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Backends
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60e9a04892
Simulator LP3 Update
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1 anno fa |
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Config
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 anno fa |
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Devices
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 anno fa |
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Instances
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c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
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1 anno fa |
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Modules
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3cb931b12b
fix the routing bug while multiple In Out pattern sequence, and the bug for return all wafer.
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1 anno fa |
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Properties
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44fc6989ef
1、Remove FabConnect dll file;
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1 anno fa |
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Resources
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a5245356d0
source files
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2 anni fa |
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App.config
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f62e761ad2
修复小标题efem online/offline报警bug
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1 anno fa |
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RT2.ico
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ffda76b488
修改rt与ui交互功能
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2 anni fa |
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Venus_RT.csproj
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c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
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1 anno fa |
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Venus_RT.csproj.bak
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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1 anno fa |
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Venus_RT.csproj.user
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8fb1796c74
1.airsys chiller加入on/off状态
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1 anno fa |
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defaultrt.ico
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bad0bb7282
icon
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2 anni fa |
sangwq
3cb931b12b
fix the routing bug while multiple In Out pattern sequence, and the bug for return all wafer.