 lixiang
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17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
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11 months ago |
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lixiang
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33d0cd73dd
1.修复Pump Counter 显示错误bug
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11 months ago |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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lixiang
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08ec6feef2
1.优化数据分析界面颜色选择bug
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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edb5ad6960
1.添加数据分析 Recipe step功能
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1 year ago |
 Intern01
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9c618d6866
DataHistory&&ProcessDataHistory update
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1 year ago |
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Intern01
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8a99234204
1.增加prcocessdatahistory 页面GridSplitter，excel导出等功能，增加FA界面
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2 years ago |
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lixiang
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8f80478982
1.添加IoSwitch
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2 years ago |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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lixiang
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e9951fa64d
1.添加efem/sequence等界面
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2 years ago |
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lixiang
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ec1eeba67c
添加数据分析界面
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2 years ago |
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lixiang
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081ab4daa5
添加多个UI界面
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2 years ago |
