using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; namespace Venus_Core { public enum RtState { Init, Initializing, Idle, Manual, Transfer, AutoIdle, AutoRunning, AutoRunningPaused, ReturningCassette, Cycle, PrepareCycle, PostCycle, SetSpeed, Error, Reset, Processing, PostProcess, PauseProcess, //Maintenance, //WaferMapping, //Cycling, ReturnWafer, } public enum PMState { Init, Idle, Homing, GasFlowing, RfPowering, Heating, LaunchingPump, LaunchingTurboPump, Pumping, Venting, Purging, GasLinePurge, PumpingLoadLock, VentingLoadLock, PurgingLoadLock, LoadLockLeakCheck, MoveLift, Purge, // transfer LLPlacing, LLPicking, Transfer, Error, PrepareTransfer, PostTransfer, TransferHandoff, //Process, LeakCheck, GasBoxLeakCheck, LiftpinMoving, LiftpinWaiting, GuidePinMoving, PreClean, LoadProcessRecipe, PreProcess, Processing, PostProcess, OpeningLid, ClosingLid, MFCVerification, AllMFCVerification, // exchange wafer with TM PreparePick, PreparePlace, ReadyForPick, ReadyForPlace, DropDownWafer, LiftUpWafer, DropDownReady, LiftUpReady, FinishPick, FinishPlace, PartialPressureTesting, VATPerformanceTesting } public enum TMState { Unknown, Init, Initializing, Idle, Error, Pumping, Venting, Purging, Leakchecking, Picking, Placing, Swaping, PMPicking, PMPlacing, PMSwaping, Aligning, Mapping, Extending, Retracting, Swapping, Gotoing, } public enum LLState { //Unknown, //Init, //Initializing, //Idle, //Error, //Pumping, //Venting, //Purging, //Leakchecking, //Picking, //Placing, //Swaping, //PMPicking, //PMPlacing, //PMSwaping, //Aligning, //Mapping, //Extending, //Retracting, //Swapping, //Gotoing, Unknown, Init, Initializing, Idle, Error, Pumping, Venting, Purging, LeakCheck, Prepare_For_TM, Prepare_For_EFEM, Ready_For_TM, Ready_For_EFEM, } }