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Kepler-Release
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Venus
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Venus_RT
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Config
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TM
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DeviceModelVenusDE_MF.xml

DeviceModelVenusDE_MF.xml 8.0 KB
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  1. <?xml version="1.0" encoding="utf-8" ?>
    2. 

  2. <DeviceModelDefine type="TM" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
    3. 

  3. 	<IoValves>
    4. 

  4. 		<IoValve id="TMFastPumpValve" display="TM Fast Pump Valve" schematicId="FastPumpTM" unit="" isNc="true"
    5. 

  5. 	        isDefaultOpen="false" diOpen="DI_TM_Fast_Pump" doOpen="DO_TM_Fast_Pump" diCloseSensor="" diOpenSensor="" />
    6. 

  6. 		<IoValve id="TMSoftPumpValve" display="TM Soft Pump Valve" schematicId="SoftPumpTM" unit="" isNc="true"
    7. 

  7. 			isDefaultOpen="false" diOpen="DI_TM_Soft_Pump" doOpen="DO_TM_Soft_Pump" diCloseSensor="" diOpenSensor="" />
    8. 

  8. 		<IoValve id="VCEASoftPumpValve" display="VCEA Soft Pump Valve" schematicId="SoftPumpVCEA" unit="" isNc="true"
    9. 

  9. 			isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Soft_Pump" diCloseSensor="" diOpenSensor="" />
    10. 

  10. 		<IoValve id="VCEAFastPumpValve" display="VCEA Fast Pump Valve" schematicId="FastPumpVCEA" unit="" isNc="true"
    11. 

  11. 			isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Fast_Pump" diCloseSensor="" diOpenSensor="" />
    12. 

  12. 		<IoValve id="VCEBSoftPumpValve" display="VCEB Soft Pump Valve" schematicId="SoftPumpVCEB" unit="" isNc="true"
    13. 

  13. 			isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Soft_Pump" diCloseSensor="" diOpenSensor="" />
    14. 

  14. 		<IoValve id="VCEBFastPumpValve" display="VCEB Fast Pump Valve" schematicId="FastPumpVCEB" unit="" isNc="true"
    15. 

  15. 			isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Fast_Pump" diCloseSensor="" diOpenSensor="" />
    16. 

  16. 		<IoValve id="TMFastVentValve" display="TM Fast Vent Valve" schematicId="FastVentTM" unit="" isNc="true"
    17. 

  17. 			isDefaultOpen="false" diOpen="" doOpen="DO_TM_Fast_Vent" diCloseSensor="" diOpenSensor="" />
    18. 

  18. 		<IoValve id="TMSoftVentValve" display="TM Soft Vent Valve" schematicId="SoftVentTM" unit="" isNc="true"
    19. 

  19. 			isDefaultOpen="false" diOpen="DI_TM_Soft_Vent" doOpen="DO_TM_Soft_Vent" diCloseSensor="" diOpenSensor="" />
    20. 

  20. 		<IoValve id="VCEASoftVentValve" display="VCEA Soft Vent Valve" schematicId="SoftVentVCEA" unit="" isNc="true"
    21. 

  21. 			isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Soft_Vent" diCloseSensor="" diOpenSensor="" />
    22. 

  22. 		<IoValve id="VCEAFastVentValve" display="VCEA Fast Vent Valve" schematicId="FastVentVCEA" unit="" isNc="true"
    23. 

  23. 			isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Fast_Vent" diCloseSensor="" diOpenSensor="" />
    24. 

  24. 		<IoValve id="VCEBSoftVentValve" display="VCEB Soft Vent Valve" schematicId="SoftVentVCEB" unit="" isNc="true"
    25. 

  25. 			isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Soft_Vent" diCloseSensor="" diOpenSensor="" />
    26. 

  26. 		<IoValve id="VCEBFastVentValve" display="VCEB Fast Vent Valve" schematicId="FastVentVCEB" unit="" isNc="true"
    27. 

  27. 			isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Fast_Vent" diCloseSensor="" diOpenSensor="" />
    28. 

  28. 	</IoValves>
    29. 

  29. 

  30. 	<IoSensors>
    31. 

  31. 

  32. 		<IoSensor id="TMATMSensor" display="TM ATM Sensor"  schematicId="" unit="" di="DI_TM_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
    33. 

  33. 				infoText="" warningText="" alarmText="" />
    34. 

  34. 		<IoSensor id="VCEAATMSensor" display="VCEA ATM Sensor"  schematicId="" unit="" di="DI_VCEA_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
    35. 

  35. 				infoText="" warningText="" alarmText="" />
    36. 

  36. 		<IoSensor id="VCEBATMSensor" display="VCEB ATM Sensor"  schematicId="" unit="" di="DI_VCEB_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
    37. 

  37. 				infoText="" warningText="" alarmText="" />
    38. 

  38. 		<IoSensor id="VCEACasSensor" display="VCEB Cassette Sensor"  schematicId="" unit="" di="DI_VCEA_Cassette_Present" isLowAsNormal="" textOutTrigValue="false"
    39. 

  39. 						infoText="" warningText="" alarmText="" />
    40. 

  40. 		<IoSensor id="VCEBCasSensor" display="VCEB Cassette Sensor"  schematicId="" unit="" di="DI_VCEB_Cassette_Present" isLowAsNormal="" textOutTrigValue="false"
    41. 

  41. 				infoText="" warningText="" alarmText="" />
    42. 

  42. 		<IoSensor id="VCEALOCKEDSensor" display="VCEA LOCKED Sensor"  schematicId="" unit="" di="DI_VCEA_ADR_LOCKED" isLowAsNormal="" textOutTrigValue="false"
    43. 

  43. 				infoText="" warningText="" alarmText="" />
    44. 

  44. 		<IoSensor id="VCEBLOCKEDSensor" display="VCEB LOCKED Sensor"  schematicId="" unit="" di="DI_VCEB_ADR_LOCKED" isLowAsNormal="" textOutTrigValue="false"
    45. 

  45. 				infoText="" warningText="" alarmText="" />
    46. 

  46. 		<IoSensor id="VCEAProtrusionSensor" display="VCEA Protrusion Sensor"  schematicId="" unit="" di="DI_VCEA_Protrusion" isLowAsNormal="" textOutTrigValue="false"
    47. 

  47. 						infoText="" warningText="" alarmText="" />
    48. 

  48. 		<IoSensor id="VCEBProtrusionSensor" display="VCEB Protrusion Sensor"  schematicId="" unit="" di="DI_VCEB_Protrusion" isLowAsNormal="" textOutTrigValue="false"
    49. 

  49. 						infoText="" warningText="" alarmText="" />
    50. 

  50. 		<IoSensor id="ROBOTNotExtendVCEA" display="ROBOT Not Extend VCEA"  schematicId="" unit="" di="DI_ROBOT_TO_VCEA_RETRACT" isLowAsNormal="" textOutTrigValue="false"
    51. 

  51. 						infoText="" warningText="" alarmText="" />
    52. 

  52. 		<IoSensor id="ROBOTNotExtendVCEB" display="ROBOT Not Extend VCEB"  schematicId="" unit="" di="DI_ROBOT_TO_VCEB_RETRACT" isLowAsNormal="" textOutTrigValue="false"
    53. 

  53. 				infoText="" warningText="" alarmText="" />
    54. 

  54. 	</IoSensors>
    55. 

  55. 	<IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
    56. 

  56. 		<IoCylinder id="VCEASlitDoor" display="VCEA Slit Door" schematicId="" unit="" doMotorRelay=""
    57. 

  57.                 doON="DO_VCEA_SlitDoor_Open" doOFF="DO_VCEA_SlitDoor_Close" diON="DI_VCEA_SlitDoor_Open_POS" diOFF="DI_VCEA_SlitDoor_Close_POS" />
    58. 

  58. 		<IoCylinder id="VCEBSlitDoor" display="VCEB Slit Door" schematicId="" unit="" doMotorRelay=""
    59. 

  59. 				doON="DO_VCEB_SlitDoor_Open" doOFF="DO_VCEB_SlitDoor_Close" diON="DI_VCEB_SlitDoor_Open_POS" diOFF="DI_VCEB_SlitDoor_Close_POS" />
    60. 

  60. 		<IoCylinder id="PMASlitDoor" display="PMA Slit Door" schematicId="" unit="" doMotorRelay=""
    61. 

  61.                 doON="DO_PMA_SlitDoor_Open" doOFF="DO_PMA_SlitDoor_Close" diON="DI_PMA_SlitDoor_Open_POS" diOFF="DI_PMA_SlitDoor_Close_POS" />
    62. 

  62. 		<IoCylinder id="PMBSlitDoor" display="PMB Slit Door" schematicId="" unit="" doMotorRelay=""									   
    63. 

  63. 				doON="DO_PMB_SlitDoor_Open" doOFF="DO_PMB_SlitDoor_Close" diON="DI_PMB_SlitDoor_Open_POS" diOFF="DI_PMB_SlitDoor_Close_POS" />
    64. 

  64. 		<IoCylinder id="PMCSlitDoor" display="PMC Slit Door" schematicId="" unit="" doMotorRelay=""									   
    65. 

  65.                 doON="DO_PMC_SlitDoor_Open" doOFF="DO_PMC_SlitDoor_Close" diON="DI_PMC_SlitDoor_Open_POS" diOFF="DI_PMC_SlitDoor_Close_POS" />
    66. 

  66. 		<IoCylinder id="PMDSlitDoor" display="PMD Slit Door" schematicId="" unit="" doMotorRelay=""
    67. 

  67.                 doON="DO_PMD_SlitDoor_Open" doOFF="DO_PMD_SlitDoor_Close" diON="DI_PMD_SlitDoor_Open_POS" diOFF="DI_PMD_SlitDoor_Close_POS" />
    68. 

  68. 	</IoCylinders>
    69. 

  69. 

  70. 	<IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
    71. 

  71. 		<IoPressureMeter id="TMPressure" display="TM Pressure" schematicId="" unit="mTorr"
    72. 

  72. 						    aiValue="AI_TM_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
    73. 

  73. 		<IoPressureMeter id="TMPipelinePressure" display="TM Pipeline Pressure" schematicId="" unit="mTorr"
    74. 

  74. 						    aiValue="AI_TM_Foreline_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
    75. 

  75. 		<IoPressureMeter id="VCEPipelinePressure" display="VCE Pipeline Pressure" schematicId="" unit="mTorr"
    76. 

  76. 						    aiValue="AI_VCE_Foreline_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
    77. 

  77. 		<IoPressureMeter id="VCEAPressure" display="VCEA Pressure" schematicId="" unit="mTorr"
    78. 

  78. 						    aiValue="AI_Left_VCE_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
    79. 

  79. 		<IoPressureMeter id="VCEBPressure" display="VCEB Pressure" schematicId="" unit="mTorr"
    80. 

  80. 						    aiValue="AI_Right_VCE_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
    81. 

  81. 	</IoPressureMeters>
    82. 

  82. 

  83. 	<IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
    84. 

  84. 		<IoMfc id="TM_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
    85. 

  85. 				aiFlow="AI_MFC_Flow" aoFlow="AO_MFC_Flow_Setpoint" diOffline="" aoRange=""
    86. 

  86. 				diPressureAlarm="DI_SYSTEM_N2_Pressure_SW"/>
    87. 

  87. 	</IoMfcs>
    88. 

  88. 

  89. 	<IoHongHuControls assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoHongHuControl">
    90. 

  90. 		<IoHongHuControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="sccm" doMFCFlow="DO_Flow_Mode" doPressureMode="DO_Pressure_Mode" doVent="DO_TM_Soft_Vent" doPump="DO_TM_Soft_Pumping" aoMFCFlow="AO_MFC_Flow_Setpoint" aoPressure="AO_TM_Pressure_SetPoint"/>
    91. 

  91. 	</IoHongHuControls>
    92. 

  92. 

  93. </DeviceModelDefine>
    94. 

  94. 

  95.