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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace Venus_Core
- {
- public enum RtState
- {
- Init,
- Initializing,
- Idle,
- Manual,
- Transfer,
- AutoIdle,
- AutoRunning,
- AutoRunningPaused,
- ReturningCassette,
- Cycle,
- PrepareCycle,
- PostCycle,
- SetSpeed,
- Error,
- Reset,
- Processing,
- PostProcess,
- PauseProcess,
-
-
-
- TMCycle,
- ReturnWafer,
- }
- public enum PMState
- {
- Init,
- Idle,
- Homing,
- GasFlowing,
- RfPowering,
- Heating,
- LaunchingPump,
- LaunchingTurboPump,
- Pumping,
- Venting,
- Purging,
- GasLinePurge,
- PumpingLoadLock,
- VentingLoadLock,
- PurgingLoadLock,
- LoadLockLeakCheck,
- MoveLift,
- Purge,
-
- LLPlacing,
- LLPicking,
- Transfer,
- Error,
- PrepareTransfer,
- PostTransfer,
- TransferHandoff,
-
- LeakCheck,
- GasBoxLeakCheck,
- LiftpinMoving,
- LiftpinWaiting,
- GuidePinMoving,
- PreClean,
- LoadProcessRecipe,
- PreProcess,
- Processing,
- PostProcess,
- OpeningLid,
- ClosingLid,
- MFCVerification,
- AllMFCVerification,
-
- PreparePick,
- PreparePlace,
- ReadyForPick,
- ReadyForPlace,
- DropDownWafer,
- LiftUpWafer,
- DropDownReady,
- LiftUpReady,
- FinishPick,
- FinishPlace,
- PartialPressureTesting,
- VATPerformanceTesting
- }
- public enum TMState
- {
- Unknown,
- Init,
- Initializing,
- InitializingRB,
- Idle,
- Error,
- Pumping,
- Venting,
- Purging,
- Leakchecking,
- Picking,
- Placing,
- Swaping,
- PMPicking,
- PMPlacing,
- PMSwaping,
- Aligning,
- Mapping,
- Extending,
- Retracting,
- Swapping,
- Gotoing,
- ControllingPressure
- }
- public enum LLState
- {
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
- Unknown,
- Init,
- Initializing,
- Idle,
- Error,
- Pumping,
- Venting,
- Purging,
- LeakCheck,
- Prepare_For_TM,
- Prepare_For_EFEM,
- Ready_For_TM,
- Ready_For_EFEM,
- }
- public enum EFEMSTATE
- {
- Unknown,
- Initializing,
- Idle,
- Error,
- Picking,
- Placing,
- Aligning,
- Mapping,
- Init,
- Orgshing,
- Lifting,
- InitingAL,
- InitingRB,
- Extending,
- Retracting,
-
- Swapping,
- Gotoing,
- Gripping,
- Ungripping,
- Fliping,
- }
- }
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