 lixiang
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f92e6abb17
1.添加Kepler2300 功能代码
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il y a 2 mois |
 zhouhr
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dba64f7240
1. add the driver of SunWayVPA && the item in config/setmentity
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il y a 5 mois |
|
lixiang
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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il y a 5 mois |
|
lixiang
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e29f6e8e46
1.优化UI界面性能
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il y a 7 mois |
|
lixiang
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46d2717838
1.Gas Leak Check 加上Penning Guage信号显示
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il y a 7 mois |
|
lixiang
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5e9ddc918f
优化SequenceView界面
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il y a 7 mois |
|
lixiang
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17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
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il y a 7 mois |
|
lixiang
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1c2b8b53bb
1.添加用户权限功能
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il y a 8 mois |
|
lixiang
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b67769ec2c
ui优化
|
il y a 8 mois |
|
zhouhr
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eff7f8a03e
upload missing files
|
il y a 9 mois |
|
zhouhr
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
il y a 9 mois |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
il y a 10 mois |
|
lixiang
|
d938a9e54c
PM/TM swap pick 开门前加压力wait
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il y a 10 mois |
|
zhouhr
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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il y a 11 mois |
|
lixiang
|
e00ff4f30d
1.高温Heater position1-position5加上动画
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il y a 11 mois |
|
lixiang
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caba8d94c6
Duplicated Wafer UI显示
|
il y a 11 mois |
 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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il y a 1 an |
|
lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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il y a 1 an |
|
hecl
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d15749f5b1
1.fix VenusSE show chiler temp bugs
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il y a 1 an |
|
lixiang
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f62e761ad2
修复小标题efem online/offline报警bug
|
il y a 1 an |
|
lixiang
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c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
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il y a 1 an |
|
lixiang
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e3ab321150
添加TM IO界面
|
il y a 1 an |
|
lixiang
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0f905564d0
加入登录界面和权限管理
|
il y a 1 an |
|
lixiang
|
af631c4aaa
1.添加RF Calibration功能
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il y a 1 an |
|
lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
|
il y a 1 an |
|
lixiang
|
5c5936c32c
1.修复mfc verification单点ui不显示bug
|
il y a 1 an |
|
zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
il y a 1 an |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
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il y a 1 an |
|
lixiang
|
1929a3510b
1.新版ui界面开发
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il y a 1 an |
|
lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
|
il y a 1 an |
