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MFControlPressureRoutine.cs
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76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
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MFHomeRoutine.cs
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76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
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MFLeakCheckRoutine.cs
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b6acfe2e29
优化TM leak check功能
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2 years ago |
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MFPMExtendRoutine.cs
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072e5d0d01
ui Module TM 名变TMRobot
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2 years ago |
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MFPMPickRoutine.cs
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8f9b95ae8f
Develop transfer cycle.
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2 years ago |
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MFPMPlaceRoutine.cs
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2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
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2 years ago |
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MFPMRetractRoutine.cs
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8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
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2 years ago |
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MFPMSwapRoutine.cs
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8f9b95ae8f
Develop transfer cycle.
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2 years ago |
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MFPickRoutine.cs
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8f9b95ae8f
Develop transfer cycle.
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2 years ago |
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MFPlaceRoutine.cs
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8f9b95ae8f
Develop transfer cycle.
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2 years ago |
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MFPumpRoutine.cs
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f216c69fcf
Enhance AutoCycle Module.
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2 years ago |
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MFPurgeRoutine.cs
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b8bd250b4e
TM/LL Pump/Vent/Purge done.
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2 years ago |
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MFSwapRoutine.cs
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8f9b95ae8f
Develop transfer cycle.
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2 years ago |
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MFVentRoutine.cs
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28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM
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2 years ago |
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TMEntity.cs
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76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
sangwq
f216c69fcf
Enhance AutoCycle Module.