123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165 |
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace Venus_Core
- {
- public enum RtState
- {
- Init,
- Initializing,
- Idle,
- Manual,
- Transfer,
- AutoIdle,
- AutoRunning,
- AutoRunningPaused,
- ReturningCassette,
- Cycle,
- PrepareCycle,
- PostCycle,
- SetSpeed,
- Error,
- Reset,
- Processing,
- PostProcess,
- PauseProcess,
- //Maintenance,
- //WaferMapping,
- //Cycling,
- ReturnWafer,
- }
- public enum PMState
- {
- Init,
- Idle,
- Homing,
- GasFlowing,
- RfPowering,
- Heating,
- LaunchingPump,
- LaunchingTurboPump,
- Pumping,
- Venting,
- Purging,
- GasLinePurge,
- PumpingLoadLock,
- VentingLoadLock,
- PurgingLoadLock,
- LoadLockLeakCheck,
- MoveLift,
- Purge,
- // transfer
- LLPlacing,
- LLPicking,
- Transfer,
- Error,
- PrepareTransfer,
- PostTransfer,
- TransferHandoff,
- //Process,
- LeakCheck,
- GasBoxLeakCheck,
- LiftpinMoving,
- LiftpinWaiting,
- GuidePinMoving,
- PreClean,
- LoadProcessRecipe,
- PreProcess,
- Processing,
- PostProcess,
- OpeningLid,
- ClosingLid,
- MFCVerification,
- AllMFCVerification,
- // exchange wafer with TM
- PreparePick,
- PreparePlace,
- ReadyForPick,
- ReadyForPlace,
- DropDownWafer,
- LiftUpWafer,
- DropDownReady,
- LiftUpReady,
- FinishPick,
- FinishPlace,
- PartialPressureTesting,
- VATPerformanceTesting
- }
- public enum TMState
- {
- Unknown,
- Init,
- Initializing,
- Idle,
- Error,
- Pumping,
- Venting,
- Purging,
- Leakchecking,
- Picking,
- Placing,
- Swaping,
- PMPicking,
- PMPlacing,
- PMSwaping,
- Aligning,
- Mapping,
- Extending,
- Retracting,
- Swapping,
- Gotoing,
- }
- public enum LLState
- {
- //Unknown,
- //Init,
- //Initializing,
- //Idle,
- //Error,
- //Pumping,
- //Venting,
- //Purging,
- //Leakchecking,
- //Picking,
- //Placing,
- //Swaping,
- //PMPicking,
- //PMPlacing,
- //PMSwaping,
- //Aligning,
- //Mapping,
- //Extending,
- //Retracting,
- //Swapping,
- //Gotoing,
- Unknown,
- Init,
- Initializing,
- Idle,
- Error,
- Pumping,
- Venting,
- Purging,
- LeakCheck,
- Prepare_For_TM,
- Prepare_For_EFEM,
- Ready_For_TM,
- Ready_For_EFEM,
- }
- }
|