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AdLinkEthercat
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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EFEM
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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10 months ago |
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EPD
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2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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10 months ago |
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EPDs
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4ffafb6001
EFEM界面优化
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1 year ago |
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IODevices
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401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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9 months ago |
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PreAligner
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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9 months ago |
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SMIF
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8436daeb68
Eliminate SE generation warning.
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1 year ago |
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TM
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401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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9 months ago |
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VCE
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4e783f1934
fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis
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9 months ago |
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AIRSYSChiller.cs
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 year ago |
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AdTecRF.cs
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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9 months ago |
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AdixenTurboPump.cs
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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10 months ago |
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CometRF.cs
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5ce110574e
1，添加cooling功能
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9 months ago |
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DataDefine.cs
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12fa756895
1. SETM will be Init while While SETM Abort Homing
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11 months ago |
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DeviceManager.cs
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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9 months ago |
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ESC5HighVoltage.cs
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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10 months ago |
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EdwardsPump.cs
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5ce110574e
1，添加cooling功能
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9 months ago |
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FinsPlc.cs
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9163903164
Kepler2200优化
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10 months ago |
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JetEPDBase.cs
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4ffafb6001
EFEM界面优化
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1 year ago |
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JetEfem.cs
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5fc13b3f0c
New Efem design
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1 year ago |
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JetKepler2200APM.cs
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5ce110574e
1，添加cooling功能
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9 months ago |
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JetKepler2200BPM.cs
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401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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9 months ago |
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JetKepler2300PM.cs
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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10 months ago |
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JetPMBase.cs
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5ce110574e
1，添加cooling功能
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9 months ago |
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JetVenusDEPM.cs
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4e783f1934
fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis
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9 months ago |
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JetVenusSEPM.cs
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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9 months ago |
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JetVenusSEPMBase.cs
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56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
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1 year ago |
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KeplerSignalTower.cs
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7a1faeac74
Redesign the EFEM module for thread safe issue.
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11 months ago |
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LzMatch_Ethercat.cs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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PendulumValve.cs
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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9 months ago |
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PlasmaController.cs
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75710d35d8
RF Match.
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2 years ago |
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RevtechMatch.cs
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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10 months ago |
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SMCChiller.cs
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41c5b8a615
Remove the toleranceChecker in SMCChiler && SMCShareChiller
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11 months ago |
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SMCChillerDrive.cs
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a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
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11 months ago |
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SMCShareChiller.cs
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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9 months ago |
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SkyPump.cs
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5ce110574e
1，添加cooling功能
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9 months ago |
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TruPlasmaRF.cs
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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9 months ago |
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TruPlasmaRF_Ethercat.cs
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
lixiang
401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因