCode}: 驱动器锁存AWC数据个数有误";
  593. break;
  594. case 7401:
  595. ErrorInfo = $"_Err {errCode}: 手指上可能有晶圆";
  596. break;
  597. case 7402:
  598. ErrorInfo = $"_Err {errCode}: 手指上可能无晶圆";
  599. break;
  600. case 7403:
  601. ErrorInfo = $"_Err {errCode}: load当前状态为ON,不正确";
  602. break;
  603. case 7404:
  604. ErrorInfo = $"_Err {errCode}: load当前状态为OFF,不正确";
  605. break;
  606. case 7405:
  607. ErrorInfo = $"_Err {errCode}: 当前slot不存在!";
  608. break;
  609. case 7495:
  610. ErrorInfo = $"_Err {errCode}: ID1码盘反馈错误";
  611. break;
  612. case 7496:
  613. ErrorInfo = $"_Err {errCode}: ID2码盘反馈错误";
  614. break;
  615. case 7497:
  616. ErrorInfo = $"_Err {errCode}: ID3码盘反馈错误";
  617. break;
  618. default:
  619. ErrorInfo = $"_Err {errCode}: 不能识别的错误码";
  620. break;
  621. }
  622. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, ErrorInfo);
  623. }
  624. else
  625. {
  626. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, $"Try Parse the receive error code faild:{errCode}");
  627. }
  628. }
  629. public void SetRobotMovingInfo(RobotAction action, Hand hand, ModuleName target)
  630. {
  631. //_robotMoveInfo.Action = action;
  632. //_robotMoveInfo.ArmTarget = hand == Hand.Blade1 ? RobotArm.ArmA : (hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
  633. //_robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{target}";
  634. blockingCollection.Add(new RobotAnimationData(action,hand,target));
  635. }
  636. private void GetEventMsg(string revMsg)
  637. {
  638. //在包含数据的前提下
  639. switch (_robotMoveInfo.Action)
  640. {
  641. case RobotAction.Picking:
  642. case RobotAction.Placing:
  643. case RobotAction.Extending:
  644. case RobotAction.Retracting:
  645. if (_rex_event_offset.IsMatch(revMsg))
  646. {
  647. //offset_x = _rex_event_getoffset.Match(revMsg).Value.Split(' ')[0];
  648. //offset_y = _rex_event_getoffset.Match(revMsg).Value.Split(' ')[1];
  649. }
  650. break;
  651. default:
  652. break;
  653. }
  654. }
  655. private void QueryAwcData(string revMsg)
  656. {
  657. //不沾包
  658. if (revMsg.Trim() == "_RDY")
  659. {
  660. if (_HasReceiveMsg)
  661. {
  662. _currentOP = OPStep.Idle;
  663. _status = RState.End;
  664. }
  665. else
  666. {
  667. _status = RState.Failed;
  668. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, $"Query Awc failed because not find valided data");
  669. }
  670. }
  671. //单条查询处理
  672. GetAwcMsg(revMsg);
  673. //沾包
  674. if (revMsg.Trim() != "_RDY" && revMsg.Contains("_RDY"))
  675. {
  676. if (!revMsg.Contains("_ERR"))
  677. {
  678. foreach (string msg in revMsg.Split('\n'))
  679. GetAwcMsg(msg);
  680. _currentOP = OPStep.Idle;
  681. _status = RState.End;
  682. }
  683. else
  684. {
  685. foreach (string msg in revMsg.Split('\n'))
  686. if (msg.Contains("_ERR"))
  687. ErrorMessageHandler(_rex_error_code.Match(revMsg.Trim()).Value);
  688. _status = RState.Failed;
  689. }
  690. }
  691. }
  692. private void GetAwcMsg(string revMsg)
  693. {
  694. revMsg = revMsg.Trim();
  695. if (_rex_query_awc.IsMatch(revMsg))
  696. {
  697. _HasReceiveMsg = true;
  698. string offset_r_t = _rex_query_getoffset.Match(revMsg).Value;
  699. //最大仅6位 不超过int范围
  700. int offset_r;
  701. int offset_t;
  702. if (int.TryParse(offset_r_t.Split(' ')[0], out offset_r) && int.TryParse(offset_r_t.Split(' ')[1], out offset_t))
  703. {
  704. // 9/26 新松暂未提供转换公式 暂时使用相关数据
  705. offset_x = offset_r * Math.Cos(offset_t);
  706. offset_y = offset_r * Math.Sin(offset_t);
  707. }
  708. else
  709. {
  710. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, $"TM Robot returned illegal offset data! Raw Data:{revMsg}");
  711. }
  712. }
  713. else if(!_HasReceiveMsg)
  714. {
  715. _status = RState.Failed;
  716. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, $"The awc parameter format returned by TM Robot is incorrect! Raw Data:{revMsg}");
  717. }
  718. }
  719. public bool PickWithOffset(ModuleName station, int slot, Hand hand, int Roffset, int Toffset)
  720. {
  721. return true;
  722. }
  723. public bool SetSpeed(string withwafer, float speed)
  724. {
  725. return true;
  726. }
  727. public bool SaveSpeed(string withwafer)
  728. {
  729. return true;
  730. }
  731. public bool QuerySpeed(string withwafer)
  732. {
  733. return true;
  734. }
  735. }
  736. }