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EFEM
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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1 gadu atpakaļ |
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LLs
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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1 gadu atpakaļ |
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LPs
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9e9459c927
efem界面按钮功能优化
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1 gadu atpakaļ |
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PMs
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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1 gadu atpakaļ |
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SMIF
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 gadu atpakaļ |
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Schedulers
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da0e19a78e
enhance the error handling routine while PM offline.
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1 gadu atpakaļ |
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TM
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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1 gadu atpakaļ |
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VCE
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01f4eaa5de
fix the bug in SEMFSwapRoutine
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1 gadu atpakaļ |
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AutoCycle.cs
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2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
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1 gadu atpakaļ |
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Autotransfer_LP_FA.cs
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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1 gadu atpakaļ |
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DVIDName.cs
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44fc6989ef
1、Remove FabConnect dll file;
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1 gadu atpakaļ |
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EntityErrorRaiseTrigger.cs
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d35b997884
1.优化RevtechMatch状态机
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1 gadu atpakaļ |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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2 gadi atpakaļ |
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ManualTransfer.cs
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1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
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1 gadu atpakaļ |
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ResourceMonitor.cs
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8436daeb68
Eliminate SE generation warning.
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1 gadu atpakaļ |
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RouteManager.cs
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1a56dd552c
fix bugs
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1 gadu atpakaļ |
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SEManualTransfer.cs
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3c1ae4babb
add abort for VenusDE && fix bug in UI && add AbortJob,StopJob
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1 gadu atpakaļ |
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SETMCycle.cs
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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1 gadu atpakaļ |
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SystemDispatcher.cs
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1b11b89cd6
handle the Scheduler wafers while destination PM unexpected offline.
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1 gadu atpakaļ |
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TMCycle.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 gadu atpakaļ |
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VenusDispatcher.cs
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9d5c9aa491
Reset PMTask while after system abort.
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1 gadu atpakaļ |
lixiang
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check