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EFEM
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ef3841f212
atm模式移除PM控压
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1 anno fa |
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LLs
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c3bef13a6e
Enhance Auto pump/vent algorithm.
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1 anno fa |
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LPs
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8bb5f3f4f9
fixed loadport event notify;
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1 anno fa |
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PMs
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ef3841f212
atm模式移除PM控压
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1 anno fa |
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SMIF
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 anno fa |
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Schedulers
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236244c8a0
redesign wtw clean function and fix auto vent bug.
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1 anno fa |
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TM
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236244c8a0
redesign wtw clean function and fix auto vent bug.
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1 anno fa |
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VCE
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dc38e4a4a8
fix bug in Venus SE Swap
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1 anno fa |
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AutoCycle.cs
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236244c8a0
redesign wtw clean function and fix auto vent bug.
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1 anno fa |
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Autotransfer_LP_FA.cs
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8bb5f3f4f9
fixed loadport event notify;
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1 anno fa |
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DVIDName.cs
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44fc6989ef
1、Remove FabConnect dll file;
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1 anno fa |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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2 anni fa |
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ManualTransfer.cs
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501997ac38
TM/EFEM robot single arm option.
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1 anno fa |
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ResourceMonitor.cs
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0ed42d17d1
fix bugs for WaferOffset
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1 anno fa |
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RouteManager.cs
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44fc6989ef
1、Remove FabConnect dll file;
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1 anno fa |
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SEManualTransfer.cs
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 anno fa |
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SETMCycle.cs
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 anno fa |
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TMCycle.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 anno fa |
sangwq
236244c8a0
redesign wtw clean function and fix auto vent bug.