RtState.cs 2.9 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace Venus_Core
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. ReturningCassette,
  19. Cycle,
  20. PrepareCycle,
  21. PostCycle,
  22. SetSpeed,
  23. Error,
  24. Reset,
  25. Processing,
  26. PostProcess,
  27. PauseProcess,
  28. //Maintenance,
  29. //WaferMapping,
  30. //Cycling,
  31. ReturnWafer,
  32. }
  33. public enum PMState
  34. {
  35. Init,
  36. Idle,
  37. Homing,
  38. GasFlowing,
  39. RfPowering,
  40. Heating,
  41. LaunchingPump,
  42. LaunchingTurboPump,
  43. Pumping,
  44. Venting,
  45. Purging,
  46. GasLinePurge,
  47. PumpingLoadLock,
  48. VentingLoadLock,
  49. PurgingLoadLock,
  50. LoadLockLeakCheck,
  51. MoveLift,
  52. Purge,
  53. // transfer
  54. LLPlacing,
  55. LLPicking,
  56. Transfer,
  57. Error,
  58. PrepareTransfer,
  59. PostTransfer,
  60. TransferHandoff,
  61. //Process,
  62. LeakCheck,
  63. GasBoxLeakCheck,
  64. LiftpinMoving,
  65. LiftpinWaiting,
  66. GuidePinMoving,
  67. PreClean,
  68. LoadProcessRecipe,
  69. PreProcess,
  70. Processing,
  71. PostProcess,
  72. OpeningLid,
  73. ClosingLid,
  74. MFCVerification,
  75. AllMFCVerification,
  76. // exchange wafer with TM
  77. PreparePick,
  78. PreparePlace,
  79. ReadyForPick,
  80. ReadyForPlace,
  81. DropDownWafer,
  82. LiftUpWafer,
  83. DropDownReady,
  84. LiftUpReady,
  85. FinishPick,
  86. FinishPlace,
  87. PartialPressureTesting,
  88. VATPerformanceTesting
  89. }
  90. public enum TMState
  91. {
  92. Unknown,
  93. Init,
  94. Initializing,
  95. Idle,
  96. Error,
  97. Pumping,
  98. Venting,
  99. Purging,
  100. Leakchecking,
  101. Picking,
  102. Placing,
  103. Swaping,
  104. PMPicking,
  105. PMPlacing,
  106. PMSwaping,
  107. Aligning,
  108. Mapping,
  109. Extending,
  110. Retracting,
  111. Swapping,
  112. Gotoing,
  113. }
  114. public enum LLState
  115. {
  116. //Unknown,
  117. //Init,
  118. //Initializing,
  119. //Idle,
  120. //Error,
  121. //Pumping,
  122. //Venting,
  123. //Purging,
  124. //Leakchecking,
  125. //Picking,
  126. //Placing,
  127. //Swaping,
  128. //PMPicking,
  129. //PMPlacing,
  130. //PMSwaping,
  131. //Aligning,
  132. //Mapping,
  133. //Extending,
  134. //Retracting,
  135. //Swapping,
  136. //Gotoing,
  137. Unknown,
  138. Init,
  139. Initializing,
  140. Idle,
  141. Error,
  142. Pumping,
  143. Venting,
  144. Purging,
  145. LeakCheck,
  146. Prepare_For_TM,
  147. Prepare_For_EFEM,
  148. Ready_For_TM,
  149. Ready_For_EFEM,
  150. }
  151. }