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ISchedulerDBCallback.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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SchedulerAligner.cs
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e61f018b66
Manual Return wafer while running cycle.
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1 year ago |
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SchedulerDBCallback.cs
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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8 months ago |
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SchedulerEfemRobot.cs
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38b40b702d
1.修复all in all out 不做cooling bug
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8 months ago |
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SchedulerLoadLock.cs
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5687e44ebc
Enhance routing algorithm.
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1 year ago |
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SchedulerLoadPort.cs
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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8 months ago |
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SchedulerModule.cs
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38b40b702d
1.修复all in all out 不做cooling bug
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8 months ago |
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SchedulerPM.cs
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a9d8e56970
1.扩展alarm list
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10 months ago |
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SchedulerSETMRobot.cs
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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1 year ago |
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SchedulerTMRobot.cs
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0af5bc1e75
throughput enhancement.
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1 year ago |
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SchedulerVCE.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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TransferModule.cs
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f8336dc16b
fix the crash issue in SETMScheduler.
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1 year ago |
lixiang
38b40b702d
1.修复all in all out 不做cooling bug