RtState.cs 3.6 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace Venus_Core
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. ReturningCassette,
  19. Cycle,
  20. PrepareCycle,
  21. PostCycle,
  22. SetSpeed,
  23. Error,
  24. Reset,
  25. Processing,
  26. PostProcess,
  27. PauseProcess,
  28. //Maintenance,
  29. //WaferMapping,
  30. //Cycling,
  31. TMCycle,
  32. ReturnWafer,
  33. }
  34. public enum PMState
  35. {
  36. Init,
  37. Idle,
  38. Homing,
  39. GasFlowing,
  40. RfPowering,
  41. Heating,
  42. LaunchingPump,
  43. LaunchingTurboPump,
  44. Pumping,
  45. Venting,
  46. Purging,
  47. GasLinePurge,
  48. PumpingLoadLock,
  49. VentingLoadLock,
  50. PurgingLoadLock,
  51. LoadLockLeakCheck,
  52. MoveLift,
  53. Purge,
  54. // transfer
  55. LLPlacing,
  56. LLPicking,
  57. Transfer,
  58. Error,
  59. PrepareTransfer,
  60. PostTransfer,
  61. TransferHandoff,
  62. //Process,
  63. LeakCheck,
  64. GasBoxLeakCheck,
  65. LiftpinMoving,
  66. LiftpinWaiting,
  67. GuidePinMoving,
  68. PreClean,
  69. LoadProcessRecipe,
  70. PreProcess,
  71. Processing,
  72. PostProcess,
  73. OpeningLid,
  74. ClosingLid,
  75. MFCVerification,
  76. AllMFCVerification,
  77. // exchange wafer with TM
  78. PreparePick,
  79. PreparePlace,
  80. ReadyForPick,
  81. ReadyForPlace,
  82. DropDownWafer,
  83. LiftUpWafer,
  84. DropDownReady,
  85. LiftUpReady,
  86. FinishPick,
  87. FinishPlace,
  88. PartialPressureTesting,
  89. VATPerformanceTesting
  90. }
  91. public enum TMState
  92. {
  93. Unknown,
  94. Init,
  95. Initializing,
  96. InitializingRB,
  97. Idle,
  98. Error,
  99. Pumping,
  100. Venting,
  101. Purging,
  102. Leakchecking,
  103. Picking,
  104. Placing,
  105. Swaping,
  106. PMPicking,
  107. PMPlacing,
  108. PMSwaping,
  109. Aligning,
  110. Mapping,
  111. Extending,
  112. Retracting,
  113. Swapping,
  114. Gotoing,
  115. ControllingPressure
  116. }
  117. public enum LLState
  118. {
  119. //Unknown,
  120. //Init,
  121. //Initializing,
  122. //Idle,
  123. //Error,
  124. //Pumping,
  125. //Venting,
  126. //Purging,
  127. //Leakchecking,
  128. //Picking,
  129. //Placing,
  130. //Swaping,
  131. //PMPicking,
  132. //PMPlacing,
  133. //PMSwaping,
  134. //Aligning,
  135. //Mapping,
  136. //Extending,
  137. //Retracting,
  138. //Swapping,
  139. //Gotoing,
  140. Unknown,
  141. Init,
  142. Initializing,
  143. Idle,
  144. Error,
  145. Pumping,
  146. Venting,
  147. Purging,
  148. LeakCheck,
  149. Prepare_For_TM,
  150. Prepare_For_EFEM,
  151. Ready_For_TM,
  152. Ready_For_EFEM,
  153. }
  154. public enum EFEMSTATE
  155. {
  156. Unknown, // 0
  157. Initializing, // 1
  158. Idle, // 2
  159. Error, // 3
  160. Picking, // 4
  161. Placing, // 5
  162. Aligning, // 6
  163. Mapping, // 7
  164. Init, // 8
  165. Orgshing, // 9
  166. Lifting, // 10
  167. InitingAL, // 11
  168. InitingRB, // 12
  169. Extending, // 13
  170. Retracting, // 14
  171. //SettingLamp, // 15
  172. Swapping,
  173. Gotoing,
  174. Gripping,
  175. Ungripping,
  176. Fliping,
  177. }
  178. }