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- using Aitex.Core.Common.DeviceData;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Device.Unit;
- using Aitex.Core.Util;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.RT.Log;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Device.Bases;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
- using System;
- using System.Collections.Generic;
- using Venus_Core;
- using Venus_RT.Modules;
- using Venus_RT.Modules.PMs;
- using Venus_RT.Devices.IODevices;
- using Venus_RT.Devices.EPD;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.OperationCenter;
- using MECF.Framework.Common.SubstrateTrackings;
- using IoMfc = Venus_RT.Devices.IODevices.IoMfc;
- using System.Threading.Tasks;
- namespace Venus_RT.Devices
- {
- class JetPM : PM
- {
- private readonly IoLid _Lid;
- private readonly IoLid _LidLoadlock;
- private readonly IoCylinder _slitDoor;
- private readonly IoCylinder _LiftPin;
- private readonly IoCylinder _LoadLockArm;
- private readonly IoValve _PVN21Valve;
- private readonly IoValve _PVN22Valve;
- private readonly IoValve _PV11Valve;
- private readonly IoValve _PV12Valve;
- private readonly IoValve _PV21Valve;
- private readonly IoValve _PV22Valve;
- private readonly IoValve _PV31Valve;
- private readonly IoValve _PV32Valve;
- private readonly IoValve _PV41Valve;
- private readonly IoValve _PV42Valve;
- private readonly IoValve _N2Valve;
- private readonly IoValve _Mfc1Valve;
- private readonly IoValve _Mfc2Valve;
- private readonly IoValve _Mfc3Valve;
- private readonly IoValve _Mfc4Valve;
- private readonly IoValve _Mfc5Valve;
- private readonly IoValve _Mfc6Valve;
- private readonly IoValve _Mfc7Valve;
- private readonly IoValve _Mfc8Valve;
- private readonly IoValve _PVHe1Valve;
- private readonly IoValve _PVHe2Valve;
- private readonly IoValve _GasFinalValve;
- private readonly IoValve _SoftPumpValve;
- private readonly IoValve _FastPumpValve;
- private readonly IoValve _TurboPumpPumpingValve;
- private readonly IoValve _TurboPumpPurgeValve;
- private readonly IoValve _GuageValve;
- private readonly IoValve _LoadlockVentValve;
- private readonly IoValve _LoadlockPumpingValve;
- private readonly IoSensor _ATM_sw;
- private readonly IoSensor _CDAPressure;
- private readonly IoSensor _ATM_Loadlock_sw;
- private readonly IoSensor _N2Pressure_sw;
- private readonly IoSensor _VAC_sw;
- private readonly IoSensor _WLK_sw;
- private readonly IoSensor _Water_Flow;
- private readonly IoSensor _RFG_Interlock;
- private readonly IoSensor _PM_Lid_Closed;
- private readonly IoSensor _Source_RF_Fan;
- private readonly IoSensor _PM_SlitDoor_Closed;
- private readonly IoSensor _TurboPumpInterlock;
- private readonly IoSensor _GasBoxDoor;
- private readonly IoSensor _GasBoxPressure;
- private readonly PumpBase _MainPump;
- private readonly ESC5HighVoltage _ESCHV;
- private readonly AdixenTurboPump _TurboPump;
- private readonly PendulumValve _pendulumValve;
- private readonly ChillerBase _Chiller;
- private readonly RfPowerBase _Generator;//srf=>AdTecGenerator
- private readonly RfPowerBase _GeneratorBias;//brf=>CometRF
- private readonly RfMatchBase _Match;
- private readonly RfMatchBase _BiasMatch;
- private readonly IoSignalTower _SignalTower;
- private readonly IoHeater _ForelineTC;
- private readonly IoHeater _WallTC;
- private readonly IoPressureControl _pressureController;
- public readonly IoGasStick[] _gasLines;
- private readonly IoGasStick _gasLineN2;
- private readonly IoBacksideHe _backsideHe;
- private readonly IoMfc _heMfc;
- // EndPoint
- private readonly EPDClient _epdClient;
- private readonly double _foreline_interlock_pressure = 750;
- public List<string> EPDCfgList => _epdClient.CFGFileList;
- public bool EPDCaptured => _epdClient.Captured;
- public bool EPDConnected => _epdClient.IsEPDConnected;
- // 盖子的状态
- public bool IsLidClosed => _Lid.OFFFeedback;
- public bool IsLidLoadlockClosed => _LidLoadlock.OFFFeedback;
- public bool IsSlitDoorClosed => !_slitDoor.ONFeedback && _slitDoor.OFFFeedback;
- public bool IsPumpRunning => _MainPump.IsRunning;
- public bool IsTurboPumpRunning => _TurboPump.IsRunning;
- public bool IsTurboPumpAtSpeed => _TurboPump.AtSpeed;
- public float TurboPumpSpeed => _TurboPump.Speed;
- public bool HasPumpError => _MainPump.IsError || !_MainPump.IsRunning;
- public bool HasTurboPumpError => _TurboPump.IsError || !_TurboPump.IsRunning;
- public bool IsCDA_OK => _CDAPressure.Value;
- public bool IsFastPumpOpened => _FastPumpValve.Status;
- public bool IsSoftPumpOpened => _SoftPumpValve.Status;
- public bool IsMfc1ValveOpened => _Mfc1Valve.Status;
- public bool IsMfc2ValveOpened => _Mfc2Valve.Status;
- public bool IsMfc3ValveOpened => _Mfc3Valve.Status;
- public bool IsMfc4ValveOpened => _Mfc4Valve.Status;
- public bool IsMfc5ValveOpened => _Mfc5Valve.Status;
- public bool IsMfc6ValveOpened => _Mfc6Valve.Status;
- public bool IsMfc7ValveOpened => _Mfc7Valve.Status;
- public bool IsMfc8ValveOpened => _Mfc8Valve.Status;
- public bool IsGuageValveOpened => _GuageValve.Status;
- // 压力信号
- public bool IsATM => _ATM_sw.Value;
- public bool PVN22ValveIsOpen => _PVN22Valve.Status;
- public bool LiftPinIsDown => _LiftPin.OFFFeedback;
- public bool LiftPinIsUp => _LiftPin.ONFeedback;
- public bool IsATMLoadlock => _ATM_Loadlock_sw.Value;
- public bool IsVACLoadLock => LoadlockPressure <= 1000;
- public bool IsVAC => _VAC_sw.Value;
- public bool IsWaterFlowOk => _Water_Flow.Value;
- public bool IsWLK => _WLK_sw.Value;
- public bool IsRFGInterlockOn => _RFG_Interlock.Value;
- public bool PMLidClosed => _PM_Lid_Closed.Value;
- public bool TurboPumpInterlock => _TurboPumpInterlock.Value;
- public bool SourceRFFanInterlock => _Source_RF_Fan.Value;
- public bool SlitDoorClosed => _PM_SlitDoor_Closed.Value;
- public double ProcessLowPressure => _pressureController.ProcessLow.Value;
- public double ProcessHighPressure => _pressureController.ProcessHigh.Value;
- public double ProcessPressure => _pressureController.ProcessGauge.Value;
- public override double ChamberPressure => _pressureController.PressureGauge.Value;
- public double ForelinePressure => _pressureController.ForelineGauge.Value;
- public double TargetPressure => _pressureController.TargetPressure;
- public double LoadlockPressure => _pressureController.LoadLockGauge.Value;
- public double ESCHePressure => _pressureController.ESCHeGauge.Value;
- public int ESCOutputVoltage => _ESCHV.OutputVoltage;
- public bool IsHVOn => _ESCHV.IsOn;
- public float CoolantInletTempFB => _Chiller.CoolantInletTcFeedback;
- public float CoolantOutletTempFB => _Chiller.CoolantOutletTcFeedback;
- //Loadlock_Arm
- public bool IsLoadlockArmRetract => _LoadLockArm.OFFFeedback;
- public bool IsLoadlockArmExtend => _LoadLockArm.ONFeedback;
- //Loadlock_Arm DO
- public bool LoadlockArmRetract => _LoadLockArm.OFFSetPoint;
- public bool LoadlockArmExtend => _LoadLockArm.ONSetPoint;
- public float ReflectPower => _Generator.ReflectPower;
- public float BiasReflectPower => _GeneratorBias.ReflectPower;
- public bool BackSideHeOutOfRange => _backsideHe.OutOfRange;
- public new ModuleName Module { get; }
- public MovementPosition LiftPinPosition
- {
- get
- {
- MovementPosition pos = MovementPosition.Unknown;
- if (_LiftPin.ONFeedback && !_LiftPin.OFFFeedback)
- {
- pos = MovementPosition.Up;
- }
- else if (!_LiftPin.ONFeedback && _LiftPin.OFFFeedback)
- {
- pos = MovementPosition.Down;
- }
- return pos;
- }
- }
- public override bool CheckAtm()
- {
- return _ATM_sw.Value && ChamberPressure > 700000;
- }
- public bool CheckSlitDoorOpen()
- {
- return _slitDoor.State == CylinderState.Open;
- }
- public bool CheckSlitDoorClose()
- {
- return _slitDoor.State == CylinderState.Close;
- }
- public bool CheckLiftUp()
- {
- return _LiftPin.State == CylinderState.Open;
- }
- public bool CheckLiftDown()
- {
- return _LiftPin.State == CylinderState.Close;
- }
- public double TotalGasSetpoint
- {
- get
- {
- double sum = 0;
- foreach (var gas in _gasLines)
- {
- sum += gas.FlowSP;
- }
- return sum;
- }
- }
- public bool HasGasOutOfRange
- {
- get
- {
- foreach (var gas in _gasLines)
- {
- if (!gas.IsOutOfRange)
- return false;
- }
- return true;
- }
- }
- public JetPM(ModuleName mod) : base(mod.ToString())
- {
- Module = mod;
- _Lid = DEVICE.GetDevice<IoLid>($"{Module}.{VenusDevice.Lid}");
- _LidLoadlock = DEVICE.GetDevice<IoLid>($"{Module}.{VenusDevice.LidLoadlock}");
- _slitDoor = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.SlitDoor}");
- _LiftPin = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.LiftPin}");
- _LoadLockArm = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.LoadLockArm}");
- _PVN21Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVN21}");
- _PVN22Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVN22}");
- _PV11Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV11}");
- _PV12Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV12}");
- _PV21Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV21}");
- _PV22Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV22}");
- _PV31Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV31}");
- _PV32Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV32}");
- _PV41Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV41}");
- _PV42Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV42}");
- _N2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveN2}");
- _Mfc1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc1}");
- _Mfc2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
- _Mfc3Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc3}");
- _Mfc4Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc4}");
- _Mfc5Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc5}");
- _Mfc6Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc6}");
- _Mfc7Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc7}");
- _Mfc8Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc8}");
- _PVHe1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe1}");
- _PVHe2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe2}");
- _GasFinalValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveGasFinal}");
- _SoftPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveSoftPump}");
- _FastPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveFastPump}");
- _TurboPumpPumpingValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveTurboPumpPumping}");
- _TurboPumpPurgeValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveTurboPumpPurge}");
- _GuageValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveGuage}");
- _LoadlockVentValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveLoadlockVent}");
- _LoadlockPumpingValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveLoadlockPumping}");
- _heMfc= DEVICE.GetDevice<IoMfc>($"{Module}.MfcHe");
- _ATM_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorATMSwitch");
- _ATM_Loadlock_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorLoadlockATMSwitch");
- _N2Pressure_sw = DEVICE.GetDevice<IoSensor>($"{Module}.N2PressureOk");
- _VAC_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorVacSwitch");
- _Water_Flow = DEVICE.GetDevice<IoSensor>($"{Module}.SensorWaterFlowOk");
- _WLK_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorWaterLeakOk");
- _CDAPressure = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCDAPressureOk");
- _RFG_Interlock = DEVICE.GetDevice<IoSensor>($"{Module}.GeneratorInterlock");
- _PM_Lid_Closed = DEVICE.GetDevice<IoSensor>($"{Module}.SensorPMLidClosed");
- _Source_RF_Fan = DEVICE.GetDevice<IoSensor>($"{Module}.SensorSourceRFFan");
- _PM_SlitDoor_Closed = DEVICE.GetDevice<IoSensor>($"{Module}.SensorSlitDoorClosed");
- _TurboPumpInterlock = DEVICE.GetDevice<IoSensor>($"{Module}.TurboPumpInterlock");
- _GasBoxDoor = DEVICE.GetDevice<IoSensor>($"{Module}.GasBoxDoorSW");
- _GasBoxPressure = DEVICE.GetDevice<IoSensor>($"{Module}.GasBoxPressureSW");
- _ForelineTC = DEVICE.GetDevice<IoHeater>($"{Module}.ForelineHeater");
- _WallTC = DEVICE.GetDevice<IoHeater>($"{Module}.WallHeater");
- _SignalTower = DEVICE.GetDevice<IoSignalTower>($"{Module}.SignalTower");
- _CDAPressure = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCDAPressureOk");
- _pressureController = DEVICE.GetDevice<IoPressureControl>($"{Module}.{VenusDevice.PressureControl}");
- _gasLines = new IoGasStick[8];
- for (int index = 0; index < 8; index++)
- {
- _gasLines[index] = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStick{index + 1}");
- }
- _gasLineN2 = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStickN2");
- _backsideHe = DEVICE.GetDevice<IoBacksideHe>($"{Module}.BacksideHelium");
- _MainPump = DEVICE.GetDevice<PumpBase>($"{Module}.{VenusDevice.MainPump}");
- // RS232 Dry pump, SKY
- if (SC.GetValue<int>($"{mod}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
- {
- if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.SKY)
- {
- _MainPump = DEVICE.GetDevice<SkyPump>($"{Module}.{VenusDevice.MainPump}");
- }
- else if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.Edwards)
- {
- _MainPump = DEVICE.GetDevice<EdwardsPump>($"{Module}.{VenusDevice.MainPump}");
- }
- }
- _ESCHV = DEVICE.GetDevice<ESC5HighVoltage>($"{Module}.{VenusDevice.ESCHV}");
- _TurboPump = DEVICE.GetDevice<AdixenTurboPump>($"{Module}.{VenusDevice.TurboPump}");
- _pendulumValve = DEVICE.GetDevice<PendulumValve>($"{Module}.{VenusDevice.PendulumValve}");
- if (SC.GetValue<bool>($"{mod}.Chiller.EnableChiller") &&
- SC.GetValue<int>($"{mod}.Chiller.CommunicationType") == (int)CommunicationType.RS232)
- {
- if (SC.GetValue<int>($"{mod}.Chiller.MFG") == (int)ChillerMFG.SMC)
- {
- _Chiller = DEVICE.GetDevice<SMCChiller>($"{Module}.{VenusDevice.Chiller}");
- }
- else if (SC.GetValue<int>($"{mod}.Chiller.MFG") == (int)ChillerMFG.AIRSYS)
- {
- _Chiller = DEVICE.GetDevice<AIRSYSChiller>($"{Module}.{VenusDevice.Chiller}");
- }
- }
-
- // RS223 AdTec Generator
- if (SC.GetValue<int>($"{mod}.Rf.CommunicationType") == (int)CommunicationType.RS232 &&
- SC.GetValue<int>($"{mod}.Rf.MFG") == (int)GeneratorMFG.AdTec)
- {
- _Generator = DEVICE.GetDevice<AdTecGenerator>($"{Module}.{VenusDevice.Rf}");
- }
- // Ethernet Comet Generator Bias
- if (SC.GetValue<bool>($"{mod}.BiasRf.EnableBiasRF"))
- {
- if (SC.GetValue<int>($"{mod}.BiasRf.CommunicationType") == (int)CommunicationType.Ethernet &&
- SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.Comet)
- {
- _GeneratorBias = DEVICE.GetDevice<CometRF>($"{Module}.{VenusDevice.BiasRf}");
- }
- else if (SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.AdTec)
- {
- _GeneratorBias = DEVICE.GetDevice<AdTecGenerator>($"{Module}.{VenusDevice.BiasRf}");
- }
- }
- // RS232 AdTec match
- if (SC.GetValue<int>($"{mod}.Match.CommunicationType") == (int)CommunicationType.RS232 &&
- SC.GetValue<int>($"{mod}.Match.MFG") == (int)MatchMFG.AdTec)
- {
- _Match = DEVICE.GetDevice<AdTecMatch>($"{Module}.{VenusDevice.Match}");
- }
- // Bias Match
- if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
- SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232 &&
- SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.AdTec)
- {
- _BiasMatch = DEVICE.GetDevice<AdTecMatch>($"{Module}.{VenusDevice.BiasMatch}");
- }
- _epdClient = DEVICE.GetDevice<EPDClient>($"{Module}.{VenusDevice.EndPoint}");
-
- DATA.Subscribe($"{Name}.ForelinePressure", () => ForelinePressure);
- DATA.Subscribe($"{Name}.ProcessHighPressure", () => _pressureController.ProcessHigh.Value);
- DATA.Subscribe($"{Name}.ProcessLowPressure", () => _pressureController.ProcessLow.Value);
- DATA.Subscribe($"{Name}.ESCHePressure", () => ESCHePressure);
- DATA.Subscribe($"{Name}.LoadlockPressure", () => LoadlockPressure);
- DATA.Subscribe($"{Name}.IsATM", () => IsATM);
- DATA.Subscribe($"{Name}.IsVAC", () => IsVAC);
- DATA.Subscribe($"{Name}.LiftPinIsUp", () => LiftPinIsUp);
- DATA.Subscribe($"{Name}.LiftPinIsDown", () => LiftPinIsDown);
- DATA.Subscribe($"{Name}.PumpIsRunning", () => IsPumpRunning);
- DATA.Subscribe($"{Name}.TurboPumpIsRunning", () => IsTurboPumpRunning);
- DATA.Subscribe($"{Name}.IsSlitDoorClosed", () => IsSlitDoorClosed);
- DATA.Subscribe($"{Name}.IsLidClosed", () => IsLidClosed);
- DATA.Subscribe($"{Name}.SRfIsOn", () => _Generator.IsPowerOn);
- DATA.Subscribe($"{Name}.SRfForwardPowerFeedBack", () => _Generator.ForwardPower);
- DATA.Subscribe($"{Name}.SRfReflectPower", () => ReflectPower);
- DATA.Subscribe($"{Name}.SRfMatchIsAuto", () =>
- {
- return _Match?.TuneMode1== EnumRfMatchTuneMode.Auto ? true : false;
- });
- DATA.Subscribe($"{Name}.BRfIsOn", () =>
- {
- return _GeneratorBias == null ? false : _GeneratorBias.IsPowerOn;
- });
- DATA.Subscribe($"{Name}.BRfForwardPowerFeedBack", () => _GeneratorBias.ForwardPower);
- DATA.Subscribe($"{Name}.BRfReflectPower", () => BiasReflectPower);
- DATA.Subscribe($"{Name}.TurboPumpRotationalSpeed", () => _TurboPump?.RotationalSpeed);
- DATA.Subscribe($"{Name}.PendulumValve.Position", () => _pendulumValve.Position);
- DATA.Subscribe($"{Name}.PendulumValve.Pressure", () => _pendulumValve.Pressure);
- DATA.Subscribe($"{Name}.PendulumValve.IsOpen", () => _pendulumValve.IsOpen);
- DATA.Subscribe($"{Name}.IsWaterFlowOk", () => IsWaterFlowOk);
- DATA.Subscribe($"{Name}.IsWLK", () => IsWLK);
- DATA.Subscribe($"{Name}.IsCDA_OK", () => IsCDA_OK);
- DATA.Subscribe($"{Name}.SourceRFFanInterlock", () => SourceRFFanInterlock);
- DATA.Subscribe($"{Name}.IsTurboPumpInterlock", () => TurboPumpInterlock);
- DATA.Subscribe($"{Name}.IsATMLoadlock", () => IsATMLoadlock);
- DATA.Subscribe($"{Name}.IsVACLoadlock", () => IsVACLoadLock);
- DATA.Subscribe($"{Name}.SensorGasBoxDoor", () => _GasBoxDoor.Value);
- DATA.Subscribe($"{Name}.SensorGasBoxPressure", () => _GasBoxPressure.Value);
- DATA.Subscribe($"{Name}.WallTempFeedBack", () => _WallTC.MonitorTcFeedback);
- DATA.Subscribe($"{Name}.GetPVPosition", () => GetPVPosition());
-
- DATA.Subscribe($"{Name}.ESCHV.OutputVoltage", () => ESCOutputVoltage);
- DATA.Subscribe($"{Name}.ESCHV.IsOn", () => IsHVOn);
- DATA.Subscribe($"{Name}.Chiller.Temp", () => CoolantOutletTempFB);
- DATA.Subscribe($"{Name}.Chiller.IsOn", () => _Chiller.IsRunning);
- DATA.Subscribe($"{Name}.IsTurboPumpAtSpeed", () => IsTurboPumpAtSpeed);
- //DATA.Subscribe($"{Name}.TurboPumpIsRunning", () => _);
- OP.Subscribe($"{Module}.SetLiftPin", (cmd, args) => {
- if ((bool)args[0] == true)
- {
- return SetLiftPin(MovementPosition.Up, out _);
- }
- else
- {
- return SetLiftPin(MovementPosition.Down, out _);
- }
-
- });
- OP.Subscribe($"{Module}.SetSRf", (cmd, args) =>
- {
- var ison = (bool)args[1];
- if (ison == true)
- {
- GeneratorPowerOn(true);
- GeneratorSetpower((float)args[0]);
-
-
- }
- else
- {
- GeneratorPowerOn(false);
- }
- return true;
- });
- OP.Subscribe($"{Module}.SetBRf", (cmd, args) => {
- var ison = (bool)args[1];
- if (ison == true)
- {
- GeneratorBiasPowerOn(true);
- GeneratorBiasSetpower((float)args[0]);
- }
- else
- {
- GeneratorBiasPowerOn(false);
- }
- return true;
- });
- //OP.Subscribe($"{Module}.SetMatchPosition", (cmd, args) => {
- // float value1;
- // float value2;
- // float.TryParse(args[0].ToString(),out value1);
- // float.TryParse(args[1].ToString(), out value2);
- // SetMatchPosition(value1, value2);
- // return true;
- //});
- //OP.Subscribe($"{Module}.SetBiasMatchPosition", (cmd, args) => {
- // float value1;
- // float value2;
- // float.TryParse(args[0].ToString(), out value1);
- // float.TryParse(args[1].ToString(), out value2);
- // SetBiasMatchPosition(value1, value2);
- // return true;
- //});
- OP.Subscribe($"{Module}.SetSlitDoor", (cmd, args) => {
- SetSlitDoor((bool)args[0], out _);
- return true;
- });
- OP.Subscribe($"{Module}.SetESCHVIsOn", (cmd, args) => {
- _ESCHV.SetPowerOnOff((bool)args[0]);
- return true;
- });
- OP.Subscribe($"{Module}.SetESCHV", (cmd, args) => {
- SetESCClampVoltage((int)args[0]);
- return true;
- });
- OP.Subscribe($"{Module}.SetPVPostion", (cmd, args) => {
- SetPVPostion((int)args[0]);
- return true;
- });
- OP.Subscribe($"{Module}.SetPVPressure", (cmd, args) => {
- SetPVPressure((int)args[0]);
- return true;
- });
- OP.Subscribe($"{Module}.ClosePump", (cmd, args) => {
- TurnDryPump(false);
- return true;
- });
- OP.Subscribe($"{Module}.CloseTurboPump", (cmd, args) => {
- TurnTurboPump(false);
- return true;
- });
- OP.Subscribe($"{Module}.ControlValve", (cmd, args) => {
- OpenValve((ValveType)((int)args[0]), (bool)args[1]);
- return true;
- });
- OP.Subscribe($"{Module}.TurnPendulumValve", (cmd, args) => {
- TurnPendulumValve((bool)args[0]);
- return true;
- });
- OP.Subscribe($"{Module}.HeatChiller", (cmd, args) => {
- HeatChiller((float)args[0], (float)args[1]);
- return true;
- });
- OP.Subscribe($"{Module}.OnOffChiller", (cmd, args) => {
- OnOffChiller((bool)args[0]);
- return true;
- });
- OP.Subscribe($"{Module}.WallChiller", (cmd, args) => {
- float value;
- float.TryParse(args[0].ToString(),out value);
- _WallTC.RampTemp ( value);
- return true;
- });
- OP.Subscribe($"{Module}.SetBacksideHeFlow", (cmd, args) => {
- double value;
- double.TryParse(args[0].ToString(), out value);
- SetBacksideHeFlow(value);
- return true;
- });
- OP.Subscribe($"{Module}.SetBacksideHePressure", (cmd, args) =>
- {
- float value;
- float.TryParse(args[0].ToString(),out value);
- SetBacksideHePressure(value);
- return true;
- });
- _foreline_interlock_pressure = SC.GetValue<double>($"{mod}.ForelineInterlockPressure");
- }
- public void CloseValves()
- {
- _PVN21Valve.TurnValve(false, out _);
- // _PVN22Valve.TurnValve(false, out _);
- _PV11Valve.TurnValve(false, out _);
- _PV12Valve.TurnValve(false, out _);
- _PV21Valve.TurnValve(false, out _);
- _PV22Valve.TurnValve(false, out _);
- _PV31Valve.TurnValve(false, out _);
- _PV32Valve.TurnValve(false, out _);
- _PV41Valve.TurnValve(false, out _);
- _PV42Valve.TurnValve(false, out _);
- _PVHe1Valve.TurnValve(false, out _);
- _PVHe2Valve.TurnValve(false, out _);
- _GasFinalValve.TurnValve(false, out _);
- _SoftPumpValve.TurnValve(false, out _);
- _FastPumpValve.TurnValve(false, out _);
- _TurboPumpPumpingValve.TurnValve(false, out _);
- _TurboPumpPurgeValve.TurnValve(false, out _);
- _GuageValve.TurnValve(false, out _);
- _LoadlockVentValve.TurnValve(false, out _);
- _LoadlockPumpingValve.TurnValve(false, out _);
- _N2Valve.TurnValve(false, out _);
- _FastPumpValve.TurnValve(false, out _);
- _Mfc1Valve.TurnValve(false, out _);
- _Mfc2Valve.TurnValve(false, out _);
- _Mfc3Valve.TurnValve(false, out _);
- _Mfc4Valve.TurnValve(false, out _);
- _Mfc5Valve.TurnValve(false, out _);
- _Mfc6Valve.TurnValve(false, out _);
- _Mfc7Valve.TurnValve(false, out _);
- _Mfc8Valve.TurnValve(false, out _);
- foreach (var stick in _gasLines)
- {
- stick.Stop();
- }
- }
- public void TurnDryPump(bool on)
- {
- //_pressureController.StartPump(on);
- _MainPump?.SetPumpOnOff(on);
- }
- public void TurnTurboPump(bool on)
- {
- _TurboPump?.SetPumpOnOff(on);
- }
- public void OpenValve(ValveType vlvType, bool on)
- {
- switch (vlvType)
- {
- case ValveType.PVN21:
- _PVN21Valve.TurnValve(on, out _);
- break;
- case ValveType.PVN22:
- _PVN22Valve.TurnValve(on, out _);
- LOG.Write(eEvent.EV_DEVICE_INFO, Module, $"{(on ? "打开" : "关闭")} 阀 {vlvType.ToString()}");
- break;
- case ValveType.PV11:
- _PV11Valve.TurnValve(on, out _);
- break;
- case ValveType.PV12:
- _PV12Valve.TurnValve(on, out _);
- break;
- case ValveType.PV21:
- _PV21Valve.TurnValve(on, out _);
- break;
- case ValveType.PV22:
- _PV22Valve.TurnValve(on, out _);
- break;
- case ValveType.PV31:
- _PV31Valve.TurnValve(on, out _);
- break;
- case ValveType.PV32:
- _PV32Valve.TurnValve(on, out _);
- break;
- case ValveType.PV41:
- _PV41Valve.TurnValve(on, out _);
- break;
- case ValveType.PV42:
- _PV42Valve.TurnValve(on, out _);
- break;
- case ValveType.N2:
- _N2Valve.TurnValve(on, out _);
- break;
- case ValveType.PVHe1:
- _PVHe1Valve.TurnValve(on, out _);
- break;
- case ValveType.PVHe2:
- _PVHe2Valve.TurnValve(on, out _);
- break;
- case ValveType.GasFinal:
- _GasFinalValve.TurnValve(on, out _);
- break;
- case ValveType.SoftPump:
- _SoftPumpValve.TurnValve(on, out _);
- break;
- case ValveType.FastPump:
- _FastPumpValve.TurnValve(on, out _);
- break;
- case ValveType.TurboPumpPumping:
- _TurboPumpPumpingValve.TurnValve(on, out _);
- break;
- case ValveType.TurboPumpPurge:
- _TurboPumpPurgeValve.TurnValve(on, out _);
- break;
- case ValveType.Guage:
- _GuageValve.TurnValve(on, out _);
- break;
- case ValveType.LoadlockVent:
- _LoadlockVentValve.TurnValve(on, out _);
- break;
- case ValveType.LoadlockPumping:
- _LoadlockPumpingValve.TurnValve(on, out _);
- break;
- case ValveType.Mfc1:
- _Mfc1Valve.TurnValve(on, out _);
- break;
- case ValveType.Mfc2:
- _Mfc2Valve.TurnValve(on, out _);
- break;
- case ValveType.Mfc3:
- _Mfc3Valve.TurnValve(on, out _);
- break;
- case ValveType.Mfc4:
- _Mfc4Valve.TurnValve(on, out _);
- break;
- case ValveType.Mfc5:
- _Mfc5Valve.TurnValve(on, out _);
- break;
- case ValveType.Mfc6:
- _Mfc6Valve.TurnValve(on, out _);
- break;
- case ValveType.Mfc7:
- _Mfc7Valve.TurnValve(on, out _);
- break;
- case ValveType.Mfc8:
- _Mfc8Valve.TurnValve(on, out _);
- break;
- default:
- throw new ArgumentOutOfRangeException($"Argument error {vlvType}-{on}");
- }
- }
- public override void Monitor()
- {
- foreach (var gas in _gasLines)
- {
- gas.Monitor();
- }
- CheckPermanentInterlock();
- }
- private void CheckPermanentInterlock()
- {
- if (ProcessPressure > 100 && _GuageValve.SetPoint)
- {
- _GuageValve.TurnValve(false, out _);
- LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"Process pressure:{ProcessPressure} exceed 100 mtorr, Guage Valve (DO-31) closed automaticlly.");
- }
- }
- public void CheckIdleInterlock()
- {
- if(ForelinePressure > _foreline_interlock_pressure)
- {
- if(_TurboPumpPumpingValve.SetPoint || _TurboPumpPurgeValve.SetPoint || _pendulumValve.IsOpen)
- {
- _pendulumValve.TurnValve(false);
- _TurboPumpPurgeValve.TurnValve(false, out _);
- _TurboPumpPumpingValve.TurnValve(false, out _);
- LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"Foreline pressure:{ForelinePressure} exceed {_foreline_interlock_pressure} mtorr, Pendulum valve & PV6 & PV7 closed automaticlly.");
- }
- }
- }
- public void BuzzerBlinking(double time)
- {
- _SignalTower.BuzzerBlinking(time);
- }
- public void SwitchOnBuzzerAndRed()
- {
- _SignalTower.SwitchOnBuzzerAndRed("", null);
- }
- public override void Home()
- {
- // 与yp讨论过,PM 初始化不需要
- SetLiftPin(MovementPosition.Down, out _);
- SetSlitDoor(false, out _);
- //2023/03/08添加
- OpenValve(ValveType.PVN22, true);
- //2023/04/25临时添加
- //RetractWafer();
- }
- public bool SetLiftPin(MovementPosition dirt, out string reason)
- {
- reason = string.Empty;
- switch (dirt)
- {
- case MovementPosition.Down:
- return _LiftPin.SetCylinder(false, out reason);
- case MovementPosition.Up:
- return _LiftPin.SetCylinder(true, out reason);
- case MovementPosition.Left:
- case MovementPosition.Right:
- case MovementPosition.Middle:
- throw new ArgumentException("Movement argument error");
- }
- return true;
- }
- public bool SetSlitDoor(bool open, out string reason)
- {
- reason = string.Empty;
- //if(open)
- //{
- // bool _isATMMode = SC.GetValue<bool>("System.IsATMMode");
- // if(_isATMMode)
- // {
- // if(!IsATM)
- // {
- // reason = $"{Module} is not ATM, can not open slit door";
- // LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
- // return false;
- // }
- // if(!IsATMLoadlock)
- // {
- // reason = $"LoadLock is not ATM, can not open slit door";
- // LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
- // return false;
- // }
- // }
- // else
- // {
- // double maxPressureDifference = SC.GetValue<double>("System.PMLLMaxPressureDifference");
- // if (Math.Abs(LoadlockPressure - ChamberPressure) > maxPressureDifference)
- // {
- // reason = $"{Module} and Loadlock pressure difference exceeds the max limit {maxPressureDifference}";
- // LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
- // return false;
- // }
- // }
-
- //}
- return _slitDoor.SetCylinder(open, out reason);
- }
- public bool RetractWafer()
- {
- return _LoadLockArm.SetCylinder(false, out _);
- }
- public bool ExtendWafer()
- {
- return _LoadLockArm.SetCylinder(true, out _);
- }
- public bool FlowGas(int gasNum, double val)
- {
- if (_gasLines.Length <= gasNum)
- return false;
- _gasLines[gasNum].Flow(val);
- return true;
- }
- public bool StopGas(int gasNum)
- {
- if (_gasLines.Length <= gasNum)
- return false;
- _gasLines[gasNum].Stop();
- return true;
- }
- public bool FlowN2(double val)
- {
- _gasLineN2.Flow(val);
- return true;
- }
- public bool StopN2()
- {
- _gasLineN2.Stop();
- return true;
- }
- public void StopAllGases()
- {
- foreach (var line in _gasLines)
- {
- line.Stop();
- }
- }
- public bool TurnPendulumValve(bool on)
- {
- return _pendulumValve.TurnValve(on);
- }
- public bool SetPVPressure(int pressure)
- {
- return _pendulumValve.SetPressure(pressure);
- }
- public bool SetPVPostion(int position)
- {
- return _pendulumValve.SetPosition(position);
- }
- public int GetPVPosition()
- {
- return _pendulumValve.Position;
- }
- public async void HeatChiller(double value, double offset)
- {
- _Chiller?.SetChillerTemp((float)value, (float)offset);
- await Task.Delay(1000);
- _Chiller?.SetChillerOnOff(true);
- }
- public void OnOffChiller(bool onoff)
- {
- _Chiller?.SetChillerOnOff(onoff);
- }
- public bool CheckChillerStatus()
- {
- return _Chiller != null /*&& _Chiller.IsRunning*/ && !_Chiller.IsError;
- }
- public void SetGeneratorCommunicationMode(int mode)
- {
- _Generator?.SetCommunicationMode(mode);
- }
- public bool GeneratorPowerOn(bool on)
- {
- if (_Generator == null) return false;
- if (on && !IsRFGInterlockOn)
- {
- LOG.Write(eEvent.ERR_RF, Module, "射频电源 Interlock条件不满足");
- return false;
- }
- return _Generator.SetPowerOnOff(on, out _);
- }
- public bool GeneratorSetpower(float val)
- {
- if (_Generator == null) return false;
- if (Math.Abs(val) > 0.01)
- _Generator.SetPower((ushort)val);
- return true;
- }
- public bool GeneratorBiasPowerOn(bool on)
- {
- if (_GeneratorBias == null) return false;
- if (on && !IsRFGInterlockOn)
- {
- LOG.Write(eEvent.ERR_RF, Module, "Bias射频电源 Interlock条件不满足");
- return false;
- }
- return _GeneratorBias.SetPowerOnOff(on, out _);
- }
- public bool GeneratorBiasSetpower(float val)
- {
- if (_GeneratorBias == null) return false;
- if (Math.Abs(val) > 0.01)
- _GeneratorBias.SetPower((ushort)val);
- return true;
- }
- public bool GeneratorBiasSetMatchMode(bool val)
- {
- if (_GeneratorBias == null) return false;
- string reason = string.Empty;
- _GeneratorBias.SetMatchingAutoMode(val, out reason);
- return true;
- }
- public bool SetMatchPosition(float c1, float c2)
- {
- if (_Match == null) return false;
- string reason = string.Empty;
- _Match.SetMatchPosition(c1, c2, out reason);
- return true;
- }
- public bool SetBiasMatchPosition(float c1, float c2)
- {
- if (_BiasMatch == null) return false;
- string reason = string.Empty;
- _BiasMatch.SetMatchPosition(c1, c2, out reason);
- return true;
- }
- public bool SetBiasPulseMode(bool on)
- {
- if (_GeneratorBias == null) return false;
- _GeneratorBias.SetPulseMode(on);
- return true;
- }
- public bool SetBiasPulseRateFreq(int nFreq)
- {
- if (_GeneratorBias == null) return false;
- _GeneratorBias.SetPulseRateFreq(nFreq);
- return true;
- }
- public bool SetDiasPulseDutyCycle(int percentage)
- {
- if (_GeneratorBias == null) return false;
- _GeneratorBias.SetPulseDutyCycle(percentage);
- return true;
- }
- public bool SetESCClampVoltage(int nVoltage)
- {
- if (_ESCHV == null) return false;
- return _ESCHV.SetOutputVoltage(nVoltage);
- }
- public bool CheckGeneratorAndHVInterlock(VenusDevice device)
- {
- eEvent evt = device == VenusDevice.Rf ? eEvent.ERR_RF : eEvent.ERR_ESC_HV;
- if (!PMLidClosed)
- {
- LOG.Write(evt, Module, $"Cannot Power ON {device} as PM Lid is Open.");
- return false;
- }
- if (!IsVAC)
- {
- LOG.Write(evt, Module, $"Cannot Power ON {device} as PM is not Vacuum.");
- return false;
- }
- if(!IsWaterFlowOk)
- {
- LOG.Write(evt, Module, $"Cannot Power ON {device} as Water Flow is OFF.");
- return false;
- }
- if(!IsRFGInterlockOn)
- {
- LOG.Write(evt, Module, $"Cannot Power ON {device} as Generator Interlock is OFF.");
- return false;
- }
- if(!SourceRFFanInterlock)
- {
- LOG.Write(evt, Module, $"Cannot Power ON {device} as Source RF Fan is OFF.");
- return false;
- }
- if(!SlitDoorClosed)
- {
- LOG.Write(evt, Module, $"Cannot Power ON {device} as Slit Door is open.");
- return false;
- }
- if ((device == VenusDevice.ESCHV || device == VenusDevice.BiasRf) && WaferManager.Instance.CheckNoWafer(Module, 0))
- {
- LOG.Write(evt, Module, $"Cannot Power ON {device} as {Module} has no wafer");
- return false;
- }
- return true;
- }
- #region EndPoint
- public void EPDRecipeStart()
- {
- _epdClient.RecipeStart();
- }
- public void EPDRecipeStop()
- {
- _epdClient.RecipeStop();
- }
- public void EPDStepStart(string cfgName)
- {
- _epdClient.StepStart(cfgName);
- }
- public void EPDStepStop()
- {
- _epdClient.StepStop();
- }
- #endregion
- public void SetBacksideHeFlow(double flow)
- {
- if (_backsideHe == null) return ;
- _backsideHe.Flow(flow);
- }
- public bool SetBacksideHePressure(float mTorr)
- {
- if (_backsideHe == null) return false;
- return _backsideHe.SetBacksideHelium(mTorr);
- }
- public bool SetBacksideHeThreshold(int nMin, int nMax)
- {
- if (_backsideHe == null) return false;
- return _backsideHe.SetFlowThreshold(nMin, nMax);
- }
- }
- /// <summary>
- /// PM Action
- /// </summary>
- abstract class PmActionBase : ActionBase
- {
- protected internal JetPM _chamber;
- protected PmActionBase(ModuleName mod, JetPM pm) : base(mod)
- {
- _chamber = pm;
- }
- }
- class PinAction : PmActionBase
- {
- public MovementPosition Pos { get; }
- public bool IsWaferTransfered { get; }
- public PMEntity PmEntity { get; set; }
- private Hand _blade;
- private bool _isPick;
- public PinAction(ModuleName mod, JetPM pm, MovementPosition pos, bool isTransferWafer, Hand blade, bool isPick) : base(mod, pm)
- {
- this.Pos = pos;
- IsWaferTransfered = isTransferWafer;
- _blade = blade;
- _isPick = isPick;
- }
- public override void Execute()
- {
- if (Module == ModuleName.PMA)
- PmEntity = Singleton<RouteManager>.Instance.PMA;
- else if (Module == ModuleName.PMB)
- PmEntity = Singleton<RouteManager>.Instance.PMB;
- if (PmEntity != null)
- {
- PmEntity.PostMsg(PMEntity.MSG.MoveLiftPin, Pos, ID, _isPick);
- }
- }
- public override void OnPostWork(string data = null)
- {
- if (IsWaferTransfered)
- {
- if (Pos == MovementPosition.Up)
- {
- WaferManager.Instance.WaferMoved(ModuleName.EfemRobot, _blade == Hand.Blade1 ? 0 : 1, Module, 0);
- }
- else
- {
- WaferManager.Instance.WaferMoved(Module, 0, ModuleName.EfemRobot, _blade == Hand.Blade1 ? 0 : 1);
- }
- Singleton<RouteManager>.Instance.EFEM.EfemDevice.SetRobotMovingInfo(MECF.Framework.Common.CommonData.RobotAction.None, Hand.Both, ModuleName.System);
- }
- }
- }
- }
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